MATERIAL SAFETY DATA SHEET PAGE 1



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1254 Chestnut Street Newton, MA 02464-1418 Tel: (617) 965-5511 Fax: (617) 965-5818 MATERIAL SAFETY DATA SHEET PAGE 1 SECTION 1. CHEMICAL IDENTIFICATION -- - CHEMICAL NAME: TRADE NAME: PRODUCT #: Organic Solvent Solution SU-8 Developer Y020100 SECTION 2. COMPOSITION- - HAZARDOUS INGREDIENTS: 1-Methoxy-2-propyl acetate (CAS: 108-65-6), 98-100% Synonym: propylene glycol monomethyl ether acetate SECTION 3. HAZARD DATA- INFLAMMABILITY: Combustible liquid. SKIN CONTACT: May cause skin irritation. No evidence of harmful effects of skin absorption. EYE CONTACT: Moderate temporary irritation. INGESTION: Slightly toxic. Headache, weakness and incoordination may occur. Nausea, vomiting, diarrhea, dizziness, and drowsiness may occur. INHALATION: Vapor causes irritation of the respiratory tract with coughing and chest discomfort. Headache, weakness and incoordination, nausea, vomiting, diarrhea, dizziness, and drowsiness may occur. MUTAGENICITY: No positive response for several tested salmonella strains. CARCINOGENICITY: Not listed in NTP, IARC, or OSHA as a carcinogen. TARGET ORGANS: Nervous System, Respiratory Tract SECTION 4. FIRST AID MEASURES-- -- INHALATION: INGESTION: SKIN CONTACT: Remove to fresh air. If patient has stopped breathing, give artificial respiration. Contact physician immediately. If substantial amounts are swallowed, have patient drink large amounts of water and INDUCE VOMITING. Contact a physician immediately. Rinse with water. Remove contaminated clothing and shoes. Wash skin with soap and water.

1254 Chestnut Street Newton, MA 02464-1418 Tel: (617) 965-5511 Fax: (617) 965-5818 EYE CONTACT: Rinse immediately with water, flush for 15 min. Contact a physician.

MATERIAL SAFETY DATA SHEET PAGE 3 - SECTION 5. FIRE FIGHTING MEASURES-- EXTINGUISHING MEDIA: SPECIAL FIRE FIGHTING PRECAUTIONS: UNUSUAL FIRE OR EXPLOSION HAZARDS: Water, dry chemical, carbon dioxide, and foam. Wear self-contained breathing apparatus (SCBA) and personal protective equipment when exposed to products of combustion. None SECTION 6. ACCIDENTAL RELEASE PROCEDURES - Avoid eye or skin contact. Eliminate ignition sources. Cover large quantities with absorbent material and collect in closed container for disposal. All clean up should be carried out in accordance with federal, state, and local regulations. If required proper authorities should be notified. SECTION 7. STORAGE AND HANDLING PRECAUTIONS- -- STORAGE: HANDLING: Store in original, well-closed container in a cool dry place. Keep away from heat, sparks, and flames. Avoid breathing vapors. Use with adequate ventilation. Avoid contact with skin, eyes, and clothing. Have available safety shower and eyewash. Wear impervious butyl or nitrile gloves. Wash with soap and water after handling. SECTION 8. EXPOSURE CONTROLS AND PERSONAL PROTECTION- - RESPIRATORY PROTECTION: VENTILATION: SKIN PROTECTION: EYE PROTECTION: In case of large spills, use of self-contained breathing apparatus (SCBA) is recommended as narcosis may occur. General mechanical ventilation is sufficient under normal conditions. Impervious butyl or nitrile gloves are recommended. Safety goggles are recommended. SECTION 9. PHYSICAL AND CHEMICAL DATA--

MATERIAL SAFETY DATA SHEET PAGE 4 - APPEARANCE: Viscous pale yellow to yellow liquid ODOR: Fruity, ester-like BOILING POINT: 150 ºC (302 ºF) SPECIFIC GRAVITY: 0.969 VAPOR PRESSURE: 3.7 mm Hg @ 20 ºC (68 ºF) H 2 O % VOLATILES: SOLUBILITY: Appreciable 100% by wt EVAPORATION RATE: 0.39 (BuAc = 1) FLASH POINT: 46 ºC (114 ºF) TCC AUTOIGNITION TEMP: 354 ºC (670 ºF) EXPLOSION LIMITS: 1.3% lower 13.1% upper SECTION 10. REACTIVITY DATA - STABILITY: INCOMPATIBILITY: HAZARDOUS POLYMERIZATION: HAZARDOUS COMBUSTION OR DECOMPOSITION PRODUCTS: Stable Oxidizing Agents, Strong Acids, Strong Alkali Will not occur Carbon Monoxide, Carbon Dioxide SECTION 11. TOXICITY HAZARDS-- -- ACUTE EFFECTS: May be harmful if swallowed, inhaled, or absorbed through the skin. Readily absorbed through the skin. No significant signs of any health hazard are expected to occur through skin absorption. Irritating to eyes and respiratory tract. May cause burning, tearing, redness or swelling. Vapor or mist is irritating to the eyes, mucous membranes and upper respiratory tract. Prolonged and/or repeated exposure can cause gastric or nervous system effects. To the best of our knowledge, the toxicological properties have not been thoroughly investigated. ORAL: LD50 (rat): 8500 mg/kg DERMAL: INHALATION: LD50 (rbt) LC50: >5000 mg/kg >4350 mg/m 3. TLV: (TWA) 100 ppm suggested SECTION 12. ECOLOGICAL DATA --

MATERIAL SAFETY DATA SHEET PAGE 5 - This product has the following properties: a moderate biochemical oxygen demand and may cause oxygen depletion in aqueous systems, a low potential to affect aquatic organisms, a low potential to persist in the environment. When diluted with a large amount of water, this material released directly or indirectly into the environment is not expected to have a significant impact. Oxygen Demand Data: ThOD: BOD-5: BOD-20 1.82g oxygen/g 3.63g oxygen/g 1.05g oxygen/g Acute Aquatic Effects Data: 96-h LC-50 (fathead minnow): 161 mg/l 48-h LC-50 (daphnid): 408 mg/l SECTION 13. DISPOSAL CONSIDERATIONS - Burn in a chemical incinerator in an approved waste disposal facility under Federal, State, and local regulations. SECTION 14. TRANSPORTATION INFORMATION HAZARD CLASSIFICATION: SHIPPING NAME: UN NUMBER: UN 1993 PACKING GROUP III Flammable Liquid Flammable Liquid NOS(Propylene glycol monomethyl ether acetate) SECTION 15. REGULATORY INFORMATION HAZARDOUS LISTINGS: All ingredients appear on the TSCA Inventory of Chemical Substances, EINECS, and the Japan Hazardous Chemical Listing. SARA Title III: This product IS NOT subject to SARA Title III, Section 313 Reporting Requirements. Calif. SCAQMD Rule 443.1 VOC's: 969 g/l; vapor pressure 3.8 mm Hg @ 20º C.

MATERIAL SAFETY DATA SHEET PAGE 6 - SECTION 16. ADDITIONAL PRECAUTIONS AND COMMENTS - To the best of our knowledge, the above information is believed to be accurate but does not claim to be all-inclusive and is intended to be used only as a guide. The supplier makes no warranty of any kind, expressed or implied, concerning the use of this product and shall not be held liable for any damage resulting from handling or from contact with the above product. User assumes all risks incident to its use.