ATE for Manufacturing Test. Major ATE Companies: Teradyne, Credence, Agilent, Advantest, NPTest... Agilent 83K. Advantest T6682
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1 ATE for Manufacturing Test Major ATE Companies: Teradyne, Credence, Agilent, Advantest, NPTest... Agilent 83K Advantest T6682 1
2 Block Diagram for T6682 Block diagram for Advantest Model T6682 described in text: Frame Processor ALPG SCPG Pin Data Selector Formatter PMUs Rate Generator Timing generator MDC UDC Test controller SQPG TTB Data fail memory AFM Timing Memory Waveform Memory Digital Compare PE Power Supplies CUT 2
3 T6682 Specifications and features Chips in the tester itself are 0.35um technology independently controllable and observable channels. Test speeds are 250MHz, 500MHz and 1GHz. Overall timing accuracy is +/- 200ps. Clock/strobe accuracy is +/- 870ps (80ps for AC measurements). Drive voltages are -2.5 to 6V. Pattern multiplexing (2 patterns written per ATE cycle) used for 500MHz. Pin multiplexing (2 tester channels drive one chip pin) used for 1GHz. SQPG: Sequential pattern generator Stores 16 Mvectors of patterns (vector is # of CUT pins). ALPG: Algorithmic pattern generator 32 address bits, 36 data bits. SCPG: Scan pattern generator Supports JTAG, boundary scan 3
4 T6682 Specifications and features Response checking Pulse train matching: ATE matches bits on 1 channel over 16 cycles or less. Pattern matching mode: ATE matches multiple bits from CUT outputs. Compares with expected output. Result of compare can change the sequence of patterns in real time. Frame processor Synchronizes the CUT input stimuli (from pattern generators) with sample-and-compare. Strobe time is interval between application of inputs and sampling of outputs. 4
5 Test Head, Membrane Probe Card and CUT Test head and membrane (cobra) probe card for probing C4s. Tester Power Supply Test Head Device Interface Board (DIB) POGO Pins Probe Card Power Supply Plane Via Membrane Multi Layer Supply Grid PCB Probe Pad Solder Ball (C4) CUT 5
6 Probing Pin electronics (PE) of Advantest T6682: DC driver driver Programmable Switch Switch I/O Pin Placed very close to CUT to maximize bandwidth and minimize parasitics. load VT terminator dynamic clamp Each channel has a driver/comparator and a comparator pin Selector DC Comparators Switch Switch Pin Terminate at POGO pins 6
7 Probing Wafer probe: POGO pins interface to Device Interface Board (DIB) and then a probe card. Package test: POGO pins interface with a package handler and then to a testing socket. (contactor) Pins/Channels: ATE has between 128 and 1024 pins, expandable in units of 128. Voltage Settings: V IH, V IL, V OH, V OL, I H, I L, V T (logic threshold voltage) and both dynamic clamp voltages for each channel can be independently set. Parametric measuring unit Applies and measures voltages or currents at a pin. Two units are available: Multi-DC unit (MDC) and universal DC unit (UDC). Mixed-signal test ATE has additional components including a waveform generator, a digitizer, digital waveform capture memory, sine wave generator, etc. 7
8 Cantilever Style Probe Cards 8
9 Other ATE Equipment power supplies. OS is usually a unix variety, Solaris. Solaris on one processor with non-real time functions. Real-time OS on a second processor for tester control. Test Description Language (TDL) used to write test programs. Can specify strobe times, voltage/current stimuli, vector application rate, vector slew rate, etc. ATE software can: Generate a fail bit map for testing a memory chip. Generate a wafer map showing passing, failing and binning results of chips. Emulate a logic analyzer for debugging. Emulate an oscilloscope for capturing analog waveforms with high resolution. Generate schmoo plots. 9
10 Multi-Site Testing One ATE can test several (usually identical) devices at the same time. Can be done at wafer probe or package test. Motivation: Most of the cost is for the basic ATE. Adding additional instruments is relatively inexpensive. Digital and mixed signal: Usually can test 2 to 4 chips at time. Memory chips frequently tested 32 and 64 at a time because the test times are very long. 10
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