Rotation Motorized Stages

Transcription

1 Motion Control Products Rotation ized SGSP-YAW Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism. ized stages suitable for positioning for measuring, inspection and evaluation instruments. Rotation Range Minus :. Scale: 0 Homing of rotation motorized stages is performed using the CW as the origin sensor. Origin detection is adjusted so that the stage stops at 0 degrees when homing is performed in the MINI system at half step. Attention Clockwise CW direction Stops at near 0 (. ) Counterclockwise CCW direction to Attention is required when mounting in upside down direction or on a vertical plane. Precision and load capacity specifications may be partly not satisfied depending on the mounting direction. mm Part Number SGSP-0YAW SGSP-YAW-0B SGSP-YAW-W-0B Mechanical Rotation Range Move in the counterclockwise CCW direction to, and stop at near 0 degree (. ) in the clockwise CW direction. Table Size [mm] φ0 φ φ Travel Mechanism (reduction ratio) Worm gear (:) Worm gear (:) Worm gear (:) Positioning Slide Bearing method Bearing method Bearing method Material Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze Weight [kg] (Full) [ /pulse] Resolution (Half) [ /pulse] MAX Speed [ /sec] Positioning [ ] Positional Repeatability [ ] Load Capacity [N].6 (.0kgf). (.0kgf). (.0kgf) Moment Stiffness [ /N cm] Lost Motion [ ] Backlash [ ] Parallelism [μm] Concentricity [μm] 0 0 Wobble [mm] Part Number Micro Photoelectric : PM-F (SUNX Co., Ltd.) Micro Photoelectric : PM-R (SUNX Co., Ltd.) Micro Photoelectric : PM-R (SUNX Co., Ltd.) Limit Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin None None None Proximity Origin None None None / Type -phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.) Part Number TS66N ( mm) Step Angle 0. Power Voltage DC V ±0% Current Consumption ma or lower Control Output NPN open collector output DC0V or lower, ma or lower Output Logic When shaded: Output transistor OFF (no conduction) Compatible Driver / Controller Compatible Driver SG-M, SG-MA, SG-M, SG-MA, SG-MSC, MC-PCL Control System Compatible Controller GSC-0, GSC-0, SHOT-0, GIP-0, SHOT-0GS, SHOT-0GS, HIT-M HIT-S, PGC-0 G0

2 Catalog Code W0 Outline Drawing SGSP-0YAW Hexagon socket head cap screw M screws () M6 depth +0.0 ( +0.00) SGSP-YAW-0B Hexagonal socket head cap screw M 0 screws () +0.0 ( ) () (6) 0. (6) (0) 0 6 (.) 6 0 -M depth -M depth P.C.D. () -M depth. 0 -M depth. P.C.D. 0 0 (.). (.) 0. SGSP-YAW-W-0B -.6 mounting hole 6 counterbore Hexagonal socket head cap screw M 0 screws (.) () +0.0 ( ) M6 depth -.6 mounting hole (.) (.) 0 -M M6 (.) (.) -M depth. P.C.D. -M depth. 0 When homing of SGSP-YAW-W-0B is performed, the position will become as shown below. (.) Connection Diagram mounting hole Connector Pin Number Hirose Electric Co., Ltd. RP-RA-SC -Phase Stepping E phase A phase lead lead lead lead lead 6 6 N.C. (not used) +VS GND (0V) 0 0 Machine origin sensor (CW ) N.C. (not used) N.C. (not used) Note D phase Machine origin sensor Note (CW ) C phase SUNX Co., Ltd. Micro photo sensor PM-F/R B phase Note When a travel command in the + direction is issued, the mounting table rotates to in the CCW (counterclockwise) direction viewed from the top surface, but it is stopped by the machine origin sensor (CW ) in the CW (clockwise) direction. Detect the machine origin using the method (MINI system) that detects the origin with a machine origin sensor (CW ). Note Compatible cable connector: Hirose Electric Co., Ltd. RP-PA-PC/RP-PC- Machine Origin Detection MINI System When the machine origin detection command is issued, the stage starts traveling in the CW (-) direction at the operating speed (F) set with the memory switch, and stops by the CW (-) side. Then it travels in the CCW (+) direction at the operating speed (F) for 0 pulses. After stop, it starts traveling in the CW (-) direction again at the starting speed (S), and stops by the CW (-) side. After that, it travels in the CCW (+) direction at the operating speed (F) for 0 pulses. This position is regarded as the machine origin. Operating speed (F) CW ( ) Operating speed (F) 0 pulse travel CCW ( ) Starting speed (S) CW ( ) Operating speed (F) 0 pulse travel CCW ( ) CW ( ) side Compatible Controllers / Drivers and Controller GSC-0 [ axis] GSC-0 [ axes] SHOT-0 [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-0GS [ axes] HIT-M/HIT-S [ axes] PGC-0 [ axes] G0 G0 Driver Drivers G00 G0 DRP-CA MINI-CA-SG SGSP-0YAW SGSP-YAW-OB SGSP-YAW-W-OB mm WEB international@sigma-koki.com TEL FAX G0

3 Motion Control Products Rotation ized SGSP-YAW Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism. ized stages suitable for positioning for measuring, inspection and evaluation instruments. Rotation Range Minus :. Scale : 0 Clockwise CW direction Stops at near 0 (. ) Counterclockwise CCW direction to Homing of rotation motorized stages is performed using the CW as the origin sensor. Origin detection is adjusted so that the stage stops at 0 degrees when homing is performed in the MINI system at half step. Attention Attention is required when mounting in upside down direction or on a vertical plane. Precision and load capacity specifications may be partly not satisfied depending on the mounting direction. mm Part Number SGSP-0YAW SGSP-0YAW SGSP-YAW SGSP-0YAW-W Mechanical Rotation Range Move in the counterclockwise CCW direction to, and stop at near 0 degree (. ) in the clockwise CW direction. Table Size [mm] φ0 φ0 φ φ0 Travel Mechanism (reduction ratio) Worm gear (:) Worm gear (:) Worm gear (:) Worm gear (:) Positioning Slide Bearing method Crossed roller Crossed roller Crossed roller Material Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze Weight [kg]..0.. (Full) [ /pulse] Resolution (Half) [ /pulse] MAX Speed [ /sec] Positioning [ ] Positional Repeatability [ ] Load Capacity [N] (0.0kgf) 6 (0.0kgf) 6 (0.0kgf) 6 (0.0kgf) Moment Stiffness [ /N cm] Lost Motion [ ] Backlash [ ] Parallelism [μm] Concentricity [μm] Wobble [mm] Part Number Micro Photoelectric : PM-F (SUNX Co., Ltd.) Limit Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin None None None None Proximity Origin None None None None / Type -phase stepping motor 0.A/phase (Oriental Co., Ltd.) Part Number PKHPB-C ( mm) Step Angle 0. Power Voltage DC V ±0% Current Consumption ma or lower Control Output NPN open collector output DC0V or lower, ma or lower Output Logic When shaded: Output transistor OFF (no conduction) Compatible Driver / Controller Compatible Driver SG-M, SG-MA, SG-MSC, MC-PCL Control System Compatible Controller SHOT-0, GIP-0, SHOT-0GS, SHOT-0GS, HIT-M HIT-S, PGC-0 G06

4 Catalog Code W0 Outline Drawing SGSP-0YAW Hexagonal socket head cap screw M 0 screws () +0.0 ( ) SGSP-0YAW Hexagon socket head cap screw M6 0 screws (.) SGSP-YAW () () -M depth () 0 0 -M depth -M depth P.C.D.6 -M6 depth -. mounting hole. counterbore Hexagon socket head cap screw M6 0 screws (0.) (.) mounting hole (6.) (.) SGSP-0YAW-W () () ( ) M depth 6 -M depth 6 P.C.D mounting hole counterbore Hexagon socket head cap screw M6 screws (6) (.) (6.) (6) () ( ) 6 (.) (0) 0 -M depth 6 6 ( ) (.) -M depth 6 6 -M depth 6 (.) (.) -M depth 6 P.C.D. 6 M6 -M 0 () Connection Diagram - 6. mounting hole counterbore () mounting hole Connector Pin Number Hirose Electric Co., Ltd. SDAB-P equivalent -Phase Stepping E phase A phase If homing of SGSP-0YAW-W is performed, the position will become as shown below. 6 0 Note lead lead Mmotor lead lead Mmotor lead 6 GND VS N.C. (not used) 0 N.C. (not used) Machine origin sensor (CW ) GND N.C. (not used) Machine Origin Detection MINI System When the machine origin detection command is issued, the stage starts traveling in the CW (-) direction at the operating speed (F) set with the memory switch, and stops by the CW (-) side. Then it travels in the CCW (+) direction at the operating speed (F) for 0 pulses. After stop, it starts traveling in the CW (-) direction again at the starting speed (S), and stops by the CW (-) side. After that, it travels in the CCW (+) direction at the operating speed (F) for 0 pulses. This position is regarded as the machine origin. D phase Machine origin sensor Note (CW ) C phase Operating speed (F) CW ( ) Operating speed (F) 0 pulse travel CCW ( ) Starting speed (S) CW ( ) Operating speed (F) 0 pulse travel CCW ( ) CW ( ) side B phase SUNX Co., Ltd. Micro photo sensor PM-F Note When a travel command in the + direction is issued, the mounting table rotates to in the CCW (counterclockwise) direction viewed from the top surface, but it is stopped by the machine origin sensor (CW ) in the CW (clockwise) direction. Detect the machine origin using the method (MINI system) that detects the origin with a machine origin sensor (CW ). Note Compatible cable connector: DDK Ltd. JE- Compatible Controllers / Drivers and Controller SHOT-0 [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-0GS [ axes] HIT-M/HIT-S [ axes] PGC-0 [ axes] G0 G06 Driver Drivers G00 G0 DDA-CA DAC-SG SGSP-0YAW SGSP-0YAW SGSP-YAW SGSP-0YAW-W mm WEB international@sigma-koki.com TEL FAX G0

5 Motion Control Products Precision Rotation ized KST-YAW High precision and high stability rotation motorized stages fitted with bearing positioning slide. Rotation motorized stages suitable for when high load capacity is required. Back up various inspection instruments according to usage such as the type, size, and measurement range of the measuring object. Rotation Range Minus :. Scale: 0 Clockwise CW direction Stops at near 0 (. ) Counterclockwise CCW direction to Homing of rotation motorized stages is performed using the CW as the origin sensor. Origin detection is adjusted so that the stage stops at 0 degrees when homing is performed in the MINI system at half step. Attention Attention is required when mounting in upside down direction or on a vertical plane. Precision and load capacity specifications may be partly not satisfied depending on the mounting direction. mm Part Number KST-0YAW KST-YAW Mechanical Rotation Range Move in the counterclockwise CCW direction to, and stop at near 0 degree (. ) in the clockwise CW direction. Table Size [mm] φ0 φ Travel Mechanism (reduction ratio) Worm gear (:) Worm gear (:) Positioning Slide Bearing method Bearing method Material Aluminum / Aluminum bronze Aluminum / Aluminum bronze Weight [kg]. Resolution (Full) [ /pulse] (Half) [ /pulse] MAX Speed [ /sec] 0 0 Positioning [ ] Positional Repeatability [ ] Load Capacity [N] (.0kgf) (0.0kgf) Moment Stiffness [ /N cm] Lost Motion [ ] Backlash [ ] Parallelism [μm] Concentricity [μm] 0 0 Wobble [mm] Part Number Micro Photoelectric : PM-U (SUNX Co., Ltd.) Micro Photo : PM-R (SUNX Co., Ltd.) Limit Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin None None Proximity Origin None None / Type -phase stepping motor.a/phase (Tamagawa Seiki Co., Ltd.) Part Number TS6NE ( mm) Step Angle 0. Power Voltage DC V ±0% Current Consumption ma or lower Control Output NPN open collector output DC0V or lower, ma or lower Output Logic When shaded: Output transistor OFF Compatible Driver / Controller Compatible Driver SG-M*, SG-M*, SG-MSC*, MC-PCL (* DC6V) Control System Compatible Controller SHOT-0GS, SHOT-0GS G0

6 Catalog Code W0 Outline Drawing KST-0YAW Hexagon socket head cap screw M6 screws (.) KST-YAW Hexagon socket head cap screw M6 screws (6) () () ( ) () () mounting hole ( ) 0 () -M depth 6 P.C.D M depth 0 (.) -M depth 0 P.C.D. -M6 depth P.C.D mounting hole -M6 depth (). - mounting hole (.).. 0 Connection Diagram 6 0 Note Connector Pin Number Hirose Electric Co., Ltd. SDAB-P equivalent lead lead lead lead lead 6 GND VS N.C. (not used) 0 N.C. (not used) Machine origin sensor (CW ) GND N.C. (not used) Machine Origin Detection MINI System When the machine origin detection command is issued, the stage starts traveling in the CW (-) direction at the operating speed (F) set with the memory switch, and stops by the CW (-) side. Then it travels in the CCW (+) direction at the operating speed (F) for 0 pulses. After stop, it starts traveling in the CW (-) direction again at the starting speed (S), and stops by the CW (-) side. After that, it travels in the CCW (+) direction at the operating speed (F) for 0 pulses. This position is regarded as the machine origin. -Phase Stepping E phase D phase SUNX Co., Ltd. Micro photo sensor 0YAW PM-U YAW PM-R Machine origin sensor (CW ) Note Compatible cable connector: DDK Ltd. JE- C phase Operating speed (F) CW ( ) Operating speed (F) 0 pulse travel CCW ( ) Starting speed (S) CW ( ) Operating speed (F) 0 pulse travel CCW ( ) CW ( ) side A phase B phase Compatible Controllers / Drivers and Controller SHOT-0GS [ axes] SHOT-0GS [ axes] Driver Drivers G0 G00 G0 DDA-CA DAC-SG KST-0YAW KST-YAW mm WEB international@sigma-koki.com TEL FAX G0

7 Motion Control Products High Durability ized Rotation HDS-YAW It is a small angle adjusting automatic rotation stages using in the alignments for a marker of semiconductor wafer. Good for the automatic alignment device which needs for adjusting the small angle of rotation by each sample. By using the ball screw system on the drive mechanism, it can reduce abrasion and backlash of parts which realized high durability. Since it converted linear motion by the ball screw into rotational motion by the steel belt, there is no difference between traveling center and end by rotation speed and resolution. Rotation range CCW (+) CW ( ) HDS-YAW, HDS-0YAW Counterclockwise CCW Direction (+) Stop on + HDS-0YAW Counterclockwise CCW Direction (+) Stop on +6 HDS-YAW, HDS-0YAW Clockwise CW Direction (-) Stop on - HDS-0YAW Clockwise CW Direction (-) Stop on -6 Attention Please be mounted HDS series in horizontal. Can not be guaranteed the performance if used in reversion on the roof or vertically situation. If you would like a special mounting, please contact our sales department. mm Part Number HDS-YAW HDS-0YAW HDS-0YAW Mechanical Rotation Range ± ± ±6 Table Size [mm] φ φ0 φ0 Travel Mechanism Ball screw with steel belt Ball screw with steel belt Ball screw with steel belt Positioning Slide Bearing method Bearing method Crossed roller guide Material Aluminum Aluminum Aluminum Finish Black anodized Black anodized Black anodized Weight [kg] Resolution (Full) [ /pulse] (Half) [ /pulse] MAX Speed [ /sec] Positioning [ ] Positional Repeatability [ ] Load Capacity [N]. (.0kgf). (.0kgf) (0kgf) Moment Stiffness [ /N cm] Lost Motion [ ] Backlash [ ] Parallelism [μm] Concentricity [μm] Wobble [mm] Part Number Micro photo sensor: GPS0HCZ(Sharp Corporation) Limit Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Proximity Origin None None None / Type -phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.) -phase stepping motor 0.A/phase (Oriental Co., Ltd.) Part Number TS66N ( mm) C6-0P ( mm) Step Angle 0. Power Voltage DC - V±0% Current Consumption ma or lower (0mA per sensor) Control Output NPN open collector output DC0V or lower, ma or lower Output Logic When shaded: Output transistor OFF (no conduction): Limit sensor When shaded: Output transistor ON (conduction): Origin sensor Compatible Driver / Controller Compatible Driver SG-M, SG-MA, SG-M, SG-MA, SG-MSC Control System Compatible Controller GSC-0, GIP-0, GSC-0, SHOT-0, SHOT-0GS, SHOT-0GS, HIT-M HIT-S, PGC-0 G00

8 Catalog Code W0 Outline Drawing HDS-YAW Hexagon socket head cap screw M screws (6) ( ) HDS-0YAW Hexagon socket head cap screw M screws () ( ) (0.). -M depth. P.C.D.. 0 -M depth.. 0 -M depth -M depth 0 -M depth P.C.D HDS-0YAW Hexagon socket head cap screw M6 screws -. mounting hole (6) mounting hole. counterbore 6 ( ) (6.) 0 -M depth 6 -M depth 6 P.C.D mounting hole counterbore Connection Diagram 6 0 Note Connector Pin Number Hirose Electric Co., Ltd. RP-R-SC lead lead lead lead lead 6 ORG Power source V GND (0V) LS (+) 0 LS ( ) FG FG -Phase Stepping E-Phase A phase D-Phase B-Phase C-Phase Originside (ORG) ON when shaded Opposite side ( ) Note Sharp Corporation Micro photo sensor side (+) GPS0HCZ0F Note Compatible Controllers / Drivers and Controller GSC-0 [ axis] GSC-0 [ axes] SHOT-0 [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-0GS [ axes] HIT-M/HIT-S [ axes] PGC-0 [ axes] G0 G0 Driver Drivers DRP-CA HDS-YAW HDS-0YAW HDS-0YAW mm Note The motor side is the (+) forward direction. Note Compatible cable connector: Hirose Electric Co., Ltd. RP-PA-PC/RP-PC- G00 G0 MINI-CA-SG WEB international@sigma-koki.com TEL FAX G0

9 Motion Control Products ized Extended OSMS-0A size High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy and durability. Their smooth movement is ideal for frequent angle adjustment. Cost-effective motorized stages achieved by integrated structure in which guides are directly processed on the main body to reduce the number of parts and assembly time. (accessories) are ideal for positioning when assembling into αβ axis or mounting on various instruments or devices. Contact our International Sales Division if you desire to assemble into an αβ axis stage. Contact our International Sales Division if you desire a rotation center height not listed in the catalog. type (GOHT-0) is also available. E6 GOHT-0 mm Part Number OSMS-0A OSMS-0A (Opposite Model) OSMS-0AR OSMS-0AR Mechanical Size Tolerance Travel [ ] ± ± Table Size [mm] Travel Mechanism (reduction ratio) Worm gear (: ) Worm gear (: 06) Positioning Slide Extended Contact Ball Extended Contact Ball Material SUS0C quench hardened SUS0C quench hardened Finish Super black chrome Super black chrome Weight [kg] Height [mm] Rotation Center Height [mm] ±0. ±0. Rotation Center Deflection [mm] Within φ0.0 Within φ0.0 (Full) [ /pulse] about 0.00 about 0.00 Resolution (Half) [ /pulse] about about MAX Speed [ /sec] 0. Positional Repeatability [ ] ±0.00 ±0.00 Load Capacity [N].6(.0kgf).6(.0kgf) Moment Stiffness [ /N cm] Roll 0.6 Yaw 0.6 Roll 0.6 Yaw 0.6 Lost Motion [ ] Part Number Micro photo sensor: GPS0HCPIF(Sharp Corporation): Limit Limit Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin None None / Type -phase stepping motor 0.A/phase (Oriental Co., Ltd.) Part Number PKHPB-C ( mm) Step Angle 0. Power Voltage DC - V - +V Current Consumption 0mA or lower (0mA per sensor) Control Output NPN open collector output ma Output Logic When shaded: Output transistor OFF (no conduction) Compatible Driver / Controller Compatible Driver SG-M, SG-MA, SG-M, SG-MA, SG-MSC, MC-PCL Control System Compatible Controller GSC-0, SHOT-0, GIP-0, SHOT-0GS, SHOT-0GS, HIT-M HIT-S, PGC-0 G0

10 Catalog Code W0 Outline Drawing OSMS-0A () (.6). (.). Mdepth Mdepth H Hexagon socket head cap screw M 6 screws, (.6) 6-Mdepth Mdepth (.) (0) -. mounting hole 6 counterbore OSMS-0AR -. mounting hole 6 counterbore Hexagon socket head cap screw M 6 screws, (.) (.6) 0. 6-Mdepth 6 6 Mdepth Mdepth 0 (.) (0) 6 6 Mdepth H () (.6). OSMS-0A () Hexagon socket head cap screw M 6 screws, (.). 0 (.6) Mdepth Mdepth Mdepth OSMS-0AR Hexagon socket head cap screw M 6 screws, (.6) 6-Mdepth Mdepth (.). Mdepth () Mdepth (.) (.) Mdepth (.6). H (0) -. mounting hole 6 counterbore -. mounting hole 6 counterbore (0) H. (.6) Connection Diagram Connector Pin Number Hirose Electric Co., Ltd. RP-R-SD lead lead lead lead lead 6 6 N.C. (not used) 0 0 VS ~VDC GND (0V) LS (+) LS ( ) N.C. (not used) N.C. (not used) Note -Phase Stepping E-Phase D-Phase C-Phase A phase B-Phase side (+) Note Sharp Corporation Micro photo sensor GPS0HCPI Opposite side ( ) ON when shaded Note Note The motor side is the + direction. ized stages are not fitted with origin and proximity origin sensors. Limit sensors are used as origin detection sensors. Note Compatible cable connector: Hirose Electric Co., Ltd. RP-PA-PC/RP-PC- Compatible Controllers / Drivers and Controller GSC-0 [ axis] GSC-0 [ axes] SHOT-0 [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-0GS [ axes] HIT-M/HIT-S [ axes] PGC-0 [ axes] G0 G0 Driver Drivers G00 G0 DRP-CA MINI-CA-SG OSMS-0A mm WEB international@sigma-koki.com TEL FAX G0

11 Motion Control Products ized Extended OSMS-A size mm High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy and durability. Their smooth movement is ideal for frequent angle adjustment. Cost-effective motorized stages achieved by integrated structure in which guides are directly processed on the main body to reduce the number of parts and assembly time. (accessories) are ideal for positioning when assembling into αβ axis or mounting on various instruments or devices. Contact our International Sales Division if you desire to assemble into an αβ axis stage. type (GOHT-) is also available. E GOHT- mm Part Number OSMS-A OSMS-A OSMS-A0 (Opposite Model) OSMS-AR OSMS-AR OSMS-A0R Mechanical Size Tolerance Travel [ ] ± ± ± Table Size [mm] Travel Mechanism (reduction ratio) Worm gear (: 6) Worm gear (: ) Worm gear (: 0) Positioning Slide Extended Contact Ball Extended Contact Ball Extended Contact Ball Material SUS0C quench hardened SUS0C quench hardened SUS0C quench hardened Finish Super black chrome Super black chrome Super black chrome Weight [kg] Height [mm] 0 0 Rotation Center Height [mm] ±0. ±0. 0±0. Rotation Center Deflection [mm] Within φ0.0 Within φ0.0 Within φ0.0 (Full) [ /pulse] about 0.00 about 0.00 about 0.00 Resolution (Half) [ /pulse] about about 0.00 about MAX Speed [ /sec] Positional Repeatability [ ] ±0.00 ±0.00 ±0.00 Load Capacity [N].(.0kgf). (.0kgf). (.0kgf) Moment Stiffness [ /N cm] Roll 0. Yaw 0. Roll 0. Yaw 0. Roll 0. Yaw 0. Lost Motion [ ] Part Number Micro photo sensor: GPS0HCZ0F(Sharp Corporation): Limit, Origin Limit Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) / Type -phase stepping motor 0.A/phase (Oriental Co., Ltd.) Part Number PKHPB-C ( mm) Step Angle 0. Power Voltage DC - V - +V Current Consumption ma or lower (0mA per sensor) Control Output NPN open collector output ma Output Logic When shaded: Output transistor OFF (no conduction): Limit sensor When shaded: Output transistor ON (conduction): Origin sensor Compatible Driver / Controller Compatible Driver SG-M, SG-MA, SG-M, SG-MA, SG-MSC, MC-PCL Control System Compatible Controller GSC-0, SHOT-0, GIP-0, SHOT-0GS, SHOT-0GS, HIT-M HIT-S, PGC-0 G0

12 Catalog Code W00 Outline Drawing OSMS-A Hexagon socket head cap screw M 6 screws, (.) 0 (.) M depth -M depth M depth OSMS-AR Hexagon socket head cap screw M 6 screws, (.) (.) 0 M depth M depth -M depth (6) (6) (.) M depth 6-M depth (.) 6-M depth M depth (.6). OSMS-A H () Hexagon socket head cap screw M 6 screws, (.) 0 (.) M depth 6-M depth -M depth M depth -. mounting hole -. mounting hole OSMS-AR () H. (.6) Hexagon socket head cap screw M 6 screws, (.) (.) 0 6-M depth M depth M depth -M depth (6) M depth M depth (6) (.) (.) (.6). H OSMS-A0 (6) () 0 Hexagon socket head cap screw M 6 screws, (.) 0 (.) M depth 6-M depth -M depth M depth -. mounting hole -. mounting hole OSMS-A0R () 0 H. (.6) Hexagon socket head cap screw M 6 screws, (.) (.) 0 6-M depth M depth M depth -M depth (6) M depth M depth (.6). (.) (.) lead lead lead lead lead 6 ORG +VS VDC GND (0V) LS (+) 0 LS ( ) FG FG H Connector Pin Number Hirose Electric Co., Ltd. RP-R-SD Connection Diagram 6 0 Note () 0 0 -Phase Stepping E-Phase D-Phase Originside (ORG) ON when shaded Opposite side ( ) Note side (+) Note -. mounting hole C-Phase A phase B-Phase Sharp Corporation Micro photo sensor GPS0HCZ0F -. mounting hole Compatible Controllers / Drivers and Controller GSC-0 [ axis] GSC-0 [ axes] SHOT-0 [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-0GS [ axes] HIT-M/HIT-S [ axes] PGC-0 [ axes] G0 G0 Driver Drivers 0 0 () DRP-CA H. (.6) OSMS-A mm Note The motor side is the + direction. ized stages are not fitted with proximity origin sensors. Note Compatible cable connector: Hirose Electric Co., Ltd. RP-PA-PC/RP-PC- G00 G0 MINI-CA-SG WEB international@sigma-koki.com TEL FAX G0

13 Motion Control Products ized s - Phase SGSP-A size mm Stepping motor driven motorized goniometer stages fitted with crossed roller guide. High stiffness goniometer stages fitted with excellent abrasion-resistant crossed roller guide. height from the table face is selectable according to the usage from mm, mm or 0mm. After purchasing two α axis stages, to assemble them into an αβ axis stage, assembly adjustment cost and performance inspection cost will be charged separately. mm Part Number SGSP-A SGSP-A SGSP-A0 Mechanical Size Tolerance Angle Range [ ] ± ± ± Table Size [mm] Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide Travel Mechanism Worm and worm wheel Worm and worm wheel Worm and worm wheel Material Aluminum Aluminum Aluminum Finish Black anodized Black anodized Black anodized Weight [kg] Height [mm] 0 Rotation Center Height [mm] 0 Rotation Center Deflection [mm] φ0.0 φ0.0 φ0.0 (Full) [ /pulse] about 0.00 about 0.00 about 0.00 Resolution (Half) [ /pulse] about 0.00 about about MAX Speed [ /sec] Positional Repeatability [ ] ±0.00 ±0.00 ±0.00 Load Capacity [N]. (.kgf). (.kgf). (.kgf) Moment Stiffness [ /N cm] Lost Motion [ ] Part Number Micro photo sensor: GPS0HCPI(Sharp Corporation) Limit Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin None None None Proximity Origin None None None / Type -phase stepping motor 0.A/phase (Oriental Co., Ltd.) Part Number C6-0P Step Angle 0. Power Voltage DC - V Current Consumption 0mA or lower (0mA per sensor) Control Output NPN open collector output ma Output Logic When shaded: Output transistor OFF (no conduction) Compatible Driver / Controller Compatible Driver SG-M, SG-M, SG-MSC Control System Compatible Controller GSC-0, GSC-0, SHOT-0, GIP-0, SHOT-0GS, SHOT-0GS, HIT-M HIT-S G06

14 Catalog Code W0 Outline Drawing SGSP-A SGSP-A Hexagonal socket head cap screw M screws Hexagonal socket head cap screw M screws () () -M depth -M depth (.) (.6) (.) (.6) (.) (6.). 0. () -. mounting hole (.) (.) mounting hole SGSP-A0 Hexagonal socket head cap screw M screws () -M depth (.) (.6) () -. mounting hole Connection Diagram Connector Pin Number Hirose Electric Co., Ltd. RP-RA-SD lead lead lead lead lead 6 6 N.C. (not used) 0 0 VS VDC GND (0V) LS (+) LS ( ) N.C. (not used) N.C. (not used) Note -Phase Stepping E phase D phase C phase A phase B phase side ( ) Note Sharp Corporation Micro photo sensor GPS0HCPI Opposite side ( ) Note Compatible Controllers / Drivers and Controller GSC-0 [ axis] GSC-0 [ axes] SHOT-0 [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-0GS [ axes] HIT-M/HIT-S [ axes] G0 G0 Driver Drivers DRP-CA SGSP-A mm Note The motor side is the + direction. Note Compatible cable connector: Hirose Electric Co., Ltd. PR-PA-PC/RP-PC- G00 G0 MINI-CA-SG WEB international@sigma-koki.com TEL FAX G0

15 Motion Control Products ized s - Phase SGSP-B size mm Stepping motor driven motorized goniometer stages fitted with crossed roller guide. Combination of two axes of excellent abrasion-resistant z stages enables flexible alignment. height from the table face is selectable according to the usage from mm or mm. Attention Assembly was adjusted for precision of both α and β axis stages. Note that if you disassemble the two axes, they might not work normally and may require assembly readjustment by us. Part Number SGSP-B SGSP-B Mechanical Size Tolerance Angle Range [ ] (Upper) β axis: ± β axis: ± (Lower) α axis: ± α axis: ± Table Size [mm] Positioning Slide Crossed roller Crossed roller Travel Mechanism Worm and worm wheel Worm and worm wheel Material Aluminum Aluminum Finish Black anodized Black anodized Weight [kg].0 ( axes).0 ( axes) Height [mm] 6 Rotation Center Height [mm] Rotation Center Deflection [mm] Resolution (Full) [ /pulse] α axis: about 0.00, β axis: about 0.00 α axis: about 0.00, β axis: about 0.00 (Half) [ /pulse] α axis: about 0.000, β axis: about 0.00 α axis: about 0.000, β axis: about MAX Speed [ /sec] 6 6 Positional Repeatability [ ] Within ±0.00 Within ±0.00 Load Capacity [N]. (.kgf). (.kgf) Moment Stiffness [ /N cm] Lost Motion [ ] Part Number GPS0HCPI (Sharp Corporation) Limit Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin None None Proximity Origin None None mm / Type -phase stepping motor 0.A/phase (Oriental Co., Ltd.) Part Number C6-0P Step Angle 0. Power Voltage DC V Current Consumption 0mA or lower (0mA per sensor) Control Output NPN open collector output ma Output Logic When shaded: Output transistor OFF (no conduction) Configuration Part Number SGSP-B SGSP-B (Upper) β axis SGSP-A SGSP-A (Lower) α axis SGSP-A SGSP-A0 (Reference) Precision of Single Axis Part Number SGSP-A SGSP-A SGSP-A0 Positional Repeatability [ ] ±0.00 ±0.00 ±0.00 Moment Stiffness [ /N cm] Lost Motion [ ] Compatible Driver / Controller Compatible Driver SG-M, SG-M, SG-MSC Control System Compatible Controller GSC-0, GSC-0, SHOT-0, SHOT-0GS, SHOT-0GS, HIT-M HIT-S G0

16 Catalog Code W0 Outline Drawing SGSP-B (.) (.6) Hexagonal socket head cap screw M screws SGSP-B (.) (.6) Hexagonal socket head cap screw M screws (.) (.6) () () -M depth (.) (.6) () () -M depth (.). (6.) (.) (.) 6 (.6). (.) (6.) () -. mounting hole () 6.. () -. mounting hole () Connection Diagram Connector Pin Number Hirose Electric Co., Ltd. RP-RA-SD lead lead lead lead lead 6 6 N.C. (not used) 0 0 VS VDC GND (0V) LS (+) LS ( ) N.C. (not used) N.C. (not used) Note -Phase Stepping E phase D phase C phase A phase B phase side ( ) Note Sharp Corporation Micro photo sensor GPS0HCPI Opposite side ( ) Note Compatible Controllers / Drivers and Controller GSC-0 [ axis] GSC-0 [ axes] SHOT-0 [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-0GS [ axes] HIT-M/HIT-S [ axes] G0 G0 Driver Drivers DRP-CA SGSP-B mm Note The motor side is the + direction. Note Compatible cable connector: Hirose Electric Co., Ltd. PR-PA-PC/RP-PC- G00 G0 MINI-CA-SG WEB international@sigma-koki.com TEL FAX G0