MEMS capacitive accelerometers for Instrumentation and Industrial Market. Bahram Arbab, Sales Director Europe & Asia

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1 MEMS capacitive accelerometers for Instrumentation and Industrial Market Bahram Arbab, Sales Director Europe & Asia

2 Content Purposes : MEMS Capacitive Accelerometer for Instrumentation and Industrial Market Instrumentation and Industrial Conditions Sensors Classification & Comparison Sensors used in Instrumentation and Industrial market Our target markets What does an accelerometer measure? Typical Industrial Application for MEMS Capacitive Accelerometer Why Colibrys product is successful for Instrumentation and Industrial 2

3 Instruments & Industrial conditions Instruments = Sensors and Actors Instruments are distinguished by output: Binary (on/off) Analog (continuous) Industrial conditions: temperature range commercial: (0 C to +70 C) industry (-40 C..+85 C) extended industrial( 55 C C) mechanical resilience (shocks and vibrations) EN protection: Electro-Magnetic (EM)-disturbances EN 55022, EN55024) protection: NEMP (Nuclear EM Pulse) - water distribution, civil protection mounting and replacement robust connectors power: DC mostly 24V= because of battery back-up, sometimes 48V=) 3

4 Sensor Classifications Vibration and Acceleration measurement: voltage created from capacitive charge or piezoelectric materials Position and Speed measurement: rate or voltage of output signal changes with input Stress and Strain measurement: applied force results in changes in resistance Temperature measurement: resistance or voltage of output signal changes with temp Pressure and Flow measurement: often derived from sensors listed above 4

5 Comparison Accelerometer Sensor Type Sensor Type Electro-mechanical sensors Piezo-resistive sensors (vibration and shock sensor) Measures DC acceleration High G Advantages High Performance Fragile Disadvantages Expensive Long term stability Poor temperature performance Piezo-electric sensor (vibration sensor) MEMS capacitive accelerometers Large bandwidth High g range Measures DC acceleration Reliable & Accuracy Excellent price performance No DC response Limited stability and temp. performance Low bandwidth (up to 5000 HZ) Relatively Fragile (up to g) 5

6 Example of products Electro-mechanical Piezo Electrical Piezo Resistive MEMS Capacitive 6

7 What is MEMS? Micro-controller Temperature sensor 3mm Mechanical Die packaging Low power ASIC 2mm Die attach MEMS or Micro Electro Mechanical Systems is a technique of combining Electrical and Mechanical components together to produce a system of miniature dimensions By miniature, we mean dimensions less than the thickness of human hair!!!! 7

8 Out of plane MEMS Silicon sensor MEMS technology Bulk silicon micromachining Wet and DRIE etching Assembly of 3 wafers High temp. Fusion Bonding (SFB) Sealing at low and controlled pressure Full functional test at wafer level, including capacitive response 8

9 Accelerometer s market The market segments for the accelerometers differentiate themselves by the performance vs volume. Low volume can generally afford high performances and higher associated cost High volume are in principle fully driven by cost High Performance / Reliability Low 1 K 10 K 100 K 1 M 10 M 100 M Annual volume MEMS capacitive accelerometers combine performance and cost High performance products are now available for medium to high volume (few hundreds K) industrial applications at reduced costs 9

10 MEMS Sensors in Industrial & Instrumentation Markets Accelerometers Gyroscopes Pressure sensors Gas sensors Thermal sensors Micro-fuel cells Mass flow controllers Chemical sensors Acoustic sensors Optical sensors 10

11 MEMS for Industrial applications Industrial, Instrumentation and Energy markets are taking advantage of the high end MEMS capacitive technology Attractiveness of the products is ensured by a better control of costs without concessions on performances The Capacitive technology allows measurement of different physical parameters: 1. Tilt products 2. Vibration and shock products 3. Seismic products 4. Inertial products 11

12 What does an Accelerometer Measure? 1. Tilt: Measurement of static gravitational force e.g. Tilt and inclination 12

13 Tilt products for industrial applications From Colibrys product to high accurate instrumentation for tilt measurement Colibrys Product Digital Compass Instrumentation MS9001.D 13

14 Tilt products for industrial applications Many industrial applications require precision tilt measurements Platform stabilization (antenna, camera, solar cells, instrumentation table ) Railway technology (tilting trains) Structure monitoring (dams, bridges, nuclear plants ) Industrial reference systems Geodesic measurements Pointing and distance measurement Latest Colibrys tilt sensors, the MS9001, has been specifically designed for platform stabilization MS9001, MS9002 and MS8002 products 1g and 2g with good long term stability, low power and low temperature coefficients Colibrys can adapt and offer industrial grade products at lower costs for volume requirements Custom MS9001 product 14

15 What does an Accelerometer Measure? 2. Vibration: Measurement of dynamic acceleration e.g. Vibration and shock measurement 15

16 Vibration and shock for industrial applications From Colibrys product to bogie monitoring on high speed train Colibrys Product Repacked and qualified for train High Speed Train Siemens Velaro VS9000.D 16

17 Vibration and shock products for industrial applications Vibration measurement is a pure industrial application Industrial machinery vibration control Preventive maintenance Railway security, safety and comfort Structure monitoring (bridges, building, wind turbine towers ) Testing (automotive, truck, planes ) The VS9000 family of products is advantageously replacing traditional piezo-resistive solutions VS9000 product family available from 2g to 200g with a bandwidth > -5% Performances inherited from the high end inertial products (DC response, long term stability, low temperature coefficients, high reliability under harsh environments) Colibrys can adapt and offer industrial grade products at lower costs for volume requirements Custom VS9000 products 17

18 What does an Accelerometer Measure? 3. Seismic: Measurement of dynamic acceleration e.g. Earthquake measurement 18

19 Seismic products for industrial applications From Colibrys product to high accurate instrument for seismic measurement Colibrys Product Seismic Measurement Instrument Structural Health Monitoring SF1500 SF

20 Seismic products for industrial applications MEMS capacitive products from Colibrys offer a unique solution for ultra low noise seismic sensing Strong motion earthquake monitoring Free field seismic monitoring Structure health monitoring (HUMS) Homeland security (perimeter, border security) Railway (track monitoring) The seismic products are advantageously replacing traditional geophones SF2006 and SF1600 are both class B seismic sensors Technology can reach class A performance (< 0.1µg/ Hz) ongoing developments Three axis solutions will soon be available (SF3600 and SF3006 products) 20

21 What does an Accelerometer Measure? 4. Inertia: Inertial measurement of velocity and position Acceleration single integrated for velocity Acceleration double integrated for position 21

22 Inertial products for industrial applications From Colibrys product to Industrial Application for Navigation Systems Colibrys Product Inertial Measurement Unit - IMU Navigation System for industrial MS9000.D 22

23 Inertial products for industrial applications Inertial measurements are used in a wide range of applications Railway technology GPS backup Dead reckoning Land and sea civilian guidance and navigation (i.e. blind people) Robotics Directional drilling Colibrys offers advanced solutions for high end and small / medium volume requirements MS8000 and MS9000 families of products 1g to 200g with good long term stability, low temperature coefficients, low VRE Colibrys can adapt and offer industrial grade products at lower costs for volume requirements Custom MS9000 like family of products 1g to 30g 23

24 Typical Accelerometer Application INERTIA SEISMIC / VIBRATION TILT / INCLINATION 24

25 Advanced manufacturing techniques COLIBRYS is a world-leading supplier of standard and semi-custom MEMS based motion sensors to the harsh-environments (Military, Aerospace and Energy) and safety critical (Industrial and Instrumentation) applications. (MEMS: Micro Electro Mechanical Systems) Business focus: High performance motion sensors for Energy, Mil/Aerospace and Industrial markets Contract Manufacturing services Colibrys has the full breadth of MEMS capability, undertaking: MEMS sensor and systems design Sensor manufacturing Packaging and Test 25

26 Colibrys value proposition Products based on unique high performance sensor technology Performance: stability 100 ppm (near term target 10 ppm) Noise S/N up to >140 db Robustness up to g Near term products up to 200 C Cost / performance ratio Robust Technology with proven manufacturing record Partnership with key customers Alignment of product roadmaps Product customizing and qualification Custom sub-systems development Security of supply In-house wafer fab and assembly line Qualified off-shore assembly line for low cost / high volume products Qualified and proven processes (ISO9001) No ITAR restrictions 26

27 Thank you for your attention 27