LASER PROCESSING LASER PROCESSING SOLUTIONS FOR HIGH-TECH PRODUCTION KEY TECHNOLOGIES FOR MULTIPLE INDUSTRIES

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1 LASER PROCESSING LASER PROCESSING SOLUTIONS FOR HIGH-TECH PRODUCTION KEY TECHNOLOGIES FOR MULTIPLE INDUSTRIES

2 MANZ AG /// LASER PROCESSING SOLUTIONS /// 2 REALIZING UNIQUE LASER PROCESSING SOLUTIONS Manz has a long-term experience and exceptional expertise in various laser applications With a long-term experience in the field of advanced laser technology solutions, Manz is in a market leading position for laser processes in micro-machining for various applications, such as cutting, scribing and ablating layers like compound semiconductors, metals or dielectric layers. In addition to these applications, Manz offers laser equipment and solutions for drilling, cutting, welding, and ablation of large areas. Manz laser tools demonstrate lowest non-productive times due to on-line alignment, loading and unloading in parallel, as well as ease of maintenance. The modular machine concept and the close collaboration between the Manz R&D team and leading German laser research institutes in the fields of laser sources and optics, enable short delivery times, very fast prototyping and a stable serial production. PV MODULES: THIN-FILM ANNEALING DISPLAYS: SILICON CRYSTALLIZATION LI-ION BATTERIES: LASER WELDING OF BATTERY CANS AND CONDUCTORS ELECTRONIC DEVICES: LASER WELDING OF HOUSINGS, STIFFENERS RTP WELDING LASER ABLATION AUTOMATION LASER SYSTEMS PROCESS VISION OPTICS DRILLING PV MODULES: LASER SCRIBING, LASER EDGE ABLATION, REAR CONTACT OPENING DISPLAYS: ITO, METAL SCRIBING CUTTING LI-ION BATTERIES: LASER CUTTING OF ELECTRODES AND SEPARATOR PV MODULES: LASER GLASS CUTTING ELECTRONIC DEVICES: LASER CUTTING OF CERAMICS AND STRENGTHENED GLASS OTHER PRODUCTS: LASER CUTTING OF TEXTILES AND ORGANIC FILMS PV MODULES: LASER DRILLING OF PRESSURE EXCHANGE HOLES AND CONNECTOR VIAS IN GLASS DISPLAYS: LASER DRILLING OF SUBSTRATE CERAMICS ELECTRONIC DEVICES: LASER DRILLING OF CERAMICS AND CERAMIC FILMS

3 MANZ AG /// LASER TECHNOLOGIES /// 3 LASER TECHNOLOGIES LASER SYSTEMS Whether stand alone laser processing tools or laser processing stations in a fully automated interlinked production system, Manz knows the optimal solution. Regardless the laser process you need, Manz will always provide you with the latest technologies and with processes developed by skilled engineers with more than eight decades of cumulated knowledge. Manz laser ablation processing for highly efficient crystalline silicon solar cells ABLATION Products: Laser Ablation System, Laser Scribing System Laser ablation technologies are used in the production of thin-film solar modules and crystalline silicon solar cells and various other technology fields. Manz provides a complete portfolio of maximum throughput scribers for thin-film ablation on glass or flexible film, local contact opening of rear side passivation layers in the production of PERC solar cells, and for other processes with typical wafer-sized workpieces. For flat and touch panel applications, Manz offers maximum throughput scribers up to sheet sizes of 2.6 m x 2.2 m (Gen. 8.5). Laser cutting of thin-film solar modules CUTTING Products: Cutting and Slitting System for Flexible Material, Cutting System for Glass and Sapphire The Manz laser cutting portfolio covers cutting and slitting of flexible material such as battery electrodes and separators, cutting of brittle material such as sapphire, which is used in electronical devices, cutting of glass (float glass, as well as thermally or chemically strengthened glass), and cutting of sheet metal. Substrate sizes can range from 2" diameter wafers to Gen. 8.5 sheets, while workpiece sizes can range from square millimeters to square meters. DRILLING Products: Drilling System With inline and stand-alone drilling tools for architectural glass and photovoltaic substrates, high throughput special tools for drilling holes in covers of electronic Laser drilling of user-defined shapes and sizes possible

4 MANZ AG /// LASER TECHNOLOGIES /// 4 devices, and tools for the perforation of films and foils, Manz covers a wide range of drilling processes for holes and openings with user-defined shapes in either brittle or flexible material. RAPID THERMAL PROCESSING (RTP) Products: RTP System for Architectural Glass, RTP System for Displays Laser cutting during the production of Li-Ion batteries Manz provides RTP tools and processes both for coatings used in photovoltaics or on architectural glasses (e. g. TCO) and for coatings used in the display industry for producing flat panels and touch devices (e. g. ITO, Si). Rapid thermal processes can be applied on sheets up to Gen. 8.5 as well as on smaller sheets of individual sizes. WELDING Products: Welding System for Battery Cans, Bi-Metal Welding System for Battery Conductors, Micro-Welding System for Electronical Devices Laser welded battery can Manz has developed highly sophisticated welding processes which allow for unmatched joint qualities at minimized energy input. Welding processes include e. g. micro-joints on support constructions in electronic devices, bi-metallic micro- or macro-joints of battery conductors, and seal welds on battery cans. INTEGRATED OPTICAL SYSTEMS Products: Edge/Line Tracing System (IPCS), Autofocus, Top Hat, Beam Splitting, 3-D Scanning Manz has an exceptional expertise in developing processing heads, needed to master complex laser processes and to overcome workpiece and system tolerances either in-house or in co-operation with renowned system partners. Manz' customers benefit from in-depth experience and expert know-how in calculating, designing, and building processing optics including one or several features such as internal beam splitting, top hat generation, autofocus, edge/line tracing or compensation of the field curvature of large field telecentric F-Theta lenses. In addition, big emphasis is layed on an appropriate removal of processing debris or waist in order not only to avoid process perturbations, but also to avoid hazards to the environment or the health and safety of the operating staff. Laser glass cutting in various shapes and sizes

5 MANZ AG /// HIGH-TECH FOR A GREEN FUTURE /// Acquisition of the mechanical engineering division of Kemet Electronics Italy (formerly Arcotronics) for enlargement of technology portfolio in Battery division 2013 Establishment as leading equipment supplier for the touch panel production 2012 Acquisition of CIGS modules innovation line from Würth Solar Foundation of Manz CIGS Technology GmbH Inauguration of new facilities in Suzhou (China) with 20,000 sqm production capacity 2010 Foundation of Vacuum Process Technologies 2008 Additional technology know-how and production capacity through acquisition of Manz Automation Slovakia and Intech (Taiwan) 2006 IPO on Entry Standard market of the Frankfurt stock exchange 2005 Entry into the thin-film market with equipment for the mechanical scribing of solar modules 2000 Delivery of the first automation system for fully automated crystalline solar cell manufacturing lines Development of the first fully automated quality testing and sorting system for crystalline solar cells 1994 Delivery of the first automation solution for the FPD industry to Asia 1990 Development of the first automation system for processing crystalline solar cells in a pilot manufacturing project 1987 Foundation of Manz Automatisierungstechnik GmbH in Filderstadt, Germany MANZ AG German-based Manz AG is one of the world s leading technology providers for the production of electronic components and devices, solar cells and modules, and li-ion batteries. The presence of the Manz Group with production facilities in Germany, Slovakia, Hungary, Italy, China, and Taiwan, as well as worldwide service centers, guarantees short response and delivery times. The Manz Group s core competences are in automation, metrology, laser processing, vacuum coating, wet chemistry, printing & coating, and roll-to-roll. With its slogan passion for efficiency, Manz is making a promise to offer its customers all companies active in important future markets increasingly efficient production equipment. Like this, the company contributes significantly to reduce the production costs of end products and thereby making them available for a broad range of buyers worldwide. Therefore, Manz is continuously optimizing its product portfolio. The aim is to achieve highly reliable production processes on the customer side while steadily improving performance parameters for products manufactured on Manz equipment. This makes the Manz Group an important driver of innovation, helping to achieve breakthroughs in key technologies of our times, such as sustainable power generation, displays and devices for global communication needs and energy storage.

6 MANZ AG 02/2015 Manz AG Steigaeckerstrasse Reutlingen Germany Phone Fax Manz Taiwan Ltd. No. 3, Tsu Chiang 3rd Road, Chungli District, Taoyuan City, Taiwan Phone Fax Manz China Suzhou Ltd. No. 405, JiaLingJiang Road, Suzhou New District, Suzhou City, Jiang Su Province, China. Phone Fax

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