MEMS Pressure Sensor Solutions for Automotive Applications

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1 MEMS Pressure Sensor Solutions for Automotive Applications Supporting customer success in Automotive, Medical and Industrial markets since

2 MEMS Pressure Sensing Solutions l About SMI We are a premier semiconductor sensor company developing and manufacturing MEMS based pressure sensors and serve challenging applications in the automotive, medical, and industrial markets. We develop unique products for applications requiring ultra-low pressure ranges, extraordinary robustness in harsh environments, and extremely small size. Our integrated business model with in-house manufacturing in Silicon Valley (Milpitas, CA, USA) enables industry-leading quality and process control while offering high levels of service and flexibility. About the group SMI is part of a global portfolio of companies owned by Elmos Semiconductor AG in Germany. The Elmos Group specializes in development and production of semiconductor system-based solutions for a wide range of applications. Products and capabilities include standard and custom integrated circuits (ICs), sensors, complete microsystem development, and advanced assembly and packaging. Elmos Group offices and facilities are located across four continents. As global suppliers to the automotive market, SMI and Elmos are committed to the innovation and reliability demands of the next generation products. The synergy of SMI MEMS expertise coupled with Elmos IC Technology will ensure our customer s success and growth. 2

3 l MEMS Pressure Sensing Solutions Introduction Today, MEMS pressure sensors are widely used in an ever increasing number of automotive applications. Pressure sensors are key components in reducing emissions and fuel consumption while maintaining the fun-to-drive elements of todays passenger vehicles. In addition, they are being deployed in a variety of safety applications, such as Airbag or Tire Pressure Monitoring Systems (TPMS). At SMI our packaged calibrated products as well as our high performance pressure sensor dies can be used in a variety of applications such as: Tire Pressure Monitoring Systems (TPMS) Vacuum brake booster Oil Pressure Sensing (OPS) Engine management system (MAP/BAP) Fuel tank vapor pressure Selective Catalytic Reduction (SCR) Particle filters for diesel engines (DPF) Transmission Fluid Pressure Exhaust gas recirculation (EGR) Crash detection for side airbags Pedestrian protection We support our customers growth and strategic goals through the development of innovative products that satisfy the constantly increasing requirements for higher accuracy and more intelligent sensor systems. We continuously supply globally million quantities of our pressure sensor products at very high levels of quality into the most challenging automotive applications. This brochure includes details of our latest pressure sensor products. 3

4 MEMS Pressure Sensing Solutions l New Automotive Products SM6841 Series SM3020 Series Die SM5108E Series Die SM6841 Series Uncompensated absolute pressure sensor for OEM applications targeting truck and motorcycle TPMS with optimized cap design for o-ring seal. Available in 30 and 100 PSI absolute pressure ranges. SM3020 Series Die Uncompensated, differential and absolute pressure sensor die. Gage Pressure ranges from 3 to 150 PSI. Compact size, all silicon technology x 1.35 mm2 SM5108E Series Die Uncompensated absolute pressure sensor die. Pressure ranges: 30 and 150 PSI Compact size, all silicon technology x 0.65 mm2 Noble Metalization available for harsh environments. Standard Automotive Products SM5108C Series Die Uncompensated absolute pressure sensor for OEM applications targeting TPMS & MAP/BAP Available in 15, 30, 60, and 150 PSI absolute pressure ranges. SM5108C Series Die SM5420C Series Uncompensated absolute pressure sensor for OEM applications targeting TPMS with optimized cap design for O-ring seal. In 15, 30, 60 and 100 PSIA Pressure Ranges. SM5420C Series SM9231 Series Die Uncompensated backside, absolute pressure sensor for OEM applications targeting transmission, SCR, and oil pressure. In 150, 300 PSIA Pressure Ranges. SM9231 Series Die For samples please contact sales@si-micro.com. 4

5 l MEMS Pressure Sensing Solutions Tire Pressure Monitoring Systems (TPMS) TPMS is one of the fastest growing market for MEMS pressure sensors and SMI is an experienced supplier to the TPMS market for both passenger vehicles, trucks, and motorcycles. While passenger vehicle TPMS are located inside the tire, TPMS for trucks are mounted outside of the tire and therefore require design optimized for high-pressure o-ring seal. SM5420C Ultra Small Key Challenges: Reliability, small form factor, high pressure o-ring seal. SMI Offering: Reliable SM5420C and SM6841 series Diesel Particulate Filter (DPF) A diesel particulate filter (or DPF) is a device designed to remove diesel particulate matter or soot from the exhaust gas of a diesel engine. Pressure is measured across the particulate filter monitor filter effectiveness. Typical differential pressure ranges from 5 to 15 PSI. Key Challenges: Media resistance to aggressive exhaust gases and NOx, SOx condensates. SMI Offering: Reliable and media resistant SM3020 series die SM3020 Media 5

6 MEMS Pressure Sensing Solutions l SM5108E Fuel Resistant MAP Engine Management New Manifold Absolute Pressure (MAP) sensors offer better fuel economy and more environment-friendly emissions. Pressure sensors are used to adjust air-fuel mixture for optimal fuel efficiency. The MAP sensor needs to be resistant to Fuel vapors & adopt various Transfer Function profiles. Key Challenges: Fuel Vapor Resistant SMI Offering: Reliable SM5108E Series SM9231 Media Dual-clutch Automated Manual Gearbox New DSG transmission offers better fuel economy, extremely fast shift times, no loss of torque transmission from engine to driving wheels during gear shifts. Pressure sensors are used in gearbox to monitor correct operation. Key Challenges: Media & High Temperature Resistant SMI Offering: Reliable, Backside Absolute Pressure, SM9231 Series Die Image Source: Scania Environment Exhaust Gas Recirculation (EGR) EGR recirculates a portion of an engine s exhaust gas back to the engine cylinders. The lower combustion chamber temperatures caused by EGR then reduces the amount of NOx the combustion generates. Key Challenges: Media resistance to aggressive exhaust gases and NOx, SOx condensates SMI Offering: Reliable SM3020 Series Die 6 SM9231 SM5420C Media Oil Pressure Sensor Design challenge: pressure sensor needs to be protected from oil and high temperature. Robust metal packaging is very important and provides isolation and protection against extreme operating conditions. Oil is pumped from the oil sump by the oil pump through the oil filter and then distributed by oil passages throughout the engine to the bearing surfaces that need lubrication. Other less critical areas that do not need a pressurized oil are lubricated and cooled by oil splash, such as valve stems and valve guides.

7 l MEMS Pressure Sensing Solutions Selective Catalytic Reduction (SCR) SCR is an advanced active emissions control technology system that injects a liquid-reductant agent through a special catalyst into the exhaust stream of a diesel engine. The reductant source is usually automotive-grade urea, otherwise known as Diesel Exhaust Fluid (DEF). The DEF sets off a chemical reaction that converts nitrogen oxides (NOx) into nitrogen, water and tiny amounts of carbon dioxide (CO2), natural components of the air we breathe, which is then expelled through the vehicle tailpipe. SCR technology alone can achieve NOx reductions up to 90%! SM3020 SM9231 Media Passive Safety - Pedestrian Protection and Side Airbags During collision a sealed air hose integrated into front bumper is distorted. Two pressure sensors at both ends of hose detect impact through resulting pressure changes. A mechanism to lift the hood of the car towards the pedestrian is activated. Side impacts still cause about 35% of fatalities. Due to shorter distances the firing decision of a side airbag needs to be much faster than for a front crash. When the door is compressed at side impact the sensor provides a signal pulse proportional to the pressure change inside the door frame. Key Challenge: Safety critical application designed compliant with ISO Offering: ELMOS E series using SM5108 pressure sensor diesmi Offering: Reliable SM2120 Series Die Image Source: Volvo Safety Critical Custom Developed and Turnkey Solutions Many applications require the use of a pressure sensor die instead of a packaged standard product. In those cases significant engineering effort is spent on the selection and development of suitable processes for handling, die-attach bonding, electrical contact, and media protection of the purchased die. The Design for Manufacturability is crucial in applications where commercial success and product quality are critical factors. Over the years SMI has acquired broad expertise in many of these areas ranging from special coatings used for the assembly process or for media protection to advanced packaging methods for easier handling of ultra-small sensors. SMI offers value-added services in conjunction with our pressure sensors that enable our customers to develop truly innovative and unique products. 7

8 About SMI We are a premier semiconductor sensor company developing and manufacturing MEMS-based pressure sensors. serve challenging applications in the automotive, medical, and industrial markets. develop unique products for applications requiring ultra-low pressure ranges, extraordinary robustness in harsh environments, and extremely small size.... have an integrated business model with in-house manufacturing in Silicon Valley (Milpitas, CA, USA) which enables industry-leading quality and process control while offering high levels of service and flexibility. are a member of global ELMOS Group, offering proven solutions to a range of industries, based on mixed-signal application-specifi c standard products (ASSPs) and ICs (ASICs), and sensor systems. ISO 9001:2008 ISO/TS 16949:2009 certified certified ISO/TS 14001: 2013 certified Headquarters Sales Americas Sales Europe/Middle East/Africa Sales Asia/Pacific Silicon Microstructures, Inc McCarthy Blvd Milpitas, CA USA Silicon Microstructures, Inc McCarthy Blvd Milpitas, CA USA Silicon Microstructures, Inc. Heinrich-Mann-Strasse Hürth Germany Silicon Microstructures, Inc. Unit 16B 16F, Zhao Feng World Trade Building, No. 369 Jiang Su Road, ChangNing District, Shanghai , P.R. China Phone Fax sales@si-micro.com Phone Fax sales@si-micro.com Phone +49 (0) Fax +49 (0) sales@si-micro.com Phone +86 (0) ext.112 Fax +86 (0) sales@si-micro.com 8 Find an authorized distributor /2014