One-Shot 3D Measurement

Transcription

1 NEW One-shot 3D Measuring Macroscope VR-3000 Series One-Shot 3D Measurement Instant 3D measurement over a large area

2 Conventional Measurement Devices With conventional equipment, only a single line can be measured, making it challenging and time consuming to analyse an entire sample. Measurement time: Several hours Significant time and skill are required in order to produce repeatable measurements. 2

3 NEW One-shot 3D Measuring Macroscope The entire surface area can be measured at once, allowing for accurate measurement of the intended region. One-shot 3D measurements over a wide area can be performed instantly. Example: Depression in a battery Measurement time: 4 From seconds Simply place the sample on the stage and click Measure. The setup is user-independent, enabling anyone to obtain repeatable and reliable results. NEW One-shot 3D Measuring Macroscope VR-3000 Series 3

4 One-Shot 3D Measurement Allows non-contact 3D measurement of surfaces. Analyse difficult-to-reach areas that could not be measured with conventional systems. Example: Stand for handheld device Here s the difference! One-shot surface measurement of 3D shapes allows measurements such as height, angles and radii to be taken simultaneously. Conventional measurement devices Shapes measured with points and lines It is difficult to measure structures with large height differences or shapes with steep angles. 4

5 One-Shot 3D Measurement Allows 3D measurement of wide areas in seconds, including measurement of curvature and small changes in surface texture. Example: Irregularity and unevenness in coating Max.-Min.: 34.3 μm Min. height Conventional field Max. height Here s the difference! In addition to visual inspection, multiple measurements can be made to calculate roughness and waviness. No. Measurement name Measurement value Unit 1 Evaluated length 1200 μm 2 Wz 34.3 μm 3 Wa 10.5 μm Conventional measurement devices Limited viewing area A small field-of-view makes it difficult to measure curvature and irregularity over wide areas. 5

6 Some things can only be seen with 3D measurement. Introducing the One-shot 3D Measuring Macroscope Internal structure of a watch Inspecting components now requires 3D data KEYENCE combined the advanced optical design of our digital microscopes with the high-speed, high-accuracy measurement and 3D technology of our displacement gauges to develop a macroscope that completes instant 3D measurements. 6

7 The 3 Main Benefits of One-shot 3D Measurement Innovative optical technology and hardware P.8 Precise 3D measurement of a wide field with a single click Place and push 3D measurement and measurement assistance functions P.12 User independent 3D measurements Extensive measurement and imaging capabilities P.16 A wide range of easy 3D analysis and reporting tools NEW One-shot 3D Measuring Macroscope VR-3000 Series 7

8 Precise 3D measurement of a wide field The world s first one-shot measurement algorithm 8

9 World s First One-shot 3D Algorithm We combined our TMT one-shot algorithm for high-accuracy, true colour measurements with our high resolution 3D technology to create the world s first algorithm for instant 3D measurement. CMOS Light source TMT (Telecentric Multi-Triangulation) Algorithm We combined three, double-telecentric lenses with the multiple triangulation technology of our displacement gauges to create a unique algorithm for highspeed, high-accuracy 3D measurement. Measurement Principle (right) Bands of light from the transmitter lens are scattered across the surface of the object being measured. When the reflected light is observed from another angle (receiver lens), height differences on the object make the bands of light appear distorted. An image of these distortions is taken using a CMOS sensor, and triangulation calculations are performed to measure the height and position at each point. Receiver lens Transmitter lens Object being measured Real Colour 3D Technology Our technology produces true colour 3D images. Red, green and blue light are shone from a dedicated real colour lighting unit. This light are captured by a new, high-accuracy CMOS sensor and images obtained from each separate colour are compiled to create a full-colour image. This process captures accurate and vivid colour information that cannot be obtained with a standard colour camera and white light. XYZ Traceability The VR-3000 Series allows any user to obtain highly reliable measurements based on an internationalstandard traceability system. A calibration gauge with inspection results and a calibration certificate are included with the system. This allows calibration to be performed on-site by anyone. Z National standard National Institute of Advanced Industrial Science and Technology (AIST) JCSS accredited organisation Gauge block Height difference measurement device Calibration block X-Y National standard National Institute of Advanced Industrial Science and Technology (AIST) JCSS accredited organisation Standard Scale Coordinate measurement equipment Calibration chart 9

10 Precise one-shot 3D measurement over a large area An innovative combination of optical technology and hardware Industry s first Triple telecentric lenses To achieve high-accuracy 3D measurement, it is crucial that the transmitter and receiver lenses are made in such a way to minimise distortion, and that changes in the distance between the object and lens do not alter the size of the image. The VR-3000 contains a total of 3 wide telecentric lenses, used in combination with the industry s largest CMOS. The advanced optical design allows highaccuracy one-shot 3D measurement of areas up to 3 cm. Minimal distortion over the entire measurement area. High accuracy with a telecentric lens Feature size is unchanged as the lens moves in the Z When measuring objects with height differences, it is important that the field-of-view remains constant as the lens moves in the Z direction. By using a telecentric lens, the VR-3000 can accurately measure height differences up to ±5 mm. When viewing object from above Standard lens Telecentric lens Minimal distortion throughout the field-of-view A telecentric lens with minimal distortion throughout the entire viewing area is essential for one-shot measurement of areas as large as 3 cm. Standard camera lens Distortion in periphery of lens VR-3000 Series Minimal distortion throughout entire field Space-saving design requires minimal operating area The small footprint allows the unit to be placed anywhere that has access to a 100 VAC power outlet. Installation area A3 size VR-3000 Series Contact-type measurement device 3-dimensional measurement device 10

11 Accurate imaging High-accuracy CMOS sensor The industry s largest highaccuracy CMOS is used, allowing data to be obtained with minimal noise for high-resolution image capture. Real Colour Light Unit The VR-3000 has a light source that emits red, green and blue light for true colour reproduction. The combination of an optical system and optical fibres minimises inaccuracies when composing the colours. No vibration isolation required Designed to withstand large amounts of vibration Strength analysis was used to create a highly-rigid frame and remove the need for vibration isolation equipment like an air table. Below is a diagram of the strength analysis on the casing on the unit. Specially designed vibration-proof rubber The VR-3000 is made of a vibration-proof material with over four times the vibration prevention of conventional materials. The material absorbs a wide range of vibration from low to high frequencies, allowing for steady imaging even at high magnifications. 11

12 User-independent measurements Place and push 3D measurement Conventional Measurement Devices Various adjustments need to be made by the user, meaning that measurement results may be inconsistent. User Measurement results Person A 0.34 Person B 0.29 Person C 0.35 Person X Positioning Adjustments such as sample positioning and stage alignment need to be completed by the user. 2. Probe selection Different contact probes need to be selected according to the sample or purpose of measurement. 3. Parameter selection Various measurement conditions need to be set. Measurement length Measurement pitch Measurement speed Brightness adjustment Measurement range 12

13 One-shot 3D Measuring Macroscope Measurements are completed instantly with just one click of the Measure button. Repeatable and accurate results can be obtained by anyone. User Measurement results Person A 0.35 Person B 0.35 Person C 0.35 Person X 0.35 Just place the sample and click one button. Industry s first AALG (Advanced Auto Light & Gain) algorithm allows accurate data to be obtained u The transmission method of the projected light and the receiver sensitivity are automatically adjusted to the optimal conditions for the sample being measured, meaning that users only need to click the Measure button. This prevents adjustments made by a user from causing inconsistencies when gathering 3D data. Without AALG With AALG 13

14 User-independent measurements Various measurement assistance functions are available to eliminate inconsistencies between users Measurement assistance tools identify edges and centres of different shapes Extensive measurement assistance tools make it possible to measure shapes by automatically establishing baselines such as top, bottom or intersection points. With contact type systems, inaccuracies tend to occur with these measurements. Now, with the measurement assist tools, these measurements can be made accurately and easily. Case: Axial direction of a round bar (measuring wear of axles, etc.) Contact-type With assistance tools Case: Angle between two surfaces (folding angle of pressed sheet metal, etc.) Contact-type With assistance tools Measurement baselines are created based on a surface area to improve measurement accuracy It can be difficult to accurately set the proper baseline when using a linear incline correction, which can lead to large errors in measurement. For example, when measuring two surfaces that are 10 mm apart, a measurement error of nearly 20 μm will occur with an incline of just 0.1 degrees. The VR-3000 has several functions for determining the baseline based on a surface area, allowing for accurate setting of the baseline and reducing measurement errors. Example: Height difference of 0.35 mm set Linear: Standard setting Upward slope Downward slope u Height difference: 0.31 mm Contact-type Results are greatly affected by the slope of the sample Surface: Standard setting Fixed VR-3000 A base level can be set for wide surfaces, preventing them from being affected by the slope of the sample. u Height difference: 0.35 mm 14

15 Eliminate variations during repeated or comparative measurements Template function for completing repeat measurements on similar parts All settings and measurement specifications for an image are stored in a template that can be applied to other samples instantly. The automatic position correction function also makes it possible to complete measurements at the same location on multiple samples, even when the samples are not placed in the same orientation. 1. Complete a profile measurement for sample A and save a template. 2. Use this template to automatically measure the same location on samples B, C and D. A B u C D Automatic position correction function Automatic position correction u regardless of sample orientation Repeatable comparative measurement *Requires optional VR-H1P Analyser expansion module The 3D comparative view displays the images of two samples side-by-side and quantifies differences in structure, including height and cross-sectional area. Visualise and quantify differences in the same area 15

16 A wide range of easy 3D analysis tools Easily complete 3D analysis on any sample X, Y and Z measurement Measure height, width, angle and radius Measurements such as height, width, cross-sectional area, angle and radius can be made by simply pointing and clicking across the desired area. Profile measurement 16

17 Average height difference, volume and surface area measurement Measure the average height difference, volume, surface area and area-to-surface area ratio of any area selected on the screen. Measure average height difference Measure volume and surface area Measurement results Comparative measurement 3D visual comparison and comparative measurement 3D visual comparison Place separately captured images side-by-side and manipulate the 3D displays simultaneously. Comparative measurement The 3D comparison view displays the images of two samples side-by-side and quantifies differences found between the two shapes, including height and cross-sectional area. Low Measuring difference between Sample A and Sample B 17

18 Line and surface roughness measurements Curvature, linear roughness (ISO4287:1997), surface roughness (ISO 25178) The VR-3000 is equipped with a variety of metrology functions for quantifying roughness and surface deformations. It is possible to visualise curvature with a heightcolour map on a 3D image and quantify the curvature of a sample. Curvature and waviness parameters will be automatically calculated by the system. Measuring curvature and distortion Measure line roughness Roughness parameters including Ra and Rz can be measured for the intended area whilst viewing either a 2D or 3D image. Measure surface roughness Various parameters, such as Sa and Sz can be measured for a selected area in accordance with ISO Differences in appearance and texture can be quantified easily. 18

19 Stitching Wide-field 3D Measurement For those wanting to measure a larger area in 3D, a stitching module allows for 3D measurement of an area up to 270 mm. *Requires VR-H1J Stitching module (optional) 19

20 A wide variety of easy-to-use 3D analysis and reporting tools One-click measurement and simple report creation STEP 1 Data capture STEP 2 Measurement Gather and analyse 3D data A function guide is included for data analysis - eliminating the need for training! By simply placing the sample on the stage and pressing the Measure button, 3D data will be collected in just a matter of seconds. Once the data has been obtained, measurement and analysis can be performed in the Analyser software. Intuitive software design makes analysis incredibly easy. The user can simply move their mouse over each measurement icon in the function guide to see a brief description of the measurement type, eliminating confusion when completing measurements. 20

21 STEP 3 Report After completing a measurement, a report can be generated instantly with a single click CAD compatible 3D data collected by the VR-3000 can be saved as an.stp file and output to a variety of CAD programmes. Formatted reports can be created and saved easily, eliminating the trouble of making a report from scratch for each sample. The Template function (see page 15) can also automatically perform measurements and create reports over the same location on a sample. 21

22 An easy-to-use microscope for everyday inspection Large depth-of-field Telecentric lenses with a large depth-of-field The VR-3000 is designed with unique telecentric lenses created by advanced optical technology developed through 20 years of microscope design experience. The high-quality lenses provide large depth-of-field observation with minimal distortion. u Conventional microscope VR-3000 Connector 12x Extended depth-of-field function Telecentric lenses combined with the KEYENCE depth composition function allows for sharp focus of the entire surface without the need for any manual manipulation of the part. This function produces fully-focused images of samples, even when working at high magnification, where depth-of-field is limited. Conventional microscope u VR-3000 PCB 12x 22

23 Capture high-quality microscope images High-definition imaging 9 megapixel 3 CMOS camera Samples can be imaged under magnifications ranging from 12x to 160x. High resolution images of 9 megapixels can be captured and saved by simply pushing the Capture button. 9 megapixel 3 CMOS camera Red, green and blue data are obtained for each pixel, allowing for clear observation with excellent colour reproduction. Observation that surpasses the limits of optics 16-bit HDR function The VR-3000 is able to capture up to 16 bits of red, green and blue colour data to perform significantly more accurate imaging of a sample than what can be captured with traditional 8-bit devices. 8-bit (256-colour) Conventional method P r o b l e m s With one click the system will capture additional colour data by varying the shutter speed Reflective samples cannot be imaged clearly due to the limited levels of colour that can be captured. Details in low contrast samples cannot be seen. 16-bit (65,536-colour) HDR function 256 times more levels of colour than a conventional E f f e c t s device By increasing the levels of colour gradation, samples with bright spots or dark spots can be imaged clearly. Low contrast samples can be imaged clearly. u Without HDR With HDR Resin surface 40x Extensive 2D measurement functions Various measurements, such as distance, angle and radius, can be taken simply by clicking the desired points on an image. An edge extraction function and measurement assistance tools also eliminate human error, allowing for consistent and repeatable measurements between different users. 23

24 Example applications Case: BGA height Captures information that traditional profile measurement tools cannot Linear measurement device Contact-type measurement takes a long time even when measuring a single line. In some cases, the intended area, such as a BGA peak, is not correctly measured. u With One-Shot 3D The 3D shapes of all BGAs are captured simultaneously, meaning that in addition to seeing the peak, the entire BGA shape can be seen instantly. Case: Surface height of substrate Captures data that could not be seen with a limited viewing area Two areas of interest that are far apart cannot be measured simultaneously, and stitching them together takes a long time. Positioning the sample for accurate measurement is extremely difficult. u With One-Shot 3D A wide area can be measured in one 3D image. Surface preparation, like adjusting for tilt, can be done with a single click. 24

25 Case: Curvature of a die-casting Captures data that cannot be obtained with point measurement systems 3D measurement device Curvature can only be measured at selected points. Figures cannot be seen visually.! red point: point being measured u With One-Shot 3D Height differences are displayed in 3D with colour coding, providing a visual representation of curvature. It is also possible to instantly measure the highest and lowest points on a surface that is several centimetres wide. Case: Depressions in O-rings Captures data that cannot be seen with traditional microscopes Optical microscope The location of air leakage cannot be seen, even when viewing under high magnification. Small changes in shape cannot be quantified. u With One-Shot 3D 3D data is obtained and height differences are colour coded even for shapes with minute height differences, ensuring that no surface changes are missed during inspection. Targeted areas can also be quantified to create specifications for acceptable or defective parts. 25

26 Optional Items OP mm Spacer Inserting this 100 mm-high spacer between the measurement section and the base allows you to measure objects up to 188 mm in height. OP Tilt Stage Install this on the XY stage to observe and measure objects from any angle without having to manipulate the object by hand. The stage is designed so that the sample securely adheres to the stage when positioned at an angle. 188 mm OP Manual Slider for Image Stitching For those wanting to measure a wider area, a stitching module (optional) allows for an area of up to 270 mm to be measured. External Dimensions Head: VR Head: VR Unit: mm Controller: VR-3000K M6 Depth (77) R

27 Specifications Model Controller VR-3000K Head VR-3100 VR-3050 Wide-field mode High magnification mode Wide-field mode Magnification on a 15" monitor 12x 25x 38x 50x 40x 80x 120x 160x 12x 25x 38x 50x Field-of-view Horizontal: mm Vertical: mm Zoom 1x to 4x Measurable height *1 10 mm (±5 mm) 1 mm (±0.5 mm) 10 mm (±5 mm) Standard scale *2 0.1 μm 0.5 μm Height measurement 0.5 μm Repeatability *3 Width measurement 1 μm 0.5 μm 1 μm Working distance 75 mm Image receiving element 4 megapixel monochrome CMOS Transmitter lens Double telecentric lens x2 Receiver lens Double telecentric lens Light sources Observation light source LED ring light (red, green, blue) LED ring light (white) Measurement light source White LED Image size 1024 x 768 pix, 2048 x 1536 pix XY stroke Up to 270 mm *4 (default 70 mm *5 ) Stage Z stroke 90 mm (electric) 88 mm (manual) Rotation ±90 Tilt Over ±30 Data processing Dedicated PC specified by KEYENCE (OS: Windows 7) *6 Power source Supply voltage 100 to 240 VAC 50/60 Hz Power consumption 150 VA Environmental resistance Weight Ambient temperature for usage 15 to 30 C Relative humidity for usage 35 to 80%, no condensation Controller 3.8 kg Head 21.5 kg (weight of measurement unit: 10.8 kg) *1 Low range ±5 mm and high range ±0.5 mm around the focal point position. *2 Height measurement resolution. *3 When the KEYENCE VR calibration gauge is measured with average height difference mode. *4 When using the OP manual slider for stitching. *5 The VR-3050 requires the XYθ stage (OP-87715, sold separately). *6 Windows 7 Professional and Ultimate. System Configuration Diagram OP mm spacer (optional) OP manual slider for stitching (optional) Head Controller VR-3050 VR-3100 VR-3000K Control PC Monitor (optional) OP tilt stage (optional) * OP XYθ stage (optional) * OP calibration standard (standard item) *Comes standard with the VR VR-H1VE Viewer software VR-H1AE Analyser software VR-H1P Analyser expansion module (optional) VR-H1J Stitching module (optional) 27

28 Providing non-contact profile and roughness measurements on nearly any material NEW 3D Laser Scanning Microscope VK-X100/X magnification 0.5 nanometre Z-axis resolution High-resolution, large depth-of-field observation Profile and roughness measurements with zero sample preparation Measures thickness and uniformity of clear layers Acquires data on angles approaching 90 degrees All-in-one imaging and measurement system NEW Digital Microscope VHX-2000 Large depth-of-field: 20x larger than conventional optics Free-angle observation for 360 degree inspection Observe, record and measure - all with a single system 0.1x x magnification range with brightfield, darkfield, transmitted, DIC and polarised illumination View low-contrast and highly-reflective targets 2D & 3D Image Stitching expands viewing area up to 200 times Please visit: SAFETY INFORMATION Please read the instruction manual carefully in order to safely operate any KEYENCE product. KEYENCE CORPORATION , Higashi-Nakajima, Higashi-Yodogawa-ku, Osaka, , Japan Phone: AUSTRIA Phone: Fax: BELGIUM Phone: Fax: BRAZIL Phone: Fax: CANADA Phone: Fax: CHINA Phone: Fax: CZECH REPUBLIC Phone: Fax: FRANCE Phone: Fax: GERMANY Phone: Fax: HONG KONG Phone: Fax: HUNGARY Phone: Fax: INDIA Phone: Fax: ITALY Phone: Fax: JAPAN Phone: Fax: KOREA Phone: Fax: MALAYSIA Phone: Fax: MEXICO Phone: Fax: NETHERLANDS Phone: Fax: POLAND Phone: Fax: ROMANIA Phone: Fax: SINGAPORE Phone: Fax: SLOVAKIA Phone: Fax: The information in this publication is based on KEYENCE s internal research/evaluation at the time of release and is subject to change without notice. Copyright (c) 2013 KEYENCE CORPORATION. All rights reserved. VR3-WW-C-GB B75 Printed in Japan SLOVENIA Phone: Fax: SWITZERLAND Phone: Fax: TAIWAN Phone: Fax: THAILAND Phone: Fax: UK & IRELAND Phone: Fax: USA Phone: Fax: WW * B 7 5 *