Sensing our World Motion, Humidity, Pressure, Temperature, Sound, Light
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1 Sensing our World Motion, Humidity, Pressure, Temperature, Sound, Light The future of MEMS sensors in our Connected World Jeanne Forget, Head of Marketing, 1
2 The three waves of MEMS proliferation MEMS enabler of new markets and applications Tomorrow s requirements 2
3 Waves of MEMS sensor proliferation 2014 Internet of Things and Services (IoTS) 3 rd wave Consumer Electronics 2 nd wave Automotive 1 st wave
4 More than 50 MEMS sensors in a car today Engine Management Safety Systems MEMS Sensors for: Engine Management Barometric Air Pressure BAP Diesel particulate filter Mass flow sensor Vehicle Dynamics Control Yaw rate sensor High pressure sensor IMU and low g sensors Vehicle Dynamics Control Safety Systems Rollover sensor gyroscope Occupant weight sensor ibolt Pedestrian Contact Sensor PCS Upfront Sensor UFS Peripheral Pressure Sensor PPS 4 Automotive Electronics
5 Smart phone: our everyday s companion User interface Tap control Gaming input Menu navigation Voice/ speech recognition Gesture recognition Motion detection Step counting Activity monitoring Power management Position detection Upside down Portrait / landscape Free speech profile Pedestrian navigation Speed & distance estimation Altitude detection Location based services Smart phones : strongest driver of new MEMS sensor development today 5
6 Today Tomorrow Bosch The future of MEMS Sensors Smart phone application trends Location based services Well-being recommendations Indoor position tracking Augmented reality Activity monitoring Environmental monitoring User Interface Gaming Image stabilisation More advanced use-cases will drive next generation smart phones 6
7 Next wave - wearable applications Gen. 1 Gen. 2 Today Tomorrow 7
8 IoTs - from monitoring to control Proprietary solutions within distributed networks Today Connected smart, self-enabling sensor networks - integrated within one eco-system via Internet Tomorrow 8
9 IoT Sensors senses of everyday commodities If you want to increase comfort, security, health, productivity, lifestyle you have to create smart, interactive and sensitive systems. Therefore you have to give the things new senses. 9 Automotive Electronics
10 More use cases than portrait / landscape Navigation Context Fitness Wellness/stress Outdoor GPS Indoor Step count + heading Localization Improve with pressure User s context In a meeting Outside Sitting and eating Watching TV Activity recognition Step counter Fitness level Calorie monitoring Sports trainer Swimming Running Snowboarding Climbing Wellbeing Sleep monitoring Activity Socializing Stress monitoring Speaker Assistant Stress level 10
11 New use cases drive sensor innovation Applications and requirements Always-on-sensors Use data from non- sensors Context awareness, PDR Track dynamic movement Extremely small form factors Diverse selection of sensors Connectivity Impact on sensors Reduce power consumption Reduce footprint New sensor types Advanced date fusion software Increase sensor performance Integration: RF, micro controller 11
12 MEMS: innovation drivers Size / power Integration / µc + SW New measurants Continuing shrinking of sensor footprint / size and power consumption (e.g. accelerometer, IMU) Integration of multi-axis sensors + µc + SW in combo package (e.g. motion / orientation) Rise / emergence of novel sensor clusters (e.g. environmental cluster T, p, H, ) MEMS technology is ready for IoTS 12
13 BMA355 3-axis, ultra-small sensor Industry smallest MEMS accelerometer Size of only 1,2 X 1,5 X 0,8 mm 60% volume reduction compared to state of the art Advanced Packaging Through-Silicon Vias (TSV) in ASIC WLCSP: all steps realized at wafer level Targets highly integrated low power CE applications Smallest 3-axis digital accelerometer in the market (1,2 X 1,5 mm 2 ) 13
14 BMI160 6-axis, inertial sensor First sub-ma current consumption 950µA in full operation (1.8V) 3 x lower then nearest competitor Very small package 2.5 x 3.0 x 0.8 mm³ 16 % smaller footprint then 3 x 3mm² Integrated functionality Activity / inactivity interrupt Low power step detector & step counter Position change & tap sensing interrupts First announced sub 1 ma IMU on the market (950 µa full operation) 14
15 BNO055 Intelligent Absolute Orientation Sensor Absolute Orientation Sensor 3-axis accelerometer 3-axis gyroscope 3-axis geomagnetic sensor 32 bit µc running BSX3.0 FusionLib software 5.2 x 3.8 mm² footprint System in Package (SiP) approach Augmented Reality Gaming Activity monitoring Navigation Context awareness Power management Home automation Logistics BNO055 plus a RF interface (WiFi, BT, etc.) is a key block of IoT based sensing 15
16 Application specific: programmable sensor nodes BNO070, based on 9-axis BNO055, incorporates Hillcrest s SH-1 software optimized for head-mounted displays (HMDs) Absolute orientation solution for head mounted displays (HMD) 16
17 MEMS challenge: one product / one technology Inertial Pressure Geomagnetic Environmental Each product segment requires specific technology (not fully CMOS compatible). Challenge for integration, need for advanced packaging technologies (SiP)! 17
18 BME280 Integrated Environmental Unit Features Tiny in size (2.5 x 2.5 mm²) Low power ( V) High accuracy (tolerance of ±3 %RH) Fast response time (1 s for humidity ) High absolute accuracy: typ ±1 hpa of pressure BNO055 Integrated plus a RF Environmental interface (WiFi, Unit BT, for etc.) Smart is a Phones, key block Wearables of IoT based and IoT sensing 18
19 The future of MEMS: Multitude of technologies (Inertial, GeoMagnetic, Environmental, Acoustic...) Implement application specific (Smart phone, Wearable Devices, Tablets...) Solutions (Integrating sensors, µc and application specific software) Broad technology portfolio + broad application know-how 19
t Markus Sonnemann, Robert Bosch GmbH
MST Baden-Württemberg, Stuttgart, 27.04.2015 Mikrosystemtechnik t Enabler für das Internet-der-Dinge t Markus Sonnemann, Robert Bosch GmbH 1 Bosch the MEMS Pioneer Start t of MEMS production in 1995 More
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