PDK Generation of Inductors. A Technology Driven Approach Using QUEST and UTMOST IV

Transcription

1 A Technology Driven Approach Using QUEST and UTMOST IV

2 QUEST Overview UTMOST IV Overview - 2 -

3 QUEST Dedicated to characterization and simulation of multi-ports structures (Transmission Lines, Inductance Loops and MIM capacitances) Based on a 3D Field Solver developed in LETI that solves Quasistatic Maxwell equation and a 3D process simulator. Uses an advanced numerical method called Fictitious Domain Combination of surfacic and regular volumic grid Fast calculation and low memory needs High emphasis on automation and ease of use - 3 -

4 Graphical Interface GUI based on Qt from Qt Software Intuitive interfaces: Each icon represents a stage Building input files step by step Tooltips provide a quick help Delete the layer selected - 4 -

5 Numerical Key Points 3D Field solver based on Quasi-Static Maxwell Equations Use 3D regular grids and surface triangle meshes No 3D Tetrahedron meshing Low memory needs Fast - 5 -

6 Numerical Key Points Quasi-Static Maxwell Equation Surface Triangle Mesh Electric Scalar Potential, Electric Charge Electric Vector Potential 3D grid Electric Scalar Potential Magnetic Vector Potential - 6 -

7 Numerical Key Points Capacitance Problem Surface Triangle Mesh Local Surface Impedance zs Electric Scalar Potential us Electric Charge qs 3D grid Electric Scalar Potential uv - 7 -

8 Numerical Key Points Impedance Problem Quasi-Static Maxwell Equation Surface Triangle Mesh Surface conductivity ss Electric Scalar Potential us Electric Vector Potential Ts 3D grid Magnetic Vector Potential AV - 8 -

9 Validation: SQUARE INDUCTORS We acknowledge STM Tours to have provided measurements and support to accomplish this work

10 Validation: BALUN We acknowledge STM Tours to have provided measurements and support to accomplish this work

11 Validation: SPIRAL INDUCTORS L1 : W = 30, S = 20, T = 3, Ri = 75, Nt = 3,5, Sg = 50 We acknowledge STM Tours to have provided measurements and support to accomplish this work

12 Q Factor Measurement and Simulation Comparison Q Factor measurement and simulation comparison on a 65 nm technology with different geometries

13 Inductance Measurement and Simulation Comparison Inductance measurement and simulation comparison on a 65 nm technology with different geometries

14 UTMOST IV Not a release of UTMOST III New environment for characterization Database Based Open Architecture User customizable Technology Independent Compatible with semi-conductor industry needs for several years

15 SQL Transaction-Based Relational Database Database for Storing, Sharing and Retrieving Data Multi-user, multi-access Database Object Locking With User Permissions Implementation 64 bit Relational Database Borland Firebird (public software) ODBC Interface for easy connection to custom databases Flexible Import/Export of Data Import UTMOST III logfiles and CSV data files Editing of Measured Data

16 Simulation User Definable Macro Model Capability Support for External Simulators Smartspice, Eldo, Hspice, Spectre, Pspice Custom interface for connecting any external simulator Compare results of different simulators Fast Optimization Using Smartspice Model Library Import/Export DC, LCR and S Parameter Simulation Noise and Transient Simulation Verilog-A simulation

17 Optimization Flexible Unrestricted Multi-target Optimization Optimization target can be any combination of measured data, transformed data or extracted parameters Easy Selection of Data Target and Model Parameters for Optimization Global, Local and Rubberband Optimizers Limit boxes for Global optimization and error calculation Optimization of Arbitrary Set of Netlists Single Point Optimization

18 Optimization Algorithms Multiple Optimization Algorithms Levenberg/Marquart Differential Evolution Genetic Algorithm Hooke-Jeeves Parallel Tempering Simulated Annealing Custom Interface for Embedding User-defined Optimizers

19 Full Flow for Inductance Model Parameter Extraction and Modelization: PDK Generation QUEST UTMOST SPAYN Measurements Inductor PdK (scaling rules) User Inductor spice model

20 Generation of Parameterized Square Inductance Layout Using Expert LISA Script Use of the build in DoE (Design of Experiment) feature of QUEST to generate automatically layouts and perform simulations. Width=20u Space=5 Nb of spires=4 Width=30u Space=10 Nb of spires=6 Width=40u Space=15 Nb of spires=8-20 -

21 Direct Import of Previous QUEST DoE Results in UIV

22 Frequency Independent USER Inductance SPICE Model Definition

23 Selection of Specific Data Regions to use to Optimize the Selected Parameters

24 Dataset editor Configuration Screen: Dataset Editor to Manipulate Data

25 Optimization and Model Cards Generation for each Different Inductance Geometry Overlay of measured and simulated data with error calculations

26 Full support of Rubberband Optimization with Macro Model Capability

27 Model Library Screen Import/Export of model cards to model library files

28 Direct Export of Model Parameters in SPAYN View of model parameters as a function of layout parameters

29 PDK Generation PCA / PFA capabilities allow the user to define dominant parameters or identify them automatically, and then generate linear or non-linear equations of spice model parameters as a function of geometrical parameters

30 PDK Validation PDK validation: SPICE simulation comparison using model parameters coming from optimization (done in UIV) and from the modelization (SPAYN PCA). SmartSpice simulation can be run directly from SPAYN. A model card (using the parameters equations previously defined during the statistical analysis i.e., PCA) is defined

31 Netlist Definition to be Used in SmartSpice

32 Spice Simulation Using Model Parameters From the Modelization (SPAYN PCA)

33 SPICE Simulation Using Model Parameters Coming Directly from Optimization (9 points used in the DoE)

34 Direct Comparison made in SmartView (NB=2 RADIUS=40,50,60)

35 Direct Comparison made in SmartView (Validation on Points outside the Doe domain NB=2 Radius=45)

36 art 3D field solver (QUEST) and ) tools Conclusion User defined reliable Inductor PDK can be done by using the combination of state of the art 3D field solver (QUEST) and optimization (UTMOST IV) tools High speed, High accuracy 3D Field Solver User Friendly GUI Mode Batch Mode SUN 32/64-bits LINUX 32/64-bits QUEST UTMOST Reliable Inductor PDK Database based and Open Architecture User customizable Multiple Optimization Algorithms