NT PRESSURE TRANSDUCERS FOR DEIONIZED WATER SYSTEMS, MODELS 4130, 4230

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1 CONTMINTION CONTROL SOLUTIONS NT PRESSURE TRNSDUCERS FOR DEIONIZED WTER SYSTEMS, MODELS 4130, 4230 Single-port and flow-through models

2 reliable pressure measurement Reliable Pressure Measurement Concerns such as uptime, contamination and process control affect your daily deionized (DI) system performance. To meet these challenges, Entegris introduces a pressure transducer designed for DI water. Constructed without fill fluids or moving diaphragms, the transducers deliver reliability, system consistency and accuracy to one percent (1%) of full scale for greater control of system variables. Nonmetallic sensing technology for reliable measurement No fill fluids to contaminate your process Electronic output signals for diagnostics and alarms One percent (1%) of full scale accuracy for stable, repeatable pressure measurement Compact design for easy installation Constructed for Compatibility Designed to protect your DI water integrity, the pressure transducers contain no fill fluids and feature PTFE and other high purity polymers for all wetted parts. The pressure transducer includes a removable grommet, allowing users to easily adjust the zero and span potentiometers, while the nonmetallic parts, corrosion resistant exterior and encapsulated electronics deliver a clean, precise and low maintenance solution. Providing compatibility and easy integration with electronic displays and monitoring systems, the transducers offer quick installations, minimal calibrations and better performance for your deionized water applications. dvanced Technology Featuring an electronic measurement technology, the pressure transducer offers one percent (1%) accuracy, a compact single unit, compatible materials and stable measurements for increased accuracy, less maintenance and more uptime. For system control, encapsulated solid-state electronics provide durability while allowing you to obtain valuable diagnostic information for monitoring system pressure and critical alarms. Improved System Control Whether your concerns are measurement reliability, system contamination, better per formance, frequent calibrations or the cost of replacing parts, the DI water pressure transducer provides the solution. You will discover how to decrease your calibration and maintenance time and eliminate the risk of contamination from corrosion and fill fluids. The durable construction of the DI pressure transducers allow you more time to keep the DI system up and running. 2 ENTEGRIS, INC.

3 NT Pressure Transducer, Single-port, Model 4130 Dimensions FLRETEK CONNECTION SUPER 300 TYPE PILLR CONNECTION Side View 25.4 mm (1.00 ) 3 conductor cable pigtail connection Side View 25.4 mm (1.00 ) 3 conductor cable pigtail connection S Z 47.0 mm (Ø1.85 ) Top View 47.0 mm (Ø1.85 ) Top View Inlet/Outlet Dimension Port Connection 1 4 Flaretek tube fitting 81.8 mm (3.22 ) 25.2 mm (0.99 ) 3 8 Flaretek tube fitting 81.8 mm (3.22 ) 26.9 mm (1.06 ) 1 2 Flaretek tube fitting 81.8 mm (3.22 ) 29.0 mm (1.14 ) 1 4 Female NPT 87.9 mm (3.46 ) 1 2 Female NPT 94.5 mm (3.72 ) 1 4 Male NPT 81.8 mm (3.22 ) 15.0 mm (0.59 ) 1 4 S300 Pillar tube fitting 81.8 mm (3.22 ) 11.0 mm (0.43 ) 3 8 S300 Pillar tube fitting 81.8 mm (3.22 ) 15.0 mm (0.59 ) 1 2 S300 Pillar tube fitting 81.8 mm (3.22 ) 17.5 mm (0.69 ) ENTEGRIS, INC. 3

4 Specifications Materials: Wetted parts ody: PTFE Sensor interface: PF Primary seal: EPDM Nonwetted parts Polypropylene, polyethylene, PVDF, Viton and FEP-jacketed cable (in addition to materials listed above) Pressure range: kpa (0 30 psig); kpa (0 60 psig) kpa (0 100 psig); kpa (0 150 psig) Over-pressure limit: 150% of full scale range or maximum pressure rating of fitting Process temperature: 10 C 65 C (50 F 149 F); 65 C 95 C (149 F kpa (75 psig) maximum Process connection options: Flaretek tube fitting 1 4, 3 8, 1 2 NPT 1 4, 1 2 S300 Pillar tube fitting 1 4, 3 8, 1 2 Electrical input: 24 VDC (12 30 VDC input voltage) Electrical output: 4 20 m, 0 5 VDC, 0 10 VDC Electrical cable: 12 FEP-jacketed cable Reference accuracy: ±1% of full scale (includes combined effects of linearity, hysteresis and repeatability) Electrical enclosure: IP54 pprovals: Conforms to NSI /IS Standard , UL Standard Class I, Division 2, Groups,, C, D, T6 Note: Specifications are subject to change without notice. Please consult the factory for the most current information. 4 ENTEGRIS, INC.

5 NT Pressure Transducer, Flow-through, Model 4230 Dimensions FLRETEK CONNECTION Top View 44.5 mm (1.75 ) 44.5 mm (1.75 ) 59.9 mm (2.36 ) Side View 2.54 mm (1.00 ) S Z 3 conductor cable pigtail connection 5.1 mm (0.20 ) 47.0 mm (Ø1.85 ) C SUPER 300 TYPE PILLR CONNECTION Top View 44.5 mm (1.75 ) 44.5 mm (1.75 ) 59.9 mm (2.36 ) Side View 2.54 mm (1.00 ) 3 conductor cable pigtail connection 5.1 mm (0.20 ) 47.0 mm (Ø1.85 ) C Inlet/Outlet Dimension Port Connection C 1 4 Flaretek tube fitting 95.3 mm (3.75 ) 94.5 mm (3.72 ) 18.5 mm (0.73 ) 3 8 Flaretek tube fitting 95.3 mm (3.75 ) 98.3 mm (3.87 ) 17.0 mm (0.67 ) 1 2 Flaretek tube fitting 99.8 mm (3.93 ) mm (4.03 ) 21.6 mm (0.85 ) 3 4 Flaretek tube fitting mm (4.33 ) mm (4.27 ) 25.4 mm (1.00 ) 1 Flaretek tube fitting mm (4.65 ) mm (4.75 ) 30.5 mm (1.20 ) 1 4 S300 Pillar tube fitting 95.3 mm (3.75 ) 66.5 mm (2.62 ) 18.5 mm (0.73 ) 3 8 S300 Pillar tube fitting 95.3 mm (3.75 ) 74.5 mm (2.93 ) 17.0 mm (0.67 ) 1 2 S300 Pillar tube fitting 99.8 mm (3.93 ) 79.5 mm (3.13 ) 21.6 mm (0.85 ) 3 4 S300 Pillar tube fitting mm (4.33 ) 88.4 mm (3.48 ) 25.4 mm (1.00 ) 1 S300 Pillar tube fitting mm (4.65 ) 98.6 mm (3.88 ) 30.5 mm (1.20 ) ENTEGRIS, INC. 5

6 Specifications Materials: Wetted parts ody: PTFE Sensor interface: PF Primary seal: EPDM Nonwetted parts Polypropylene, polyethylene, PVDF, Viton and FEP-jacketed cable (in addition to materials listed above) Pressure range: kpa (0 30 psig); kpa (0 60 psig); kpa (0 100 psig) Over-pressure limit: 150% of full scale range or maximum pressure rating of fitting Process temperature: 10 C 65 C (50 F 149 F); 65 C 95 C (149 F kpa (75 psig) maximum Process connection options: Flaretek tube fitting 1 4, 3 8, 1 2, 3 4, 1 S300 Pillar tube fitting 1 4, 3 8, 1 2, 3 4, 1 Electrical input: 24 VDC (12 30 VDC input voltage) Electrical output: 4 20 m, 0 5 VDC, 0 10 VDC Electrical cable: 12 FEP-jacketed cable Reference accuracy: ±1% of full scale (includes combined effects of linearity, hysteresis and repeatability) Electrical enclosure: IP54 pprovals: Conforms to NSI/IS Standard , UL Standard Class I, Division 2, Groups,, C, D, T6 Note: Specifications are subject to change without notice. Please consult the factory for the most current information. 6 ENTEGRIS, INC.

7 Ordering Information NT Pressure Transducers Part Number Pressure Range 030G = 207 kpa (30 psig) 060G = 414 kpa (60 psig) 100G = 690 kpa (100 psig) 150G = 1034 kpa (150 psig) (F02, F03, F04, inlet/outlet options only) Inlet/Outlet Connection F02 = 1 4 Flaretek tube fitting F03 = 3 8 Flaretek tube fitting F04 = 1 2 Flaretek tube fitting NO2 = 1 4 FNPT N04 = 1 2 FNPT M02 = 1 4 MNPT W02 = 1 4 Super 300 Type Pillar tube fitting W03 = 3 8 Super 300 Type Pillar tube fitting W04 = 1 2 Super 300 Type Pillar tube fitting Electrical Outputs = 4 20 m (12 30 VDC input) = 0 10 VDC (12 30 VDC input) C = 0 5 VDC (12 30 VDC input) Note: Product specified with a flared connection is packaged with one PVDF nut. For alternative nut material or custom configurations and specifications, please contact the factory. NT Pressure Transducers Part Number Pressure Range 030G = 207 kpa (30 psig) 060G = 414 kpa (60 psig) 100G = 690 kpa (100 psig) Electrical Outputs = 4 20 m (12 30 VDC input) Inlet/Outlet Connection = 0 10 VDC (12 30 VDC input) F02 = 1 4 Flaretek tube fitting C = 0 5 VDC (12 30 VDC input) F03 = 3 8 Flaretek tube fitting F04 = 1 2 Flaretek tube fitting F06 = 3 4 Flaretek tube fitting F08 = 1 Flaretek tube fitting W02 = 1 4 Super 300 Type Pillar tube fitting W03 = 3 8 Super 300 Type Pillar tube fitting W04 = 1 2 Super 300 Type Pillar tube fitting W06 = 3 4 Super 300 Type Pillar tube fitting W08 = 1 Super 300 Type Pillar tube fitting Note: Product specified with a flared connection is packaged with two PVDF nuts. For alternative nut material or custom configurations and specifications, please contact the factory. ENTEGRIS, INC. 7

8 Wet Chemical Process Control Entegris patented products measure and control the pressure, flow and level of high purity corrosive acids, bases and solvents used in semiconductor processing. The proven reliability, performance and ease of integration provided by Entegris products offer you new levels of wet chemical process control. For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit and select the Customer Service link for the center nearest you. Terms and Conditions of Sale ll purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, Creating a Material dvantage, NT and Flaretek are registered trademarks of Entegris, Inc. Pillar is a trademark of Nippon Pillar Packing Company, Ltd. Viton is a registered trademark of DuPont Dow Elastomers. NSI is a registered trademark of merican National Standards Institute. IS is a registered trademark of International Society of utomation. U.S. Patent 5,825,244, 5,869,766, 5,693,887, other patents pending ENTEGRIS, INC. Corporate Headquarters 129 Concord Road illerica, M US Customer Service Tel Customer Service Fax In North merica Entegris, Inc. ll rights reserved Printed in US ENT-0614

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