NSK Linear Guides. Miniature PU Series/PE Series. NSK Miniature Linear Guides, ideal for semiconductor manufacturing and medical equipment

Transcription

1 S inear uides Miniature PU Series/P Series S Miniature inear uides, ideal for semiconductor manufacturing and medical equipment

2 Smoot motion and unprecedented ligtness e advanced S Miniature inear uides e new generation PU series/p series inerit te outstanding lineage of te S miniature linear guides U series/ series. Improve dynamic friction caracteristics and create smooter motion wit reduced noise intensity. e new design supports a wide variety of applications. S inear uides Miniature PU Series/P Series Smooter motion e resin ball recirculation component creates an optimal configuration, resulting in smooter motion. est conditions: Oil lubrication (V68) Operating speed: mm/min oad cell rated capacity: 5 1 eatures Miniature PU Series (Intercangeable wit U Series) PU09R riction force, Movement distance, mm ig. 1-1 luctuations in dynamic friction 1. Motion performance igly smoot operation is acieved by smoot ball recirculation. 2. igtweigt e ball slide is fabricated to be approximately % ligter tan conventional models by te application of resin to a part of its body. Miniature U series/ series 3. Reduced noise intensity Resin components applied in te ball circulating system reduce collision noise between steel balls and te inner wall of circurating circuits. 4. ow dust generation e new design generates less dust compared to conventional models. 5. xcellent dust resistance Compact space between te side of te rails and te inner walls of te ball slide prevents te entrance of foreign matter. ide Miniature P 6. ig corrosion resistance ig corrosion-resistant martensite stainless steel is incorporated as a standard feature provides excellent resistance to corrosion. 7. asy to andle Safety design prevents steel balls from dropping out of te ball slide even wen te slide is removed from te rail. 8. ong-term maintenance-free quipped wit S 1 ubrication unit realizes long-term, maintenance-free use. Series (Intercangeable wit Series) P09R ow dust generation e PU series/p series, wit resin ball recirculation components, generates less dust tan a conventional ball recirculation system tat goes rigt troug te ball slide. ust generation rate (particles/ m 3 ), Particle diameter of 0.1 μm or more est conditions: rease lubrication (2) Operating speed: 600 mm/min Stroke: 0 mm ime, r ig. 1-2 ust generation rate all slide body U 9. ast delivery ineup of random-matcing rails and ball slides in te series facilitates fast delivery. Molded resin ball recirculation component Minute clearance is maintained. Cutaway view ig. 2 Cross sectional front view 1 2

3 eveloped for precision positioning tables, supporting cutting-edge equipment, including semiconductor manufacturing and medical devices S inear uides Miniature PU Series/P Series (3) Reference number for rail of random-matcing 2 Reference number Reference numbers will be used as reference before finalizing all specifications. Please specify te reference number, except design serial number, to identify te product wen ordering, requesting estimates, or inquiring about specifications from S. xample: Random-matcing rail series code P1U: PU Series random-matcing rail P1: P Series random-matcing rail P1U 0470 R PC Preload code : ine clearance (Z) ccuracy code PC: ormal 2.1 Preloaded assembly xample: PU P5 1 Series name Rail lengt (mm) Rail sape code S: PU09 12, R: PU05 P , P: P ( ) Please consult S foutting rail specification. esign serial number utting specification ( ) : non-butting rails, : utting specification Material/surface treatment : Stainless steel : Stainless steel + surface treatment Rail lengt (mm) all slide sape code Material/surface treatment code : Stainless steel : Stainless steel + surface treatment Preload code 0: ine clearance (Z0), 1: Sligt preload (Z1) ccuracy code P4: Super precision, P5: ig precision, P6: Precision, P: ormal (wit S 1) 4: Super precision, 5: ig precision, 6: Precision, : ormal esign serial number umber of ball slides per rail 3 ccuracy standard e offer te following accuracy grades: Super precision grade P4, ig precision grade P5, Precision grade P6, and ormal grade P for preloaded assembly, and ormal grade PC for random-matcing. able 1 olerance of preloaded assembly able 3 Running parallelism of ball slide 2.2 Random-matcing (1) Reference number for rail and ball slide assembly xample: PU PC ccuracy grade Caracteristics Mounting eigt Variation of (ll ball slides on a set of rails) Mounting widt 2 or 3 Variation of 2 or 3 (ll ball slides on reference rail) Super precision P4 ±10 5 ± 7 ig precision P5 ± 7 ± 10 Precision grade P6 ± ±30 ormal grade P ±40 25 ±50 ccuracy grade Rail lengt (mm) Preloaded assembly Random-matcing over or less P4 P5 P6 P PC Series name Rail lengt (mm) all slide sape code Material/surface treatment code : Stainless steel : Stainless steel + surface treatment Preload code : ine clearance (Z) ccuracy code PC: ormal (wit S 1) C: ormal esign serial number umber of ball slides per rail Running parallelism of surface C to surface Running parallelism of surface to surface able 2 olerance of random-matcing : ormal grade PC Sown in able 3, ig. 3, ig. 4 ccuracy grade ormal grade Caracteristics PC Mounting eigt ± Variation of mounting eigt ➀ 30➁ (2) Reference number foall slide of random-matcing Mounting widt 2 or 3 ± Variation of mounting widt 2 or 3 Running parallelism of surface C to surface Running parallelism of surface to surface Sown in able 3, ig. 3, ig. 4 xample: PU S ➀Variation on te same rail ➁Variation on multiple rails Random-matcing ball slide series code PU: PU Series random-matcing ball slide P: P Series random-matcing ball slide Option code -: quipped wit S 1 Material code S: Stainless steel C C C C all slide sape code ig. 3 ssembled accuracy Mounting widt 2 ig. 4 ssembled accuracy Mounting widt 3 3 4

4 S inear uides Miniature PU Series/P Series 4 Preload and rigidity 6 ubrication e offer tree levels of preload: Sligt preload (Z1) and ine clearance (Z0) for preloaded assembly s, along wit random-matcing s of ine clearance (Z). Values for preload and rigidity of te preloaded assembly s are sown in ables 4 and 5. Selection of grease: able 10 sows grease tat is suitable for te PU series/p series. e specify PS2 as te standard grease for S miniature linear guides. able 10 vailable greases able 4 Preload and rigidity of preloaded assembly of PU series Standard ig-load Preload () Rigidity ( /μm) Sligt preload (Z1) Sligt preload (Z1) PU05R PU07R PU09R PU12R PU09UR PU12UR able 5 Preload and rigidity of preloaded assembly of P series Standard ig-load Preload () Rigidity ( /μm) Sligt preload (Z1) Sligt preload (Z1) P05R P07R P09R P12R PR P09UR P12R PR rease code PS2 2 ickener itium itium ase oil Syntetic oil + Mineral oil Mineral oil + Syntetic ydrocarbon oil ase oil kinematic viscosity mm 2 /s (40ºC) emperature range for use (ºC) 50 to to 70 or clean environment U iurea Syntetic ydrocarbon oil to 1 or clean environment Caracteristic/pplication or low temperature operation Suitable for ig speed and ligt load application ong term maintenance free: S 1 ubrication unit enables long term maintenance free. Clearance of fine clearance Z0 is 0-3 μm. erefore, preload is zero. Clearance values of te random-matcing s are sown in ables 6 and 7. V 1 V 2 V 2 V 1 nd seal able 6 Clearance of random-matcing of PU series able 7 Clearance of random-matcing of P series 5 Standard ig-load PU09R PU12R PU09UR PU12UR ine clearance Z 3 or less 5 or less Standard ig-load P09R P12R PR P09UR P12R PR Soulder eigt of te mounting surface and corner radius r igs. 5, 6 and ables 8, 9 sow te soulder eigt and corner radius dimensions. ine clearance Z 3 or less 5 or less able 11 imensions wen equipped wit S 1 (PU series) Standard Standard ball slide lengt all slide lengt equipped wit two S 1, ickness of S 1, V 1 ickness of protective cover, V 2 PU05R PU07R PU09R PU12R Protective cover S 1 able 12 imensions wen equipped wit S 1 (P series) Standard Standard ball slide lengt all slide lengt equipped wit two S 1, ickness of S 1, V 1 ickness of protective cover, V 2 P05R P07R P09R P12R PR ra r a ra r a PU09UR ig-load PU12UR ig-load P09UR P12R PR all slide lengt equipped wit S 1 = (Standard ball slide lengt) + (ickness of S 1, V 1 umber of S 1) + (ickness of te protective cover, V 2 2) dditional S 1 is available depending on te use conditions. ig. 5 Soulder for te rail datum face ig. 6 Soulder for te ball slide datum face 7 ust resistance able 8 Soulder eigt of te mounting surface and corner radius r (PU series) able 9 Soulder eigt of te mounting surface and corner radius r (P series) nd seal: Provided to bot sides of te ball slide as a standard feature. ottom seal function: It is designed to minimize te clearance between te side faces of rail and te inner walls of te slide, and prevent foreign matters from entering te ball slide. Corner radius (Maximum) Soulder eigt r a ( ) Corner radius (Maximum) Soulder eigt r a ( ) PU PU PU PU ( ) is te minimum recommended value based on te dimension in able 13. P P P P P ( ) is te minimum recommended value based on te dimension in able pplications l Smooter motion and low dust generation iquid crystal manufacturing and printed circuit board manufacturing devices l igtweigt and low dust generation Semiconductor manufacturing devices (mounter, die bonder, and exposure device) l entler tone and excellent dust resistant features Medical macinery and various precision devices 5 6

5 9 imensions 9.1 Rail and ball slide assembly (preloaded, random-matcing ) S inear uides Miniature PU Series/P Series Please refer to able 13 for eac dimension. 1 Please refer to able 14 for eac dimension. 1 2-M 2-M P05 PU PU05, 07, 09, 12 1 n P05, 07, 09, 12 1 n 0 1 PU07, 09, 12 P07, 09, n P 1 1 n 1 ig. 7 ssembly (PU series) ig. 8 ssembly (P series) 0 P able 13 imensions (PU series) ssembly all slide Rail asic load rating ( 2) all diameter eigt Randommatcing lengt M eigt idt engt Mounting ole Oil ole idt eigt Pitc Mounting bolt ole Maximum ynamic Static Static moment ( m) all slide Rail RO M PO M YO C C 0 2 M Pitc ole diameter d 3 (Reference) 0max () () one slide one slide close contact close contact (g) (g/100 mm) PU05R M PU07R M PU09R M PU09UR PU12R M PU12UR M : Random-matcing is available. ( 1) rive-in grease fitting for 3 is available to. ( 2) asic dynamic load rating is a load tat allows for a 50-km rating fatigue life and is a vertical and constant load on te ball slide mounting surface. o convert C to C 100 for a 100-km rating fatigue life, divide C by able 14 imensions (P series) 3 ( 1) 3.2 (3.6) ssembly all slide Rail asic load rating ( 4) all diameter eigt Randommatcing lengt M eigt idt engt Mounting ole Oil ole idt eigt Pitc Mounting bolt ole Maximum ynamic Static Static moment ( m) all slide Rail RO M PO M YO C C 0 2 M Pitc ole diameter d 3 (Reference) 0max () () one slide one slide close contact close contact (g) (g/100 mm) P05R M P07R M P09R M P09UR P12R M P12R PR M PR : Random-matcing is available. ( 3) rive-in grease fitting for 3 is available to P. ( 4) asic dynamic load rating is a load tat allows for a 50-km rating fatigue life and is a vertical and constant load on te ball slide mounting surface. o convert C to C 100 for a 100-km rating fatigue life, divide C by ( 3) 3.2 (3.3) o fix rails of PU05R, use M2 0.4 cross-recessed pan ead macine screw for precision instrument. (CIS o. 0 pan ead macine screw o. 1) (CIS: apanese Camera Industrial Standard) o fix rails of P05R, use M cross-recessed pan ead macine screw for precision instrument. (CIS o. 0 pan ead macine screw o. 3) (CIS: apanese Camera Industrial Standard)

6 9.2 Random-matcing (1) all slide of random-matcing s (2) Rail of random-matcing s S inear uides Miniature PU Series/P Series Please refer to able 13 for eac dimension. Please refer to able 13 for eac dimension PU09,12, n PU09,12 PU09,12 ig. 11 Rail of random-matcing s (PU series) Please refer to able 14 for eac dimension P09,12 ig. 9 all slide of random-matcing s (PU series) P n 0 Please refer to able 14 for eac dimension. ig. 12 Rail of random-matcing s (P series) P09,12 1 P09,12 10 Intercangeability wit U series/ series e PU series/p series is designed to be intercangeable* wit te U series/ series for its mounting dimensions and load ratings. Refer to igs. 7, 8 and ables 13, 14 for more details. (*) oad ratings for PU05 and P05 are not intercangeable P 1 1 P 11 andling precautions (1) S inear uides may become damaged wen struck or it. (2) Maximum operating temperature must be 80 C oelow. xceeding tis limit may damage resin parts. (3) Maximum operating temperature must be 50 C (max. momentary 80 C) wen attacing S 1. lso, avoid exposure to organic solvents wit a degreasing effect. o not immerse in kerosene or rust preventative oil (wit kerosene ingredients). (4) anding of random-matcing s ➀ Random-matcing ball slide will be delivered wit a provisional rail (inserting fixture). ➁ e sure to use te provisional rail wen mounting ball slide(s) to a rail. ➂ o not remove te ball slide from provisional rail until inserting into a rail. ig. 10 all slide of random-matcing s (P series) 9 10

7 C. o. 3327c 12 X-2 Printed in apan S td. 03