ZEISS Semiconductor Metrology Systems Sustainability Program & Report Version 03/ Update 2014
Content Preface Introduction Semiconductor Metrology Systems Social Responsibility Energy, Climate, Environment Sustainable Innovations & Technology Workforce Sustainability Projects & Reporting 2
Preface Dear valued partners, The semiconductor industry makes a significant contribution to the global economy: supporting economic growth, innovation and employment; and enabling the success of the digital economy. This breeds responsibility and ZEISS Strategic Business Unit Semiconductor Metrology Systems (SMS) bares a share of that. As a technology leader and driver of innovation, we commit ourselves not only to outstanding products, but also to sustainability. In this report we share insights on all dimensions of sustainability at ZEISS SMS: Social Responsibility, Environment, Workforce and Sustainable Technologies. Within each category, we have emphasized some examples of the many activities in which we are engaged. You will find diagrams and data used to track our performance. These show the progress we have made during the last year, as well as the future challenges we will have to confront. We are convinced that corporate sustainability and transparency are long term sources of competitiveness and progress. Therefore we commit to sustain our business in an environmentally and socially responsible manner. Roberto Deger Member of the Management Board and Chief Financial Officer 3
Social Energy, Climate, Sustainable Workforce Sustainability Introduction Social Responsibility Energy, Climate, Environment Sustainable Innovations & Technology Workforce Sustainability Projects & Reporting 4
Introduction to the ZEISS Group: Connection to Sustainability The ZEISS Group To be transparent to the public and our stakeholders, we are committed to sustainability reporting. Within this document, we showcase our achievements and challenges and provide detailed information about our actions in terms of sustainability. The sparing use of resources is of central importance in product development at ZEISS: care is always taken to maximize energy efficiency in the company s instruments and to minimize material usage through innovative production processes and equipment. With its products, ZEISS supports sustainability in many different sectors: the company develops intelligent measuring systems that are utilized for quality inspection in the energy, automotive and aerospace industries. These systems are used, for example, to test the quality of large wind turbine components and thus ensure a high level of efficiency. The different ZEISS sites around the world apply innovative concepts to use green power and conserve natural resources: Figure 1: The six business groups of ZEISS Solar panels were installed at ZEISS in Dublin, California, in 2012 which are covering more than half of the site s electricity requirements. ZEISS in Italy is also meeting its demand for electricity using a photovoltaic system which has been supplying the Novara site and even parts of the town itself with energy since 2011. Solar technology is also in use in Oberkochen, Germany, since 2013. The solar plant installed will reduce carbon dioxide emissions by 11,700 tons of over a period of 20 years. The same year, ZEISS founded an legal entity with the goal to measure energy flows at ZEISS in Germany, make costs more transparent and positively influence energy consumption. And these are only some samples. Besides the environmental engagement, ZEISS plays an active role in society with supporting educational and scientific projects and institutions. ZEISS is very committed to regional dedication at the company s sites. Based on the concept of with society, for society and in the midst of society, the Carl Zeiss Promotion Fund sponsors social, youth, cultural and amateur sports projects at certain locations in Germany. For fiscal year 2012/13, for example, ZEISS provided over one million euros to the fund. Boards of trustees at the sites, comprised of cultural, political and societal representatives decide on how the funds will be used. 5
Business Principles Corporate Code of Conduct ZEISS is committed to perfect solutions, special services and highest standards, not only in technological terms. Also with regard to the "rules" of good and fair behavior we strive for outstanding results. ZEISS adopted a corporate code of conduct, defining basic rules for all business activities. This code has proved to be effective. For complying with the code s principles, ZEISS is being rewarded everyday with business confidence and a high reputation of its brand. It is our firm belief that a sustainable economic success is inseparable connected to our conduct. Based on the Code s Principles, ZEISS SMS identified relevant subjects on which this report focuses. Figure 2: Main categories of our reporting, based on the Code of Conduct 6
Social Responsibility Energy, Climate, Environment Sustainable Innovations & Technology Workforce Sustainability Projects & Reporting Semiconductor Metrology Systems 7
Semiconductor Manufacturing Technology The Strategic Business Unit Semiconductor Metrology Systems (SMS) is part of the Semiconductor Manufacturing Technology (SMT) Business Group of ZEISS. As a leading global supplier of both metrology and manufacturing equipment ZEISS SMS focuses on a key component in semiconductor manufacturing process, the photomask. ZEISS SMS develops, manufactures and distributes advanced mask solutions along the mask manufacturing chain empowering our customers in the mask making industry to develop and manufacture zero defect and in specification photomasks. We provide innovative solutions and spend in average more than 25% of our net sales in research and development. Figure 3: Organizational Structure of Carl Zeiss SMT 8
Semiconductor Metrology Systems All our solutions are focused on optimizing the performance of a photomask. Our customer s benefit is manifold: an out of specification photomask can be brought back into specification avoiding costly and resource consuming remanufacturing, our tools enable our customers to achieve specifications which could not be reached without them and to produce next generation photomasks the wafer fab benefits obtaining a widened process window which gives higher yields and better performance of the electronic devices. The design and manufacturing of our tools follow the highest standards in safety and environmental requirements determined in the guidelines of ZEISS and German law. Figure 4: Product Portfolio of ZEISS SMS 9
Social Responsibility Energy, Climate, Environment Sustainable Innovations & Technology Workforce Sustainability Projects & Reporting Social Responsibility 10
Embracing responsibility ZEISS plays an active role in society. With the Carl Zeiss Förderfonds (Carl Zeiss Promotion Fund) and an Education and Science Fund (Bildungs und Wissenschaftsfonds), the ZEISS Group supports social and cultural projects at the various sites of the company as well as science and education initiatives. In fiscal year 2012/13 ZEISS provided over one million euros for these endeavors. Commitment to education and research With society, for society and in the midst of society this is the philosophy anchored in the Carl Zeiss Promotion Fund, which bundles the social engagement activities of the ZEISS Group at specific sites in Germany. The Promotion Fund supports projects in the areas of community, social issues, youth, culture and amateur sports. In Jena the Promotion Fund supports the local youth soccer foundation and also sponsors concerts of the Jena Philharmonic Orchestra during the Thuringian Bach Weeks. The Education and Science Fund promotes science and education on a cross regional basis. In this way, ZEISS also supports universities with material donations, finances graduate and masters programs, sponsors junior professorships and promotes initiatives that inspire children and young people for the natural sciences and technology. Competition Jugend Forscht ZEISS is one of the companies sponsoring the annual Jugend forscht youth science fair and regularly organizes a Children's Day of Microscopy. Another example of ZEISS activities is the participation at the Girls' Day campaign, intended to give young girls an insight into technic related professions. In Oberkochen, ZEISS sponsors the Café Samocca, in which disabled and able bodied people work together as a team. ZEISS also supports universities in different ways. During the reporting year the company clearly expanded its sponsorship of the Abbe School of Photonics (ASP) at the Friedrich Schiller University in Jena. Up to 2014, ZEISS provided a sum totaling 500,000 euros to sponsor master s students, a visiting professorship for optics and science programs. The goal is to attract internationally leading scientists in the fields of optics and photonics as visiting researchers to Jena and to promote junior research groups and junior professorships. ZEISS has been an active partner of the optics department at the Friedrich Schiller University and the Abbe School of Photonics in Jena since 2005. 11
Examples of current ZEISS Group Social Initiatives New master course of studies in Jena EAH Since October 2014, the Ernst's Abbe College (EAH) Jena offers the new Master s course "Patent engineering" the first of its kind in Germany. It is geared towards graduates in scientific courses and employees with professional experience and will provide knowledge necessary to close the gap between the inventor and the external patent attorney or the German Patent Office. During the three year doctorate, the students are supervised by both the doctoral advisor as well as the responsible manager at ZEISS. In the new model, students work 50% at ZEISS and 50% on her doctorate. While the university will bring the curriculum modules for legal, management and business economic related competencies, ZEISS is providing specialist knowledge about industrial property rights. The 2015 summer semester will be the program's first semester. This new model is beneficial for all participants: Young scientists can combine research and practice and ZEISS benefits from latest R&D results. Kindergarten Sternschnuppe ZEISS invested more than 500,000 euros in the architectural measures of the day care center which is pursued by the German Red Cross circle federation Jena Eisenberg Stadtroda. Located directly next to ZEISS site Lichtenhain in Jena, the center is offering care places for up to 32 children of employees of the ZEISS enterprises in Jena. Industrial doctorate There is a new kind of industrial doctorate at ZEISS: The first student is doing her doctorate in the Optical Design area at Corporate Research & Technology (CRT). Supervised by both her doctoral advisor from university and her superior, she is working 50 percent at ZEISS and 50 percent on her doctorate, studying optimization methods for glass selection in optical system design. Once a month, she discusses the current results with her professor to decide the further proceeding. To share the research results with ZEISS, a briefing of the design team happens every six months in order. The industrial doctorate model is very interesting for both ZEISS and the doctorate due to the practical research and the technology and software provided by ZEISS. New Trainees at ZEISS Opening of the Kindergarten Sternschnuppe A total of 153 young people have begun their professional career at ZEISS locations Goettingen, Jena, Oberkochen and Wetzlar, receiving a technical training of high quality. In addition, they can acquire methodical and social competences in additional projects. 53 of them will complete a cooperative study program afterwards. ZEISS is also offering a lot of interesting positions for internship candidates and students. Please visit www.zeiss.com/responsibility to learn more about responsibility at ZEISS 12
Social Responsibility Energy, Climate, Environment Sustainable Innovations & Technology Workforce Sustainability Projects & Reporting Energy,Climate &Environment 13
ZEISS SMS Indicators introduced in fiscal year 2011/2012 water consumption 1) (liter per productive hour) energy consumption 1) (kwh per productive hour) Since 2011, entities of ZEISS which are located at the facility Lichtenhain in Jena, Carl Zeiss SMS GmbH, Carl Zeiss Jena GmbH, Carl Zeiss Meditec AG and Carl Zeiss Microscopy GmbH, are measuring the environmental footprint of their production activities. All data were set in relation to the sum of hours of production, to ensure an efficiency based reporting. 25 20 15 10 5 0 20,26 21,18 22,33 2011 2012 2013 2014 2015 2016 2017 20 18 16 14 12 10 8 6 4 2 0 16,65 18,24 18,96 2011 2012 2013 2014 2015 2016 2017 In fiscal year 2013/14 ZEISS SMS invested strongly in new clean room technologies at our Jena site, to remain competitive and ensure a sustainable corporate development. The improved manufacturing standard contributes to a slight increase of our consumptions. Additionally, the amount of productive hours decreased. As a result, the site related indices raised by 5.4% since 2012 (water) and 4.0% (energy). The total waste volume was reduced by 5.4% (hazardous waste) and 6.0% (non hazardous waste). CO 2 emissions are calculated as an equivalent of the thermal energy consumed by all of the tenants at the Jena building, including Non ZEISS companies. In 2013, the valuation method to calculate CO 2 emissions changed. Now, state ofthe art factors were used to calculate the CO 2 equivalent. In effect, the proportion of renewable energies within the provided mix is taken into account. 0,25 0,20 0,15 0,10 0,05 0,00 0,20 target corridor: water consumption water consumption factor [l/h] waste (kg per productive hour) 0,22 0,20 0,12 0,13 0,13 2011 2012 2013 2014 2015 2016 2017 target corridor: waste non hazardous [g/h] target corridor: waste hazardous [g/h] waste non hazardous [g/h] waste hazardous [g/h] 5.000 4.500 4.000 3.500 3.000 2.500 2.000 1.500 1.000 500 0 4.523 target corridor: energy consumption energy consumption factor [kwh/h] 3.765 CO 2 emission 3.042 2011 2012 2013 2014 2015 2016 2017 target corridor: CO2 emission CO2 emission site Lichtenhain [t] 1) increasing trend, mainly caused by less productive hours and higher consumptions during reporting period 14
ZEISS Activities in 2013 ZEISS Energy Management The importance of saving natural resources and producing environmental friendly at ZEISS shows the founding of an own legal entity within ZEISS on 1 October 2013. A total of 10 employees now work on achieving a sustainable improvement in energy efficiency at the company s sites in Germany. The entity is ISO 50001 certified by the German Society for the Certification of Management Systems (DQS). This global standard verifies that a systematic and efficient energy management system has been implemented in the company. The goal is to measure energy flows at ZEISS, make costs more transparent and positively influence energy consumption. Solar Power Plant At the end of 2013 two new photovoltaic systems were put into operation on the roofs of the parking garage and the Site Logistics Center in Oberkochen. The systems consist of over 2,500 modules and a panel area measuring around 4,100 square meters. The systems are forecast to generate around 660,000 kilowatt hours of electricity every year. This will mean 11,700 fewer tons of carbon dioxide emissions over a period of 20 years. Combined Heat & Power Unit In addition, the combined heat and power units (CHP) generate a large percentage of the required electricity in Oberkochen. This process also produces heat which can be used to supply heating and cooling systems. CHP units therefore display a high efficiency level up to 87 percent. Energy at ZEISS campaign To inform the employees and visitors about methods on saving energy a two pronged Energy at ZEISS campaign was launched at certain sites in Germany. First, stickers in elevators, on machines or in kitchens drew people s attention to the consumption of energy in precisely the areas where it is used. Second, a roadshow set out to visit various sites in Germany. This enabled employees to obtain targeted information from ZEISS energy specialists and ask them any questions they had. The focus of the roadshow was electricity. Combined Heat & Power Unit 15
Social Responsibility Energy, Climate, Environment Sustainable Innovations & Technology Workforce Sustainability Projects & Reporting Sustainable Innovations&Technology 16
Sustainable Product Design at ZEISS SMS During the development process, different aspects regarding a sustainable product design and lifecycle costs are being evaluated. The assessment of sustainability requirements is part of every milestone release. During the creation of the product requirement document prior to main development we consider sustainability related aspects and requirements of our customers as well as our own. Product Generation Process Main Development Phases Examples at ZEISS SMS Consideration of sustainability related aspects in milestones Concept Start, Development Start, Final Design, Product Launch and Product Release Efficient Components Related decisions are being taken during the development phase of ZEISS SMS tools already. Examples are the use of switching power supplies instead of usual adaptors to consume energy only when required. In addition, several electric consumers are being switched off automatically if they are not used for operation any longer. Another example is the constant optimization of all parts which carry or store process gases regarding their leakage rate to further reduce even minimal losses of media. Long lasting Design Using an automatically lifetime tracking of chosen key consumables is helping to forecast the time of default more precisely. To raise efficiency and reduce scrap, standard drive units are being replaced by wear resistant ones. Sustainable Packaging A complex packaging of parts is required to ensure compliance to the clean room conditions in which they are processed in. To reduce the environmental impact, ZEISS SMS is considering ecological aspects within the packaging specifications, e.g. the step by step substitution of PVC with reusable packaging material and recycling the packaging material if at all possible. Assessments and Audits during Design Phases The Suppliers of ZEISS SMS are being assessed regularly regarding their sustainability performance. ZEISS SMS is also auditing its own processes in terms of environment and sustainability. 17
Social Responsibility Energy, Climate, Environment Sustainable Innovations & Technology Workforce Sustainability Projects & Reporting Workforce 18
Develop the talents needed Labor and Human Rights data are ZEISS SMS specific and cover the facilities in Jena, Oberkochen, Rossdorf and Karmiel (Israel). ZEISS SMS workforce is still increasing significantly, which reflects the quick growth of the business. By nearly tripling the efforts in training since 2011, ZEISS SMS is expanding the knowledge base appropriately. New Indicators Developed with feedback from stakeholders, ZEISS SMS started to transform its Sustainability Report according to the international reporting standard of the Global Reporting Initiative (GRI3). In 2013, ZEISS SMS expanded its report by adding indicators related to Employee Turnover and Compliance Incidents. Employee turnover, Compliance The rate of employee turnover remained on a very low level compared to relevant industry data. Significant differences in employee turnover between the three sites or any relation to gender or age were not identified. There were no compliance incidents. In all of its operations, there is no risk for child labor or forced or compulsory labor. 16 14 12 10 8 6 4 2 0 300 250 200 150 100 50 0 0,67 2,50% 2,00% 1,50% 1,00% 0,50% 0,00% 6 130 total workforce 1) 10 18 171 192 24 34 224 245 2009 2010 2011 2012 2013 external workforce total number of employees average hours of training 1) 4,16 4,86 11,71 15,47 2009 2010 2011 2012 2013 average hours of training employee turnover, broken down by site 1) 0,00% 2,08% 2,23% 0,52% 0,45% 0,89% 0,00% 1,63% 2011 2012 2013 Baden Württemberg (Oberkochen) Thüringen (Jena) Hessen (Roßdorf) 250 200 150 100 50 0 4,00% 3,50% 3,00% 2,50% 2,00% 1,50% 1,00% 0,50% 0,00% 0,00% 128 type of contract 1) 166 188 216 236 2 5 4 8 9 2009 2010 2011 2012 2013 permanent rate of employee turnover 1) 2,60% 3,57% temporary 1,63% 2011 2012 2013 rate of employees leaving employment during the reporting period 3,00% 2,50% 2,00% 1,50% 1,00% 0,50% 0,00% rate of employee turnover, broken down by age group 1) 0,00% 2,60% 0,45% 0,00% 2,23% 0,89% 0,82% 2011 2012 2013 < 30 30 50 > 50 0,82% 250 200 150 100 50 (all indicators acc. to GRI standard, related to ZEISS SMS; all data captured on December, 31 st of each year excluding worldwide service teams) 0 4,00% 3,50% 3,00% 2,50% 2,00% 1,50% 1,00% 0,50% 0,00% 0,00% 129 employment type 1) 167 186 215 230 1 4 6 9 15 2009 2010 2011 2012 2013 2,60% full time 0,00% 0,00% 3,57% part time rate of employee turnover, broken down by gender 1) 16 14 12 10 8 6 4 2 0 0,82% 0,82% 2011 2012 2013 female male compliance incidents acc. to ZEISS Compliance Reporting 1) 0 0 0 0 0 2009 2010 2011 2012 2013 No. of Incidents 19
Striving for zero incidents Health and safety performance is a key measure of our organization s duty of care. Low injury and absentee rates are generally linked to positive trends in staff morale and productivity. ZEISS SMS is striving for zero incidents. The Total Recorded Injury Rate (TRI), based on the standard of the International Labor Organization, is showing whether health and safety management practices are resulting in fewer occupational health and safety incidents. In the international comparison the following graduation can be put on: TRI < 5: very good TRI < 10: acceptable TRI > 10: measures required Total Recorded Injury Rate (TRI) [way to work accidents] 12,00 10,00 8,00 6,00 4,00 2,00 0,00 0,00 2,59 0,00 FY 10/11 FY 11/12 FY 12/13 TRI = LTI + MTC (acc. to ILO standard) LTI (LTI Lost Time Injuries) = (quantity of way to work accidents which caused absence > 1 day / working hours) * 10 6 MTC (MTC Medical Treatment Cases) = (quantity of way to work accidents which caused absence < 1 day / working hours) * 10 6 Total Recorded Injury Rate (TRI) [occupational injuries] 12,00 10,00 8,00 6,00 4,00 2,00 0,00 6,60 2,59 2,63 FY 10/11 FY 11/12 FY 12/13 TRI = LTI + MTC (acc. to ILO standard) LTI (LTI Lost Time Injuries) = (quantity of work related injuries which caused absence > 1 day / working hours) * 10 6 MTC (MTC Medical Treatment Cases) = (quantity of work related injuries Health day To actively support the health conditions of our employees, ZEISS SMS organized a so called Health day in Jena and Rossdorf. Experts educated employees individually on healthy nutrition, sports activities and a healthy work environment (optimum tables and seats etc.). Additionally people could attend workout sessions or measure their body conditions. Health day at ZEISS SMS in Jena 20
Sustainability Projects and Reporting 21
Sustainability Projects Achievements To continuously improve the sustainability of our business activities, several improvement projects were started in August 2012. They relate to different aspects of sustainability, e.g. management system, labor, health & safety and environment. All of the projects are owned by ZEISS SMS. Focus Area Target Measure Status Sustainable Business / Risk Preparedness Workforce / Reduction of Overtime Sustainable Innovations & Technology until Q IV/2013: 3 completed BCP s incl. roll out for Jena, Rossdorf and Karmiel until Sept. 2014: BCP roll out completed and implemented until Sept. 2013: average hiring time 3.75 months until Sept. 2014: average hiring time 3 months until Sept. 2013: realize a sharing of experiences / workshops regarding the sustainability program of ZEISS SMS with chosen Managed Suppliers until Sept. 2014: continue to develop supply chain in terms of sustainability - Finalize a business continuity plan for three of four ZEISS SMS sites - Training of all risk class I manager - Emergency drill for management team (incl. site managers) until QII/2013 - Training 100% of risk class II and III Manager in emergency procedures and processes until 09/2014 (yearly instruction in future) - Emergency drill for management team (site managers) Rossdorf until QIV/2014 - BCP Audits in 2015 (Jena, Roßdorf, Karmiel) - Realization of follow up workshops (lessons learned) after the 3th. BCP Audit - Training finished - Emergency Drill shifted to 2015 due to technical reasons - Optimize the recruitment process - Focus on pre selection by HR and manager (phone interviews, check of references) to improve - Competency based interviews - Focus on clear milestones and deadlines for HR as well as for the managers in the process to increase speed) - Review and optimization of the process - Focus active sourcing approach to keep pipeline of candidates filled - Execution of 2 supplier sustainability assessments - Embedding of a Managed Supplier into a common ZEISS SMS suppliersustainable design development project - EICC based questionnaire: acknowledgement for all managed suppliers; target approval rate of > 70% within 2014 - Refinement of supplier sustainability program and further roll out - Definition an appropriate number of sustainability assessments within 2014 - Embedding of a Managed Supplier into a common ZEISS SMS suppliersustainable design development project - Assessments realized - Sustainable design Project: Project development ongoing - Purchasing Orders include EICC accordance - SMS suppliers requested to disclose conflict free supply chain (disclosed by 12%; total survey participation 46%) - SMT included Sustainability in Supplier Communication, e.g. Adaptation of Purchasing Orders and General Terms and Conditions - Sustainability assessments planned for 2015 Not implemented yet Partially implemented Successfully implemented 22
Summary Sustainability Report Vs. 03 With publication of this 3rd version of the sustainability program ZEISS SMS confirms the content of our sustainability program and emphasize our aim of realizing it. Social Responsibility ZEISS has a long tradition of taking responsibility. With this report, only some of many examples which took place during the reporting period were shown. ZEISS is engaged to share its benefits with its neighbor communities by creating jobs, helping to develop skills and supporting with donations and investments. Energy, Climate, Environment ZEISS is constantly working to reduce the environmental impact of its operations. ZEISS has strict environmental standards to reduce waste, the use of energy and to minimize the consumption of fresh water. Changes of the product mix and the manufacturing environment, e.g. air conditioning, lead to different consumption figures from year to year. A further development of the figures and indicators is necessary. Sustainable Innovations & Technology Sustainability related aspects are an integrated part of the main development process. ZEISS SMS is focusing on eco friendly packaging and efficient, long lasting components and are working on more sustainable products together with the suppliers. Workforce Following the GRI3 format, additional figures for Labor and Human Rights were included. The high degree of staff retention indicates ZEISS attractive working environment. Sustainability Projects & Reporting Nearly all sustainability related improvement projects were finished in time. A common sustainable design project with one of ZEISS SMS suppliers could not be realized. The next reporting about the sustainability program is planned in November 2015. 23
Editors Gregor Rentsch Sustainability Nadine Schütze Communications We value your interest in our report and welcome questions, comments and improvement suggestions. Please use the following email address to contact us: info.sms@zeiss.com Download this document at www.zeiss.com/responsibility Copyright 2014 Carl Zeiss SMS GmbH 24