LINEAR STAGES ENGINEERED SYSTEMS CONTROLLERS ROBOTICS LINEAR ROTATION

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1 for more information see: I info@micos.ws I fon: +49-(0) I fax: +49-(0)

2 400 Ultra Precision Stage UPS-150 Linear Motor Travel range up to 305 mm (12") Maximum speed 600 mm/sec Load capacity up to 15 kg Ultra Precision Linear Stage UPM-160 Travel range up to 205 mm (8") Maximum speed 100 mm/sec Load capacity up to 35 kg High long-term stability XY-mounting 05/07 Errors and technical modifications are subject to change High Precision Stage HPS Travel range up to 305 mm (12") Maximum speed 90 mm/sec Load capacity up to 35 kg Option: Vacuum up to HV,

3 401 Linear Stage LS-270 Linear Motor Stage LMS-300 Travel range up to 1016 mm Maximum speed 150 mm/sec Load capacity up to 150 kg Linear Motor Travel range up to 815 mm (32") Maximum speed 800 mm/sec Load capacity up to 100 kg XY-mounting Linear Stage LS Travel range up to 815 mm Maximum speed 150 mm/sec Load capacity up to 100 kg 4.060

4 402 Linear Motor Stage LMS-180 Linear Motor Travel range up to 508 mm (20") Maximum speed 500 mm/sec Load capacity up to 45 kg XY-mounting Linear Stage LS Travel range up to 508 mm (20") Maximum speed 200 mm/sec Load capacity up to 100 kg 05/07 Errors and technical modifications are subject to change Linear Motor Stage LMS Linear Motor Travel range 40 mm Maximum speed 200 mm/sec Load capacity up to 2.5 kg XY-mounting

5 403 Linear Stage LS-120 Linear Stage LS-110 Travel range 40 mm (1.5") Maximum speed 90 mm/sec Load capacity up to 10 kg Travel range up to 305 mm Maximum speed 90 mm/sec Load capacity up to 10 kg Linear Motor Stage LMS Linear Motor Travel range up to 1000 mm Maximum speed 500 mm/sec Load capacity up to 20 kg XY-mounting 4.120

6 404 Linear Motor Stage LMS-80 Linear Motor Travel range 120 mm Maximum speed 500 mm/sec Load capacity up to 5 kg Integrated linear scale XY-mounting Linear Motor Stage LMS Linear Motor Travel range up to 65 mm Maximum speed 500 mm/sec Load capacity up to 3 kg Integrated linear scale XY-mounting 05/07 Errors and technical modifications are subject to change Precision Linear Stage PLS Travel range up to 102 mm (4") Maximum speed 100 mm/sec Load capacity up to 10 kg Optionally: linear scale

7 405 Linear Stage LS-65 Micro Stage MTS-65 Travel range up to 102 mm (4") Bi-directional repeatability down to +/- 5 µm Maximum speed 10 mm/sec Load capacity up to 2 kg Optionally 0.4 mm pitch Travel range up to 52 mm (2") Maximum speed 10 mm/sec Load capacity up to 2 kg Optionally: linear scale Micro Stage MTS Travel range 10 mm Maximum speed 7 mm/sec Load capacity up to 2 kg Optionally: linear scale 4.180

8 406 Linear Stage VT-75 Travel range up to 650 mm Bi-directional repeatability down to +/- 4 µm Maximum speed 100 mm/sec Load capacity up to 5 kg Linear Stage VT Travel range up to 100 mm Bi-directional repeatability down to +/- 4 µm Maximum speed 100 mm/sec Load capacity up to 1 kg 05/07 Errors and technical modifications are subject to change Translation Stage VT Travel range up to 300 mm +/- 1 µm Maximum speed 20 mm/sec Load capacity up to 5 kg 4.210

9 407 Linear Stage LS-40 Micro Stage MT-40 Travel range up to 52 mm Bi-directional repeatability down to +/- 2 µm Maximum speed 15 mm/sec High resolution Linear recirculating ball system Travel range up to 26 mm (1") +/- 2 µm Maximum speed 5 mm/sec Load capacity up to 1 kg High resolution Micro Stage MT Travel range 5 mm +/- 2 µm Maximum speed 1 mm/sec Load capacity up to 0.8 kg Center hole 15 mm High Resolution Ball bearings Option:, Vacuum up to FV 4.240

10 408 Cross Stage CS-430 Travel range 350x300 mm Maximum speed 100 mm/sec Load capacity up to 30 kg Scan Table MS Travel range 205 mm (8") Maximum speed 90 mm/sec Load capacity up to 4 kg Optionally: linear scale Clear aperture 205 x 205 mm Ball bearings 05/07 Errors and technical modifications are subject to change Scan Table MS Travel range 102 mm (4") Maximum speed 90 mm/sec Load capacity up to 3 kg Optionally: linear scale Clear aperture 100 mm Ball bearings

11 409 Scan Table KT-120 Travel range 26 mm (1") Bi-directional repeatability down to +/- 5 µm Maximum speed 3.5 mm/sec Load capacity up to 5 kg Nano Precision Elevation Stage NPE-200 Travel range 13 mm (1/2") +/ µm Maximum speed 0.2 mm/sec Load capacity up to 30 kg Ultra Precision Elevation Stage UPL-160 Travel range 26 mm (1") Maximum speed 30 mm/sec Load capacity up to 30 kg Clear aperture 45 mm Option: Vacuum up to FV

12 410 Elevation Stage ES-100 Travel range up to 26 mm (1") Maximum speed 20 mm/sec Load capacity up to 5.5 kg Higher load on request Option: Vacuum up to FV Elevation Stage ES Travel range 6.25 mm Bi-directional repeatability down to +/- 1 µm Maximum speed 0.14 mm/sec Load capacity up to 2 kg 05/07 Errors and technical modifications are subject to change Elevation Stage ES Travel range 26 mm (1") +/- 2 µm Maximum speed 20 mm/sec Load capacity up to 2 kg Ball bearings Option: Vacuum up to FV

13 411 Nano Pusher NP-40 Micro Actuator MA-35 Travel range 26 mm (1") Maximum speed 25 mm/sec Load capacity up to 1 kg Optionally: linear scale Non rotating tip Manual adjustment knob Option: Vacuum up to FV Travel range 52 mm (2") +/- 0.5 µm Maximum speed 100 mm/sec Force max. 200 N High resolution Micro Pusher MP-20 L Travel range up to 75 mm +/- 0.5 µm Maximum speed 3.5 mm/sec Force max. 125 N High resolution Including both inserts MP-B & MP-F 4.730

14 412 Micro Pusher MP-20 S Travel range 12.5 mm +/- 1 µm Maximum speed 3 mm/sec Force max. 20 N High resolution Micro Pusher MP Travel range up to 12.7 mm +/- 2 µm Maximum speed 0.16 mm/sec Force max. 10 N a choice of different interfaces like M6 05/07 Errors and technical modifications are subject to change Linear Piezo Stage LPS Travel range up to 13 mm (1/2") Maximum speed 2 mm/sec Load capacity up to 0.8 kg Integrated linear scale Piezo driven inertia motor Encoder resolution 5 nm Holding force 4 N Ball bearings

15 413 Piezo Positioner PP-30 Elevation Piezo Stage EPS-30 Travel range up to 30 mm Maximum speed 2 mm/sec Load capacity up to 1 kg Optionally: linear scale Piezo driven step motor, no hysteresis Holding force 4 N Ball bearings Option: Vacuum up to HV Travel range up to 13 mm (1/2") Maximum speed 1 mm/sec Load capacity up to 0.15 kg Piezo inertia drive Encoder resolution up to 5 nm Holding force 1.5 N Ball bearings