Peak Sensor Systems e-diagnostics Initiative

Transcription

1 Peak Sensor Systems e-diagnostics Initiative Adding e-diagnostic Capability to ProPak Technology Pam Ward / Peak Sensor Systems [email protected], , March /13/2003-1

2 ProPak Plasma Monitoring System Current Features: Fault library of known faults Internal and pager notification on Fault Historical data collection Broadband OES technology Remote access via desktop tools Dual methods for endpoint Playback tools for analysis Pending Release: PlasmaTrax State of Health Data Base Statistical analysis (PCA) Return from clean Features Under Development e-diagnostics tification internally and to OES vendor and OEM provider Integration of Tool State on Board Sensors Data reduction technology Fingerprinting Automatic algorithm development 03/13/2003-2

3 Building Value Endpoint Fault Detection State of Health OEM Tool Parameter Archival Fault Detection and State of Health Analysis OES in conjunction with Tool State Data e-diagnostic Communication of Tool Fault, Process Fault and Sensor fault to Quality Partners Peak is building value by building on past successes. Adding nested layers of capability allows Peak to provide customized plasma monitoring solutions 03/13/2003-3

4 Peak s Historic Connectivity Engineer Desktop OES (Fiber-Optics) Pr o Pak Engineer Desktop / paging Advanced Communications (Ethernet TCP/IP) Engineer Desktop SECS Comm SW Etch Cluster Tool DATA (SECS/GEM) Equipment Interface FAB Network 03/13/2003-4

5 Peak s Vision of e-diagnostics ProPak monitors plasma process: All desired recipes and steps for endpoint Known fault conditions as they exist in a fault library Unknown fault conditions based on process trend excursion detection ProPak monitors sensor condition Fiber condition, alignment Tape backup status Spectrometer status Communication status ProPak monitors tool condition Critical tool parameters collected, archived, evaluated as part of process monitoring Validates tool parameters with OES data for more detailed fault analysis and diagnosis ProPak provides critical information regarding tool health using degradation analysis based on trend analysis ProPak communicates between Quality Assurance Partners Sensor Vendor, Customer, and OEM provider

6 e-diagnostics Process Flow Process On? Plasma Monitoring Enabled? Internal Network tification of Engineer or Maintenance Personnel via Internal Network OES Plasma Process Monitoring and Tool State Data Collection EP Detected? EP rmal? Log Data tify: APC System, Tool Controller, Appropriate Contacts Process Fault Tool Fault Sensor Fault Process Completed Without Faults? Internet tification of External Vendors, OEM, Other Authorized Users Log Data Is it a New Day? Send Heartbeat Message to Vender, OES Partner, Etc. 03/13/2003-6

7 Peak s e-diagnostics Connectivity Plan, Additional Network Sensor Status Sensor Faults Fault Mediation Sensor Diagnostics Peak Sensor Systems Fire Wall Engineer Desktop Fire Wall 2-way VPN Communication 2-way VPN Communication Fire Wall Tool Status Tool Faults Fault Mediation Tool Diagnostics Internet OES (Fiber-Optics) ProPak Engineer Desktop Engineer Desktop LAM Process Fault Fault Mediation (Ethernet TCP/IP) IPC DATA (SECS/GEM) Lot, Slot, Recipe, Step Start, Step Stop, On Board Sensor Data Etch Cluster Tool AEC/APC control system such as Fabworks, Brookside,etc. (May not be available) FAB Network 03/13/2003-7

8 Peak s e-diagnostics Connectivity Plan, Additional Network 03/13/2003-8

9 The User s View User receive heartbeat message from ProPak? Quality Partners are alerted to heartbeat message failure Quality Partners are notified of endpoint failure, data logged with failure details User loads production into etch chamber Plasma process halted, damage stopped Plasma processing begins ProPak remains idle Service Call initiated by OEM or Sensor Vendor. Service Call tice goes to User Data and process results logged ProPak determines if plasma monitoring enabled Process Fault tice is sent to User Was endpoint successfully detected? ProPak monitors for endpoint and fault conditions Is fault tool or sensor related? OES & Tool state data collected Quality Partners notified, fault information logged with data Has process fault occurred? Has process tool fault occurred? Has sensor fault occurred? 03/13/2003-9

10 Technical Demonstration Detection of known fault conditions based upon OES data merged with tool state data. Communicate the occurrence of fault Process fault: Facility Engineer (SEMATECH, Austin) Sensor fault: Sensor Vendor (Peak Sensor Systems, Albuquerque) Tool fault: OEM Provider (LAM Research, Fremont) Test Details 100% Silicon represented normal product 100% Photoresist represented a no mask process fault A detached and blocked fiber represented Broken Fiber sensor fault +25% and 25% Cl process gas represented tool fault 03/13/

11 Fault Details Ratio ( ) to ( ) Light Leak 652,662,722,730, st Test for Broken Fiber rmal Wafer ( PR) 100% PR Broken Fiber +25% Cl -25% Cl te: these tests may catch other unpredicted problems since these bandpasses are sensitive to other parameters of a well behaved process. 652,662,722,730, th Test for High Cl2 Flow ,730,652,662, th Test for Low Cl2 Flow Time (sec.) 03/13/

12 Fault Details Ratio ( ) / ( ) rmal Wafer ( PR) 100% PR Broken Fiber +25% Cl -25% Cl 360,415,505,525, nd Test for Broken Fiber ,415,505,525, st Test for 100% PR Time (sec.) 03/13/

13 Understanding Plasma Parameter Space Plasmas reside inside of an operational space. Plasmas are dynamic systems that strive to maintain a balance by compensating for slight drifts in gas flow, pressure, power and temperature. Ideally, plasma parameters are picked so that the plasma resides in the center of the parameter space, resulting in robust plasma systems tolerant to larger parameter shifts. OES is not a quantitative tool, but rather qualitative. It can only respond when parameters have shifted the plasma out of the space. 03/13/

14 Peak s Goals for e-diagnostics Unprecedented Customer Support e-diagnostic capability allows Peak Sensor Systems to provide an unprecedented level of customer support OEM/Vendor partnerships build on e-diagnostic capabilities all collaborative trouble shooting via remote connectivity 24 Hour process surveillance Immediate response to trouble calls Remote connectivity allow OEM/Vendor partners to provide JIT service and response Predictive tool and sensor maintenance Instantaneous installation of software upgrades Instantaneous service contract support With remote access to the tool sets in the field, OEM/Vendor partners can provide remote performance monitoring and tool operation Engineering support to develop fault detection methods, endpoint algorithms, etc. New methods installed and activated on line 03/13/

15 What Went Wrong Lessons Learned Peak Sensor Systems became involved in the e-diagnostic program relatively late in the year (October, 2002) The short time to develop and test was negatively impacted by the holiday seasons, making it difficult to run repetitive tests The original tool demonstration was performed the week before Christmas, impacting the number of attendees to the demonstration Demonstrations were run with PR blanks and Si blanks, therefore the tests had no real-world applicability Simulation of tool fault type was not as sensitive as we would have liked 03/13/

16 What Went Right? Peak and Lam received excellent support and active collaboration from ISMT without which these successes would have not been possible: Communications between the Sensor and Quality Partners, Peak, Lam and ISMT were quickly established. VPN access to the in Fab OmniPak system was simple and elegant once established. Remote access allowed Peak engineers to perform much of the required development on the Austin system from Peak s Albuquerque office- Saving $$$ and Time while offering a higher level of customer support. System configuration, data retrieval, and sensor software upgrades were performed remotely without any issues. Tool parameter gathering and archival was successful. Communication of tool status (heartbeat messages, fault conditions) was delivered to all quality partners immediately upon occurrence. Successfully demonstrated most items on the e-diagnostic Checklist 03/13/

17 The Future of e-diagnostics at Peak Where Peak wants to go from here: Diagnostics based on tool parameter deviations Linking the Fabs via ProPak More detailed fault information Incorporation of additional sensors Addition of predictive maintenance capability to ProPak Predictive cleans Impending tool failure Detailed diagnostics with Just in Time replacement part acquisition to maintain tool and sensor performance. Establish 24 hour Customer support centers to provide in fab support via electronic monitoring. EP development Fault algorithm development Etc. Enhanced Security User identity and activity logs Security keyed information 03/13/