Metrology and Calibration of Mechatronic Systems. Metrology and Calibration of Mechatronic Systems overview ( ) Adrian M.

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1 Metrology and Calibration of Mechatronic Systems

2 Mechatronics Training Curriculum Premium Advanced Feedforward Control (2 days) Workshop Mechatronics System Design (5d) Advanced Advanced Motion Control (5 days) Advanced Mechatronic System Design (6d) Standard Motion Control Tuning (6 days) Dynamics and Modelling (3 days) Experimental Techniques in Mechatronics (3 days) Metrology & Calibration of Mechatronic Systems (3 days) Actuation and Power Electronics (3 days) Machine Vision in Mechatronic Systems (2 days) Thermal Effects in Mechatronic Systems (3 days) Relevant Courses of one of our partners * Basic Mechatronics System Design part 2 (5 days) Mechatronics System Design part 1 (5 days) Summer school Opto- Mechatronics (5 days) Start * Design Principles, Applied Optics, Electronics for non-electrical engineers, System Architecture, Soft skills for technology professionals,

3 Mechatronics Training December 31, 2009 Philips decided to stop all its training activities, which were carried out by the Philips Centre for Technical Training (CTT), and all training programs were transferred to external parties. Currently, all former Philips trainings (and more) are offered to the market under the umbrella of The High Tech Institute ( Content partner for all Mechatronics courses is Mechatronics Academy B.V. ( which is set-up and supervised by : Professor Dr.ir. Jan van Eijk Professor Dr.ir. Maarten Steinbuch Dr.ir. Adrian Rankers

4 Metrology and Calibration of Mechatronic Systems Trainers Dr.ir. Rens Henselmans (NTS-Group) Prof.Dr.ir. Jan van Eijk (MiceBV) Dr.ir. Stefan Bäumer (TNO) Dr.ir. René Klaver (Heidenhain) Ir. Jef Horijon (Assembleon) Dr.ir. Adrian Rankers (Mechatronics Academy) Course Director(s) Dr.ir. Rens Henselmans (NTS-Group) Dr.ir. Adrian Rankers (Mechatronics Academy)

5 Global Program Day Topic Presenter 1 Introduction / Case Nanomefos Mechatronics Context Short Range Sensors 2 Interferometry Systems Encoder Systems Metrology on System Level Rens Henselmans Adrian Rankers Rens Henselmans Stefan Bäumer René Klaver Rens Henselmans 3 System Calibration Rens Henselmans Calibration Component Mounters Metrology in Lithography Equipment Special Topics Jef Horijon Jan van Eijk

6 Day 1 (morning) Case introduction Measurement machine for freeform optics Analysis of existing solutions Performance estimation Metrology definitions SI system and traceability Definitions (repeatability, reproducibility, uncertainty etc.) Components of a measurement system Mechatronic context Control theory summary Influence of sensor properties Influence of sensor placement Applying corrections

7 Day 1 (afternoon) Short range sensors Sensor terminology (range, resolution, sensitivity etc.) Sensor types (capacitive, inductive, optical etc.)

8 Day 2 (morning) Displacement interferometry (principle, components, error sources etc.) Encoders (theory, various types)

9 Day 2 (afternoon) Metrology on System Level Design for low uncertainty Error types Rules of Abbe and Bryan System loops Quantity of concern Error budgeting basics

10 Day 3 (morning) System Calibration Basics Calibration instruments & artefacts Self-calibration Calibration application examples Use of calibration data

11 Day 3 (afternoon) Calibrations in Component Mounters Metrology in Lithography Equipment Special Topics

12 Sign-up for this training Via the website of our partner The High Tech Institute

Summerschool Opto-Mechatronics an initiative of the Dutch Society for Precision Engineering (DSPE)

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