Resolutions of 0.1, 0.05, and 0.01 m (including special model)

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1 Scale unit LASERSCALE TM BLRU.RE.E Introducing the BL, a new Laserscale designed to meet nextgeneration needs by providing maximum performance in its class. The BL features highspeed response, superior accuracy, and high environmental resistance. BLRU BLRE BLE BLRU (Shield Type with Zero Point), BLRE (Open Type with Zero Point), BLE (Compact Open Type) Resolutions of.1,., and.1 m (including special model) A wide range of new Laserscales are offered shield type with zero point, open type with zero point, and lowexpansion glass open type and feature unrivaled ease of installation Head signal pitch of. m provides almost zero interpolation error Optical IC driven by the latest semiconductor technology are used for a compact, energy efficient design Typically not affected by changes in temperature, humidity, or air pressure, or by atmospheric fluctuations and uses lowexpansion glass for enhanced measurement stability (Compact, open type) Shield type design is noncontact, which eliminates mechanical errors Maximum speed of, mm/s (analog output) These products are manufactured at our Isehara Plant that is certified to ISO1 Quality Management System and ISO1 Environmental Management System.

2 These standards, specifications and exteriors are subject to change without prior notice for the purpose of incorporating technical improvements. Sony Precision Technology Inc. Toyo Building,17,ishigotanda chome,shinagawaku,tokyo,11 Japan Phone:+11 Fax:+1 Sony Precision Technology America, Inc. 1 Hermana Circle, Lake Forest, CA, USA Phone:+177 Fax:+177 Sony Precision Technology Europe GmbH HeinrichHertzStrasse 1, D77 Stuttgart, Germany Phone: Fax: This product uses a semiconductor laser (7 nm wavelength). Although the laser beam is not visible to the eye, it can cause an injury to the human body. Therefore, never look into the reader head. Printed on % recycled and recyclable paper Printed using VOC (volatile organic compound)free vegetable oil based ink..1.cx7bap SOY Catalog o.7

3 The BL range embodies a technological breakthrough in Sony's Lasescale design. Sony has dramatically reduced the overall size of its Laserscale by creating a new optical integrated circuit. All of the separate parts that make up the read head are now combined into one device. As a result, BL provides the highest level of precision and reliability at a reasonable price. Mounters Among its many possible uses, the BL is an excellent choice for the applications shown below. Precision machining applications Dicers FPD manufacturing Precision lathes Semiconductor applications Liquid crystal testing equipment Bonders Slicers Surface measurement Precision measurement testing applications Toolmaker s microscopes Magnetic head testers Electron microscopes Sony s new optical integrated circuitry allow superminiaturization (1/th the size of previous Sony models) Polarization beam splitter Amplifying circuit Semiconductor laser Integration Photodetector PREVIOUS DETECTORS Scale Mirror EW OPTICAL DEVICE High stability under environmental fluctuations High accuracy High accuracy (interpolation accuracy) Positional Change ( nm/div) 1. mb Effects due to Changes in Air Pressure. 1. Laser interferometer Laserscale Time (min). deg 1.. Error (µm) BL Scale length (mm) Error (µm) BL Scale length (mm) The Laserscale s unique principles prevent displacement from occurring due to the air pressure fluctuations that are characteristic of lasers. The noncontact structure of the head scale allows high repeatability and a low returning error. With the small signal wavelength of. µm, the interpolation error is practically nonexistant.

4 BLRU (Shield Type with Zero Point) Even though the shieldtype BL is enclosed, great care was taken to ensure a noncontact design, thus eliminating inherent mechanical errors. Also, the enclosure provides a higher resistance to harsh environments. All of the benefits Sony's Laserscale technology have been incorporated in an enclosed design High response speed and high accuracy at the top of its class Ideal for use on high precision machine tools Head signal pitch of. µm Offers userdefinable zero point reference for maximum flexibility Main standards and specifications Output signal form system Effective measurement length (mm) Scale length Mounting hole pitch Grating pitch Signal pitch Output signal Resolution Accuracy Linearity Returning error Repeatability Thermal expansion coefficient Maximum response speed Alarms Entire scale length BLRUF BLRUH A/B quadrature output Analog output Diffraction grating scanning system Differential (compliant with EIA).1/. µm. µm (1 Vpp) (can be changed by switch) 1 ±. µm (7 to mm) ±. µm (7 mm or more) (Accuracy per meter for more than 1 m of length) mm/s (.1 µm) mm/s (. µm) Minimum phase difference: ns Effective length + 11mm Effective length + 17mm 1. µm max.. µm max. Differential (zero point signal only is compliant with EIA) ±. µm.1 µm max..1 µm max. / C The output signal is high impedance when a response speed is exceeded or signal level error occurs. mm/s Max.: 7. MHz one Zero point Zero point accuracy Zero point output signal Cable length Head cable Bending radius Output cable length (to the electronic control section) Power supply Power consumption Protective design Vibration resistance Impact resistance Operating temperature range Storage temperature range Light source Radiation power 1:.1 µm resolution of AB quadrature output is special model. : The linearity is the range of scattering when scale accuracy slope is set to zero. : Please inquire about this matter separately since there is a correlation between the maximum response speed and output cable length. : Up to, mm can be supported for special model. BLRUF Error User definable ±. µm (at C) (depending on machine movement accuracy) 1, mm When stationary: mm When in motion: mm 1 m max. 1 m max. +V ±% Linearity BLRUH Unidirectional synchronous zero point (specify the and detection direction when ordering) ma (no load) ma (maximum when cable is connected) IP or equivalent (when air is supplied: IP or equivalent) m/s ( to Hz) m/s to + C (no condensation) to + C Two semiconductor lasers with power of mw and wavelength of 7 nm JIS Class 1 equivalent, DHHS Class 1 equivalent Designated accuracy Length BLRU External Dimensional Diagram φ.(m installation holes) F1 Effective length (L) + 17 Effective length (L) + 11 F. φ. (M installation holes) Effective length (L) mm F1 mm 7 7 F mm. For air supply φ1 Effective length (L) (.) 1 7 () () 1 1 1±.1.. elongated holes (M installation holes) φ. (M installation holes) 1.1 M.1 (ote 1). M..1 M. (ote ) Cable length: ote 1: Parallelism is. mm or less when effective length is mm or less. ote : Parallelism is. mm or less when effective length is 17 mm or less. ote : M indicates the machine guide (machine movement).. M.. M. Unit: mm

5 BLRE (Open Type with Zero Point) BL makes highly accurate ing affordable for anyone. With the linearity of ±1. µm or better, and a design that makes installation simple, the BLRE is an excellent choice for thousands of demanding applications. High response speed of up to, mm/s Can be supplied with either A/B quadrature or analog (1V pp) output Offers userdefinable zero point reference for maximum flexibility Measuring length available to 1, mm Main standards and specifications BLREF BLREH Output signal form A/B quadrature output Analog output system Diffraction grating scanning system Effective measurement length (mm) 1 7 Maximum movable length Effective length + mm Scale length Entire scale length Effective length + mm Grating pitch Signal pitch 1. µm. µm Output signal Resolution Accuracy Linearity Returning error Repeatability Thermal expansion coefficient Maximum response speed Differential (compliant with EIA).1/. µm (can be changed by switch) 1 ±. µm ( to mm) ±. µm ( mm or more) (Accuracy per meter for more than 1 m of length) ±. µm ( to 1 mm) ±1 µm ( to mm) ±1. µm ( mm or more) mm/s (.1 µm) mm/s (. µm) Minimum phase difference: ns Differential (zero point signal only is compliant with EIA). µm max.. µm max. / C. µm (1 Vpp) mm/s Max.: 7. MHz Alarms Zero point Zero point accuracy Zero point output signal Cable length Head cable Bending radius Output cable length (to the electronic control section) Power supply Power consumption Vibration resistance Impact resistance Operating temperature range Storage temperature range Light source Radiation power BLREF The output signal is high impedance when a response speed is exceeded or signal level error occurs. Any selected point ±. µm (at C) (depending on machine movement accuracy) 1, mm When stationary: mm When in motion: mm 1 m max. 1 m max. +V ±% BLREH one Unidirectional synchronous zero point (specify the and detection direction when ordering) ma (no load) ma (maximum when cable is connected) m/s ( to Hz) m/s to + C (no condensation) to + C Two semiconductor lasers with power of mw and wavelength of 7 nm JIS Class 1 equivalent, DHHS Class 1 equivalent 1:.1 µm resolution of AB quadrature output is available as special model. : The linearity is the range of scattering when scale accuracy slope is set to zero. : Please inquire about this matter separately since there is a correlation between the maximum response speed and output cable length. : Up to, mm can be supported for special model. External Dimensional Diagram Open type with zero point BLRE BLRE BLRE BLRE BLRE BLRE BLRE BLRE BLRE BLRE BLRE BLRE Open type with zero point BL1RE BLRE BLRE BL7RE BLRE BL1RE BLRE BLRE BL7RE BLRE L1 L1 1 7 φ +. L L Spacer (t=) φ +. Spacer (t=) Reference plate (t=) +. φ hole φ. 1. L L 1 A 1 A 1 1 φ hole M φ hole 1 1 M Reference plate (t=) +. φ hole φ. 1. M scale clamp spacer P 1 P 1 1 L1±1 AL L±1 L±1 AL L±1 L±1 ±..±. ±. ±. ±. ±. ±. ±. ±. ±.. M scale clamp spacer Reference plate M (Reference plate. PM ( 1±. 1 M (Slider. φ. (M installation holes) 1 () 7 L1±1 AL L±1 L±1 AL L±1 L±1 ±..±. ±. ±. ±. ±. ±. ±. ±.. Reference plate M (Reference plate. 1±. PM ( 1 M (Slider. 1 () A.1M ± A Cable length: A.1M ±. 7.1 φ. Cable length:. A (M installation holes) ote 1: The machining dimensions of the installation surface are indicated by. ote : The surface roughness of the scale installation surface shall be RMAX=.S. ote : The surface roughness of the slider installation surface shall be RMAX=.S. ote : M indicates the machine guide (machine movement). Unit: mm

6 BLE (Compact Open Type) The BLE takes full advantage of the newly developed optical integrated circuitry and offers the smallest footprint of any SOY Laserscale. Plus, the BLE is comprised of lowexpansion glass, witch ensures consistent accuracy. Compact size makes machine integration much easier(head thicness:1. mm) Typically not affected by changes in temperature, humidity, or air pressure fluctuation Designed with low expansion coefficient glass (eoceram) for enhanced measuring stability Incredible linearity of ±1 µm or less Main standards and specifications BLEA system Diffraction grating scanning system Effective measurement length (mm) Maximum Scale length movable length Effective length + mm Entire scale length Effective length + mm Grating pitch 1. µm max. Signal pitch. µm max. Output signal A/B quadrature differential (compliant with EIA) Resolution.1 µm Accuracy ±. µm ( to mm) ±. µm (7 mm or more) Linearity 1 ±. µm ( to mm) ±1 µm (7 mm or more) Returning error. µm max. Repeatability. µm max. Thermal expansion coefficient.7 / C mm/s Maximum response speed Minimum phase difference: ns BLEA The A/B quadrature is high impedance when signal Alarms level error occurs. Cable length 1, mm Head cable Bending radius When stationary: mm When in motion: mm Output cable length 1 m max. (to the electronic control section) Power supply +V +%, % Power consumption ma (no load) ma (maximum when cable is connected) Vibration resistance m/s ( to Hz) Impact resistance m/s Operating temperature range to + C (no condensation) Storage temperature range to + C Light source Semiconductor laser with power of mw and wavelength of 7 nm Radiation power JIS Class 1 equivalent, DHHS Class 1 equivalent 1: The linearity is the range of scattering when scale accuracy slope is set to zero. : The specifications are satisfied by the connector input section. : 1Vpp Analog output : Please consult our sales. External Dimensional Diagram Compact open type BLE, BL17E, BLE BL7E, BLE φ +. φ φ Reference plate (t=.) Compact open type BLE, BL7E, BL7E, BLE φ +. φ +. Reference plate (t=.) 1. φ φ Spacer (t=.) φ Stopper (ABS) ±. φ φ. L ±1 L ±1 L1 ±1 L ±1 L ±1 ±. M ( M (Reference plate ±. ±. ±. ±. ±. M ( ±. M (Reference plate ±. ±. ±. ± L1 ±1 L ±1 L ±1 Detector head installation screws M. (Installation holes φ) φ. (M installation holes) φ. (M installation holes) Cable length: 1 Detector head installation screws M. (Installation holes φ) 1. Cable length: A M.1. ± ±... A M.1.1 Spacer (t=.) 1. Stopper (ABS) 1 BLE BLE BL17E BLE BL7E BLE L1 1 1 L L BL7E BL7E BLE L1 L ote 1: The machining dimensions of the installation surface are indicated by. ote : The surface roughness of the scale installation surface shall be RMAX=.S. ote : The surface roughness of the slider installation surface shall be RMAX=.S. ote : M indicates the machine guide (machine movement). Unit: mm

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