General Catalog Linear Encoders Length Gauges Angle Encoders Rotary Encoders Contouring Controls 3-D Touch Probes Digital Readouts

Transcription

1 General Catalog Linear Encoders Length Gauges Angle Encoders Rotary Encoders Contouring Controls 3-D Touch Probes Digital Readouts October 2009

2 DR. JOHANNES HEIDENHAIN GmbH develops and manufactures linear and angular encoders, rotary encoders, digital readouts, and numerical controls. HEIDENHAIN supplies its products to manufacturers of machine tools, and of automated machines and systems, in particular for semiconductor and electronics manufacturing. This General Catalog offers you an overview of the HEIDENHAIN product program. You will find more products and further information in the documentation for specific products (see page 60) or on the Internet at Our sales personnel will be glad to help you personally. See page 62 for addresses and telephone numbers. HEIDENHAIN is represented in over 50 countries mainly through its own subsidiaries. Sales engineers and service technicians support the user on-site with technical information and servicing.

3 Contents Fundamentals and Processes 4 Precision Graduations the Foundation for High Accuracy 5 Length Measurement 6 Sealed Linear Encoders Exposed Linear Encoders Length Gauges Angle Measurement 20 Angle Encoders Modular Encoders Rotary Encoders Machine Tool Control 38 Contouring Controls for Milling Machines and Machining Centers Programming Station Tool and Workpiece Setup and Measurement 47 Workpiece Touch Probes Tool Touch Probes Measured Value Acquisition and Display 50 Position Display Units Interface Electronics More Information 56 Support and Service 58

4 Fundamentals and Processes The high quality of HEIDENHAIN products presupposes special production facilities and measuring equipment. Masters and submasters for scale manufacturing are produced in a clean room with special measures for temperature stabilization and vibration insulation. The copying machines and the machines required for the manufacture and measurement of linear and circular graduations are largely developed and built by HEIDENHAIN. Measuring machine for linear scales Linear scale inspection station Our competence in the area of linear and angular metrology is reflected by a large number of customized solutions for users. Among other implementations, they include the measuring and test equipment developed and built for standard laboratories and the angular encoders for telescopes and satellite receiving antennas. Of course the products in the standard HEIDENHAIN product program profit from the knowledge gained. Angle comparator, measuring step approx " 4 Very Large Telescope (VLT), Paranal, Chile (photograph by ESO)

5 Precision Graduations the Foundation for High Accuracy The heart of a HEIDENHAIN encoder is its measuring standard, usually in the form of a grating with typical line widths of 0.25 µm to 10 µm. These precision graduations are manufactured in a process invented by HEIDENHAIN (e.g. DIADUR or METALLUR) and are a decisive factor in the function and accuracy of encoders. The graduations consist of lines and gaps at defined intervals with very little deviation, forming structures with very high edge definition. These graduations are resistant to mechanical and chemical influences as well as to vibration and shock. All graduations have a defined thermal behavior. Phase grating with approx µm grating height DIADUR DIADUR precision graduations are composed of an extremely thin layer of chromium on a substrate usually of glass or glass ceramic. The accuracy of the graduation structure lies within the micron and submicron range. AURODUR AURODUR graduations consists of highly reflective gold lines and matte etched gaps. AURODUR graduations are usually on steel carriers. METALLUR With its special optical composition of reflective gold layers, METALLUR graduations show a virtually planar structure. They are therefore particularly tolerant to contamination. Phase gratings Special manufacturing processes make it possible to produce three-dimensional graduation structures, possessing certain optical characteristics. The structure widths are in the range of a few microns down to quarters of a micron. SUPRADUR Graduations manufactured with the SUPRADUR process function optically like three-dimensional phase gratings, but they have a planar structure and are therefore particularly insensitive to contamination. MAGNODUR Thin magnetically active layers in the micron range are structured for very fine, magnetized graduations. DIADUR and AURODUR graduations on various carrier materials 5

6 Length Measurement Sealed linear encoders Sealed linear encoders from HEIDENHAIN are protected from dust, chips and splash fluids and are ideal for operation on machine tools. Accuracy grades as fine as ± 2 µm Measuring steps to µm Measuring lengths up to 30 m Fast and simple installation Large mounting tolerances High acceleration loading Protection against contamination Exposed linear encoders Exposed linear encoders from HEIDENHAIN operate with no mechanical contact between the scanning head and the scale or scale tape. Typical areas of application for these encoders include measuring machines, comparators and other precision devices in linear metrology, as well as production and measuring equipment, for example in the semiconductor industry. Accuracy grades of ± 0.5 µm and better For measuring steps to µm (1 nm) Measuring lengths up to 30 m No friction between scanning head and scale Small dimensions and low weight High traversing speed Sealed linear encoders are available with Full-size scale housing For high vibration loading Up to 30 m measuring length Slimline scale housing For limited installation space Up to 1240 mm measuring length, up to 2040 mm with mounting spar or tensioning elements The aluminum housing of a HEIDENHAIN sealed linear encoder protects the scale, scanning carriage, and its guideway from chips, dust, and fluids. Downward-oriented elastic lips seal the housing. The scanning carriage travels along the scale on a low-friction guide. It is connected to the external mounting block by a coupling that compensates unavoidable misalignment between the scale and the machine guideways. Scanning carriage DIADUR scale Light source Sealing lips Mounting block Electronic scanning 6

7 Length gauges Length gauges from HEIDENHAIN feature integral guideways for the plunger. They are used to monitor measuring equipment, in industrial metrology, and also as position encoders. Accuracy grades as fine as ± 0.1 µm For measuring steps to µm (5 nm) Measuring lengths up to 100 mm High measuring accuracy Available with automated plunger drive Simple mounting With incremental linear encoders, the current position is determined by starting at a datum and counting measuring steps, or by subdividing and counting signal periods. encoders from HEIDENHAIN feature reference marks, which must be scanned after switch-on to reestablish the reference point. This process is especially simple and fast with distance-coded reference marks. Absolute linear encoders from HEIDENHAIN require no previous traverse to provide the current position value. The encoder transmits the absolute value through the EnDat interface or another serial interface. The recommended measuring steps listed in the table refer primarily to position measurements. Smaller measuring steps are useful in particular for applications in rotational speed control, e.g. on direct drives. The sinusoidal output signals make it possible to attain higher interpolation factors. Under the designation functional safety, HEIDENHAIN offers encoders with purely serial data transmission as single-encoder systems for safety-related machines and systems. The two measured values are already formed independently of each other in the encoder, and are transmitted to the safe control via the EnDat interface. Sealed Linear Encoders Series Page With full-size scale housing Absolute position measurement position measurement Very high repeatability Typically for manual machines Large measuring lengths LC 100 LS 100 LF 100 LS 600 LB With slimline scale housing Absolute position measurement position measurement Very high repeatability Typically for manual machines LC 400 LS 400 LF 400 LS Exposed Linear Encoders Accuracy grades better than ± 3 µm Two-coordinate encoders Accuracy grade as fine as ± 5 µm Length Gauges Accuracy ± 0.1 µm Accuracy ± 0.2 µm Accuracy to ± 0.5 µm Accuracy ± 1 µm LIP, LIF PP LIDA HEIDENHAIN-CERTO HEIDENHAIN-METRO HEIDENHAIN-METRO HEIDENHAIN-SPECTO

8 LC, LF, LS, LB Sealed Linear Encoders With Full-Size Scale Housing Linear encoders with full-size scale housing are characterized particularly by high tolerance to vibration. Absolute linear encoders of the LC 100 series provide the absolute position value without any previous traverse required. signals can also be provided. They can be mounted to the same mating dimensions as the incremental linear encoders of the LS 100 series and feature the same mechanical design. Because of their high accuracy and defined thermal behavior, LC 100 and LS 100 series linear encoders are especially well suited for use on numerically controlled machine tools. The incremental encoders of the LF type feature measuring standards with relatively fine grating periods. This makes them particularly attractive for applications requiring very high repeatability. The LS 600 series incremental linear encoders are used for simple positioning tasks, for example on manual machine tools. The LB type of incremental linear encoders were conceived for very long measuring lengths up to 30 meters. Their measuring standard a steel tape with AURODUR graduation is delivered as a single piece, and after the housing sections have been mounted, is pulled into the housing, drawn to a defined tension and fixed at both ends to the machine casting. LC 100 series Absolute position measurement Defined thermal behavior High vibration rating Two mounting attitudes Single-field scanning LS 187 position measurement Defined thermal behavior High vibration rating Two mounting attitudes Single-field scanning LF 183 Very high repeatability Thermal behavior similar to steel or cast iron High vibration rating Two mounting attitudes Single-field scanning LS 600 series Typically for manual machines Simple installation LB 382 For large measuring lengths up to 30 m Defined thermal behavior High vibration rating Two mounting attitudes Single-field scanning 8

9 Absolute LC 183 LC 193 F/M LF 183 LS 187 LS 177 LS 688 C LS 628 C LB 382 Measuring standard DIADUR glass scale DIADUR phase grating on steel DIADUR glass scale DIADUR glass scale AURODUR steel scale tape signals Optional for LC 183» 1 V PP LS 187:» 1 V PP LS 177: «TTL LS 688 C:» 1 V PP LS 628 C: «TTL» 1 V PP Signal period 20 µm 4 µm 20 µm LS 177: 4 µm/2 µm 20 µm 40 µm Absolute position values EnDat 2.2 Fanuc/Mitsubishi Accuracy grade ± 5 µm, ± 3 µm ± 3 µm, ± 2 µm ± 5 µm, ± 3 µm ± 10 µm ± 5 µm Recommended measuring step 0.05 to µm 1) 1 to 0.1 µm 1 to 0.1 µm LS 688 C: up to 1 µm LS 628 C: 5 µm 10 to 0.1 µm Measuring lengths ML 140 to mm (± 3 µm to mm) 140 to 3040 mm 170 to 3040 mm 440 to mm Reference mark One or distance-coded; LS 6xx C: distance-coded 1) Absolute position values 9

10 LC, LF, LS Sealed Linear Encoders With Slimline Scale Housing Sealed linear encoders with slimline scale housing are primarily used where installation space is limited. Absolute linear encoders of the LC 400 series provide the absolute position value without any previous traverse required. signals can also be provided. Like the LS 400 series incremental linear encoders, their high accuracy and defined thermal behavior make them especially well suited for use on numerically controlled machine tools. The incremental encoders of the LF type feature measuring standards with relatively fine grating periods. This makes them particularly attractive for applications requiring very high repeatability. The LS 300 series incremental linear encoders are used for simple positioning tasks, for example on manual machine tools. LC 400 series Absolute position measurement Defined thermal behavior Single-field scanning LS 487 position measurement Defined thermal behavior Single-field scanning LF 481 Very high repeatability Thermal behavior similar to steel or cast iron Single-field scanning LS 300 series Typically for manual machines Simple installation with mounting spar The use of a mounting spar can be of great benefit when mounting slimline linear encoders. They can be fastened as part of the machine assembly process. The encoder is then simply clamped on during final mounting. Easy exchange also facilitates servicing. Moreover, installation with a mounting spar significantly improves the encoder s acceleration behavior. Stop Mounting spar Scale housing Clamping spring Scanning unit 10

11 ML ML ML Absolute LC 483 LC 493 F/M LF 481 LS 487 LS 477 LS 388 C LS 328 C Measuring standard DIADUR glass scale DIADUR phase grating on steel DIADUR glass scale DIADUR glass scale signals Optional for LC 483» 1 V PP LS 487:» 1 V PP LS 477: «TTL LS 388 C:» 1 V PP LS 328 C: «TTL Signal period 20 µm 4 µm 20 µm LS 477: 4 µm/2 µm 20 µm Absolute position values EnDat 2.2 Fanuc/Mitsubishi Accuracy grade ± 5 µm, ± 3 µm ± 5 µm, ± 3 µm ± 10 µm Recommended measuring step 0.05 to µm 1) 1 to 0.1 µm 1 to 0.1 µm LS 388 C: up to 1 µm LS 328 C: 5 µm Meas. lengths ML 70 to mm 2) 50 to mm 70 to mm 2) 70 to mm Reference mark One or distance-coded Distance-coded 1) Absolute position values 2) over ML mm only with mounting spar or tensioning element 11

12 LIP, LIF Exposed Linear Encoders Accuracy Grades Better than ±3 µm The exposed linear encoders of the LIP and LIF types are characterized by small measuring steps together with high accuracy. The measuring standard is a phase grating applied to a substrate of glass or glass ceramic. LIP and LIF encoders are typically used for: Measuring machines and comparators Measuring microscopes Ultra-precision machines such as diamond lathes for optical components, facing lathes for magnetic storage disks, and grinding machines for ferrite components Measuring and production equipment in the semiconductor industry Measuring and production equipment in the electronics industry LIP 300 series Very high resolution with measuring steps to 1 nanometer Very high repeatability through an extremely fine signal period Defined thermal behavior thanks to a measuring standard on Zerodur glass ceramic LIP 400 series Small dimensions Measuring steps to µm Scale available with various thermal expansion coefficients ML = 70 mm LIP 500 series Measuring lengths up to 1440 mm Measuring steps to 0.05 µm LIF 400 series Fast, simple scale fastening with PRECIMET adhesive film Relatively insensitive to contamination thanks to SUPRADUR graduation Position detection through limit switches and homing track LIP 382 LIP 372 LIP 481 LIP 471 LIP 581 LIP 571 Measuring standard Expansion coefficient DIADUR phase grating on Zerodur glass ceramic Þ therm (0 ± 0.1) 10 6 K 1 DIADUR phase grating on glass or Zerodur glass ceramic Þ therm K 1 (glass) or Þ therm (0 ± 0.1) 10 6 K 1 (Zerodur) DIADUR phase grating on glass Þ therm K 1 signals LIP 382:» 1 V PP LIP 372: «TTL LIP 481:» 1 V PP LIP 471: «TTL LIP 581:» 1 V PP LIP 571: «TTL Signal period LIP 382: µm LIP 372: µm LIP 481: 2 µm LIP 471: 0.4 µm/0.2 µm LIP 581: 4 µm LIP 571: 0.8 µm/0.4 µm Accuracy grade ± 0.5 µm 1) ± 1 µm; ± 0.5 µm 1) ± 1 µm Recommd. meas. step 1 nm 1 µm to µm 1 µm to 0.05 µm Measuring lengths ML 70 to 270 mm 70 to 420 mm 70 to 1440 mm Reference mark None One One or distance-coded 1) Other accuracy grades available on request 12

13 PP Exposed Linear Encoders Two-Coordinate Encoders The PP two-coordinate encoders feature as measuring standard a planar phase-grating structure on a glass substrate. This makes it possible to measure positions in a plane. ML = 120 mm Applications include: Measuring and production equipment in the semiconductor industry Measuring and production equipment in the electronics industry Extremely fast X-Y tables Measuring machines and comparators Measuring microscopes LIF 481 LIF 471 SUPRADUR phase grating on glass Þ therm K 1 Measuring standard Coefficient of linear expansion PP 281 PP 271 DIADUR phase grating on glass Þ therm K 1 LIF 481:» 1 V PP LIF 471: «TTL LIF 481: 4 µm LIF 471: 0.8 µm to 0.04 µm ± 3 µm 1 µm to 0.1 µm 70 to 1020 mm (up to 3040 mm on request) signals PP 281:» 1 V PP PP 271: «TTL Signal period PP 281: 4 µm PP 271: 0.8 µm/0.4 µm Accuracy grade ± 2 µm Recommd. meas. step To 0.01 µm Measuring range 68 mm x 68 mm (other measuring ranges upon request) One Reference mark One per coordinate 13

14 LIDA Exposed Linear Encoders Accuracy Grades to ± 5 µm The LIDA exposed linear encoders are specially designed for high traversing speeds up to 10 m/s, and are particularly easy to mount with various mounting possibilities. Steel scale tapes, glass or glass ceramic are used as carriers for METALLUR graduations, depending on the respective encoder. LIDA exposed linear encoders are typically used for: Coordinate measuring machines Testing machines PCB assembly machines PCB drilling machines Precision handling devices Position and velocity measurement on linear motors LIDA 403 series Thermal adaptation through graduation carriers with different coefficients of expansion Scale cemented to mounting surface Limit switches LIDA 405 series For large measuring lengths up to 30 m One-piece steel scale tape drawn into an aluminum extrusion and tensioned at its ends Limit switches LIDA 407 series Fast, simple scale fastening of the aluminum extrusion with PRECIMET adhesive film One-piece steel scale tape drawn into an aluminum extrusion and fixed at center Limit switches ML LIDA 207 series Scale tape cut from roll Fast, simple scale fastening of the aluminum extrusion with PRECIMET adhesive film One-piece steel scale tape drawn into an aluminum extrusion and fixed at center ML LIDA 209 series Scale tape cut from roll One-piece steel scale with PRECIMET mounting adhesive film cemented on mounting surface ML LIDA 483 LIDA 473 LIDA 485 LIDA 475 LIDA 487 LIDA 477 Measuring standard Coefficient of linear expansion signals METALLUR graduation on glass ceramic or glass Þ therm K 1 (glass) Þ therm K 1 (Robax glass ceramic) Þ therm (0 ± 0.1) x 10 6 K 1 (Zerodur glass ceramic) LIDA 483:» 1 V PP LIDA 473: «TTL METALLUR steel scale tape Þ therm K 1 LIDA 48x:» 1 V PP LIDA 47x: «TTL Signal period LIDA 483: 20 µm LIDA 473: 4 µm/2 µm/0.4 µm/0.2 µm LIDA 48x: 20 µm LIDA 47x: 4 µm/2 µm/0.4 µm/0.2 µm Accuracy grade ± 5 µm ± 5 µm ± 15 µm Recommd. meas. step 1 µm to 0.1 µm 1 µm to 0.1 µm Measuring lengths ML 240 to 3040 mm (Robax glass ceramic to 1640 mm) 140 to mm 240 to 6040 mm Reference mark One (distance-coded upon request) One 14

15 The exposed linear encoders of the LIDA 503 series are specially designed for limited installation space. They consist of a compact scanning head and a glass scale that is simply cemented directly to the machine with PRECIMET adhesive film. The LIDA 503 is used wherever space is insufficient for encoders of the LIDA 400 series, such as on: XY tables Measuring microscopes PCB assembly machines Compact positioning units 1.05 ML LIDA 287 LIDA 277 LIDA 289 LIDA 279 LIDA 583 LIDA 573 Steel scale tape Þ therm K 1 Measuring standard Coefficient of linear expansion METALLUR graduation on glass Þ therm K 1 LIDA 28x:» 1 V PP LIDA 27x: «TTL signals LIDA 583:» 1 V PP LIDA 573: «TTL LIDA 28x: 200 µm LIDA 27x: 20 µm/4 µm/2 µm ± 30 µm 5 µm to 0.5 µm Signal period LIDA 583: 20 µm LIDA 573: 4 µm/2 µm/0.8 µm/0.4 µm Accuracy grade ± 5 µm Recommd. meas. step 1 µm to 0.1 µm Scale tape from the roll 3 m/5 m/10 m Selectable every 100 mm Measuring lengths ML Reference mark 70 to mm One 15

16 HEIDENHAIN-CERTO Length Gauges Accuracy ± 0.1 µm HEIDENHAIN-CERTO length gauges feature a large measuring range, provide high linear accuracy and offer resolution in the nanometer range. They are used predominantly for production quality control of high-precision parts and for the monitoring and calibration of reference standards. Length gauges reduce the number of working standards required to calibrate gauge blocks. Accuracy The total error of HEIDENHAIN-CERTO length gauges lies within ± 0.1 µm. After linear length error compensation in the evaluation electronics of the ND 28x, HEIDENHAIN guarantees accuracy of ± 0.03 µm for the CT 2500 and ± 0.05 µm for the CT These accuracy grades apply over the entire measuring range at ambient temperatures between 19 and 21 C and with a temperature variation of ± 0.1 K during measurements for which the HEIDENHAIN-CERTO s CS 200 gauge stand is used. Plunger actuation The plungers of the CT 2501 and CT 6001 are extended and retracted by an integral motor. It can be actuated by the associated switch box, which can also be controlled by external signal. The CT 2502 and CT 6002 have no plunger drive. The freely movable plunger is connected by a separate coupling with the moving machine element. Mounting The CT 2500 length gauge is fastened by its 16 mm diameter clamping shank. The CT 6000 is fastened with two screws on a plane surface. CT 2501 CT 2502 CT 6001 CT 6002 Measuring standard signals DIADUR phase grating on Zerodur glass ceramic Coefficient of linear expansion: Þ therm 0 ± K 1» 11 µa PP Signal period 2 µm System accuracy 1) ± 0.1 µm ± 0.03 µm 2) ± 0.1 µm ± 0.05 µm 2) Recommd. measuring step 0.01 µm and µm with the ND 28x measured value display units Measuring range 25 mm 60 mm Plunger actuation Motor driven Via coupling Motor driven Via coupling Reference mark One 1) At 19 C to 21 C; permissible temperature fluctuation during measurement: ± 0.1 K 2) With linear length-error compensation in the evaluation electronics 16

17 HEIDENHAIN-METRO Length Gauges Accuracy ± 0.2 µm With their high system accuracy and small signal period, the HEIDENHAIN-METRO MT 1200 and MT 2500 length gauges are ideal for precision measuring stations and testing equipment. They feature ball-bush guided plungers and therefore permit high radial forces. Plunger actuation The length gauges of the MT 12x1 and MT 25x1 series feature a spring-tensioned plunger that is extended at rest. In a special version without spring it exercises particularly low force on the measured object. In the pneumatic length gauges MT 1287 and MT 2587 the plunger is retracted to its rest position by the integral spring. It is extended to the measuring position by application of compressed air. Mounting The MT 1200 and MT 2500 length gauges are fastened by their 8h6 standard clamping shank. A mounting bracket is available as an accessory to mount the length gauges to plane surfaces or to the MS 200 from HEIDENHAIN. MT 1281 MT 1287 MT 1271 MT 2581 MT 2587 MT 2571 Measuring standard DIADUR phase grating on Zerodur glass ceramic Coefficient of linear expansion: Þ therm 0 ± K 1 signals» 1 V PP «TTL» 1 V PP «TTL Signal period 2 µm 0.4 µm, or 0.2 µm 2 µm 0.4 µm, or 0.2 µm System accuracy ± 0.2 µm Recommended measuring step 0.5 µm to 0.05 µm Measuring range 12 mm 25 mm Plunger actuation Reference mark MT 12x1/MT 25x1: by cable-type lifter or freely movable MT 1287/MT 2587: pneumatic One 17

18 HEIDENHAIN-METRO Length Gauges Accuracy ± 0.5 µm Large measuring ranges together with their high accuracy make the MT 60 and MT 101 HEIDENHAIN-METRO length gauges attractive for incoming inspection, production monitoring, quality control, or anywhere parts with very different dimensions are measured. But they are also easy to mount as highly accurate position encoders, for example on sliding devices or X-Y tables. Plunger actuation M version length gauges feature an integral motor that retracts and extends the plunger. While the MT 101 M operates at a constant gauging force, the MT 60 M allows you to select from three gauging force levels. K version gauges have no integral plunger actuation. The plunger is freely movable. It can be connected to moving elements such as linear slides and X-Y table by a coupling. Mounting The length gauges are mounted onto a flat surface by two screws. HEIDENHAIN offers the M versions for mounting in the accessory MS 100 and MS 200 gauge stands. MT 60 M MT 60 K MT 101 M MT 101 K Measuring standard signals DIADUR graduation on glass ceramic» 11 µa PP Signal period 10 µm System accuracy ± 0.5 µm ± 1 µm Recommended measuring step 1 µm to 0.1 µm Measuring range 60 mm 100 mm Plunger actuation Motor driven Via coupling Motor driven Via coupling Protection IP 50 Reference mark One 18

19 HEIDENHAIN-SPECTO Length Gauges Accuracy ± 1 µm Thanks to their very small dimensions, the HEIDENHAIN-SPECTO length gauges are the product of choice for multipoint inspection apparatus and testing equipment. Plunger actuation The length gauges of the ST 12x8 and ST 30x8 series feature a spring-tensioned plunger that is extended at rest. In the pneumatic length gauges ST 12x7 and ST 30x7 the plunger is retracted to its rest position by the integral spring. It is extended to the measuring position by application of compressed air. Mounting The HEIDENHAIN-SPECTO length gauges are fastened by their 8h6 standard clamping shank. ST 1288 ST 1287 ST 1278 ST 1277 ST 3088 ST 3087 ST 3078 ST 3077 Measuring standard DIADUR glass scale signals» 1 V PP «TTL» 1 V PP «TTL Signal period 20 µm 4 µm, or 2 µm 20 µm 4 µm, or 2 µm System accuracy ± 1 µm Recommended measuring step 1 µm to 0.2 µm Measuring range 12 mm 30 mm Plunger actuation ST 12x8/ST 30x8: by measured object ST 12x7/ST 30x7: pneumatic Degree of protection IP 64 Reference mark One 19

20 Angle Measurement Angle encoders HEIDENHAIN angle encoders are characterized by high accuracy values in the arc second range and better. These devices are used in applications such as rotary tables, swivel heads of machine tools, dividing apparatuses, high-precision angle measuring tables, precision devices in angular metrology, antennas and telescopes. Line counts typically 9000 to Accuracy from ± 5 to ± 0.4 Measuring steps as fine as or 0.018" (incremental) or 29 bits, i.e. approx. 536 million positions per revolution (absolute) Rotary encoders Rotary encoders from HEIDENHAIN serve as measuring sensors for rotary motion, angular velocity and also, when used in conjunction with mechanical measuring standards such as lead screws, for linear motion. Application areas include electrical motors, machine tools, printing machines, woodworking machines, textile machines, robots and handling devices, as well as various types of measuring, testing, and inspection devices. Line counts of typically 50 to 5000 Accuracy from ± 12" (depending on the line count, corresponding to ± 1/20 of the grating period) Measuring steps to Particularly with the photoelectric encoders, the high quality of the sinusoidal incremental signals permits high interpolation factors for digital speed control. 20

21 Mounting variants In angle encoders and rotary encoders with integral bearing and stator coupling, the graduated disk of the encoder is connected directly to the shaft to be measured. The scanning unit is guided on the shaft via ball bearings, supported by the stator coupling. During angular acceleration of the shaft, the stator coupling must absorb only that torque resulting from friction in the bearing, thereby minimizing both static and dynamic measuring error. Moreover, the coupling mounted on the stator compensates axial motion of the measured shaft. Other benefits of the stator coupling are: Simple installation Short overall length High natural frequency of the coupling Hollow through shaft possible Angle encoders and rotary encoders with integral bearings that are conceived for a separate shaft coupling are designed with a solid shaft. The recommended coupling to the measured shaft compensates radial and axial tolerances. Angle encoders for separate shaft couplings permit higher shaft speeds. Angle encoders and rotary encoders without integral bearing operate without friction. The two components the scanning head and the scale disk, drum, or tape are adjusted to each other during assembly. The benefits are: Requires little space Large hollow-shaft diameter High shaft speeds No additional starting torque With incremental angle encoders and rotary encoders, the current position is determined by starting at a datum and counting measuring steps, or by subdividing and counting signal periods. encoders from HEIDENHAIN feature reference marks to reestablish the reference point. rotary encoders with commutation signals provide the angular shaft position value without requiring previous traverse with sufficient accuracy to correctly control the phases of the rotating field of a permanent-magnet threephase motor. Absolute angle encoders and rotary encoders require no previous traverse to provide the current position value. Singleturn encoders provide the current angular position value within one revolution, while multiturn encoders can additionally distinguish between revolutions. The position values are transmitted over an EnDat, SSI, PROFIBUS-DP or other serial data interface. The EnDat or PROFIBUS-DP bidirectional interfaces enable automatic configuration of the higher-level electronics and provide monitoring and diagnostic functions. Under the designation functional safety, HEIDENHAIN offers encoders with purely serial data transmission as single-encoder systems for safety-related machines and systems. The two measured values are already formed independently of each other in the encoder, and are transmitted to the safe control via the EnDat interface. Angle Encoders Series Page With integral bearing and integrated stator coupling Absolute (singleturn) RCN RON, RPN 22 With integral bearing, for separate shaft coupling ROD 24 Without integral bearing ERP, ERA 25, 26 Modular Encoders ERM 28 Rotary Encoders With integral bearing, for mounting by stator coupling Absolute (singleturn/multiturn) ECN/EQN ERN 30, 32 With integral bearing, for separate shaft coupling Absolute (singleturn/multiturn) ROC/ROQ, RIC/RIQ ROD 34 Without integral bearing Absolute (singleturn/multiturn) ECI/EQI ERO 36 21

22 RCN, RON, RPN Angle Encoders With Integral Bearing and Integrated Stator Coupling Because of their high static and dynamic accuracy, the RCN, RON and RPN angle encoders with integral bearings and stator couplings are the preferred units for highprecision applications such as rotary tables and tilting axes. The measuring standard is a circular scale with DIADUR graduation or with the RPN a phase grating. For the units with stator coupling, the specified accuracy includes the error caused by the coupling. For angle encoders with separate shaft coupling, the coupling error must be added to find the system accuracy. RCN/RON 200 series Compact size Sturdy design Typically used with rotary tables, tilting tables, for positioning and speed control Measuring steps to Versions in stainless steel (e.g. for antennas) available on request RCN/RON 700 series and RCN/RON/RPN 800 Large hollow shaft diameter up to 100 mm Measuring steps to with system accuracy of ± 2 and ± 1 Typically used on rotary and angle measuring tables, indexing fixtures, measuring setups, image scanners Versions in stainless steel (e.g. for antennas) available on request RON 785 D RCN 700/800 D = 60 mm or 100 mm RON 786/886, RPN 886 D = 60 mm RON 905 Very high-accuracy angle encoder Measuring steps to System accuracy ± 0.4 Used with high-accuracy measuring devices and for the inspection of measuring equipment 22

23 Absolute RCN 226 RCN 228 RCN 223 F RCN 227 F RCN 223 M RCN 227 M RON 225 RON 275 RON 285 RON 287 signals» 1 V PP 3) «TTL x 2 «TTL x 5 «TTL x 10» 1 V PP Line count Signal periods/rev ) or Absolute position values EnDat 2.2 1) Fanuc 02 Mit 02-4 Position values/rev (26 bits) (28 bits) System accuracy ± 5 ± (23 bits) (27 bits) ± 5 ± 2.5 Recommended measuring step 2) Mech. perm. speed min min 1 1) PROFIBUS-DP via gateway 2) For position measurement 3) Only for EnDat 2.2/02 Absolute RCN 729 RCN 829 RCN 727 F RCN 827 F RCN 727 M RCN 827 M RON 786 RON 785 RON 886 RPN 886 signals» 1 V PP 4)» 1 V PP Line count Signal periods/rev ) , ) Abs. position values EnDat 2.2 1) Fanuc 02 Mit 02-4 Position values/rev (29 bits) (27 bits) System accuracy RCN 72x: ± 2 ; RCN 82x: ± 1 ± 2 ± 1 Recommd. meas / step 2) Mech. perm. speed min min 1 1) PROFIBUS-DP via gateway 2) For position measurement 3) Only RON 786 4) Only for EnDat 2.2/02 RON 905 signals» 11µA PP Line count System accuracy ± 0.4 Rec. meas. step Mech. perm. speed 100 min 1 23

24 ROD Angle Encoders With Integral Bearing, for Separate Shaft Coupling ROD angle encoders with solid shaft for separate shaft coupling are particularly attractive for applications where high shaft speeds and large mounting tolerances are required. The precision shaft couplings allow axis motion up to ± 1 mm. ROD angle encoders feature a DIADUR circular scale as measuring standard. For angle encoders with separate shaft coupling, the angular measuring error caused by the shaft coupling must be added to determine the system accuracy. ROD 200 series Compact size Sturdy design Typically used with rotary tables, tilting tables, for positioning and synchronization monitoring Measuring steps to ROD 220 ROD 270 ROD 280 signals «TTL x 2 «TTL x 10» 1 V PP Line count Signal periods/rev System accuracy 1) ± 5 Rec. meas. step 2) Mech. perm. speed min 1 1) Without shaft coupling 2) For position measurement ROD 780 and ROD 880 High accuracy ± 2 (ROD 780) or ± 1 (ROD 880) Measuring steps to Ideal for angle measurement on highprecision rotary tables, dividing apparatuses or measuring machines ROD 780 ROD 880 signals» 1 V PP Line count , System accuracy 1) ± 2 ± 1 Rec. meas. step 2) Mech. perm. speed 1000 min 1 1) Without shaft coupling 2) For position measurement 24

25 12 12 ERP Angle Encoders Without Integral Bearing The HEIDENHAIN ERP angle encoders without integral bearing are intended for integration in machine elements or components. They operate without friction and permit high accuracy. This makes them particularly attractive for high-precision angle measuring tables and precision devices in angular metrology. The ERP 4080 and ERP 8080 angle encoders are designed for applications in the clean room. A circular scale with phase grating serves as the basis for the high accuracy of the ERP encoders. The attainable system accuracy depends on the eccentricity of the graduation to the drive shaft bearing, as well as the radial runout and wobble of the bearing. ERP 880 Very high accuracy Very fine grating period Low error within one signal period thanks to the interferential scanning principle ERP 880 ERP 880 with housing signals» 1 V PP Line count Signal periods System accuracy 1) ± 1 Recommd. meas. step 2) Mech. perm. speed min 1 1) Before installation. Additional error is caused by imprecise mounting and the bearing. 2) For position measurement Mounting the ERP 880 ERP 4080 and ERP 8080 Very high accuracy Very compact dimensions Low error within one signal period thanks to the interferential scanning principle ERP 4080 ERP 8080 signals» 1 V PP Line count Signal periods System accuracy 1) ± 5 ± 2 Rec. meas. step 2) Diameter D1/D2 8 mm/44 mm 50 mm/108 mm Mech. perm. speed 300 min min 1 1) Before installation. Additional error is caused by imprecise mounting and the bearing. 2) For position measurement 25

26 ERA Angle Encoders Without Integral Bearing The HEIDENHAIN ERA angle encoders without integral bearing are intended for integration in machine elements or components. They are designed to meet the following requirements: Large hollow shaft diameters (up to 10 m with scale tape) 1 High shaft speeds up to min No additional starting torque from shaft seals The attainable system accuracy depends on the eccentricity of the graduation to the drive shaft bearing, as well as the radial runout and wobble of the bearing. ERA 4000 series High shaft speeds up to min 1 Sturdy design with steel scale drum with METALLUR graduation Axial motion of measured shaft permissible up to ± 0.5 mm Typical application on fast spindles and ball screws The ERA 4480 C is available for larger diameters or in versions with protective cover Various drum versions ERA 4x80 C: solid version with centering collar for high speeds ERA 4x81 C: with T-section for 3-point centering with low weight and low moment of inertia ERA 4282 C: solid version with 3-point centering for high accuracy requirements signals Inside diameter D1 Outside diameter D2 Line count/ System accuracy 2) Mech. perm. speed ERA 4280 C ERA 4480 C ERA 4880 C ERA 4000 ERA 700 and ERA 800 series For very large diameters up to 10 m AURODUR steel scale tape High accuracy even at the junction of the scale-tape ends ERA 780 C ERA 700 series Scale tape is placed in a slot on the inside circumference of the machine element ERA 780 C: full-circle version ERA 781 C: circle-segment version ERA 800 series Scale tape is fastened on the outside circumference of the machine element ERA 880 C: full-circle version ERA 881 C: segment, scale tape secured with tensioning elements ERA 882 C: segment, scale tape secured without tensioning elements ERA 781 C ERA 880 C ERA 880 C 26

27 ERA 4280 C 1) Signal period 20 µm ERA 4480 C 1) Signal period 40 µm ERA 4880 C Signal period 80 µm» 1 V PP 40 mm 70 mm 80 mm 120 mm 150 mm 180 mm 270 mm 425 mm 512 mm mm mm mm mm mm mm mm mm mm /± 6.1" 6 000/± 7.2" 3 000/± 9.4" /± 4.5" 8 192/± 5.3" 4 096/± 6.9" /± 3.7" /± 4.3" 5 000/± 5.6" /± 3.0" /± 3.5" 7 000/± 4.4" /± 2.9" /± 3.3" 8 192/± 4.1" /± 2.9" /± 3.2" /± 3.8" /± 2.8" /± 3.0" /± 3.5" /± /± min min min min min min min min min 1 1) For other drum versions, please refer to our catalog Angle Encoders without Integral Bearings 2) Before installation. Additional error is caused by imprecise mounting and the bearing. ERA 4000 ERA 780 C ERA 880 C signal» 1 V PP ; signal period 40 µm (on circumference) ERA 780 Line count System accuracy 1) ± 3,5 ± 3,4 ± 3,2 ± 3,5 ± 3,4 Diameter D mm mm mm mm mm Mech. perm. speed 500 min min 1 1) Before installation. Additional error is caused by imprecise mounting and the bearing. ERA

28 ERM Modular Encoders Without Integral Bearing The ERM modular encoders from HEIDENHAIN consist of a magnetized scale drum and a scanning unit with magnetoresistive sensor. Their MAGNODUR measuring standard and the magnetoresistive scanning principle make them particularly tolerant to contamination. Typical applications include machines and equipment with large hollow shaft diameters in environments with large amounts of airborne particles and liquids, for example on the spindles of lathes or milling machines, for reduced accuracy requirements. ERM 200 For large shaft diameters up to 410 mm Drum fastening with axial screws ERM 2410 Consists of ERM 2410 scanning head and the ERM 200 scale drum measuring method with distance-coded reference marks Integrated counting function for absolute position-value output Absolute position value after traverse of two reference marks ERM 200 Scale drum ERM 2404 Scale drum ERM 2405 Scale drum ERM 2400 series Especially compact dimensions for limited installation space High mechanically permissible shaft speeds and therefore particularly well suited for spindles ERM 2484: Drum fastening by axial clamping ERM 2485: Drum fastening by axial clamping and feather key as anti-rotation element ERM Scanning head ERM

29 ERM 220 ERM 280 ERM 2410 signals ERM 220: «TTL ERM 280:» 1 V PP ERM 2410: Absolute position values 1) ERM 2410: EnDat 2.2 Inside diameter D1 40 mm 70 mm 80 mm 120 mm 130 mm 180 mm 220 mm 295 mm 410 mm Outside diameter D mm mm mm mm mm mm mm mm mm Line count Shaft speed min 1 min 1 min 1 min 1 min 1 min 1 min 1 min 1 min 1 Operating temp. 10 C to 100 C 1) Through integrated counting function after traverse of two reference marks ERM 2484 ERM 2485 signals» 1 V PP Inside diameter D1 40 mm 55 mm 40 mm 55 mm Outside diameter D mm mm mm mm Line count Shaft speed min min min min 1 Operating temperature 10 C to 100 C 29

30 ECN, EQN, ERN Rotary Encoders With Integral Bearing and Mounted Stator Coupling Protection IP 64 HEIDENHAIN ECN, EQN and ERN rotary encoders with integral bearings and statormounted couplings operate by photoelectric scanning. They are characterized by their simple mounting and short overall length. Possible applications range from simple measuring tasks to position and speed control on servo drives. The hollow shaft of these encoders is slid directly onto and fastened to the shaft to be measured. During angular acceleration of the shaft, the stator coupling must absorb only that torque caused by friction in the bearing. Rotary encoders with stator coupling therefore provide excellent dynamic performance and a high natural frequency. ECN, EQN, ERN 1000 series Miniaturized version Blind hollow shaft with 6 mm inside diameter Housing outside diameter 35 mm Natural frequency of the encoder stator coupling: 1800 Hz Mechanically permissible speed: min 1 signals Line count Absolute position values Position values per rev Distinguishable revolutions Power supply Operating temperature ECN/EQN/ERN 1000 ECN/EQN/ERN 400 ECN, EQN, ERN 400 series Compact size Blind hollow shaft or hollow through shaft with 8 mm or 12 mm inside diameter Housing outside diameter 58 mm Degree of protection: IP 67 at housing (IP 66 with hollow through shaft) IP 64 at shaft inlet (IP 66 upon request) Natural frequency of the encoder stator coupling: 1400 Hz (cable version) Mechanically permissible speed: min 1 68 ECN/ERN 100 ECN/ERN 100 series For large shaft diameters Hollow through shaft with inside diameters D: D: 20 mm, 25 mm, 38 mm, 50 mm Housing outside diameter 87 mm Natural frequency of the encoder stator coupling: 1000 Hz Mechanically permissible speed: 6000 min 1 (D 30 mm) 4000 min 1 (D > 30 mm) 30

31 Absolute ECN 1013 EQN 1025 ECN ) EQN ) ERN 1020 ERN 1030 ERN 1070 ERN 1080 ERN 1085» 1 V PP «TTL «HTL «TTL» 1 V PP» 1 V PP to to to /2048 EnDat 2.2 (PROFIBUS-DP via Gateway) Z1 track 1) 8192 (13 bits) (23 bits) 4096 (12 bits) 4096 (12 bits) 3.6 to 14 V 5 V 10 to 30 V 5 V 100 C 100 C 70 C 100 C 1) Sine and cosine signal per revolution 2) Functional safety upon request Absolute ECN 413 EQN 425 ECN 425 2) EQN 437 2) ERN 420 ERN 430 ERN 460 ERN 480 signals» 1 V PP «TTL «HTL «TTL» 1 V PP Line count 512 or to to 5000 Abs. position values EnDat 2.2 1) or SSI EnDat 2.2 1) Position values per rev (13 bits) (25 bits) Distinguishable revolutions 4096 (12 bits) (12 bits) Power supply EnDat: 3.6 to 14 V SSI: 5 V or 10 to 30 V 3.6 to 14 V 5 V 10 to 30 V 5 V Operating temperature 5 V: 100 C 10 to 30 V: 85 C 100 C 100 C 70 C 100 C 1) Includes EnDat 2.1 command set; PROFIBUS-DP via Gateway 2) Functional safety upon request Absolute ECN 113 ECN 125 ERN 120 ERN 130 ERN 180 signals» 1 V PP «TTL «HTL» 1 V PP Line count to Absolute position values EnDat 2.2 1) or SSI EnDat 2.2 1) Position values per rev (13 bits) (25 bits) Power supply 5 V 2) 3.6 to 5.25 V 5 V 10 to 30 V 5 V Operating temperature 100 C 100 C 100 C (U P 15 V) 85 C (U P 30 V) 100 C 1) Includes EnDat 2.1 command set; PROFIBUS-DP via gateway 2) 10 to 30 V via connecting cable with voltage converter (only SSI) 31

32 ECN, EQN, ERN Rotary Encoders With Integral Bearing and Mounted Stator Coupling Protection IP 40 The ECN, EQN and ERN rotary encoders from HEIDENHAIN with IP 40 degree of protection are specially designed for integration in motors. Bearings and mounted stator coupling are integrated. Absolute rotary encoders and versions with commutation tracks are available for synchronous motors. The taper shaft or the blind hollow shaft is fastened directly to the shaft to be measured. This ensures an extremely stiff coupling that permits exceptionally high dynamic performance of the drive. The stator coupling is designed to be fastened in a location bore and permits fast, simple mounting while enabling a mechanical fine adjustment of the commutation. ERN/ECN/EQN 1100 ERN/ECN/EQN 1300 ECN, EQN, ERN 1100 series Miniaturized version Blind hollow shaft 6 mm Housing outside diameter 35 mm Stator coupling for location holes with inside diameter 45 mm Natural frequency of the encoder stator coupling: 1500 Hz 1 Mech. permissible speed min ECN, EQN, ERN 1300 series Compact dimensions 1:10 taper shaft with 9.25 mm functional diameter for extremely stiff connection Housing outside diameter 56 mm. The stator coupling is suited for location holes with 65 mm inside diameter Natural frequency of the encoder stator coupling: 1800 Hz Mech. perm. speed ERN/ECN: min 1 EQN: min 1 IP 40 protection when mounted

33 Absolute ECN 1113 EQN 1125 ECN ) EQN ) ERN 1120 ERN 1180 ERN 1185 signals» 1 V PP «TTL» 1 V PP Line count , 512, 1 024, 2 048, or Commutation signals Z1 track 2) Absolute position values EnDat 2.2 1) Position values per rev (13 bits) (23 bits) Distinguishable revolutions (12 bits) (12 bits) Power supply 3.6 to 14 V 5 V Operating temperature 115 C 100 C 115 C 1) Includes EnDat 2.1 command set; PROFIBUS-DP via Gateway 2) One sine and one cosine signal with one period per revolution of the encoder shaft 3) Functional safety upon request Absolute ECN 1313 EQN 1325 ECN ) EQN ) ERN 1321 ERN 1326 ERN 1381 ERN 1387 signals» 1 V PP «TTL» 1 V PP Line count 512 or Commutation signals Block commutation 2) Z1 track 3) Absolute position values EnDat 2.2 1) EnDat 2.2 1) Position values per rev (13 bits) (25 bits) Distinguishable revolutions 4096 (12 bits) (12 bits) Power supply 3.6 to 14 V 5 V Operating temperature 115 C 115 C 120 C; lines: 100 C 1) Includes EnDat 2.1 command set; PROFIBUS-DP via Gateway 2) Three block commutation tracks with 90 or 120 mechanical phase shift 3) One sine and one cosine signal with one period per revolution of the encoder shaft 4) Functional safety upon request 33

34 ROC, ROQ, ROD and RIC, RIQ Rotary Encoders With Integral Bearing, for Separate Shaft Coupling The optical encoders ROC, ROQ and ROD, as well as the inductive RIC and RIQ from HEIDENHAIN have integrated bearings and are sealed. They provide IP 64 to IP 67 protection, depending on the version. They are robust and compact. These encoders are coupled by the rotor to the measured shaft through a separate coupling that compensates axial motion and misalignment between the encoder shaft and measured shaft. Some rotary encoders are suitable in a special version for potentially explosive atmospheres in accordance with Directive 94/9/EG, (ATEX). Synchro flange ROD 1000 series Miniaturized dimensions for installation in small devices or in limited installation space Mounting by synchro flange Shaft diameter 4 mm ROC, ROQ, ROD 400 series Industrial standard for dimensions and output signals Degree of protection IP 67 at housing IP 64 at shaft end (IP 66 available on request) Mounting by synchro flange or clamping flange Shaft diameters 6 mm with synchro flange 10 mm with clamping flange Preferred types with fast delivery (see Rotary Encoders brochure or ask HEIDENHAIN) RIC/RIQ 400 series Inductive scanning principle For reduced accuracy requirements up to ± 480 Mechanical design same as ROC/ROQ 400 Series 1000 ROD 400 series with synchro flange 43.2 PROFIBUS: 80 Absolute Singleturn Synchro flange RIC 418 ROC 413 ROC 425 Clamping flange RIC 418 ROC 413 ROC 425 signals» 1 V PP Clamping flange Line count/ Signal periods Absolute position values EnDat 2.1 EnDat 2.2 2) SSI 39r1 PROFIBUS- DP V0 EnDat 2.2 2) Positions per rev (18 bits) (13 bits) (25 bits) Distinguishable revolutions Power supply 5 V 3.6 to 14 V 5 V or 10 to 30 V 9 to 36 V 3.6 to 14 V Operating temperature 100 C 100 C 70 C 100 C 34 1) ATEX version available 2) Includes EnDat 2.1 command set; PROFIBUS-DP via Gateway

35 Absolute Singleturn Multiturn ROC 1013 ROC ) ROQ 1025 ROQ ) ROD 1020 ROD 1030 ROD 1070 ROD 1080 signals» 1 V PP» 1 V PP «TTL «HTL «TTL 2)» 1 V PP Line count to / to Absolute position values EnDat 2.2 Position values per rev (23 bits) (13 bits) (23 bits) Distinguishable revolutions 4096 (12 bits) Power supply 3.6 to 14 V 5 V 10 to 30 V 5 V 5 V Operating temperature 100 C 100 C 70 C 100 C 1) Functional safety upon request 2) 5/10-fold integrated interpolation ROD 400 series with clamping flange 37.2 PROFIBUS: 70 PROFIBUS DP Multiturn RIQ 430 ROQ 425 ROQ 437 ROD 426 ROD 466 ROD 436 ROD 486 RIQ 430 ROQ 425 ROQ 437 ROD 420 1) ROD 430 ROD 480» 1 V PP «TTL «HTL» 1 V PP to ROD 426/466: up to ) to EnDat 2.1 EnDat 2.2 2) SSI 41r1 PROFIBUS- DP V0 EnDat 2.2 2) (18 bits) (13 bits) (25 bits) (12 bits) 5 V 3.6 to 14 V 5 V or 10 to 30 V 9 to 36 V 3.6 to 14 V 5 V 10 to 30 V 5 V 100 C 100 C 70 C 100 C 100 C 70 C 100 C 3) Signal periods over are generated through signal doubling in the encoder 35