Hynix H2JTDG8UD2MBR-BC 21 nm 64 Gb NAND Flash Memory Device. Flash Process Review

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1 Hynix H2JTDG8UD2MBR-BC 21 nm 64 Gb NAND Flash Memory Device Flash Process Review

2 Hynix H2JTDG8UD2MBR-BC 64 Gb NAND Flash Memory 2 Some of the information in this report may be covered by patents, mask and/or copyright protection. This report should not be taken as an inducement to infringe on these rights. Chipworks Inc all rights reserved. Chipworks and the Chipworks logo are registered trademarks of Chipworks Inc. This report is provided exclusively for the use of the purchasing organization. It can be freely copied and distributed within the purchasing organization, conditional upon the accompanying Chipworks accreditation remaining attached. Distribution of the entire report outside of the purchasing organization is strictly forbidden. The use of portions of the document for the support of the purchasing organization s corporate interest (e.g., licensing or marketing activities) is permitted, as defined by the fair use provisions of the copyright act. Accreditation to Chipworks must be attached to any portion of the reproduced information. FPR RKJM Revision 1.0 Published: April 26, 2013

3 Hynix H2JTDG8UD2MBR-BC 64 Gb NAND Flash Memory 3 Table of Contents Introduction Device Summary Process Summary Critical Dimensions Device Identification Package Photographs Package X-Ray Plan View Package X-Ray Side View Detailed Package X-Rays Side View Flash Controller Die Photograph Flash Controller Die Markings NAND Flash Die Photograph NAND Flash Die Markings General Structure General Die Structure Die Edge Overview and Die Seal Dielectrics Passivation ILD 2 SEM ILD 1 SEM and TEM PMD (Periphery) SEM PMD (Periphery) TEM PMD (Memory) SEM PMD (Memory) TEM Metallization Overview Metal 3 TEM Metal 3 SEM Metal 3 TEM Top and Bottom Views Metal 2 Metal 1 Metal 1 TEM Top and Bottom Views Vias and Contacts Via 2 Via 1 Contacts Source Line Contacts Source Line Detail Contacts Bitline Contacts Bitline Detail Isolation Periphery Flash Cell Array Periphery Transistor Periphery Transistor SEM Periphery Transistor TEM 1 Periphery Transistor TEM 2 Periphery Transistor Detail Periphery Transistor Interpoly Dielectric Periphery Transistor Gate Dielectric

4 Hynix H2JTDG8UD2MBR-BC 64 Gb NAND Flash Memory 4 Table of Contents, continued Wells and Substrate SCM Overview Memory Cell Analysis Annotated Die Photograph Substrate N + Diffusions Substrate N + Diffusions Detail Deprocessed to Wordlines Deprocessed to Metal 1 Deprocessed to Metal 2 Bitlines Deprocessed to Metal 3 Cross-Sectional Analysis NAND Flash Array General Structure (Parallel to Bitline) Bitline Contacts (Parallel to Bitline) SEM Bitline Contacts (Parallel to Bitline) TEM Source Line Contact (Parallel to Bitline) SEM Source Line Contact (Parallel to Bitline) TEM NAND Flash Array Transistors (Parallel to Bitline) 1 NAND Flash Array Transistors (Parallel to Bitline) 2 NAND Flash Array Transistor Dielectric (Parallel to Bitline) NAND Flash Transistors General Structure (Parallel to Wordline) NAND Flash Array Transistors in Detail (Parallel to Wordline) Floating Gate (Parallel to Wordline) Interpoly Dielectrics (Parallel to Wordline) Tunnel Oxide Lattice Image (Parallel to Wordline) Metal 2 Bitlines Bitline Contacts (Parallel to Wordline) Bitline Contacts (Parallel to Wordline) Detail 1 Bitline Contacts (Parallel to Wordline) Detail 2 Bitline Contacts (Parallel to Wordline) Detail 3 Statement of Measurement Uncertainty and Scope Variation About Chipworks

5 Hynix H2JTDG8UD2MBR-BC 64 Gb NAND Flash Memory 82 About Chipworks Chipworks is the recognized leader in reverse engineering and patent infringement analysis of semiconductors and electronic systems. The company s ability to analyze the circuitry and physical composition of these systems makes them a key partner in the success of the world s largest semiconductor and microelectronics companies. Intellectual property groups and their legal counsel trust Chipworks for success in patent licensing and litigation earning hundreds of millions of dollars in patent licenses, and saving as much in royalty payments. Research & Development and Product Management rely on Chipworks for success in new product design and launch, saving hundreds of millions of dollars in design, and earning even more through superior product design and faster launches. Contact Chipworks To find out more information on this report, or any other reports in our library, please contact Chipworks at Chipworks 1891 Robertson Road, Suite 500 Ottawa, Ontario K2H 5B7 Canada T F Web site: info@chipworks.com Please send any feedback to feedback@chipworks.com

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