Motorized Rotation Stages

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1 Motorized Rotation Stages ~0mm Table mm Table Worm & Worm Wheel, Aluminum Body, Bearing mm Table Worm & Worm Wheel, Aluminum Body, Bearing mm Table Worm & Worm Wheel, Aluminum Body, Bearing 182 Tangent-Bar, Aluminum Body, Cross-Roller Bearing 184 1mm Table Worm & Worm Wheel, Aluminum Body, Bearing mm Table Worm & Worm Wheel, Aluminum Body, Bearing 186 0mm Table Worm & Worm Wheel, Aluminum Body, Bearing 186

2 Understanding Rotation Stage Specifications RA07A-W Motorized Rotation Stages Specifications Table Size 68mm Guide Mechanism Bearing Motion Range 135 Lead Mechanism Worm & Worm Wheel / step (Half Step) 20 / sec Accumulated Lead Error / 3 Lost Motion Angular Repeatability 0.01 Pitch Error 0.01 / 4 Backlash 0.02 Surface Run out 0.02 / 3 Eccentricity 0.01mm Moment Load Stiffness 7 arcsec / kgf-cm Load Capacity (Horizontal) 6kg Material Aluminum Alloy Finish Clear-Matte Anodizing Weight 1.65kg Description 1. Kohzu's significant alpha-numeric model numbers offer quick product insight. 2. Table size refers to the stage's upper-most mounting surface. 3. Type of bearing mechanism used on this stage. 4. Stage travel range in the positive and negative directions from it's centered or neutral position. 5. Feeding Mechanism and feed screw pitch. 6. of standard stage (half step). 7. of standard stage (half step, 10kpps). 8. See "Kohzu Stage Inspection Standards" section, page See "Kohzu Stage Inspection Standards" section, page See "Kohzu Stage Inspection Standards" section, page See "Kohzu Stage Inspection Standards" section, page See "Kohzu Stage Inspection Standards" section, page See "Kohzu Stage Inspection Standards" section, page See "Kohzu Stage Inspection Standards" section, page Moment load stiffness is measured in a direction perpendicular to the motion axis. See page Maximum load capacity is for a horizontally orientated stage with load centered on top-plate. 17. Material specification is for stage's main body components only. 18. Surface finish type and color. 19. Stage weight includes all components depicted in product photograph. Standard Motor Standard Connector Five (5) phase stepper motor PX535MH-B RP13A-12RA-20PC 20. Actuator type of standard stage. 21. Connector type of standard stage. See page 216. Guide Mechanism Type Angular Bearing The angular bearing has a contact angle appropriate to receive a unidirectional axial load or a combined radial and axial load (see Fig. 1). To use this bearing as a guide system, set two bearings face-to-face on opposite sides. This arrangement provides rigidity for loads both in the radial and axial directions. Contact Angle Fig.1 178

3 Cross-Roller Bearing In cross-roller bearing guides quench hardened and precision ground bearing surfaces move upon loose hardened steel cylinders (rollers) with rotation axes oriented in alternating 90 degree angles (Ref. Fig.1). Having rollers arranged in an alternating cross pattern allows preloading and operation at any angle. The roller bearings are held apart from one another by a bearing cage, which prevents adjacent rollers from touching. Since cross-roller bearings have little difference between static and dynamic friction they minimize start-to-stop slip-motion typical of other bearing types. The line contact of roller bearings along with precise roller-to-race gap management provide larger load-bearing surfaces, higher preloads and meet very tight run out and stiffness specifications. Feeding Mechanism Worm Shaft & Worm Wheel The worm wheel is ground at high precision and the worm shaft was processed with a precision abrasive finish (see Fig. 3). Worm wheel Worm shaft Fig.3 Tangent-Bar System (Ball Screw) This is the optimum feed system when the rotation range is small (5 to 10 ) but a fine rotary movement at a high resolution is required. Rotary movement is generated by applying linear displacement to the bar tip extending from the rotary axis in the tangential direction by means of a ball screw. of stage RA05A-W, RA07A-W, RA10A-W are calculated based on the following formula. = /nm n m Basic step angle of motor n Reduction ratio of Worm shaft and Worm wheel m Division number of micro-step The minimum resolution described in this catalog is calculated with two (2) divisions of the standard motor step (half-step, where the value of m is 2). RA05A-W RA07A-W RA10A-W RA16A-W of tangent-bar style stage RA10A-T is calculated based on the formula below. P = tan -1 ( 3 R m ) n m ( / pulse) Resolution ( / p) Basic step angular of motor P Feed screw pitch R Length of tangent-bar (mm) m Division number of micro-step In the case of RA10A-T : R=108mm. The minimum resolution described in this catalog is calculated with two (2) divisions of the standard motor step (half-step, where the value of m is 2). Maximum speed depends on individual motor torque characteristics. However, we calculate maximum speed at 10kpps with motor in half-step mode. Fig.2 Motorized Rotation Stages Precision Positioning Stages CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 179

4 Motorized Rotation Stages / ~70 mm Table RA05A-W RA07A-W Motorized Rotation stages are fitted with Worm shaft & Worm wheel, and precision bearing. Stage body is made of Aluminum and finished with a clear-matte anodizing. Motorized Rotation stages are fitted with Five (5) phase stepper motor. Uses SC-Series motor controller, see page 206. Motorized Rotation Stages Specifications Table Size Guide Mechanism Motion Range Lead Mechanism Accumulated Lead Error Lost Motion Angular Repeatability Pitch Error Backlash Surface Run out Eccentricity Moment Load Stiffness Load Capacity (Horizontal) Material Finish Weight Standard Motor Standard Connector RA05A-W RA07A-W 49mm 68mm Bearing Worm & Worm Wheel / step (Half Step) 20 / sec 0.02 / / / / / mm 11 arcsec / kgf-cm 7 arcsec / kgf-cm 4kg 6kg Aluminum Alloy Clear-Matte Anodizing 900g 1.65kg Five (5) phase stepper motor PX535MH-B RP13A-12RA-20PC Motor exchange is available on request. We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange Lubricant Type Sample Modification Cost Clean Room Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot Vacuum RA05A-W-C RA05A-W-R-C RA05A-W-V RA05A-W-R-V be guaranteed. 2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. 180

5 Worm & Worm Wheel, Aluminum Body, Bearing RA05A-W RA07A-W Motorized Rotation Stages Precision Positioning Stages CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 181

6 Motorized Rotation Stages / 100~1 mm Table RA10A-W RA16A-W Motorized Rotation stages are fitted with Worm shaft & Worm wheel, and precision bearing. Stage body is made of Aluminum and finished with a clear-matte anodizing. Motorized Rotation stages are fitted with Five (5) phase stepper motor. Uses SC-Series motor controller, see page 206. Motorized Rotation Stages Specifications Table Size Guide Mechanism Motion Range Lead Mechanism Accumulated Lead Error Lost Motion Angular Repeatability Pitch Error Backlash Surface Run out Eccentricity Moment Load Stiffness Load Capacity (Horizontal) Material Finish Weight Standard Motor Standard Connector RA10A-W RA16A-W 98mm 1mm Bearing Worm & Worm Wheel / step (Half Step) 20 / sec / / / / arcsec / kgf-cm 0.7 arcsec / kgf-cm 10kg 20kg Aluminum Alloy Clear-Matte Anodizing 2.9kg 8.5kg Five (5) phase stepper motor Five (5) phase stepper motor PK545-B PK566-B P-1620BAP-1620A-STA Motor exchange is available on request. We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange Lubricant Type Sample Modification Cost Clean Room Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot Vacuum RA10A-W-C RA10A-W-R-C RA10A-W-V RA10A-W-R-V be guaranteed. 2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. 182

7 Worm & Worm Wheel, Aluminum Body, Bearing RA10A-W RA16A-W Motorized Rotation Stages Precision Positioning Stages CONTACT TEL: FAX: [ ] info@kohzu.com [URL] 183

8 Motorized Rotation Stages / 100 mm Table RA10A-T Motorized Rotation Stages Motorized Rotation stage is fitted with a Tangent-bar, and precision cross-roller bearing. Tangent-bar mechanism provides optimum performance for high resolution applications. Stage body is made of Aluminum and finished with a clear-matte anodizing. Motorized Rotation stage is fitted with Five (5) phase stepper motor. Uses SC-Series motor controller, see page 206. Specifications Table Size Guide Mechanism Motion Range Lead Mechanism Accumulated Lead Error Lost Motion Angular Repeatability Pitch Error Backlash Surface Run out Eccentricity Moment Load Stiffness Load Capacity (Horizontal) Material Finish Weight Standard Motor Standard Connector RA10A-T 100mm Cross-Roller Bearing 3 Tangent-bar system / step (Half Step) 2.65 / sec mm / 3 1 arcsec / kgf-cm 0.005mm / 3 10kg Aluminum Alloy Clear-Matte Anodizing 3.2kg Five (5) phase stepper motor (PX535MH-B) P-1620BA, P-1620A-STA Motor exchange is available on request. We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange Lubricant Type Sample Modification Cost Clean Room Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot Vacuum RA10A-T-C RA10A-T-R-C RA10A-T-V RA10A-T-R-V be guaranteed. 2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. 184

9 Tangent-Bar System, Aluminum Body, Cross-Roller Bearing RA10A-T Motorized Rotation Stages Precision Positioning Stages CONTACT TEL: FAX: [ ] [URL] 185

10 Motorized Rotation Stages / 200~0 mm Table / Worm & Worm Wheel, Aluminum Body, Bearing RA20A-W Build-To-Order RAA-W Build-To-Order Motorized Rotation Stages Specifications Table Size Guide Mechanism RA20A-W 176mm Bearing RAA-W 274mm Motion Range Lead Mechanism Worm & Worm Wheel / step (Half Step) / step (Half Step) Accumulated Lead Error Pitch Error Angular Repeatability 20 / sec 0.01 / / / sec / / Eccentricity Surface Run out 0.01mm 0.02mm / 3 Backlash Lost Motion Moment Load Stiffness Load Capacity (Horizontal) arcsec / kgf-cm 25kg arcsec / kgf-cm kg Material Finish Aluminum Alloy Clear-Matte Anodizing Weight Standard Motor 15kg Five (5) phase stepper motor (PK566-B) 41.5kg Five (5) phase stepper motor (PK596-B) Standard Connector P-1620BA, P-1620A-STA Motor exchange is available on request. We offer custom products such as vacuum stages, clean room stages, and many other modifications. 186 CONTACT TEL: FAX: [ ] info@kohzu.com [URL]

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