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1 InnovationPoint UV-Light Demands on Optical Systems Thomas Thoeniss, Manager R&D Matthias Ulrich, R&D Optical Engineering LINOS Photonics GmbH & Co. KG Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 1
2 Introduction Why UV-light? Target: Smaller structure generation or detection Theoretical limit: Law of diffraction Resolution is a function of aperture and used wavelength Practical limit: Aperture cannot be more increased in many application Solution: Using shorter wavelengths down to the UV region Example Illustration of a test structure at (a) 1064 nm (b) 532 nm (c) 266 nm in an aberration-free optical system Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 2
3 Introduction Typical applications for UV optical systems Solar blind inspection (e.g. electric discharge inspection) Crime scene inspection Chemical analysis (e.g. flame spectroscopy) Car glass inspection (e.g. scratch and crack detection) Laser Material processing Flat panel display inspection / repair Wafer structuring / inspection Main driver for development of UV optical systems! Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 3
4 UV Systems - Overview Typical LINOS UV catalog lenses Imaging systems Laser systems UV-VIS Macro inspection lenses Micro inspection lenses Catoptric lenses UV-Achromatic Doublets UV-Beam expander (fixed, modular, zoom) UV-Scan lenses Examples of LINOS UV systems will be shown and related specific technological problems will be explained. Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 4
5 Example I: Assembly technology Example: UV imaging system - macro inspection lens Inspec.x 2.8/50 UV-VIS APO Resolution: 120 lp/mm Waveband: nm Image size: 1 inch Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 5
6 Example I: Assembly technology Technological problems No organic absorbing cements allowed Instead of cemented lenses, tighny and sensitive air gaps are required. This requires a precise assembly technology. Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 6
7 Example I: Assembly technology High precision adjustment turning Philosophy Classical drop-in assembly Sub-mount assembly Technique is derived from classical microscopy assembly Lens tolerances are taken into sub-mount accuracy Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 7
8 Example I: Assembly technology High precision adjustment turning Principle D L Lens Sub-mount in sub-mount shoulder diameter Diamond with turned with Erected tilt respect of optical to to the axis the lens optical vertex axis Complete lens assembly in precise outer cylinder Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 8
9 Example II: Metrology and adjustment Example: UV imaging system - micro inspection lens High NA long distance micro lens Wavelength: 266nm Resolution: Strehl ratio > 0.9 at 266nm NA: 0.7 Working distance 15mm Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 9
10 Example II: Metrology and adjustment High precision adjustment Typical tolerances for lens displacement: - Element decenter: 2µm - Surface tilt: 10 arcsec - Air gaps: 5µm Adjustment turning leads to a very good start performance Additional adjustment of single components is required Adjustment after Zernike polynomials are used to reach diffraction limit Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 10
11 Example II: Metrology and adjustment Shack Hartmann sensor Principle Wave front measuring system Calibration plate Entrance / Exit pupil Collimating lens Beam expander Focusing lens Beam splitter Collimator Lens under test Concave reference mirror Conjugated pupil plane Shack-Hartmann sensor Fiber / Pinhole Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 11
12 Example II: Metrology and adjustment Typical performance graphs Wavefront Zernike Point spread function Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 12
13 Example III: Straylight analysis and prevention Example: UV imaging system - Reflective optical system mag.x RO 20x / NA=0.35 Optical performance: diffraction limited Waveband: 190nm - 900nm Working distance: 15mm Field of view: 1mm Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 13
14 Example III: Straylight analysis and prevention Straylight in optical systems - Effects Heating of lens elements and lens housing Decreasing of optical performance via scattered light on detector Lowering of optical transmission Beside standard sequential ray trace and ghost analysis, non-sequential simulation tools (e.g. TracePro) are used for straylight analysis Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 14
15 Example III: Straylight analysis and prevention Scattered light caused by optical surfaces Scattered light in UV-optical systems could be caused by the dependency between roughness of optical surfaces and wavelength Scattered light (TIS) [ppm] 14,000 12,000 10,000 8,000 6,000 4,000 lambda = 157 nm lambda = 193 nm lambda = 248 nm lambda = 355 nm lambda = 633 nm lambda = 1064 nm 2, Micro-roughness s rms [nm] Super-polishing (rms < 0.5 nm) is required. Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 15
16 Summary UV Light - Demands on optical systems Assembly Small air gaps with tight tolerances High-precision assembly techniques required Adjustment and Measurement UV light sources and detectors Online measurement is necessary for online adjustment Straylight Micro roughness of optical surfaces have to be reduced Lens element tolerances, Coatings, UV compatible materials, clean-room production,... Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 16
17 Thank you for your attention Author: Thomas Thoeniss (Manager R&D), Matthias Ulrich (R&D Optical Engineering) LASER 2009, Munich Slide 17
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