: Electrons and holes in a semiconductor

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1 Modern Semiconductor Devices for Integrated Circuits Chenming Calvin Hu November 11, 2011 Part I : Electrons and holes in a semiconductor Chapter summary 1. Silicon crystals are formed via covalent bonds. In an intrinsic silicon crystal there are few mobile electrons and holes. Their concentration is equivalent to n i (~10 10 cm 3 ) 2. Using the bond model one can explain why group V atoms can serve as donors where as group III atoms can serve as acceptors 3. Electrons and holes are the major characters in the play and carry opposite charge. Their mass however is altered from the mass of an electron in vacuum. The altered mass is called eective mass, m n and m p 4. The band model is the tool required for quantitative analysis of semiconductors. From this model one can get the energy gap, E-K diagrams allowing the determination of eective masses, analysis of the energy levels with in the gap and the conduction/valence bands etc 5. Band gap is dened as the separation between the valence and the conduction band. Si 1.1eV, GaAs 1.424eV, InP 1.344eV 6. The valence and the conduction band contain states which contain electrons and holes. This is dened by density of states (#/volume/energy) for a certain energy range 7. The distribution of electrons and holes in a semiconductor is given by the fermi-dirac distribution. Fermi-Dirac distribution is dependent on the temperature 1

2 8. The fermi level or fermi energy is determined by the available electrons and states in the system. 9. The total number of lled states in the conduction or valence band dened by: n = D (E) F (E) de 10. Thermal agitation gives each energy state a certain probability of being occupied by an electron. That probability is expressed by the reduced fermi function for E more than a few above the Fermi level, E F. 11. The fermi level, E F, is related to the density of electrons and holes in the following manner: n = N c e (Ec E F )/ p = N V e (E F E v)/ 12. The eective density of states, N c &N v, are around cm The majority carrier concentrations are (for a N and P type Semiconductor): n = N d N a p = N a N d where N d &N a are the concentration of donors and acceptors which are usually assumed to be completely ionized. 14. The intrinsic carrier concentration, n i, is determined as a function of E g and T Properties of semiconductors Dierent surface orientations have dierent properties such as the rate of oxidation and the electronic quality of the oxide/semiconductor interface. Both the surface orientation and the direction of the current ow along the surface aects the speed performance of a surface based device such as a MOSFET 1 Semiconductor Silicon To break a silicon bond an energy of 1.1 ev is required. E thermal = 26 mev at 300 K and 1.1 ev is roughly K. Therefore doping is done because the energy to relax an electron or hole is ~ 50meV 2

3 GaAs Each Ga atom has four As atoms and each As atom has for Ga atom. Group VI elements are donors because they replace As, i.e. S, Se etc and group III elements are acceptors, i.e. Zn. Group IV elements like Si and Ge can be either donors or acceptors depending on their electronegativities. For e.g. silicon is a donor because energetically favorable to replace Ga atoms while Ge is an acceptor because it is energetically favorable to replace As atoms 2 Energy Band Model Bond Model Pauli exclusion principle coupled with bringing atoms together is used to derive the band model. A band gap exists where the lower lying band or the lower energy band is called the valence band and the higher lying band or higher energy band is called the conduction band. The gap between is called the band gap. The electrons in a totally lled band does not have a net velocity and does not conduct current and neither does an empty band. Therefore it is only the valence band and the conduction band which conducts current. The electrons in the valence band are those associated with the covalent bonds in the bond model and the electrons in the conduction band are the conduction or mobile electrons. Band gaps are determined by measuring the absorption of light. Below the band gap energy the substance is transparent and above the band gap energy the substance absorbs the photon. Useful relationship to convert photon frequency into energy (ev) hν = 1.24 λ Donors and Acceptors in Band model Donors, E d, donate electrons to the conduction band while acceptors, E a, accept an electron from the valence band. Electrons and Holes Holes can be thought of as bubbles in liquids, oating up in the energy band and electrons can be thought of as water drops that tend to fall to the lowest energy state in the energy band. This is because in the energy band model the y-axis are states of higher energy for the electrons and lower energy for holes. This is true because the y-axis energy is based on electron charge. 3

4 Eective Masshttps://accounts.google.com/ServiceLogin?service=ma In a crystal the electrons and holes interact with a periodic coulombic eld. They surf over the periodic potential of the crystal and therefor m n and m p are not the same as the free electron mass. A complete description of electrons in a crystal must be based on their wave characteristics. The electron wave function will be the solution of a 3-D Schrodinger Equation. The solution will be of the form exp(±k r) where k is the wave vector and is a function of energy. For each k there is a corresponding energy. Assuming the E-k relationship has a spherical symmetry, an electric eld, E, would accelerate an electron wave packet with: a = qe 2 d 2 E dk ; here the concept of eective mass is introduced, m 2 eff = 2 d 2 E/dk, 2 in order to interpret the acceleration equation as F = ma. Eective masses for electrons and holes in a semiconductor: Si GaAs m n m p m Each semiconductor has a unique E-k relationship for its conduction band and its valence band both due the unique V(r). d2 E dk is the curvature of the band. 2 Therefore the eective mass is related to inverse of curvature of the band. 3 Density of States Density of states is used to think of energy bands as a collection of discrete energy states. Here the energy states is dened in quantum mechanical terms as representing spin up and spin down states and a unique solution to the Schrodinger wave equation for the periodic electric potential function of the semiconductor. Each state can hold either one electron or none. Conduction band and valence band density of states is: D c (E) = D v (E) = # of states in E E volume # of states in E E volume = 8πm n 2mn (E E c ) E E c h 3 = 8πm p 2mp (E v E) h 3 E E v D c is a parabola where the value of D C ate c is a minimum, i.e as E increases so does D c and D v is an inverted parabola like x 2 where the value of of D v ate v is also minimum, i.e as E increases D v decreases. 4 Thermal Equilibrium and Fermi function Idea: Given that we know that most of the electrons in the conduction band exist at the lowest energy level E c and most of the holes in the valence band exist at the energy E v here the idea is to examine the distribution of electrons and holes 4

5 Analogy for Thermal Equilibrium Equilibrium is dened as the lowest energy conguration in the presence of thermal agitations In the presence of thermal agitations the particles can also take higher energy positions. However the system will be at its lowest possible energy consistent with the presence of thermal agitations. This is called thermal equilibrium Electrons and holes receive and exchange energy from or with the crystal (phonons) and one another and every energy state in the conduction and valence band has a certain probability of being occupied by an electron. Quantication of occupancy of electrons and holes To derive the expression for the probability of nding an electron at a certain energy: a statistical thermodynamic analysis with the assumption that the number of particles and the total system energy are held constant without regard to the specics of how particles bounce o the atoms or one another yields the fermi-dirac distribution: f (E) = exp ( E E F Here, E F is called the fermi energy and f (E) is the probability of a state at energy E being occupied by an electron. When E E F >> the probability of a state being occupied decreases exponentially and the fermi-dirac distribution can be approximated using the boltzman distribution: ( f (E) = e E EF At low energies E E F << the occupation probability approaches 1, i.e. low energy states tend to be fully occupied, or ( ) f (E) 1 e EF E In this energy region, the probability of a state not being occupied, i.e. being occupied by a hole i.e.: ( ) 1 f (E) e EF E Therefore from the fermi-dirac distribution one the following important points occur: 1. The probability of occupancy at E F is a 1/2 2. Probability approaches unity if E is much lower than E F and approaches 0 at E much higher than E F 3. There exist only one E F or one fermi level in a system at thermal equilibrium ) ) 5

6 5 Electron and Hole Concentrations Consider an n-doped semiconductor with cm 3 : Question: what is the hole concentration? What is the carrier concentration in undoped semiconductor? To answer these questions one needs to derive a relationship between the Fermilevel and the carrier concentration Derivation of n and p from D (E)and f (E) The electron and hole concentration is derive using the density of states and the fermi-dirac distribution: n = ˆ E C f (E) D c (E) de n = 8πm n 2mn h 3 ˆ E C E Ec e (E E F ) de n = 8πm n 2mn h 3 e (Ec EF ) ˆ E C E Ec e (E Ec) d (E E c ) n = N c e (Ec E F ) { } 3 2πmn 2 N c = 2 h 2 N c is called the eective density of states of the conduction band. This is an important equation and can be remembered as follows: N c is called the eective density of states. It is as if the energy states in the conduction band were eectively squeezed into a single energy level E c which can hold N c electrons (per cubic centimeter). Therefore the above equation is simply the product of N c and the probability that an energy E c is occupied. The expression for the hole concentration is: p = ˆE v V alence band bottom (1 f (E)) D v (E) de p = N v e (E F Ev) { } 3 2πmp 2 N v = 2 h 2 6

7 N v is called the eective density of states of the valence band. The values of N c and N v are roughly the same ( cm 3) and dier only because of the dierence in the eective mass. Table below contains the typical values for Silicon and GaAs Si GaAs ( N ) c cm 3 ( 2.8e19 4.7e17 N ) v cm e19 7.0e18 Fermi level and Carrier concentration As is seen from the above equations of concentration of electrons and holes the fermi level is intrinsically linked to the concentration of electrons and holes, i.e. as the concentration of electrons the fermi energy moves closer to the conduction band energy, i.e. E F = E c, similarly for increase in hole concentration, i.e. E F = E v. When dierence between the fermi energy and the conduction or the valence band is < 20 mev, i.e. the Boltzman approximation is not quantitatively valid. This usually occurs when the semiconductor is heavily doped ( > cm 3) or degenerate. The np product and the intrinsic carrier concentration np = n 2 i = N c N v e Eg The product above says that the np is constant for a given semiconductor and T and independent of the dopant concentration. n i is called the intrinsic carrier concentration and is dependent on E g and T. In the absence of doping n = p or the number of electrons excited due to thermal excitation results in an equivalent number of holes produced, i.e. electrons and holes are created in pairs. n i at room temperature for Si is cm 3 and for GaAs is 10 7 cm 3. GaAs is lower because of its larger band gap. The constant product can be explained as follows: the electron-hole recombination rate is proportional to np product. When np = n 2 i the recombination rate happens to be equal to the rate of thermal generation of electron-hole pairs. 6 General theory of n and p Shallow donors and acceptor levels (E d & E a ) are represented in the energy band as energy states and their occupancy by electrons is governed by the Fermi function. E d is usually a few above E F, the donor level is nearly empty of electrons, or the donor atoms are ionized, i.e. have lost all the electrons. This case is true for acceptors as well. There are four types of charged species in a semiconductor: electrons, holes, positive donor ions and negative acceptor ions. Their densities are represented by n, p, N a, N d. In general one can assume that a sample is free of a net charge, i.e. the Charge Neutrality condition requires that the densities of the negative particles and positive particles are equal: 7

8 If N d N a n i N-type n + N a = p + N a n = N d N a p = n2 i n If N d N a n = N d If N a N d n i p-type p = n2 i N d p = N a N d n = n2 i p If N a N d p = N a n = n2 i N a 7 Carrier concentration at extremely high and low temperature At very high temperatures, n i is large and it is possible to have n i >> N d N a, therefore n = p = n i, i.e. the semiconductor becomes intrinsic At very low temperatures E F moves away from the dopant energy levels and most of the donors or acceptors remain nonionized. This phenomena is called freeze-out. Part II Motion and Recombination of Electrons and Holes Summary 8

9 1. In the presence of an electric eld, charge carriers gain a drift velocity and produce a drift current density proportional to the electric eld: v p = µ p E v n = µ n E J p,drift = qpµ p E J n,drift = qnµ n E µ p and µ p are called the hole and electron mobility. 2. Both, µ p and µ p are determined by how frequently the carriers collide with phonons or dopant ions and lose their drift momentum. Mobilities are functions of temperature and total dopant concentration 3. Second important transport mechanism is diusion. Diusion current density is proportional to the gradient of the carrier concentration J p,diffusion = qd p dp dx J n,diffusion = qd n dn dx D n and D p are the electron and hole diusion constants. Both drift and diusion are perturbations to the same thermal motion, and both are slowed down by the same collisions that are responsible for the zigzag paths of the thermal motion. 4. D and µ are related by the Einstein relations 5. J tot = J drift + J diffusion D n = µ n q D p = µ p q 6. Minority carrier concentration, e.g. p in an N-type semiconductor, can easily be increased from its equilibrium concentration p o by orders of magnitude with light or doping, such that: p = p 0 + p >> p 0 p is dened as the excess hole concentration 7. Charge neutral region, n = p. Charge non-neutrality will generate an electric eld that causes the majority carriers to redistribute until neutrality is achieved 9

10 8. Electron and hole recombination rate is proportional to n'(=p'): Recombination rate = n τ = p τ τ is the recombination lifetime and ranges from nanoseconds to milliseconds for Si, depending on the density of trace metal impurities that form deep traps 9. Quasi-Equilibrium is condition when the excess minority carriers are present, the pn product can be orders of magnitude larger than n 2 i. This condition creates a non-equilibrium between electron and holes as two groups of particles. Within each group however the carriers are still in equilibrium among themselves and share one common (quasi) Fermi level at dierent locations. The following relationships elucidate this: n = N c e (Ec E F n) ktt p = N v e p Ev) (E F ktt E F n ande F n are the quasi-fermi levels of electrons and holes 8 Thermal Motion The idea here being thermal eects alone can create an average kinetic energy of charge carriers. The motion resulting from this kinetic energy or velocity is random resulting in non steady electric current, but it does introduce thermal noise. The kinetic energy of electrons, E E c can be calculated as follows: Average electron kinetic energy = total kinetic energy number of electrons = f (E) D (E) (E Ec ) de f (E) D (E) de Average electron kinetic energy = 3 2 The thermal velocity, v th, of electrons and holes is: 3 v th = m where m = m n or m p. Electrons and holes move at thermal velocity but not in simple straight lines. Their direction of motion change frequently due to collisions or scattering with the imperfections in the crystal. The mean free time between collisions is typically 0.1 ps, and the distance between collisions is a few tens of nanometers. The net thermal velocity is zero. 10

11 9 Drift Drift is the motion of charge carriers caused by an electric eld. Drift is at play when voltages are applied to a semiconductor 9.1 Electron and hole mobilities With the application of voltage the average velocity of carriers is no longer zero, in fact they carry a drift velocity. This drift velocity is superimposed on the thermal motion creating a net current ow. A large drift velocity is desired in semiconductors because it results in faster processing speeds. Due to the superimposing of the drift velocity on the thermal motion one can derive the drift velocity using the following assumptions: (a) mean free time between collisions is τ mp and that the carrier loses its entire drift momentum, m p v, after each collision. Between collisions the drift momentum gained is equal to the force times the mean free time: m p v = q Eτ mp v = q Eτ mp m p = µ p E µ p = qτ mp m p Here µ p is the hole mobility or a metric of how mobile the holes are. This term depends on the mean free time between collision and inversely on the hole mass. For electrons one gets a similar expression: v = q Eτ mn m n = µ n E µ n = qτ mn m n Typical values are given in the table below: cm 2 V s Si GaAs µ n µ n GaAs has a high electron mobility because the electron eective mass is much smaller than Silicon's electron eective mass. Remember the eective mass is related to the curvature of the band. 11

12 9.2 Mechanism of Carrier Scattering The mean free time between collision, τ mp, τ mn can vary signicantly with temperature and doping concentration. There are two causes of scattering in a crystal: phonon scattering and ionized impurity scattering. Phonon Scattering - the physical mechanism of phonon scattering occurs due to electron and phonon interaction, i.e. the electron scatters due to interacting with the phonon or the crystal vibration. This crystal vibration distorts the periodic crystal structure thus scattering the electron wave. Therefore this brings in the concept of mobility of phonons due to scattering which is: µ phonon = qτ ph m where τ ph is the mean free time of phonon scattering. The mean free time of phonon scattering is inversely proportional to phonon density and electron speed (or thermal velocity). Phonon density is proportional to temperature. The mobility of phonons therefore is: 1 µ phonon ατ ph α phonon density carrier thermal velocity α 1 T T αt 3 2 The above equation shows that the scattering mobility decreases as the temperature increases or as the temperature increases the scattering life time goes from being very long to very short, which is as expected. Impurity Scattering - Physically scattering rises because the dopant ions are xed charge in the semiconductor crystal, therefore due to coulombic forces they can make the electrons and holes change the direction of motion. Electrons or holes can be scattered by either a donor (positive) or an acceptor (negative) ion. The mobility due to this type of scattering is inversely proportional to the donor or acceptor ion concentrations and proportional to T 3 2. The mobility increases at higher temperature because the higher thermal velocity means the charge carriers y by the ions in a shorter time therefore resulting in lower perturbation to the electrons motion. T 3 2 µ impurity α N a + N d In the event of more than one scattering mechanism the total scattering rate and therefore the total mobility are determined by the sum of their inverses: 1 τ = 1 + τ phonon 1 µ = 1 + µ phonon The mobilities may be expressed as: µ p = [ (Na+N d ) 1.6e17 1 τ impurity 1 µ impurity ]

13 µ n = [ (Na+N d ) 1.0e17 ] From the above equations the inverse proportionality to the dopant density is not followed at the limit of very N a or N d. The reason is free carrier screening. When the carrier concentration is large the carriers can distribute themselves to partially screen out the coulombic eld or dopant ions. Velocity Saturation and Ballistic Transport In small device one can get large applied electric eld however the drift velocity will always saturate at around 10 7 cm s. This is because of optical phonons. When the carrier kinetic energy exceeds the optical phonon energy, E opt, it generates an optical phonon and loses its kinetic energy. Mobility and even velocity saturation are concepts that describe the carrier motion averaged over many scattering events. These concepts become fuzzy when dealing with devices whose sizes are smaller than the mean free path. The motion of carriers in a nearly scattering-free environment is called ballistic transport. mvsat 2 = E opt 2 v sat = 2Eopt E opt is the optical phonon energy and is usually 40 mev, which puts v sat 10 7 cm s. Velocity saturation has deleterious eects on device speeds Drift Current and Conductivity m J p,drfit = qp v J p,drfit = qpµ p E J n,drfit = qpµ n E J drfit = J n,drfit + J p,drfit = (qpµ n + qpµ p ) E = σ E where σ is the conductivity of the semiconductor 13

14 10 Diusion Current Diusion current is the second mechanism of current ow. This type of current ow is not considered in metals because of their high conductivities. In semiconductors it plays a role because of the low conductivity and the ease of creating a nonuniform carrier densities. Diusion is the result of particles undergoing thermal motion, i.e. particle movement from a point of higher particle density towards a lower particle density. Mathematically we say the rate of movement by diusion is proportional to the concentration gradient, i.e. J n,diffusion α dn dx J n,diffusion = qd n dn dx J p,diffusion = qd p dp dx The negative sign is due to sign convention of taking the ow of current due to the diusion of electrons as positive. Therefore the holes will diuse in the opposite direction and the current produced will also be in the opposite direction. J n = J n,drift + J n,diffusion = qnµ ne dn + qdn dx J p = J p,drift + J p,diffusion = qpµ pe dp qdp dx J = J p + J n 11 Relation between Energy band diagram and V, E A voltage applied across a piece of semiconductor alters the band diagram. By denition, a positive voltage raises the potential energy of all positive charges and lowers the potential energy of a negative charge. This means the band diagram is higher where the voltage is lower or the band diagram is lower where the voltage is higher. Point to remember is thate c ande v vary in the opposite direction from the voltage.e c ande v are higher where the voltage is lower. That is to say E c (x) = constant qv (x) One can think of the following analogy: electrons roll downhill like stones in the energy band diagram and the holes oat up like bubbles. 14

15 12 Einstein relationship between D andµ Considering a semiconductor at equilibrium, meaning the total current density is zero, i.e. Jn = J p = 0. From the above equations: 0 = qnµ ne dn + qdn dx ; n = N ce (Ec E F ) 0 = qnµ n E qn qd n E D n = q µ n At equilibrium the drift and diusion currents perfectly cancel each other out for an arbitrary doping prole. A close relationship between D andµ becomes possible when one realizes that all scattering mechanisms (phonon and impurity scattering) that impede electron drift would also impede electron or hole diusion. The equation for hole is: D p = q µ p 13 Electron-Hole recombination Electron and hole concentration introduced are the equilibrium carrier concentration and are denoted as: n o & p o. These concentration can be dierent if light shines on the sample and generate electron and holes. The dierences are known as excess carrier concentration denoted by n & p. If n & p are created by light then they are equivalent because electrons and holes are created in pairs. If n & p are introduced by other means then they will still be equal because of charge neutrality. A charge neutral sample can be written as: n = p. The concentration of electrons and holes as a result of the excess carrier concentration can be written in mathematical form as: n = n o + n p = p o + p If the light is suddenly turned o n & p will decay with time until they become zero and n & p return to their equilibrium values n o & p o. The process of decay is recombination where by an electron and a hole recombine and annihilate each other. The time constant of decay is called the recombination time or carrier lifetime τ dn dt = n τ = p τ 15

16 The recombination rate (per cubic centimeter per second) is proportional to n & p. Recombination rate = n τ = p τ τ has dimensions of time and is typically around 1µs in Silicon. It may range from 1ns to 1ms, depending on the density of trace metal impurities such as Au and Pt, which form traps in the band gap with several energy levels deep in the band gap. These deep traps can capture electrons and holes to facilitate recombination and thus shorten the recombination time. Too small τ is bad for device leakage current thus extreme cleanliness is maintained in the semiconductor fabrication plants partly to avoid these metallic contaminants. In direct band gap semiconductors one gets radiation being emitted when electrons and holes recombine. 14 Thermal generation The reverse process of recombination is thermal generation. At any nonzero temperature, electron-hole pairs are constantly being generated and lost by recombination. 16

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