Optical Design Compensation from Engineering to Production Manufacturing C. Theodore Tienvieri, Tim Rich Corning Tropel Corporation 60 O Connor Rd Fairport, NY 14450 TienvieriT@Corning.com, RichT@Corning.com Abstract: This paper will discuss transitioning a precision optical system from engineering to a manufacturing process stream. OCIS codes: (0.360) Lens design; (0.3630) Lenses; (0.4610) Optical fabrication 1. Introduction Many optical systems for precision applications such as optical inspection, micro-lithography, DVD mastering, and projection printing require significant optical engineering involvement to support the manufacturing team in fabricating these systems. Performance demands placed upon lenses used in these industries often dictate diffraction limited wavefront quality, minimal image distortion, and resolution of very small features. Achieving the necessary as-built performance requirements for the lens assembly can mean optical designer involvement to select and compensate manufactured parts, prior to release to the component assembly team. This level of detailed engineering involvement is suitable for proto-type quantities but can constrain the manufacturing stream when the system transitions to sizeable production quantities. Support in the manufacture of volume assemblies can require a dedicated team of optical design engineers to manage the day to day project needs of lens selection and compensation in order to keep pace with the program s delivery rate. A second option to manage the engineering duties of precision optical systems is to develop a manufacturing stream which enables transferring and transitioning designer project support to the assembly and fabrication teams.. Manufacturing Philosophy and Key Components In producing many state of the art optical systems, the manufacturing strategy hinges around a philosophy whereby each fabricated objective is first modeled and simulated in optical design software prior to committing to assembling the components (figure 1). A group of lens elements will first be custom selected from the population of manufactured parts to minimize aberration build up. The component s measured fabrication properties (radius, thickness, index, ) will be modeled in design code and further performance gains achieved by optimizing with predetermined air spaces. SELECTION of MANUFACTURED COMPONENTS SYSTEM COMPENSATION EVALUATE PERFORMANCE RELEASE to MANUFACTURING Fig. 1 Manufacturing Philosophy International Optical Design Conference 006, edited by G. Groot Gregory, Joseph M. Howard, R. John Koshel, SPIE Vol. 634, 634S, 006 SPIE-OSA 077-786X/06/$15 doi: 10.1117/1.690 SPIE-OSA/ Vol. 634 634S-1 Downloaded From: http://spiedigitallibrary.org/ on 05/8/013 Terms of Use: http://spiedl.org/terms
Mechanical parts will be adjusted accordingly to achieve desired lens spacings. This manufacturing concept allows for looser optical fabrication tolerances as opposed to building a static objective. Fine tuning and computer simulation of each optical assembly has often been the task of the optical designer. This methodology is fine for small quantity production, but how might it be applied to producing optical systems with sizeable volume? A manufacturing strategy has been developed to create a Volume Manufacturing Compensation Platform (VMCP) for quantity production of high performance optical systems. A suitable software platform and suite of compensation tools has been implemented to integrate optical design support duties to a volume manufacturing stream (VMS). The key components of the platform (figure ) consist of an integrated computer network accessible to design and manufacturing, electronic fabrication records stored in a Lens Manufacturing Database (LMD)[1], optical design analysis/compensation software, and lens assembly report specific to each manufactured lens unit. This infrastructure lends itself to automating the design compensation process, which allows for incorporation into a production VMS. Lens Manufacturing Database (LMD) OPTICAL DESIGN Optical Design Code Compensation Build Solution MANUFACTURING Assembly Mechanical Report Fig.. Volume Manufacturing Compensation Platform 3. Project Requirements for VMCP There are basic requirements the project must fulfill to be integrated into the VMCP. The volume must be large enough to justify spending time and effort to develop the underlying software code to manage the data collection, design optimization, solution tracking, and reporting. In many optical projects if more than one to two dozen lenses are to be manufactured, the investment effort will be re-couped. The design compensation strategy must be robust, well understood, and characterized. This means the system compensation algorithm does not need to be fine tuned or adjusted on a set by set basis to yield an acceptable solution. The tolerance budgets need to be carefully assigned to different manufacturing parameters such as optics, mechanics, assembly, and test. This aids in establishing acceptance threshold criteria to judge if a lens solution can be released to assembly for building. 4. VMCP and Operation The VMCP is developed to be compatible with a variety of different lens systems, complexities, compensation paths, and manufacturing requirements. Each lens system has its own unique built in performance metrics and compensation processes which need to be adhered to. These parameters are decided jointly between the lens design SPIE-OSA/ Vol. 634 634S- Downloaded From: http://spiedigitallibrary.org/ on 05/8/013 Terms of Use: http://spiedl.org/terms
and manufacturing teams. Necessary process information is committed to work procedures and flow diagrams. An optical designer generally oversees the project s development and integration into the VMCP. The design quality metrics computed in the software consist of parameters utilized to judge adherence to design tolerances, specification, and any merits which may be quantified in the test laboratory. For example, theoretical performance merits evaluated could include wavefront RMS and spherical aberration, which could then be verified by interferometry in the test lab. Running design compensations with the VMCP is relatively simple. The optical elements to be assembled are selected from the Lens Manufacturing Database. An implemented LMD facilitates this process by a simple point and click user interface (figure 3). Components are grouped by their project designated set number or available stock elements. Each lens component is compared to manufacturing specifications and the impact to performance computed. This information is utilized to quickly determine the performance change due to a particular component being placed into a lens assembly. The lens set s specific manufactured data (radius, ct, index, ) can easily be exported to optical design code for optimization and analysis. E!SdIImfllthI LSy%ISIOS 063 Tiger Objective St 1093..:J System & Set # Designation DST I L9 30.1167 300 0.1167 56.4% 0.707-6 -96-0.05-0.046 66 14 FIB 16.4064 16.3500 0.0564 77.9% -0.03-0.05 1.063-0.017 0.1606-0.0464-0.0133 0.033-0.010-0.0-0.05 0.969-0.0110.1379-0.01-0.01 0.301-0.05 CURRENT SET -0.04-0.03 1.141-0.097 3 7 9.0600 9.0000 0.0600 60.0% -0.0156-0.0153 47 75 4 194-04 5.00965.000096l9.T 0.049-51 -69-35 -05 5 64-04 30.5616 30.5500 0.0316 63.6% 0.01 0.09360.016550-36 -64 6 L4-04.5649.50000.064966.5% 0.04-0.14 69-79 -74 66 6 71946.50676.5000676.9T 6 15.756015.7000.0360 UI 9 1910 15.0014 15.0000 14 36.0% 1.4% 10 M4-046k5. 6955.56500.037937.9% DESIGNATION 0.01-0.01 0.07 0.013 0 - -1 0.0514-0.0100-0.0100 0.016-0.016-0.0144 74 16-1 0.05793345ll -19 39-15 Export to Design Code STOCK Stock Set Controls 5] 0.0-0.1-0.1 4.144 J!11± -0.1560.550 ZSF -0.0753-0.0940.0464-51 RdiidCT DCdS 6 EI ID CT NCTDI%CT% 1T I SF6 CMA 650 650 1966 6FL 9 16 5 36 37 66 16.3453 16.3500-47 -6.3% -0.066 ' 30-0.04549-0. 006 39 610 16.3540 16.3500 40 5.3% 0.073-1 0.161-0.0567-670.0151-30 V 35 16.3553 16.3500 53 7.1% 0.096 - -65-0.036' -T.0133400.0107 67 16.3556 16.3500 56 7.7% -0.010.106 - -67-0.070 -T.0110.019043 36 16.366 16.3500 0.016 17.1% -0.01-0.010.33 I -4 0.0406 -T.03300.01330.001 I-o.ooss 34 16.3656 16.3500 0.0156 0.6% -0.01-0.010.64-5 0.0196-7 1-0.099 1-03 40 STOCK ELEMENTS 1 16.3695 16.3500 0.0195 6.0% -0.01-0.00.355-6 0.0194 -T.05640.01360.0117-64 HI 16.3749 16.3500 0.049 33.% -0.01-0.00.453-7 0.056-0.0176-0.01690.046-76 3 ITS 6.9306 9.0000-0.069-9.3% 0.03 0.06-1.140 0.01 0.14560.0110-0.01660.099-0.0333 lit F:9 6.9646 9.0000-0.035-46.9% 6H1 Srnhl -57(04-0.0' 0.03 70-0.560-0707 6 57(0 0.1046-7 -T.0360.014679 0147007074-57607-Tr6TSTfllSO 3 S Tc%Tr 1Tr 1T Fig. 3. Project Element Selection Interface in LMD Additional set unique mechanical and as-built air space data, stored in the assembly mechanical report, can be exported, combined with the element LMD information and compensated with the VMCP. At the end of the lens compensation phase, performance merits are evaluated against the threshold criteria. If acceptable performance is achieved, the manufacturing solution is reported and released to assembly (figure 4). SPIE-OSA/ Vol. 634 634S-3 Downloaded From: http://spiedigitallibrary.org/ on 05/8/013 Terms of Use: http://spiedl.org/terms
SYSTEM HAS PASSED ALL PERFORMANCE CRITERIA APPROVED FOR RELEASE TO MANUFACTURING LENS NNE: TI*R SET NUMBER: 04 16 May 006 DATE SET PARN VALUE LOWER UPPER P/F 16 May 006 04 RMS POLY 0.0630 0.000 0.0850 pass 16 May 006 04 MAG. 9168. 9197. 9139 pass 16 May 006 04 DIST 5.5711 00 10. 0000 pass 16 May 006 04 DIST C 5.3875 00 100 pass 16 May 006 04 DOF 5.4630 44.0000 600 pass 16 May 006 04 CURV 9.3870 4.5000 1. 7000 pass 16 May 006 04 ASTIG 10.1010 7.0000 15. 0000 pass 16 May 006 04 MTF MIN 0.7970 0.7400 0.8500 pass 16 May 006 04 TT 8. 9996 8. 0000 84. 0000 pass 16 May 006 04 V V OBJ 64.7564 64.3000 65.3000 pass 16 May 006 04 V IMG 738. 0056 737. 5000 738. 5000 pass 16 May 006 04 TEL OBJ.618 00 5.0000 pass 16 May 006 04 TEL 1MG 5.6940 00 10. 0000 pass 16 May 006 04 MERIT 0.1434 0.145 0.1650 pass AIR SPACE REPORT 16 May 006 TIGER SET 04 SPACE VALUE 3 6.3393 1r 3r1 95.0679 3 4/5 9.131 Cern 0.033 4/5 6 0.6479 6 Stop 6.4398 '.7 110 U40 Fig. 4. Objective performance and solution report Should the design fail to achieve acceptable performance, the solution is not released to manufacturing and the user is recommended to alter the mix of selected elements and re-run the compensation. The VMCP includes history information. Each time a lens system is run on the platform, performance and compensation data is archived. Historical project data can be reviewed for manufacturing performance trends, adherence to specification, and statistics. 5. Design Transition to Volume Production The VMCP architecture permits easy transition of lens system support from proto-type to volume production. This platform offers several advantages to the manufacturing community. Manufacturing personnel can take over many of the routine project support design duties that have traditionally been performed by an optical designer. This alleviates dependence by manufacturing upon the engineering staff for day to day project support. The cycle time for design compensation is greatly reduced as the process is automated. Each system within a project is uniformly compensated with the same tools, variables, and methodology. Multiple users can easily be trained to run the VMCP allowing for additional staff versatility within programs. Each individual project maintains it own custom compensation strategy and unique set of performance merits. The threshold criteria dictate to the user if it s acceptable to build a particular lens set. This eliminates many of the subjective performance decisions that have routinely been made by an optical designer. Any modifications and changes in compensation philosophy would need to be reviewed by an optical designer before implementation into the VMCP. SPIE-OSA/ Vol. 634 634S-4 Downloaded From: http://spiedigitallibrary.org/ on 05/8/013 Terms of Use: http://spiedl.org/terms
6. Summary A manufacturing compensation and analysis stream has been developed to assist with the manufacturing support duties of production optical systems. This concept can be utilized to transition/transfer optical designer engineering system support activities directly to manufacturing personnel. This can include selection of system parts to be assembled, analysis, and compensation of these parts prior to committing to building. Manufactured lens data and mechanical assembly measurements can be built into design models to predict what level of performance may be achieved by a given assembly. If performance is acceptable, the parts can be released for assembly. This streamline process circumvents engineering involvement in production activities and allows for manufacturing to transition designs from proto-type to volume. References 1. Tienvieri, C., et al, Modern lens design using a lens manufacturing database, SPIE Proceedings, IODC 1998, vol 348, pp. 508-518. SPIE-OSA/ Vol. 634 634S-5 Downloaded From: http://spiedigitallibrary.org/ on 05/8/013 Terms of Use: http://spiedl.org/terms