King Lai Hygienic Materials Co., Ltd. CDA/Bulk Gas /UHP Gas Delivery System

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1 R King ai Hygienic Materials Co., td. CD/ulk Gas /UHP Gas Delivery System

2 Introduction 1 King ai Standard and Specifications 2 Cleaning & Packaging Process 3-4 Tube & Pipe 5-6 TUE PIPE- STM PIPE- JIS PIPE- RGE DIMETER High Purity Fittings - Inch Type EOW 45 EOW EQU TEE REDUCING TEE CONCENTRIC REDUCER

3 Micro- Fittings & VCR Components MICRO EOW MICRO REDUCING EOW MICRO TEE MICRO REDUCING TEE MICRO TRI-EOW MICRO CROSS MICRO REDUCER GND - TUE UTT WED - SOCKET WED - ME WED - TUE DPTER - IND GND ODIES WEDED SSEMIES NUTS, CPS, ND PUGS GSKETS Reference 27

4 Gas Delivery With years of experience in manufacturing high purity tubing and fittings, King ai has a complete line of precision equipment and techniques to fulfill all strict regulations required for semiconductor industry. Our excellent product s inner surface finish, ovality, and perpendicularity are suitable for automatic orbital welding. King ai tubing and fittings are designed and manufactured to provide the broadest range of semiconductor grade ultraclean application for ultra high purity systems. To achieve the maximum corrosion resistance, King ai provides a wide range of electropolished tubing and fittings with extremely low oxidation while maximizing surface passivation. ln addition, King ai s state-of-the-art class 10 clean room furnishes all the essential purging and packaging required by the high purity semiconductor application. King ai is ISO-9001 certified and an active member of SME PE. Our profound knowledge in io-pharmaceutical industry is the basis in developing semiconductor grade tubing and fittings and becoming a SEMI member. King ai supplies to merica, Europe, and other major industrial countries worldwide. s a mature manufacturer, we persist in research and development as well as quality management in lowering production cost while generating the highest efficiency. We feature quick delivery, best quality, competitive pricing and excellent service for each and every fitting. If you need further information, please feel free to contact us. We appreciate your continuous interests in King ai products. 1 Introduction

5 KING I Standard Specification INCH Tubes 1/8 OD ~ 6 OD (~152.4mm) Fittings OD ~ 32 OD (~812.8mm) JIS Pipes 8 ~ 300 Fittings 8 ~ 300 DN Fitting DN20~DN800 Material 316 stock available 304, VOD/VR, VIM/VR and other materials are available upon request Surface Finish Grading ased on the characteristic of finished products Electropolished (EP) F1 < 10 μin Ra (0.25 μm) Mechanical Polished (MP/) D2 < 15 μin Ra (0.38 μm) Mill Finished (P) 0 < 40 μin Ra (1.00 μm) King ai Standard and Specifications 2

6 Cleaning & Packaging Process Pressurized room Class 10,000 clean room - Degreasing - DI water rinsing - orescope inspection - ppearance & size check - Surface roughness measurement Interior surfaces are measured according to SME 46.1 Cleaning Inspection Cleaning - Flushed with Heated DI water - Cleaned with Nitrogen - CD Drying - Nitrogen Drying Inspection Packaging - Moisture content - Oil density - Particle count - Capped - Single bag nitrogen filled package Packaging - Capped - agged 3 Cleaning & Packaging Process

7 Class 100 clean room Class 10 clean room - Flushed with Heated DI water - Double bag package Inner bag filled with nitrogen Cleaning Drying Inspection Packaging UHP (EP) - Nitrogen - Moisture content - Particle count CFOS (/MP) General pplication (P) Cleaning & Packaging Process 4

8 TUE & PIPE TUE PIPE- STM PIPE- JIS PIPE- RGE DIMETER 5

9 TUE * Spec: STM 269 / 632 / 270 * Material: 304 or 316 * Surface Finish: P,, MP, EP OD (mm) T (mm) TYPE 3P P P P P P P P P P P P /8 (3.18) () () (12.7) () 1.0 (25.4) 1.5 (38.1) 2.0 (50.8) 2.5 (63.5) 3.0 (76.2) 4.0 (101.6) 6.0 (152.4) (0.70) () () () () () () () () () () (2.77) Seamless Seamless Seamless Seamless Seamless/ Seamless/ Seamless/ PIPE - STM * Spec: STM 312 * Material: 304 or 316 * Surface Finish: P,, MP, EP PIPE - JIS * Spec: JIS G3459 * Material: 304 or 316 * Surface Finish: P,, MP, EP Nominal Pipe Size OD (mm) Wall Thickness (mm) SCH 5S SCH 10S SCH 40S TYPE Seamless Seamless Seamless Seamless/ Seamless/ Seamless/ Seamless/ Seamless/ Nominal Pipe Size OD (mm) Wall Thickness (mm) SCH 5S SCH 10S SCH 20S SCH 40S TYPE Seamless Seamless Seamless Seamless/ Seamless/ Seamless/ Seamless/ Seamless/ PIPE - RGE DIMETER * Spec: JIS G3459/STM 312 * Material: 304 or 316 * Surface Finish: P,, MP, EP Nominal Pipe Size OD (mm) SCH 5S Wall Thickness (mm) SCH 10S SCH 20S SCH 40S TYPE Tube & Pipe TUE, PIPE- STM, PIPE- JIS, PIPE- RGE DIMETER 6

10 High Purity Fittings - Inch Type 90 EOW 45 EOW EQU TEE REDUCING TEE CONCENTRIC REDUCER 7

11 45 EOW EQU TEE EOW High Purity Fittings - Inch Type 90 EOW, 45 EOW, EQU TEE

12 REDUCING TEE x x x x x x1/ x x x1/ x x x x1/ x x x x x1/ x x x x x x1/ x x x x x x x1/ x x x x x High Purity Fittings - Inch Type REDUCING TEE

13 CONCENTRIC REDUCER x x x x x x1/2 1.0 x 1.0 x 1.0 x1/2 1.0 x 1.5 x 1.5 x 1.5 x1/2 1.5 x x x 2.0 x 2.0 x1/2 2.0 x x x x1/2 3.0 x x x x x x x x x High Purity Fittings - Inch Type CONCENTRIC REDUCER 10

14 Micro-Fittings & VCR Components 11 MICRO EOW MICRO REDUCING EOW MICRO TEE MICRO REDUCING TEE MICRO TRI- EOW MICRO CROSS MICRO REDUCER GND ODIES WEDED SSEMIES NUTS, CPS, ND PUGS GSKET

15 MICRO EOW / / / MICRO REDUCING EOW /8 x / x / x / MICRO TEE / / / MICRO REDUCING TEE /8 x / x / x / Micro - Fittings MICRO EOW, MICRO REDUCING EOW, MICRO TEE, MICRO REDUCING TEE 12

16 MICRO TRI-EOW / / / F flat MICRO CROSS / / / MICRO REDUCER x x x Typical VCR ssemblies Male nut Gland Gasket Gland Female nut 13 Micro - Fittings MICRO TRI-EOW, MICRO CROSS, MICRO REDUCER

17 Short Tube utt Weld Size (inch) (mm) (mm) (mm) 4-4-VR-3S VR-3S VR-3S VR-3S VR-3S VR-3S VR-3S VR-3S VR-3S VR-3S-6M7 Size (mm) 6 (mm) (mm) (mm) VR-3S-8M7 4-8-VR-3S-10M VR-3S-12M VR-3S-18M ong Tube utt Weld Size (inch) (mm) (mm) (mm) 4-4-VR VR VR VR VR VR VR VR VR VR Size (mm) (mm) (mm) (mm) 4-4-VR-3-6M VR-3-8M VR-3-10M VR-3-12M VR-3-18M VCR Components GND 14

18 Short utomatic Tube utt Weld Size (inch) (mm) (mm) C (mm) D (mm) (mm) 4-4-VR-3S VR-3S VR-3S Size (mm) (mm) (mm) C (mm) D (mm) (mm) 4-4-VR-3-6MS VR-3-8MS VR-3-10MS VR-3-12MS D C ong utomatic Tube utt Weld Size (inch) (mm) (mm) C (mm) D (mm) (mm) 4-4-VR VR VR D 4-8-VR C 4-12-VR-3 Size (mm) (mm) (mm) C (mm) D (mm) 52.6 (mm) 4-4-VR-3-6M VR-3-12M VR-3-18M VCR Components GND

19 Socket Weld Size (inch) (mm) (mm) D (mm) (mm) 3-4-VR VR D 3-8-VR VR-3 5/8 5/ VR Short Socket Weld Size (inch) (mm) (mm) D (mm) (mm) 3-4-VR-3-50G VR-3-50G D Reducing Socket Weld Size (inch) (mm) (mm) D (mm) (mm) 3-8-VR-3-4TSW D VCR Components GND 16

20 Male Weld Size (inch) (mm) (mm) (mm) 3-8-VR-3-6MTW VR-3-8MTW VR-3-12MTW VR-3-16MTW Tube dapter Size (inch) (mm) (mm) (mm) 3-4-VR-3-4T VR-3-6T VR-3-8T lind Gland 3-4-VR VR VR-3- Size (inch) (mm) VCR Components GND

21 Male NPT Connector Size (inch) (mm) (mm) (mm) 3-4-VR-1-2 1/ / VR VR /8 15/ VR / VR / VR VR /16 1 5/ Male NPT ulkhead Connector Size (inch) (mm) (mm) D (mm) (mm) 3-4-VR-1-4M / VR-1-4M / D Straight Thread O-Ring Seal Male Connector Size (mm) (mm) D (mm) (mm) 3-4-VR / / VR / VR / / D VCR Components ODIES 18

22 Female NPT Connector Size (inch) (mm) (mm) 3-4-VR VR-7-4 1/8 5/8 3/ VR / VR / VR / Male NPT ulkhead Connector Size (inch) (mm) (mm) C (mm) (mm) 3-4-VR VR /8 15/ VR / C Tube Fitting ulkhead Connector Size (mm) (mm) C (mm) (mm) 3-4-VR-1S / VR / VR / C 19 VCR Components ODIES

23 Male Union (mm) (mm) 3-4-VR-6-DM 5/ VR-6-DM 3-12-VR-6-DM /16 1 5/ VR-6-DM / Male Reducing Union (mm) 1(mm) (mm) 3-8-VR-6-DM-4 15/ Male ulkhead Union (mm) (mm) F1(inch) (mm) 3-8-VR /16 1 1/ F1 flat 3-8-VR-61S /16 1 1/ VCR Components ODIES 20

24 Coupling (mm) 3-4-VR-CG 3-8-VR-CG 3/4 1 1/ VR-CG 1 1 / Female Reducing Union (mm) (mm) (mm) 3-4-VR-6-DF VR-6-DF-4 1 / /4 1 1/ Reducing dapter (mm) (mm) (mm) 3-4-VR-7-8VCRF / Reducing ushing (mm) (mm) (mm) 3-8-VR-7-4VCRF / VCR Components ODIES

25 Male NPT Elbow (mm) C(mm) D (mm) E (mm) 3-4-VR VR-2-4 1/ /2 1 /2 E 3-8-VR / VR /16 D C Union Elbow 3-4-VR-9 (mm) 27.2 E (mm) 1 /2 E 3-8-VR / VR /4 Union Tee (mm) (mm) E (mm) 3-4-VR-T /2 E 3-8-VR-T / VR-T /4 Union Cross (mm) (mm) E (mm) 3-4-VR-CS /2 3-8-VR-CS / VR-CS /4 E VCR Components ODIES 22

26 Male NPT Connector G flat 3-4-WR WR-1-4 1/8 3-8-WR-1-6 C E (mm) (mm) C(mm) E(mm) F(inch) G(inch) /16 9/16 3/4 3/ /16 1 1/ WR /8 1 1/16 Female NPT Connector (mm) C(mm) E(mm) F(inch) G(inch) G flat E 3-4-WR WR WR /4 3/4 7/8 1 1/16 1 1/16 1 1/16 C Tube Fitting Connector (mm) C(mm) D(mm) E(mm) F(inch) G(inch) G flat E 3-4-WR WR WR /2 5/8 13/16 3/4 3/4 1 1/16 D C Rotating Female Union (mm) E(mm) G(inch) 3-4-WR-6-DF /4 3-8-WR-6-DF /16 G flat E G flat 23 VCR Components ssemblies

27 Female Nut (mm) F(inch) (mm) 3-4-VR / VR / VR-1 5/ / VR / Male Nut (mm) F(inch) (mm) 3-4-VR VR /8 15/ VR-4 5/ / VR / Short Male Nut For use with short gland. 3-4-VR-4-54NC (mm) 9.1 F(inch) 5/8 (mm) VR-4-65NC 9.1 5/ Cap F(inch) (mm) (mm) 3-4-VR-CP 3/ VR-CP 1 1/ VR-CP 1 1 / VCR Components Nuts, Caps, and Plugs 24

28 Cap with anyard anyard material is 302 SS anyard length is 6 in. (15.2cm). (mm) C(mm) F(inch) 3-4-VR-CP-P /4 3-8-VR-CP-P /16 Plug (mm) F(inch) 3-4-VR-P /8 3-8-VR-P / VR-P /16 Plug with anyard anyard material is 302 SS anyard length is 6 in. (15.2cm). (mm) F(inch) 3-4-VR-P /8 3-8-VR-P /16 Protective Cap Made of 304 stainless steel and supplied as bead protection during shipping for a variety of VCR face seal fittings processed to KING I Ultrahigh-Purity Process Specification. 3-4-VR-SC 3-8-VR-SC 3-12-VR-SC 3-16-VR-SC 1 Nuts, Caps, and Plugs Split- Nut ssemblies Split Nut Type (inch) (mm) C(mm) D(mm) E(mm) 3-4-VR-1-SN Female 3/ E 3-4-VR-4-SN Male 5/ D C 25 VCR Components Nuts, Cap, and Plugs

29 Sliver Plated E Tx Nonretained Cannot be used in a gasket retainer assembly. E(mm) Tx(mm) -2-VR-2-4-VR-2-8-VR-2-10-VR-2-12-VR-2-16-VR-2 1/8 5/ Gasket Retainer ssembly Retainer and gasket must be used as an assembly. E(mm) Tx(mm) -4-VR-2-GR VR-2-GR E Tx -12-VR-2-GR VR-2-GR Unplated (VS) Nonretained E(mm) Tx(mm) VR-2-VS -4-VR-2-VS 1/ VR-2-VS E Tx -10-VR-2-VS 5/ VR-2-VS VR-2-VS Gasket Retainer ssembly E(mm) Tx(mm) -4-VR-2-GR-VS E Tx -8-VR-2-GR-VS -12-VR-2-GR-VS VR-2-GR-VS Side-oad Retainer E(mm) Tx(mm) -4-VR-2-ZC-VS E Tx -8-VR-2-ZC-VS 11.0 VCR Components Gaskets 26

30 Reference STM Specifications STM Standard specification for seamless and welded austenitic stainless steel tubing for general service STM Standard specification for seamless and welded austenitic stainless steel tubing (small-diameter) for general service STM Standard specification for stainless steel bars and shapes for use in boilers and other Pressure vessels STM Standard specification for seamless, welded, and heavily cold worked austenitic stainless steel pipes STM Standard specification for seamless and welded austenitic stainless steel sanitary JIS Standards JIS G Standard steel pipes SEMSPEC No STD - Test method and helium leak rate No STD - nalysis of surface composition and chemistry of electro-polished stainless steel tubing Federal Standards No Clean room, workstation and environment requirement ISO Standards ISO 9001:2008 certified ISO 14001:2004 certified NSI Standards tubing SEMI Specifications SEMI F60 - Test method for ESC evaluation of surface composition of wetted surfaces of passivated NSI / SME Surface construction NSI Y14.5M - Dimension and tolerance NSI / SQC Z1.4 - Sampling inspection procedures and chart EN Specifications 316 stainless steel components SEMI F72 - Test method for uger Electron Spectroscopy (ES) evaluation of oxide layer of wetted surfaces of passivated 316 stainless steel components SEMI F19 - Specification for the surface condition of the wetted surfaces of stainless steel components EN Inspection documents 27 Reference

31

32 R King ai Hygienic Materials Co., td. * ddress: No.10, 6th East Street, Youth Industrial Zone, Tachia Dist, Taichung City 43770, Taiwan, R.O.C. * Telephone : * Fax : * l : * Website : Copyright 2013 King ai Hygienic Materials Co., td. ll rights reserved. May 2013 revision

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