CRITICAL FLUID MANAGEMENT FLUOROPURE TRILAYER HDPE DRUMS

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1 CRITICAL FLUID MANAGEMENT FLUOROPURE TRILAYER HDPE DRUMS High purity transport technology

2 CRITICAL FLUID MANAGEMENT Safe, high purity chemical transport Entegris is a worldwide leader in providing high performance, critical fluid management solutions for use in high purity corrosive environments. For more than 30 years, Entegris has been assuring materials integrity with quality products, systems and related services to the semiconductor industry. We provide the most comprehensive portfolio of materials management solutions to help you handle your high purity, microelectronic grade chemicals from storage and transport to chemical distribution and point of use. Keeping pace with your changing market and technology demands, Entegris continually invests in next generation product development. One such investment is our on-site blowmolding equipment where our FluoroPure HDPE drums are manufactured. The product family includes the trilayer HDPE drum, the Advantage trilayer HDPE drum and the trilayer single-use HDPE drum. Our state-of-the-art manufacturing facilities include Class 100 and Class 1000 cleanrooms, controlled manufacturing environments, sophisticated process control equipment, computerized inprocess inspections and highly trained personnel. With manufacturing facilities in the United States, Germany and Japan, along with customer support on six continents, we are positioned to service your needs around the world. This on-site, state-of-the-art equipment is used to blowmold HDPE drums used for transporting electronic grade specialty chemicals.

3 FluoroPure HDPE Blowmolded Drum Entegris has invested in blowmolding tech - nology to give you the highest purity HDPE drum currently available. High density polyethylene drums (HDPE) are commonly used by chemical companies to transport electronic grade specialty chemicals. Maintaining the utmost purity of these chemicals is critical to everyone who handles them. Entegris understands this and has designed a family of HDPE drums that allows these companies to better meet end users purity requirements. The three blowmolded drums offer higher purity, lower trace metals and fewer particles than current HDPE drums. Lower Cost of Ownership In addition to meeting the industry s stringent purity requirements, our multilayer blowmolding technology enables us to extend lower product costs to you. Although multilayer blowmolding technology itself is not new, Entegris is the first to invest in this breakthrough technology and offer a 200 liter drum for handling large volume chemicals in the semiconductor industry. Entegris is able to make such a commitment because of our experience, sophisticated resources and dedication to market needs. Entegris FluoroPure trilayer HDPE drum offers higher purity, lower trace metals and fewer particles than typical HDPE drums. The Advantage trilayer HDPE drum assures chemical integrity in applications where maintaining the utmost purity is critical. The trilayer single-use FluoroPure HDPE drum is a cost-effective, one-way packaging solution for transporting electronic grade chemicals.

4 Blowmolding Process As microelectronic process requirements become increasingly more stringent it is essential to get chemical from the point of production to the point of use in as close to its original state as possible. Entegris has taken great steps to help you meet these stringent requirements by investing in state-of-the-art blowmolding equipment specially designed to enhance product cleanliness. The equipment is housed in a dedicated room complete with high purity blowmolding methodology and dedicated material handling lines. We have selected the materials of construction specifically for their mechanical strength and cleanliness properties. High Purity Blowmolding When manufacturing the drum using Entegris patented blowmolding design, the three layers are combined into one parison (a hollow tube of molten plastic material that is formed in the first stage of the blowmolding process). Next, the parison is inflated using a high purity blowmolding methodology. During this stage, the material layers in the drum maintain their stratified cross section, Each drum layer has a dedicated material line so cleanliness is maintained throughout the manufacturing process. keeping the drum s inner layer very clean while allowing the use of additives needed to satisfy drum integrity and manufacturing requirements in the outer layer. The finished drum is moved from the controlled environment of the manufacturing equipment to a Class 1000 cleanroom. When in the cleanroom, drum insert installation is accomplished without contaminating the drum.

5 Product Design Trilayer Advantage The HDPE drum is blowmolded in three layers. Entegris material knowledge and expertise allowed us to select a material combination that meets customer purity requirements, minimizes material waste and keeps product costs down. Inner Layer The inner layer is blowmolded from proprietary HDPE materials. These resins were selected as the best performing materials for this application based on thorough testing in our Material Test Laboratory. As a result, you get a drum with a corrosion-resistant chemical contact surface that sheds fewer particles than existing drums. Middle Layer The middle layer is blowmolded from a material blend that includes excess material resulting from normal manufacturing. Because the middle layer is removed from chemical contact, purity in this layer is not critical. In addition, using excess material in this layer minimizes waste and lowers product costs without compromising overall container strength. Outer Layer The outer layer contains colorants and UV stabilizers necessary for long-term strength and resistance to environmental exposure. Because these additives comprise the outer layer and are far removed from your chemical, optimum product performance is achieved. Single-Piece Molded Design The single-piece blowmolded drum has a deep draw integral chime that protects the drum insert and shipping enclosures during transportation unlike multipiece and single-piece designs with low chimes that leave them unprotected and vulnerable. Because the chimes are integrally blowmolded into the drum, they will not disengage from the drum when transporting high specific gravity chemicals a concern with multipiece designs. In addition, the integral design is easier to clean and has fewer entrapment areas than the hard to clean snap-on chime alternatives. Multiuse design Single-use design Deep draw chime Mated threads Middle layer See detail Inner layer Outer layer The drum mates exactly to Entegris drum insert for a positive seal and secure connection. The deep draw chime protects the drum insert during transportation. The trilayer design enables us to maintain purity in the inner layer, minimize waste in the middle layer and use additives and colorants in the outer layer.

6 Performance Purity Our unique manufacturing process with clean manufacturing methodologies produces drums with fewer surface particles than existing drums. These clean manufacturing practices, combined with our standard precleaned drum insert proce - dure and material selection process, provide a high purity drum with significantly reduced particle shedding and low trace metals. As a result of Entegris goal to continuously improve products and develop cleaner materials, we recently released a drum using an inner layer material with improved purity performance. You now have a choice of two HDPE inner layer materials to satisfy your drum purity requirements. Chemical Drainability and Retrievability The unique sump design results in optimum performance and cost effectiveness. Preliminary testing reveals that when used with a FluoroPure drum insert, chemical drainability in our blowmolded HDPE drums is three times better than the industry average, and chemical retrievability is six times better. Safety DOT/UN Compliance Your safety is our primary concern. Because of our multilayer design, additives in the outer layer give the drum the strength to pass extreme test conditions, while the inner layer maintains your chemical purity. We have made sure we provide you a high purity drum without compromising product strength, and ultimately your safety. Our drums comply with stringent DOT/UN shipping regulations. An impartial third party has conducted tests including drop testing, stack testing and hydrostatic testing. Our HDPE drums are DOT/UN approved for transporting Group II chemicals with a specific gravity of 2.0. The drums have a hydrostatic rating of 170 kpa. Continual Requalification Quality drives every function at Entegris. We hold materials, components, products and service to rigorous standards. ISO 9001 certification serves as the baseline for this comprehensive quality program. To ensure continued DOT/UN compliance we are committed to requalifying our HDPE drums annually. Our extensive testing ensures product reliability and safety, so you can confidently store and transport your specialty chemicals. FluoroPure HDPE drums are fully compatible with our patented Quick Connect System the industry accepted means for connecting the drum to a chemical distribution system.

7 Product Test Laboratory Quality is an integral part of Entegris corporate culture. Extensive qualification testing in Entegris Product Test Laboratory fully characterizes products to ensure they meet reliability, safety, durability and functionality requirements for use in even the harshest environments before the product ever arrives on site. Use of sophisticated equipment in our Technology Research Laboratory like this ICP Mass-Spectrometer ensures leading edge materials research and performance. Our drums comply with stringent DOT/UN shipping regulations. To ensure continued compliance, drums are conditioned in our on-site environmental chamber then transferred to the drop pad for drop testing. Material Test Laboratory Material selection is a key element in designing a molded component. Entegris trained material experts give you more than a material specification. Sophisticated laboratory equipment and inspection techniques enable our scientists to thoroughly analyze resins for temperature capability, chemical c o m p a t i b i l i t y, structural tolerance and maximum s t rengths. We inspect each resin lot thoroughly. ISO 9001 certification and regular process audits a s s u re material is consistent each time. Manufacturing Capability Entegris has built a reputation as a leader in molding the most difficult materials to close tolerances. In addition to our capability to blowmold HDPE material on site, our rotomolding expertise allows us to rotomold seamless containers as small as 1 liter and as large as 4500 liters in PE, PVDF and PFA materials. We also run a variety of injection molding presses ranging from 60 to 710 tons. More than 100 different materials can be extruded, molded and machined. For More Information Experience firsthand how FluoroPure HDPE drums can maintain chemical purity during transport. Contact your local Entegris representative to learn more about these and other FluoroPure containers. To review our complete line of critical fluid management products, log on to or contact Entegris Customer Service for your free Fluid Handling Products catalog on CD ROM.

8 Terms and Conditions of Sale AGREEMENT Entegris expressly limits acceptance to the prices, conditions and terms set forth in this document. Buyer s terms and conditions of purchase shall not apply. CANCELLATION PRIOR TO SHIPMENT Entegris may, on a discretionary case-by-case basis, charge Buyer cancellation charges for orders which are cancelled prior to shipment. Buyer should contact their Entegris customer service representative to determine the effect of an order cancellation. PERFORMANCE Unless otherwise agreed to in writing, Entegris reserves the right to make design changes which Entegris believes will improve its products. Entegris may also satisfy customer purchase orders by shipping % of ordered quantities for nonstandard products when shipping lesser quantities provides Entegris operational efficiencies. Entegris shall only charge Buyer for actual quantities shipped. Entegris performance shall be excused in the event of strikes, accidents, fires, unavailability of materials and all other causes beyond the control of Entegris. CLAIMS AND RETURNS Claims for shortages or inaccurate filling of orders must be made to Entegris within thirty (30) days after receipt of goods. All returns must have an accompanying return authorization number issued by Entegris. Returned goods will be accepted only with prior written approval from Entegris and must be returned in unused, resalable condition and in the original packaging and must be at the current revision level. Entegris may charge a reasonable restocking charge on any items which it accepts that are returned for credit or exchange when the error is not Entegris. TOOL OWNERSHIP All tools, dies and patterns produced by or at the request of Entegris shall remain the exclusive property of Entegris. Entegris reserves the right to advertise and/or sell any of the foregoing items and any of its products unless otherwise agreed to in writing by Entegris. WARRANTY Entegris warrants each new product against defects in materials and workmanship for the following periods of time from shipment: Wafer Management products, Integrated Shipping Systems products, Test, Assembly and Packaging products, Custom products 90 days; Entegris TM Cleaning Systems and AutoPod TM Wafer Carriers 1 year; Critical Fluid Management products (except as separately identified below) including FluoroPure Chemical Container products 1 year; Sheetlined Chemical Container products and FluoroPure PFA Liners (blistering, cracking or leakage only) 18 months; FluoroPure o-rings and gasket materials 90 days. Entegris makes no warranty, express or implied, with respect to any components, products or services provided by any third party. With respect to products specially manufactured to Buyer s specifications, Entegris warrants only that such products have been manufactured, without testing, to Buyer s specifications but makes no other warranty, express or implied. Upon Entegris confirmation of defects, Entegris agrees, as its exclusive remedy to repair or, in its discretion, replace defective product without charge. Entegris is not responsible for product damage resulting from accident, misuse, or lack of reasonable care. IMPORTANT: No other warranty, written or verbal, is authorized by Entegris. Entegris is not liable for any special, incidental or consequential damages. Implied warranties of merchantability and fitness for a particular purpose are specifically disclaimed. Entegris TM is a trademark of Entegris, Inc. FluoroPure and AutoPod TM are trademarks of Fluoroware, Inc. HDPE blowmolded drum patent number 6,045,000. Quic k Connect patent numbers 5,108,015; ; ENTEGRIS, INC. Corporate Headquarters / 3500 Lyman Boulevard / Chaska, Minnesota USA Customer Service Tel / Customer Service Fax / A critical materials managem ent company 2000 Entegris, Inc. Printed in USA MAX-0600