Capacitive sensors for displacement, distance and position

Transcription

1 Capacitive sensors for displacement, distance and position Capacitive measurement system and sensors with micrometer resolution for linear measurement of displacement, distance and position ideal for insulators and semiconductors Non-contact capacitive sensors also known as oszillation sensors, flatness sensor, position sensor, dislocation sensor, displacement sensor, distance sensor, heat resistant, stable, robust, industry sensor, measurement system for layer thickness, thickness measurement, gap, compact measurement system for elongation, also for customer-specific OEM sensors

2 capancdt 6100 Non-contact displacement measuring Distance Measurement The inherent linearity is based on the measuring principle for distance mode. The capancdt system evaluates the reactance Xc of the capacitor which changes strictly proportionally with the distance: Xc = j C 3 4 capacitance C = r 0 area distance Electrical conductor Xc = constant distance 5 6 Thickness measurement The system can also measure linear the thickness of insulator material. The capancdt system evaluates the reactance Xc change based on the dielectric volume of the material inside the constant sensor gap. 7 Electrical conductor ADVANTAGES Sensors are wear-free and maintenance free Extreme temperature stability Tri-electrode and active guarding technology Nanometer repeatability Any conductive target Areas of use The capancdt 6100 is designed for industrial use in production plant and for measuring and testing during inprocess quality assurance. Illustrated are examples showing only a small selection of the numerous possibilities. 1 - vibration, amplitude, clearance, run-out 2 - displacement, distance, position, elongation 3 - deflection, deformation, waviness, tilt 4 - dimensions, measuring of tolerances, part recognition 5 - stroke, deformation, axial shaft oscillation 6 - in-process quality-control, dimensions test 7 - thickness measurement of insulator material 02

3 System structure Active guard triaxial cable & tri- electrode technology The Micro-Epsilon capacitive system uses a unique active driven and hermetically sealed triaxial RF cable in conjunction with an active guarded tri-electrode sensor. Therefore the system is electron leakage proof and creates a protected homogeneous measurement field enabling an absolute unmatched stable, interference free precision measurement. Any parasitic capacitance which compromises the accuracy is eliminated! A complete measuring channel consits of: 1- a capacitive displacement sensor 2- a sensor cable 3- controller Optional: 4- power/signal cable 5- power supply Housing Measuring principle Guard ring Capacitor Field lines Measuring spot Block diagram Controller: Amplifier-electronics DT 6100 Power supply: 24 VDC, ±15 VDC or 9-36 VDC Output: 0-10 V 24 V DC/DC- converter Oscillator ±15VDC f osz 31 khz Signal Demodulator Sensorcable Preamplifier Sensor 03

4 capancdt 6100 Technical specifications and features Technical specifications are valid for electrical conductors (metal) as reference material at 20 C (68 F) ambient temperature and for the standard length (1 m) of the sensor cable. Sensor installation All sensors can be installed free-standing or flush and are secured by clamping or with a chuck. Any conductive / semi conductive target The linear characteristic of the measurement signal is achieved without extra electronic linearisation when measuring against targets made of electrically-conductive materials (metals). Changes in the conductivity do not affect sensitivity or linearity. Any conductive or even semiconductive target is measured with the same measurement performance. Calibration capancdt 6100 system is factory-calibrated for metallic targets (output 0-10 Volt). In critical sensor mounting conditions, the rated range of the output characteristic can be adjusted and optimized, through the use of the zero and gain potentiometers. The adjustment is carried out at two distances (zero and full-scale) that are measured by an independent reference. Grub screw mounted (plastics) Clamping ring mounted Non-contact target grounding Target grounding sometimes can be very difficult or even impossible. Unlike conventional systems due to the unique synchronisation of two 6100 systems the target does not require any electrical grounding. The following principle shows two synchronised capancdt sensors measuring roller run out. The target does not require to be grounded because of the unique synchronised noncontact-grounding technology. Instant sensor swap without recalibration The unique Micro-Epsilon capacitive technology allows changing any capancdt sensor in seconds! Replacing sensors with different measuring ranges and any capancdt controller without recalibration. A sensor swap with capancdt needs no more than 5 seconds, while other capacitive systems are not designed for replacing components without the need of individual calibration and linearisation. sensor controller sync. Instant sensor swap within 5 seconds! Replace any capancdt controller and any capancdt sensor within seconds without recalibration! sensor controller No target grounding required with capancdt sensors! controller 04

5 Technical data Specification Sensor CS02 CS05 CS1 CS1HP 1 CS2 CS3 CS5 CS10 Measuring range Extended range 2 Linearity Resolution Sensor outer diameter Weight mm inch mm inch standard <0.3 % FSO µm tuned 3 <0.1 % FSO µm <0.015 % FSO mm inch g Active measuring area Guard ring width Min. diameter of target Temperature stability Sensitivity Output Power supply Bandwidth Temperature range Sensor ambient air humidity Electromagnetic compatibility EMC Protection class Diameter Sensors Controller Standard Option I Sensors and cables Controller Sensors mm inch mm inch mm inch <0.01 % FSO / C <0.03 % FSO / C V/mm V/inch V Resistance min. 1.2 k Ohm / Capacitance max. 1 nf 4-20 ma / load max. 400 Ohm 24 VDC / 85 ma ( VDC) or ±15V / ±55 ma 10 Hz (-3 db) / 2 khz 4 (-3 db) (switchable) -50 to +150 C (-60 to +300 F) +10 to +50 C (+50 to +125 F) 5 to 95 % (non condensing) EN Spurious emission EN Immunity to interference 5 IP 54 FSO = Full Scale Output 1 µm = 1 micron 1) INVAR sensor 2) Factory setting 3) Controller and sensor matched and calibrated 4) Factory default setting 5) Uncertainty of measurement: Immunity to interference / electromagnetic fields acc. to EN max. 1 % 05

6 capancdt 6100 Sensors and sensor cable Sensors The sensors are designed as tri-electrode guard ring capacitors and are connected to the preamplifier electronics with a 1m long triaxial cable. The sensor cables are equipped with high quality triaxial RF connectors. All standard sensors can be used within any capancdt series electronics without recalibration. Micro Epsilon offers and designs customized probes for your specific application. IMPORTANT! All Micro-Epsilon probes are short circuit proof. Unlike other systems the preamplifier will not get damaged, if the front face of the sensor gets shorted by touching the conductive target. Sensor connecting cable The sensor and controller are connected by a special triaxial active guarded 1 m sensor cable. A special cable length of 2 m and 3 m is an option but requires special tuning of the amplifier. Sensor cable CCxC ø5.4 ø6 Sensor cable CCxC/90 16 ø Sensor cable CCxB cable length cable length ø3.2 ø ø7 ø7 ø9.5 ø Sensor cable CCxB/ ø6 ø5.4 Model Cable length 2straight connectors 1x straight + 1x 90 for sensors CC1C 1 m x mm CC2C 2 m x mm CC3C 3 m x mm CC1C/90 1 m x mm CC2C/90 2 m x mm CC3C/90 3 m x mm CC1B 1 m x mm CC2B 2 m x mm CC3B 3 m x mm CC1B/90 1m x mm CC2B/90 2m x mm CC3B/90 3m x mm SW12 ø8.8 ø7 ø10 Vacuum feed through SWH 34 M10x0.75 max.17 2 ø

7 Sensor dimensions in mm (inch) CS02 CS05 CS1 CS2 CS3 Ø 20h7 ø20h7 ø30h7 ø10f7 12 Ø 6f7 12 Ø 8f CS1HP ø10f CS5 CS10 connector ø20h7 ø40h7 ø20h7 ø60h7 Dimension 6f7 Tolerance (µm) f f h h7 40h7 60h

8 capancdt 6100 Controller - Dimensions in mm (rounded inch), not to scale 150 (5.90) 138 (5.44) 64 (2.52) 54 (2.13) output / power 8 pin socket DIN output / power Mounting holes for M4 or 3/16'' screws Sensor 38 (1.50) sensor sync out sync in Weight: appr 380 g Accessories PC3/8 Power- and output cable, 3 m (10 ft.) long, 8-pin SC30 Synchronisation cable 30 cm /1ftlong PS 2010 Power supply for DIN rail mounting Input 230 VAC (115 VAC) Output 24 VDC / 2.5 A L/W/H 120 x 120 x 40 mm SWH Vacuum feed through MC2.5 Micrometer calibration fixture Range mm (0-0.1 inch) Division 1 µm for sensors S thru to CS2 MC25D Digital micrometer calibration fixture Range 0-25mm(0-1inch) Adjustable offset (zero), for all sensors CSP 301 Digital signal processing unit with display for synchronous processing of two channels MICRO-EPSILON info@micro-epsilon.com info@micro-epsilon.co.uk info@micro-epsilon.us certified DIN EN ISO 9001 : modifications reserved / Y A020077JKR