Ready for Takeoff. TURBOVAC MAGiNTEGRA

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1 Ready for Takeoff TURBOVAC MAGiNTEGRA

2 ADVANTAGES OF MAGNETICALLY LEVITATED TURBOMOLECULAR PUMPS TURBOVAC MAGiNTEGRA Insensitivity to process particles/dust Shock venting tolerance Reliability in industrial environments Robust and trouble-free operation Low cost of ownership Suitability for vibration-sensitive applications ADDITIONAL BENEFITS OF TURBOVAC MAGiNTEGRA Maintenance-free operation in most applications Monitoring of performance data Self-protection in case of exceeding operation limits or malfunction APPLICATIONS COATINGS SOLAR DISPLAY ANALYTICS Industrial glass coating Sputtering (TCO) Flat Panel Analytical systems Web CIGS PVD Electron microscopes Optical LCD Particle accelerators

3 Your Ticket to the next level of vacuum Our TURBOVAC MAGiNTEGRA combines accuracy, precision and reliability - qualities that are essential to the vacuum technology and aircraft industries alike. When it comes to vacuum technology, magnetically levitated turbomolecular pumps from Oerlikon Leybold Vacuum feature high pumping and gas throughput for faster pumpdown to improve equipment cycle times. The new 5-axis active magnetic bearing and drive system combines high reliability and efficient operation.

4 PUMPS AND OPTIONS MAG W 300, MAG W 400, MAG W 600, MAG W 700, MAG W 1300, MAG W 1600, MAG W 1700 and MAG W 2200 MAG W Turbomolecular pumps are available with these following features: Inlet fl anges ISO-K, ISO-F, Mounting position of the integrated controller and power supply fl anking: ip version bottom: ipl version Interfaces 9 pin 24V PLC, Profi bus, RS485, Ethernet and others based on the customer s particular needs. HIGHLIGHTS Fully integrated converter and power supply eliminate the need for a conventional rack-mounted controller and interconnecting cables Flexible design with controller position on the side or bottom for easy system integration Innovative and modular industrial communication solution allows easy integration with customer equipment to meet current and future requirements High robustness in industrial environment due to protective class IP 54 required in PVD, display, solar and optical coating applications TECHNICAL DATA High vacuum flange Pumping speed (PNEUROP) Max. compression ratio Max. gas throughput Ar He H 2 Ar He H 2 Ar PERFORMANCE DATA Max. forevacuum pressure 2200 Nominal speed Pumping speed (l/s) High vacuum pressure (mbar) MAG W 2200 MAG W 1700 MAG W 1600 MAG W 1300 MAG W 700 MAG W 600 MAG W 400 MAG W 300 Ultimate pressure ISO-K/F Run-up time, approx. Foreline flange Purge gas / vent port Weight, approx. Noise level (according to ISO 3744) Purge gas / vent port

5 ACCESSORIES Choose from a wide range of accessories to control and monitor performance of the TURBOVAC MAGiNTEGRA: Controllers for pressure measurement Systems for active and passive sensors, water and air cooling facilities, venting valves, cables, etc. Forevacuum pumps and systems, engineering and application support MAG W 300 ip(l) 400 ip(l) 600 ip(l) 700 ip(l) 1300 ip(l) 1600 ip(l) 1700 ip(l) 2200 ip(l) DN 100 ISO-K 160 ISO-K 160 ISO-K 200 ISO-K D00 ISO-F 250 ISO-F 250 ISO-F 250 ISO-F DN l x s l x s l x s l x s > > > > > 10 8 > 10 7 > 10 8 > 10 8 > 10 8 > 10 7 > 10 8 > 10 8 at 1 sccm 9x10 4 9x10 4 2x10 6 2x10 6 2x10 5 6x10 4 2x10 5 5x10 4 at 1 sccm 3x10 3 3x10 3 3x10 4 3x10 4 8x10 3 1x10 3 4x10 3 5x10 3 mbar x l x s -1 > 10 > 10 > 15 > 15 > 30 > 60 > 30 > 30 > 20 > 30 > 20 > 20 mbar min mbar < 10-8 mbar < min DN 16 KF (clamped) 25 KF (clamped) 40 KF DN 16 KF (clamped) kg db(a) < 41 µm < 0.01

6 ORDERING INFORMATION MAGiNTEGRA with 9 pin 24V PLC 3) 1) 2) # MAG W 300 ip(l) 400 ip(l) 600 ip(l) 700 ip(l) ISO-K ip V V V V0505 ipl on request on request V0705 on request ip V V V V0506 ipl on request on request on request on request MAGiNTEGRA with Profibus interface 3) 1) 2) # MAG W 1300 ip(l) 1600 ip(l) 1700 ip(l) 2200 ip(l) ISO-F ip V V V V0504 ipl V V V V0704 ip V V V0506 ipl V V V0706 MAGiNTEGRA with 9 pin 24V PLC 3) ISO-F ip V V V V0514 ipl V V V V0714 ip V V V0516 ipl V V V0716 1) IP: flanking controller installation 3) Additional interface options, including RS485 and Ethernet, are available on request. 2) IPL: bottom controller installation Headquarter Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D Köln T +49 (0) F +49 (0) info.vacuum@oerlikon.com BICOM Printed in Germany on chlorine-free bleached paper Technical alterations reserved