Specialty Gases Specialty Gases

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1 Specialty Gases

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3 Title page: The atmosphere Sundown in orbit. The earth's atmosphere, photographed from an altitude of 300 kilometers during the D-2 Mission (April/May 1993). A pink-colored layer can be seen about 15 kilometers high. The color indicates particles of sulfuric acid and ammonium sulfate, caused in turn by an immense presence of sulfur particles released a few days before by the eruption of Mount Pinatubo. Photo with the kind permission of the DLR German Aerospace Center.

4 About This Catalog Many fields of application in high-technology industrial processes, research and development, instrumentation and medicine require high-purity gases, high-quality gas mixtures and appropriate gas handling equipment such as efficient pressure regulators and customized gas supply systems. In this catalog we present the broad range of our product lines and services. We also provide a wealth of important and useful information on the safe handling of our products. Should you have any further questions, we will gladly send you additional detailed information. Our team of qualified specialists near you and in our headquarters will solve your specific problems quickly and precisely. Years of experience and a strongly developed sense of quality, safety and environment form the basis for high customer benefits and long-lasting, successful partnerships.

5 Content Quality, Safety and Environmental Protection Pure Gases Index Acetylene to Xenon Gas Mixtures / Calibration Gas Mixtures Instrumentation Gases Gases in Small Containers Linde Small Steel Cylinders Linde minican pressure cans Linde Plastigas bags Gas Supply Systems Specialty Gas Service Gas analytical service Environmentally-compatible disposal and recycling Containers for Specialty Gases Information, Tables and Diagrams Order Processing Information and Terms and Conditions Extract from the Linde Product Line

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7 Quality, Safety and Environmental Protection 3

8 4 Quality, Safety, Environmental Certificate for our operations in Germany. Similar certificates exist in other countries

9 Quality, Safety and Environmental Protection Quality, safety and environmental protection in the production, transportation and use of our products are an important part of our corporate philosophy. Our new policy in this field (see overleaf) also defines our responsibility to our customers, employees, the authorities, society at large and the environment. Quality We introduced a certified quality management system based on ISO 9001 in most of our group companies worldwide. We also meet other specifications, e.g. in the fields of nuclear technology, medicine and pharmacy as well as for the automotive and semiconductor industries. Our specialty gas activities are, therefore, firmly embedded in a comprehensive quality management system. Safety Safety is of essential importance to our work. The aim of our publications on the characteristics, transportation and handling of our products is to ensure their safe use. Details on this are included in this catalog. Our customer consultants and safety experts will also gladly help you in your individual questions and problems. Integrated QSE Management System with certificate Linde was the first gas company in Germany to introduce a management system for quality, safety and the environment (QSE) in its operations and to have it certified for all its business premises according to DIN EN ISO 9001 (quality management), SCC (safety management) and DIN EN ISO (environmental protection management). Meanwhile a number of operative units in other countries followed this example. The aim of our management system is to ensure constant improvement in our internal and external services. We place similar demands on our suppliers, service-providers and sales partners. Customer complaints and deviations from our internal standards are systematically analyzed and detailed corrective and preventative measures introduced. Work processes are regularly checked for efficiency and our employees encouraged to improve their qualifications. In this way we will continually improve our products, processes and services. Advantages to our customers The general objectives of our integrated QSE Management System are: Environmental protection It is our concern that no harm to the environment emanates from our gases at any stage from production and storage through distribution to use and disposal. We realize this on the basis of applicable laws and in some cases even go beyond them. Environmentally safe products and services Safety in their supply and use Constant high product quality Individual, competent advice Consistent orientation to the needs of our customers 5

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11 Pure Gases 7

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13 Pure Gases Linde's current product portfolio of pure gases is intended to cover as many fields of application in production, work safety, environmental protection and research and development as possible. Its special gases for the semiconductor industry are also included in this chapter. An overview of the most important information on them is listed under "Electronic Gases". To aid in finding the gases, the index that follows includes old or customary gas names in addition to presently applicable terminology. The descriptions of the gases contain details of their purities, complete cylinder information as well as all major gas data and properties. Further physical specifications, vapor pressure curves, etc. can be found in the chapter "Information, Tables and Diagrams". Industrial gases and their mixtures are not dealt with in detail in this catalog. Separate literature is available on these gases. An overview of the entire range of Linde gases is contained at the end of this catalog. Important information for the use of these gases Definition of purity: The minimum purity of a gas refers to the specified impurities that characterize the pure gas. The specific limits for the impurities are not exceeded. In the case of gases without details on impurities, the specification of their purity is to be seen as a typical value. In the case of a number of high purity gases, every filled cylinder is accompanied by a certificate of analysis confirming that the maximum limits for impurities have not been exceeded. This is noted for the gas purities to which it applies. It does not apply to "Gases in Small Containers". Cylinder fillings frequently display purities that are higher than those which have been guaranteed. Even if this should occur repeatedly, it should nevertheless not be taken as any assurance of uniformly higher purities. Purity information: The purity of the gases is indicated by a short suffix serving as an abbreviated indication of the minimum content of a pure gas. The first digit in the suffix indicates the number of "nines" in the specification of the gas's purity in percent. The second digit indicates the first decimal place not "nine". The first and second digits are separated by a point. Examples: Ethylene 2.8 means 99.8 % purity Argon 6.0 means % purity Instead of the short suffix, a few gases have an application-related suffix, e.g. Nitrogen CO-free. Irrespective of the minimum purity indicated in the product description, these gases have an especially low residual content of certain otherwise troublesome impurities. Percentage information: The percentages indicated in conjunction with purities or impurities are mole percents (ideal volume percentages). Extremely low percentages are indicated in ppm or ppb (1 ppm = 1 part per million = 10-4 %; 1 ppb = 1 part per billion). Volume information: Unless otherwise expressly stated, the following applies: 1m 3 of gas is the volume of gas that will fill a cube having an edge length of 1 m at a temperature of 15 C and a pressure of 1 bar. One liter of gas is one thousandth of the gas volume thus defined. Unless otherwise expressly noted, pressures indicated in bars are absolute pressures. The volume information for gases with a critical temperate T c -10 C is given in kg. New color coding Pursuant to the new EN 1089 Part 3 the color coding is effected on the cylinder shoulder. The color of the cylinder shoulder is given for every gas under "Identification". Since the standard provides for a transitional period for implementation extending to the year 2006, cylinders with the old color coding can also be in circulation up to this point in time. Both types of cylinder identification are therefore shown in this catalog. Further information on the change to the new color coding can be obtained from every Linde Sales Center. 9

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15 Pure Gases Index (Linde's names for the gases are printed in boldface type) Name Page Name Page Name Page Acetylene Ammonia Argon Arsine Boron trichloride Boron trifluoride /26 1,3-Butadiene Butane i-butane = Isobutane Butene i-butene = Isobutene n-butane = Butane Carbon dioxide Carbon monoxide Chlorine /26 Chlorodifluoromethane Chloromethane Chlorotrifluoromethane Deuterium Dichlorosilane Difluoromethane Dimethyl ether ,2-Dimethylpropane Dinitrogen monoxide = Nitrous oxide /45 Dinitrogen tetroxide = Nitrogen dioxide Disilane Electronic Gases Ethane Ethene = Ethylene Ethylene Ethylene dichloride = Vinyl chloride Ethylene oxide Fluoromethane Germane Helium Helium Hexafluoroethane /32 Hydrogen Hydrogen bromide Hydrogen chloride Hydrogen sulfide Isobutane Isobutene Isobutylene = Isobutene Krypton Laughing Gas = Nitrous oxide /45 Methane Methyl chloride = Chloromethane Neon Neopentane = 2,2-Dimethylpropane Nitric oxide /41 Nitrogen Nitrogen dioxide Nitrous oxide /45 Nitrogen trifluoride Octafluorocyclobutane Octafluoropropane Oxygen Phosphine Propane Propene = Propylene Propylene R 13 = Chlorotrifluoromethane..26 R 14 = Tetrafluoromethane..26/51 R 22 = Chlorodifluoromethane..26 R 23 = Trifluoromethane....26/51 R 32 = Difluoromethane R 41 = Fluoromethane R 116 = Hexafluoroethane...26/32 R 218 = Octafluoropropane R C318 = Octafluorocyclobutane 26 Silane Silicon tetrafluoride Sulfur dioxide /50 Sulfur hexafluoride /50 Tetrafluoromethane /51 Trifluoromethane /51 Vinyl chloride Xenon

16 F-AAS (Flame atomic absorption spectrometry) for the analysis of individual elements with acetylene as fuel gas 12

17 Pure Gases Acetylene for Flame photometry (dissolved in acetone) Acetylene (solvent-free) Ammonia 3.8 Purity, %: 99.6 (referred to C 2 H 2 without acetone) (from vaporized liquid phase) Impurities, ppm:ent: Hydrogen compounds of As, S and P 5 Hydrogen compounds of As, S and P 10 N Containers: Steel cylinders Linde Small Steel Cylinders Water Filling Contents liters approx. bar kg Water Filling Contents liters approx. bar kg Water Vapor Contents liters at 20 C, bar kg , Conversion factors: Identification: Cylinder shoulder color Label Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Sublimation temperature at bar Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: Maroun RAL 3009 Acetylene for Flame photometry/ Acetylene solvent-free Yoke fitting, DIN 477 No. 3 Highly flammable C 2 H g/mol K ( C) K ( C) ,100 0, Yellow RAL 1018 Ammonia 3.8 W x 1/14, DIN 477 No. 6 Liquefied gas, toxic, caustic, flammable, environmentally harmful 50 ppm NH g/mol K ( C) K ( C) See page 26 for higher purities 13

18 Argon 4.8 Argon for spectrometry Argon 5.0 Purity, %: Impurities, ppm: O 2 3 N 2 10 H 2 O 5 C n H m 0.5 O 2 3 N 2 10 H 2 O 5 C n H m 0.5 O 2 2 N 2 5 H 2 O 3 C n H m 0.2 Containers: Steel cylinders Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m Cylinder bundles Linde minican l Conversion factors: Identification: Cylinder shoulder color Label Dark green RAL 6001 Argon 4.8/for spectrometry/ Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: Filling pressure 200 bar: W x 1/14, DIN 477 No. 6 Filling pressure 300 bar (bundles):w x 1/14, 477 No. 6 (pressure regulating valve < 200 bar) and ISO 5145 No (standard valve to 300 bar) Compressed gas, suffocating, chemically inert Ar g/mol K ( C) K ( C) Argon is also available cryogenically liquefied, in road tankers.. In this case the technical equipment required is provided by Linde. The LI-PUR system satisfies even the most stringent demands. 14

19 Pure Gases Argon 5.3 Argon 5.6 Argon 6.0 Purity, %: Impurities, ppm: O 2 1 N 2 3 H 2 O 2 C n H m 0.1 O N 2 1 H 2 O 1 C n H m 0.1 CO 0.1 CO O N H 2 O 0.5 C n H m 0.1 CO 0.1 CO Certificate of analysis: Yes Yes Yes Containers: Steel cylinders Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m Linde Small Steel Cylinders l Conversion factors: Identification: Cylinder shoulder color Label Dark green RAL 6001 Argon 5.3/5.6/6.0 Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: Filling pressure 200 bar: W x 1/14, DIN 477 No. 6 Filling pressure 300 bar (single cylinder): M 30 x 1,5 INT, DIN 477 No. 52 Compressed gas, suffocating, chemically inert Ar g/mol K ( C) K ( C) Argon is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde. The LI-PUR system satisfies even the most stringent demands. 15

20 Argon 7.0 Boron trifluoride 1.6 1,3-Butadiene 2.5 Purity, %: Impurities, ppb: O 2 30 H 2 30 H 2 O 50 C n H m 30 CO 30 CO 2 30 Halogenated hydrocarbons in SF 6 equivalents (from vaporized liquid phase) Certificate of analysis: Yes Containers: Steel cylinders Aluminum cylinders Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar kg Water Vapor Contents liters at 20 C, bar kg Linde Small Steel Cylinders Conversion factors: , Identification: Cylinder shoulder color Label Dark green RAL 6001 Argon 7.0 Yellow RAL 1018 Boron trifluoride 1.6 Red RAL ,3-Butadiene 2.5 Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) W x 1/14, DIN 477 No. 6 Compressed gas, suffocating, chemically inert Ar g/mol K ( C) K ( C) 1,380 1, DIN 477 No. 8 Compressed gas, highly toxic, caustic 1 ppm BF g/mol K ( C) K ( C) W x 1/14 LH, DIN 477 No. 1 Liquefied gas, toxic, carciogenic (Cat. 2), highly flammable 5 ppm (preliminary value) C 4 H g/mol K ( C) K ( C) Other types of supply: The LI-PUR system satisfies even the most stringent demands. See page 26 for higher purities 16

21 Pure Gases Butane 2.5 Butane Butene 2.5 Purity, %: 99.5 (from vaporized liquid phase) (from vaporized liquid phase) 99.5 (from vaporized liquid phase) Other C n H m 500 Other C n H m 5000 Certificate of analysis: Yes Containers: Steel cylinders Water Vapor Contents liters at 20 C, bar kg Water Vapor Contents liters at 20 C, bar kg Water Vapor Contents liters at 20 C, bar kg Steel drums Linde minican Conversion factors: Identification: Cylinder shoulder color Label Red RAL 3000 Butane 2.5/3.5 Red RAL Butene 2.5 Valve outlet: Properties: W x 1/14 LH, DIN 477 No. 1 Liquefied gas, highly flammable W x 1/14 LH, DIN 477 No. 1 Liquefied gas, highly flammable MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) 1000 ppm C 4 H g/mol K ( C) K ( C) C 4 H g/mol K ( C) K ( C)

22 Carbon dioxide 3.0 Carbon dioxide 4.5 Carbon dioxide 4.8 Purity, %: 99.9 (from vaporized liquid phase) (from vaporized liquid phase) (from vaporized liquid phase) Impurities, ppm: O N 2 } H 2 O 250 C n H m 50 O 2 15 N 2 30 CO 1 H 2 O 5 C n H m 2 O 2 2 N 2 10 CO 1 H 2 O 5 C n H m 2 Certificate of analysis: Yes Yes Containers: Water Vapor Contents Steel cylinders Water Vapor Contents liters at 20 C, bar kg liters at 20 C, bar kg Water Vapor Contents liters at 20 C, bar kg Linde Small Steel Cylinders Linde minican 1 Filling pressure 21 g 12 bar Conversion factors: (15 C, (-56,6 C, 5,2 bar) (15 C, (-56,6 C, 5,2 bar) (15 C, (-56,6 C, 5,2 bar) Identification: Cylinder shoulder color Label Grey RAL 7037 Carbon dioxide 3.0/4.5/4.8 Valve outlet: W x 1/14, DIN 477 No. 6 Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: Liquefied gas, suffocating 5000 ppm CO g/mol K ( C) K ( C) Carbon dioxide is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde. 18

23 Pure Gases Carbon dioxide 5.3 Carbon dioxide SFC/SFE Carbon dioxide SFE high purity Purity, %: (from vaporized liquid phase) (from vaporized liquid phase) (from vaporized liquid phase) Impurities, ppm: Certificate of analysis: O 2 2 N 2 3 CO 0.5 H 2 O 1 C n H m 1 Yes O 2 2 N 2 3 CO 0.5 H 2 O 1 C n H m 1 Yes O 2 1 N 2 2 CO 0.5 H 2 O 1 C n H m 0.01 Halogenated hydrocarbons in CCl 4 equivalents 0.01 ppb Yes Containers: Water Vapor Contents Water Vapor Contents liters at 20 C, bar kg Aluminum cylinders Steel cylinders liters at 20 C, bar kg approx. 120* approx. 120* 22 * Helium supporting pressure Water Vapor Contents liters at 20 C, bar kg approx. 120* approx. 120* 17.3 * Helium supporting pressure Conversion factors: Identification: Cylinder shoulder color Label (15 C, (-56,6 C, 5,2 bar) (15 C, (-56,6 C, 5,2 bar) Grey RAL 7037 Carbon dioxide 5.3/SFC/SFE/SFE high purity (15 C, (-56,6 C, 5,2 bar) Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: W x 1/14, DIN 477 No. 6 (double valve with submerged pipe for SFC/SFE & SFE high purity) Liquefied gas, suffocating 5000 ppm CO g/mol K ( C) K ( C) Carbon dioxide is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde. 19

24 Carbon monoxide 2.0 Carbon monoxide 3.0 Carbon monoxide 3.7 Purity, %: Impurities, ppm: Certificate of analysis: N O 2 Ar 3000 H C n H m 500 } } N O 2 60 Ar H C n H m 50 N O 2 10 Ar 20 H C n H m 10 H 2 O 10 Yes Containers: Steel cylinders Cylinder bundles Linde Small Steel Cylinders Linde minican Water Filling Contents liters approx. bar m * Water Filling Contents liters approx. bar m 3 10* * Water Filling Contents liters approx. bar m 3 10* * l l *Aluminum cylinders *Aluminum cylinders *Aluminum cylinders Conversion factors: Identification: Cylinder shoulder color Label Valve outlet: Yellow RAL 1018 Carbon monoxide 2.0/3.0/3.7 1 LH, DIN 477 No Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Compressed gas, toxic, highly flammable, toxic for reproduction (development) (Cat. 1) 30 ppm CO g/mol K ( C) K ( C)

25 Pure Gases Carbon monoxide 4.7 Chlorine 2.8 Chlordifluoromethane 2.8 R 22 Purity, %: (from vaporized liquid phase) 99.8 (from vaporized liquid phase) Impurities, ppm: N 2 5 O 2 5 Ar 15 H 2 1 C n H m 2 H 2 O 5 Certificate of analysis: Yes Containers: Steel cylinders Water Filling Contents liters approx. bar m 3 10* * Water Vapor Contents liters at 20 C, bar kg Water Vapor Contents liters at 20 C, bar kg Linde Small Steel Cylinders *Aluminum cylinders Conversion factors: Identification: Cylinder shoulder color Label Yellow RAL 1018 Carbon monoxide 4.7 Yellow RAL 1018 Chlorine 2.8 Bright green RAL 6018 R Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: 1 LH, DIN 477 No. 5 Compressed gas, toxic, highly flammable, toxic for reproduction (development) (Cat. 1) 30 ppm CO g/mol K ( C) K ( C) , DIN 477 No. 8 Liquefied gas, toxic, irritating, environmentally harmful 0,5 ppm Cl g/mol K ( C) K ( C) See page 26 for higher purities W x 1/14, DIN 477 No. 6 Liquefied gas, suffocating, environmentally harmful CHClF g/mol K ( C) K ( C)

26 Chloromethane 2.8 Deuterium Stabile H 2 isotope Purity, %: 99.8 (from vaporized liquid phase) 99.9 Enrichment 99.8 % Containers: Steel cylinders Linde Small Steel Cylinders Linde minican Water Vapor Contents liters at 20 C, bar kg Water Filling Contents liters approx. bar m l Conversion factors: Identification: Cylinder shoulder color Label Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Red RAL 3000 Chloromethane 2.8 W x 1/14 LH, DIN 477 No. 1 Liquefied gas, harmful, carcinogenic (Cat. 3), highly flammable 50 ppm CH 3 Cl g/mol K ( C) K ( C) Red RAL 3000 Deuterium W x 1/14 LH, DIN 477 No. 1 Compressed gas, highly flammable D g/mol K ( C) K ( C)

27 Pure Gases Dimethyl ether 3.0 2,2-Dimethylpropane 2.0 Purity, %: 99.9 (from vaporized liquid phase) 99 (from vaporized liquid phase) Containers: Water Vapor Contents liters at 20 C, bar kg Water Vapor Contents liters at 20 C, bar kg Linde Small Steel Cylinders Conversion factors: Identification: Cylinder shoulder color Label Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Red RAL 3000 Dimethylether 3.0 W x 1/14 LH, DIN 477 No. 1 Liquefied gas, highly flammable 1000 ppm C 2 H 6 O g/mol K ( C) K ( C) Red RAL ,2-Dimethylpropane 2.0 W x 1/14 LH, DIN 477 No. 1 Liquefied gas, highly flammable 1000 ppm C 5 H g/mol K ( C) K ( 9.50 C)

28 Electronic gases Electronic gases for high-tech use The demands of the microelectronics industry are growing from day to day. Linde's response has been to engage in a program of ongoing product development to meet even the most stringent of requirements. We support our customers in the optimization of their processes by delivering gases of the highest purity to their point of use. An indispensable prerequisite for this development work is cooperation between user and supplier in a spirit of trust and confidence. Electronic gases, however, are not only used in microelectronics, but also in other fields of high technology, e.g. in the production of optical glass fibers, surface coating of materials and glasses as well as in the production of sensors and solar cells. Production of high-purity electronic gases Thanks to its own production operations and procurement on the world market, Linde can guarantee reliable availability of its products. Where necessary, the products are purified further in our own purification plants for optimum conformity to our customers' requirements. Preparation of cylinders for electronic gases Special containers and their preparation Particular care is made in the selection of the containers and cylinder valves because the quality of high-purity gases depends on the containers and fittings to a significant extent. Proven materials used include hardened and tempered steels with inner surface treatment, passivated aluminum alloy or (electropolished) stainless steel. In the case of the cylinder valves there are simply no alternatives: stainless steel valve models are employed exclusively since they have demonstrated their superiority in comprehensive tests with respect to major properties such as low particle generation, leak tightness, purging, handling and reliability. On request, valves with flow restrictors (reduction of the cross-sectional area at the valve outlet) and pneumatic valves can also be supplied. To meet even the highest standards, supply concepts are offered in which the connections between valve and cylinder and between valve and gas supply system are designed with metallic seals. This enables a supply system for gases from pressurized gas containers to be designed in stainless steel throughout, from the storage container all the way to the point of use. Analysis of corrosive gases using a special sampling system In addition to the selection of the ideal container material for the particular gas in question, pretreatment of the containers also plays a crucial role. The containers are subjected to intensive treatment using turbomolecular pumps and tested for particle emissions and residual contamination before being filled. 24

29 Pure Gases Electronic gases Filling of ultra-high purity gases and gas mixtures To prevent cross-contamination with other process gases, cylinders are only refilled with similar gases or gas mixtures. Every cylinder is individually controlled and all relevant information documented in an electronic database. Both the cylinder inventory as well as the filling equipment are kept strictly segregated by gases. Sophisticated equipment and perfect gas handling preclude any loss in purity during filling of the containers. The filling procedure is also combined with purification measures (reduction in gaseous impurities, filtration). Gas mixtures are prepared gravimetrically by means of high-precision electronic scales. Quality assurance Decades of experience in the analysis of calibration gas mixtures (e.g. with corrosive components) and with trace analysis in ultra-high purity gases have made it easier to implement and optimize analysis methods for quality assurance of electronic gases. In addition, special sampling techniques have also been developed, mainly for corrosive gases and metal trace analysis. Leading-edge methods of gas chromatography, (FT-) infrared absorption, atomic absorption and (ICP-) mass spectrometry as well as particle counting are available for quality assurance. Within the scope of the final inspection, information on the purity and the individual specifications of the product are provided on the certificate of analysis for every cylinder of gas. Quality management for electronic gases In the field of electronic gases quality, certification to DIN EN ISO 9001 means not only that every filled cylinder is checked in a final analysis, but also that intermediate tests are carried out in every step of production for process control purposes. The results of these tests are, for example, regularly evaluated in the form of SPC data for the pretreatment of containers and used for ongoing process improvement. Pilot plant for large-scale secondary purification of HCl Container for chlorine: layout developed by Linde 25

30 Electronic gases Key products in the Linde product line Gas Purity 2.0/ /5.5/6.0 Ammonia NH 3 Arsine AsH 3 Boron trichloride BCl 3 Boron trifluoride BF 3 Chlorine Cl 2 Chlortrifluoromethane CClF 3 Disilane Si 2 H 6 Germane GeH 4 Difluoromethane CH 2 F 2 Fluoromethane CH 3 F Hexafluoroethane C 2 F 6 Hydrogen bromide HBr Hydrogen chloride HCl Nitric oxide NO Nitrogen trifluoride NF 3 Nitrous oxide N 2 O Octafluorocyclobutane C 4 F 8 Octafluoropropane C 3 F 8 Phosphine PH 3 Silicon tetrafluoride SiF 4 Sulfur hexafluoride SF 6 Tetrafluoromethane CF 4 Trifluoromethane CHF 3 Gas Purity Doping gas mixtures and further reactive gases on request Dichlorosilane SiH 2 Cl 2 50 Ωcm 150 Ωcm Silane SiH Ωcm 2000 Ωcm The key products in our line of electronic gases are shown in the obove table. The ultra-high purities offered by Class 5.0/6.0 represent the best qualtities that are presently available on the elctronic gases market. Further information is given in product leavlets and safety data sheets available from your local Linde representative on our Export Head Office. The employment of high-quality products, some of which have extreme chemical and toxicological properties, necessiates gas supply systems that incorporate professionally sophisticated concepts, designs and construction. In this regard see chapter Gas Supply Systems. A number of standard mixtures for use in the electronic industry is to be found on page

31 Pure Gases Ethane 2.5 Ethane 3.5 Ethylene 2.8 Purity, %: 99.5 (from vaporized liquid phase) (from vaporized liquid phase) 99.8 Impurities, ppm: Other C n H m 5000 Other C n H m 450 O 2 30 N Other C n H m 1800 Certificate of analysis: Yes Containers: Steel cylinders Linde Small Steel Cylinders Linde minican Water Vapor Contents liters at 20 C, bar kg Filling 14 g pressure 12 bar Water Vapor Contents liters at 20 C, bar kg Water Filling Contents * liters at 20 C, bar kg g * Filling pressure greatly dependent upon temperature Conversion factors: Identification: Cylinder shoulder color Label Red RAL 3000 Ethane 2.5/3.5 Red RAL 3000 Ethylene 2.8 Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) W x 1/14 LH, DIN 477 No. 1 Liquefied gas, highly flammable C 2 H g/mol K ( C) K ( C) W x 1/14 LH, DIN 477 No. 1 Compressed gas, highly flammable C 2 H g/mol K ( 9.50 C) K ( C)

32 Ethylene 3.5 Ethylene oxide 3.0 Purity, %: Impurities, ppm: O 2 15 N 2 50 Other C n H m (from vaporized liquid phase) Certificate of analysis: Yes Containers: Water Filling Contents * liters at 20 C, bar kg Steel cylinders Linde Small Steel Cylinders Water Vapor Contents liters at 20 C, bar kg * Filling pressure greatly dependent upon temperature Conversion factors: Identification: Cylinder shoulder color Label Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Red RAL 3000 Ethylene 3.5 W x 1/14 LH, DIN 477 No. 1 Compressed gas, highly flammable C 2 H g/mol K ( 9.50 C) K ( C) , Red RAL 3000 Ethylene oxide 3.0 W x 1/14 LH, DIN 477 No. 1 Liquefied gas, toxic, irritating, highly flammable, carcinogenic (Cat. 2), genemodifying (Cat. 2) 1 ppm (preliminary value) C 2 H 4 O g/mol K ( C) K ( C)

33 Pure Gases Helium 4.6 Helium 5.0 Helium ECD Purity, %: Impurities, ppm: O 2 5 N 2 20 H 2 O 5 C n H m 1 O 2 2 N 2 3 H 2 O 3 C n H m 0.2 O 2 2 H 2 O 2 C n H m 0.1 Halogenated hydrocarbons in SF 6 equivalents 1 ppb Certificate of analysis: Yes Containers: Steel cylinders Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m Cylinder bundles Trailers Linde minican l Conversion factors: Identification: Cylinder shoulder color Label Brown RAL 8008 Helium 4.6/5.0/ECD Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Filling pressure 200 bar: W x 1/14, DIN 477 No. 6 Filling pressure 300 bar (bundles):w x 1/14, DIN 477 No. 6 (pressure regulating valve < 200 bar) and ISO 5145 No (standard valve to 300 bar) Compressed gas, suffocating, chemically inert He g/mol 5.21 K ( C) 4.22 K ( C) Other types of supply: The LI-PUR system satisfies even the most stringent demands. 29

34 Helium as lifting gas for balloons, airships and dirigibles Helium 5.3 Purity, %: Impurities, ppm: O 2 1 N 2 2 H 2 O 2 C n H m 0.1 Certificate of analysis: Yes Containers: Steel cylinders Linde Small Steel Cylinders Water Filling Contents liters approx. bar m l Conversion factors: Identification: Cylinder shoulder color Label Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: Brown RAL 8008 Helium 5.3 W x 1/14, DIN 477 No. 6 Compressed gas, suffocating, chemically inert He g/mol 5.21 K ( C) 4.22 K ( C) The LI-PUR system satisfies even the most stringent demands. 30

35 Pure Gases Helium 5.6 Helium 6.0 Helium 7.0 Purity, %: Impurities, ppb: O N 2 1 H 2 O 1 C n H m 0.1 CO 0.1 CO O N H 2 O 0.5 C n H m 0.1 CO 0.1 CO O 2 30 H 2 30 H 2 O 50 C n H m 30 CO 30 CO 2 30 Halogenated hydrocarbons in SF 6 equivalents 1 Certificate of analysis: Yes Yes Yes Containers: Steel cylinders Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m 3 Aluminum cylinders Conversion factors: Identification: Cylinder shoulder color Label Brown RAL 8008 Helium 5.6/6.0/7.0 Valve outlet: W x 1/14, DIN 477 No. 6 Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: Compressed gas, suffocating, chemically inert He g/mol 5.21 K ( C) 4.22 K ( C) The LI-PUR system satisfies even the most stringent demands. 31

36 Liquid Helium Helium-3 Stable He isotope Hexafluoroethane 2.8 R 116 Purity, %: Enrichment Containers: Water Water Filling Contents capacity liters liters approx. bar Liter Steel cylinders Water Filling Contents * liters at 20 C, bar kg Linde Small Steel Cylinders Vacuum insulated dewars * Filling pressure greatly dependent upon temperature Conversion factors: Identification: Cylinder shoulder color Label Valve outlet: Liquid Helium Gland for siphon diameters 10/12/12.7/16/18 mm OMT coupling for 250 and 450 liter containers Brown RAL 8008 Helium-3 W x 1/14, DIN 477 No. 6 Bright green RAL 6018 R W x 1/14, DIN 477 No. 6 Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: Cryogenically liquefied gas, suffocating, chemically inert He g/mol 5.21 K ( C) 4.22 K ( C) Compressed gas, suffocating, chemically inert 3 He g/mol 3.33 K ( C) 3.19 K ( C) Compressed gas, suffocating, chemically inert C 2 F g/mol K ( C) K ( C) See page 26 for higher purities 32

37 Pure Gases Hydrogen 5.0 Hydrogen ECD Hydrogen 5.3 Purity, %: Impurities, ppm: O 2 2 N 2 3 H 2 O 5 C n H m 0.5 O 2 2 H 2 O 2 C n H m 0.1 Halogenated hydrocarbons in SF 6 equivalents 1 ppb O 2 1 N 2 3 H 2 O 2 C n H m 0.2 Certificate of analysis: Yes Containers: Steel cylinders Cylinder bundles Trailers Linde Small Steel Cylinders Linde minican Water Filling Contents liters approx. bar m to to l Water Filling Contents liters approx. bar m , ,9 Water Filling Contents liters approx. bar m l Conversion factors: Identification: Cylinder shoulder color Red RAL 3000 Label Hydrogen 5.0/ECD/5.3 Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: W x 1/14 LH, DIN 477 No. 1 Compressed gas, highly flammable H g/mol K ( C) K ( C) Hydrogen is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde. The LI-PUR system satisfies even the most stringent demands. 33

38 Steam reformer for the production of hydrogen in Milazzo (Italy) 34

39 Pure Gases Hydrogen 5.6 Hydrogen 6.0 Hydrogen chloride 2.8 Purity, %: Impurities, ppm: O N 2 1 H 2 O 1 C n H m 0.1 CO 0.1 CO O N H 2 O 0.5 C n H m 0.1 CO 0.1 CO (from vaporized liquid phase) Certificate of analysis: Yes Yes Containers: Steel cylinders Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m Water Vapor Contents liters at 20 C, bar kg Linde Small Steel Cylinders Conversion factors: Identification: Cylinder shoulder color Label Red RAL 3000 Hydrogen 5.6/6.0 Yellow RAL 1018 Hydrogen chloride 2.8 Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: W x 1/14 LH, DIN 477 No. 1 Compressed gas, highly flammable H g/mol K ( C) K ( C) Hydrogen is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde. The LI-PUR system satisfies even the most stringent demands. 1, DIN 477 No. 8 Liquefied gas, toxic, caustic 5 ppm HCl g/mol K (51.54 C) K ( C) See page 26 for higher purities 35

40 Hydrogen sulfide 2.5 Isobutane 2.5 Isobutane 3.5 Purity, %: 99.5 (from vaporized liquid phase) 99.5 (from vaporized liquid phase) (from vaporized liquid phase) Impurities, ppm: Other C n H m 5000 Other C n H m 500 Certificate of analysis: Yes Containers: Steel cylinders Steel drums Linde Small Steel Cylinders Linde minican Water Vapor Contents liters at 20 C, bar kg Water Vapor Contents liters at 20 C, bar kg Water Vapor Contents liters at 20 C, bar kg Conversion factors: Identification: Cylinder shoulder color Label Yellow RAL 1018 Hydrogen sulfide 2.5 Red RAL 3000 Isobutane 2.5/3.5 Valve outlet: 1 LH, DIN 477 No. 5 W x 1/14 LH, DIN 477 No. 1 Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: Liquefied gas, highly toxic, highly flammable, environmentally harmful 10 ppm H 2 S g/mol K ( C) K ( C) Liquefied gas, highly flammable 1000 ppm C 4 H g/mol K ( C) K ( C) Isobutane 2.5 is also available liquefied, in road tankers. 36

41 Pure Gases Isobutene 3.5 Krypton 4.0 Krypton 4.8 Purity, %: (from vaporized liquid phase) Impurities, ppm: Certificate of analysis: Other C n H m 450 Yes O 2 2 N 2 20 H 2 O 5 C n H m 1 H 2 2 Xe 20 Ar 5 O 2 1 N 2 5 H 2 O 3 C n H m 1 H 2 1 Xe 3 Ar 2 Yes Containers: Steel cylinders Water Vapor Contents liters at 20 C, bar kg Water Filling Contents liters approx. bar liters** Water Filling Contents liters approx. bar liters** Linde minican **Filled by weight, 1 liter corresponds to 3.51 g **Filled by weight, 1 liter corresponds to 3.51 g Conversion factors: Identification: Cylinder shoulder color Label Red RAL 3000 Isobutene 3.5 Bright green RAL 6018 Krypton 4.0/4.8 Valve outlet: Properties: W x 1/14 LH, DIN 477 No. 1 Liquefied gas, highly flammable W x 1/14, DIN 477 No. 6 Compressed gas, suffocating, chemically inert MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) C 4 H g/mol K ( C) K ( C) Kr g/mol K ( C) K ( C)

42 Methane 2.5 Methane 3.5 Methane 4.5 Purity, %: Impurities, ppm: O N H Other C n H m 3000 O 2 30 N H 2 20 Other C n H m 300 O 2 5 N 2 20 H 2 5 Other C n H m 20 H 2 O 5 Certificate of analysis: Yes Yes Containers: Water Filling Contents Steel cylinders Cylinder bundles Linde Small Steel Cylinders Linde minican Water Filling Contents liters approx. bar m liters approx. bar m l Water Filling Contents liters approx. bar m l Conversion factors: Identification: Cylinder shoulder color Label Red RAL 3000 Methane 2.5/3.5/4.5 Valve outlet: W x 1/14 LH, DIN 477 No. 1 Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Compressed gas, highly flammable CH g/mol K ( C) K ( C)

43 Pure Gases Methane 5.5 Environmentally friendly drive technology with CNG (compressed natural gas) as fuel Purity, %: Impurities, ppm: O N 2 4 H Other C n H m 1 H 2 O 2 Certificate of analysis: Yes Containers: Steel cylinders Water Filling Contents liters approx. bar m Conversion factors: Identification: Cylinder shoulder color Label Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Red RAL 3000 Methane 5.5 W x 1/14 LH, DIN 477 No. 1 Compressed gas, highly flammable CH g/mol K ( C) K ( C)

44 Neon 3.5 Neon 4.5 Neon 5.0 Purity, %: Impurities, ppm: O 2 3 N 2 10 H 2 O 3 C n H m 0.2 He 200 O 2 2 N 2 5 H 2 O 3 C n H m 0.2 He 20 O 2 1 N 2 2 H 2 O 2 C n H m 0.1 He 5 Certificate of analysis: Yes Containers: Steel cylinders Linde Small Steel Cylinders Linde minican Water Filling Contents liters approx. bar liters Water Filling Contents liters approx. bar liters Water Filling Contents liters approx. bar liters Conversion factors: Identification: Cylinder shoulder color Label Bright green RAL 6018 Neon 3.5/4.5/5.0 Valve outlet: W x 1/14, DIN 477 No. 6 Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Compressed gas, suffocating, chemically inert Ne g/mol K ( C) K ( C)

45 Pure Gases Nitric oxide 2.5 Nitrogen 4.6 Nitrogen 5.0 Purity, %: (incl. rare gases) (incl. rare gases) Impurities, ppm: O 2 5 H 2 O 5 C n H m 0.5 O 2 3 H 2 O 5 C n H m 0.2 Containers: Steel cylinders Steel drums Linde Small Steel Cylinders Linde minican Water Filling Contents liters approx. bar m l Water Filling Contents liters approx. bar m Water Filling Contents liters approx. bar m l Conversion factors: Identification: Cylinder shoulder color Label Valve outlet: Properties: MAK value Chemical symbol Molar mass Critical temperature (T c ) Boiling point at 1,013 bar (T b ) Relative density at 15 C, 1 bar (dry air = 1) Other types of supply: Yellow RAL 1018 Nitric oxide 2.5 1, DIN 477 No. 8 Compressed gas, highly toxic, caustic 25 ppm NO g/mol K ( C) K ( C) Black RAL 9005 Nitrogen 4.6/5.0 Filling pressure 200 bar: W 24,32 x 1/14, DIN 477 No. 10 Filling pressure 300 bar (bundles): W 24,32 x 1/14, DIN 477 No. 10 (pressure regulating valve< 200 bar) and ISO 5145 No (standard valve to 300 bar) Compressed gas, suffocating, chemically inert N g/mol K ( C) K ( C) Nitrogen is also available cryogenically liquefied, in road tankers, or from nitrogen service vehicles in the case of low requirements from 5 to 300 l. The LI-PUR system satisfies even the most stringent demands. 41