Summary. Curriculum Vitae for Krzysztof Malecki. July 30, 1970, Czestochowa. Position of Marie Currie Fellowship, Researcher, PhD, eng.

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1 Curriculum Vitae for Krzysztof Malecki Name: Born: Nationality: Marital Status: Actual Position: Krzysztof Malecki July 30, 1970, Czestochowa Polish Single, no children Position of Marie Currie Fellowship, Researcher, PhD, eng. Current affiliation: Institute of Sensor and Actuator Systems Vienna University of Technology 7/2 Floragasse Street; A-1040 Vienna - Austria Phone: ; Fax: Krzysztof.Malecki@TUWien.ac.at Web page: Private Address: Ul. Strachocinska 88a/ Wroclaw, POLAND Phone.: ; esho@wp.pl Personal home page: Summary Krzysztof Malecki (born in Czestochowa, Poland in 1970). He was given a diploma in Engineering at the Silicon Micromechanics Group, Semiconductor Laboratory Institute of Microsystems Technology, Department of Electronics, Wroclaw University of Technology, Poland, major in Electronics Devices in 1996 for a work entitled: "Silicon Micropump for Liquids". He obtained the MSc in 1997 from the Department of Electronics, Institute of Microsystems Technology at the Wroclaw University of Technology, Poland. His Master thesis was entitled: "Silicon Liquid Micropump for Gas Chromatograph". In 2003 the PhD degree was conferred him in a field of Technical Science from Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Poland. The title of the dissertation was: The integrated microdosing system for silicon capillary systems. From 1995 to 2003 he cooperated with Silicon Micromechanics Group where he made independently several works on sensors and actuators for Micro-Electro-Mechanical-Systems - MEMS. The micromachined components (TCT - thermal conductivity detector and gas dosage system) developed in his works were performed as an contribution of government program on the first Polish micro gas chromatograph (microgc) financed by Polish Ministry of Industry and Polish Research and Science Committee (KBN). From 2003 to 200, as a double winner of the European competition, he held a position of the major executor of the project granted by European Commission, Marie Curie Fellowships Association, under the 5th Framework Programme (FP5) for Research and Development Improving Human Research Potential and the Socio-economic Knowledge Base. The contract entitled: "Technologies for Micro-Opto-Electro-Mechanical Systems" was undertaken at the Italian National Council of Research, Institute for Microelectronics and Microsystems Unit of Naples. The main responsibilities of his employment were: design and fabrication of innovative Micro-Opto-Electro-Mechanical-Systems (MOEMS), and implementation of MEMS technologies in IMM-Naples. Since 2005, as an Experienced Researcher, Krzysztof Malecki is holding a position of the Project Assistant at the Institute of Sensor and Actuator Systems Vienna University of Technology, in a frame of Marie Curie Research Training Network Advanced Methods and Tools for Handling and Assembly in Microtechnology - ASSEMIC founded by European Commission. His contribution in the Consortium covers microhandling and micromanipulation Page 1 / 14

2 issues for biological and medical applications, and in particular results and experiments on drag screening microtechnology and single cells manipulation. Krzysztof Malecki is an author and co-author of several papers and know-how scientific reports. He is the winner of domestic and international honours. He is a member of Polish Society of Sensor Technology PTTS, Marie Curie Fellowships Association MCFA, and International Microelectronics and Packaging Society IMPAS US. Employment From 2005 The Project Assistant at the Institute of Sensor and Actuator Systems Vienna University of Technology, in a frame of Marie Curie Research Training Network Advanced Methods and Tools for Handling and Assembly in Microtechnology - ASSEMIC founded by European Commission. The main responsibilities: Microhandling and micromanipulation for biological and medical applications Results and experiments on microhandling for biological applications Drug screening microtechnology for live-cells, technology development Concepts, comparative analysis and experiments for manipulation in special environment/conditions The project granted by European Commission, Marie Curie Fellowships Association, under the 5 th Framework Programme (FP5) for Research and Development Improving Human Research Potential and the Socio-economic Knowledge Base. The contract entitled: "Technologies for micro-opto-electromechanical systems", at the Italian National Council of Research, Institute for Microelectronics and Microsystem Unit of Naples. The main responsibilities: Design and fabrication of innovative Micro-(Opto-)Electro-Mechanical-Systems (M(O)EMS) Implementation of Silicon-Glass Anodic Bonding System and technology Start-up and tuning of photolithography process Implementation of Anisotropic Etching of Silicone and technology Implementation of wet technology: washing, cleaning and decontamination processes Start-up and tuning of technological equipments for DC-RF sputtering system Tuning and assistance for RIE and CVD technology Teaching and tutoring university students and institutional staff Page 2 / 14

3 Cooperation and work with Micromechanics Group, at Wroclaw University of Technology Microsystem Electronics and Photonics, Poland. The research group supervised by Prof. Jan Dziuban. Several and independently made works on sensors and actuators. The main projects: Silicon-glass valve-less liquid micropump Silicon-glass liquid micropump for gas chromatograph Micromachined step engine (500μm) Silicon micromachined valves in different configuration Flow meters Thermal Conductivity Detectors (TCD) in different technology Silicon-glass dosage system for micro-gas-chromatograph (μgc) Education January 15, 2003 PhD graduation and Physical Doctor degree confer in a field of Technical Science from Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Poland. A title of dissertation: The integrated microdosing system for silicon capillary systems Doctoral courses at Wroclaw University of Technology, Department of Electronics, Faculty of Microsystem Electronics and Photonics (old name: Institute of Microsystems Technology), Supervisor: Prof. Kazimierz Friedel Master study at Wroclaw University of Technology, Department of Electronics, Institute of Microsystems Technology, Major in Electronics Devices. Master Thesis entitled: "Silicon Liquid Micropump for Gas Chromatograph" (award date July 8 th 1997), Supervisor: Dr. J. Dziuban, Institute of Microsystems Technology, Wroclaw University of Technology, Poland Bachelor study at Wroclaw University of Technology, Department of Electronics, Institute of Microsystems Technology, Major in Electronics Devices. Bachelor Thesis on: "Silicon Liquid Micropump" (award date July 4 th 1996, Supervisor: Dr. J. Dziuban, Institute of Microsystems Technology, Wroclaw University of Technology, Poland One year of Pedagogic University in Czestochowa, Poland. Department of Engineering Science. Page 3 / 14

4 Scholarships & Awards 1997 First Prize of the 6th Scientific Conference for Electron Technology ELTE 97; Krynica 6-9 May '97 for the research work entitled: TECHNOLOGY OF EJECTOR MICROPUMPS First Prize for the graduate of Electronic Department of Technical University of Wroclaw for the Ms.C. work entitled: Silicon Liquid Micropump for Gas Chromatograph Award of Rector of the Warsaw University of Technology for the highest level of Scientific works Government Grant to proceed doctor degree programme on Microdosing system for gas chromatograph from Polish Research and Science Committee (KBN) The award of organizers Global Dialogue - Shaping The Future international forum for graduates and young researches at the World Exposition EXPO2000 in Hannover, Germany, funded by a grant of the Volkswagen Foundation, Subject of works: Silicon Components for Gas Chromatograph, 9th 18th July May 20, 2002; January 16, 2004 A double winner of public selection of the European Commission for a self-employment contract for research activities in the field of optoelectronics, microsystems and specifically on the subject: "Technologies for micro-opto-electro-mechanical systems", at the Institute for Microelectronics and Microsystems Unit of Naples, under the responsibility of Prof. Francesco Della Corte. The contract granted by Marie Curie Association, under the 5th Framework Programme (FP5) for Research and Development Improving Human Research Potential and the Socio-economic Knowledge Base A winner of public selection of the European Commission for an employment contract for research and development activities in the field of Microsystems, microhandling and micromanipulation for biological and medical applications, in a frame of Marie Curie Research Training Network Advanced Methods and Tools for Handling and Assembly in Microtechnology - ASSEMIC founded by European Commission. Scientific highlights and research experience 2006 Technology expert at the Rutherford Appleton Laboratory, EID/Central Microstructure Facility (Business Unit - Technology), Chilton, Didcot, Oxfordshire, United Kingdom Topics: Su-8 polymer technology development for lab-on-chip applications Page 4 / 14

5 Project Assistant at the Institute of Sensor and Actuator Systems Vienna University of Technology, in a frame of Marie Curie Research Training Network Advanced Methods and Tools for Handling and Assembly in Microtechnology - ASSEMIC founded by European Commision. Topics: microhandling and micromanipulation for biological and medical applications, results and experiments on drug screening microtechnology for live-cells, innovative microfluidic technology development, concepts, comparative analysis and experiments for manipulation in special environment/conditions The main contractor and executor of the European Project entitled: "Micro Opto Mechanical Systems in Campania Felix" Marie Curie Fellowships, 5th Framework Programme (FP5) for Research and Development Improving Human Research Potential and the Socio-economic Knowledge Base. Topics: design and fabrication of innovative Micro-Opto-Electro-Mechanical-Systems (MOEMS), implementation of variety of MEMS technologies in IMM-Naples Participation in works of R&D Team of Institute for Microelectronics and Microsystems Unit of Naples, for porous silicon optical chip for bio-chemical sensing applications, under the Italian PON-MIUR project number 68/2002. Topics: design and development, construction, realization of porous silicon based bio-chemical sensor, investigation of possibilities for integration of optical detection in gas and liquid different phases, integration for lab-on- chip applications Participation in works of R&D team in grant KBN (Polish State Committee of Scientific Research) No. PBZ Microsystems for total analysis of multi component mediums. Topics: design and development, construction and realization of silicon-glass components, investigation of possibilities for integration optical and thermal detection in gas and liquid measurement Major contractor in grant KBN (Polish State Committee of Scientific Research) No. 8T11B07317 for PhD scientist "Scientific Research of Microsystems for Steering and Control of gas and liquids microflows". Topics: Gas Microdosing System design, technology, fabrication and test, prototype realization, microelectronics, microsystems, mirotechnology, silicon micromechanics, Micro-Gas-Chromatograph Participation in works of R&D team in grant KBN (Polish State Committee of Scientific Research) No. 9T12A03710 "Micro Gas Microchromatograph for measurements and detecting of composition of atmosphere in coal mines". Topics: silicon microcolumns for gas chromatography, flow sensors, thermal stabilization of silicon column, gas/liquid dosage systems, micropumps. Page 5 / 14

6 Participation in works of R&D team in grant KBN (Polish State Committee of Scientific Research) PBZ 2705 "Silicon micromechanic sensors" in cooperation with Warsaw University of Technology and Institute of Electron Technology in Warsaw. Topics: design, realization, and measurement of electrical and mechanical properties of silicon chips for MEMS applications, anodic bonding, micromachining of glass and silicon (etching, moulding, etc.). Summary of current research RESEARCH INTERESTS: Sensors and actuators, MEMS, MOEMS, Lab-on-chips (LOC) Micro total analysis systems (μtas) technology, development and testing Microsystems and micromechanics technology Microdosage systems (valves, pumps) Gas sensors and gas flow sensors, microfluidics ACCOMPLISHMENTS: The project entitled Advanced Methods and Tools for Handling and Assembly in Microtechnology - ASSEMIC founded by European Commission of the Marie Curie Association, in a frame of Marie Curie Research Training Network. Elaboration of the concept, design and fabrication, technology development and tests of the microfluidic chip for single cell handling and manipulation, for biological and medical applications Development of the Su-8 polymer on glass technology for lab-on-chip applications in a low micrometric size range The project entitled "Technologies for micro-opto-electro-mechanical systems" granted by Marie Curie Association, under the 5th Framework Programme (FP5) for Research and Development Improving Human Research Potential and the Socio-economic Knowledge Base. Transfer and successful implementation of Silicon Glass Anodic Bonding technology for MEMS applications, in laboratory of the Institute for Microelectronics and Microsystems Unit of Naples New approach and investigation of low temperature Anodic Bonding technology Implementation of wet technology: washing, cleaning and decontamination processes Transfer and successful implementation of Anisotropic Etching of Crystalline Silicone in Alkaline Solutions in laboratory of the Institute for Microelectronics and Microsystems Unit of Naples Silicon integrated micro dosing system for gas and liquid chromatography (grants founded by Polish State Committee of Scientific Research, Institute of Microsystems Technology in co-operation with EMAG Katowice, Institute of Electron Technology and Warsaw University of Technology) Page 6 / 14

7 Elaboration of new construction principle for micromechanical valves based on the Teflon membrane Elaboration of free thick dielectric membranes and bridges technology for micromechanical constructions Elaboration of new method of anodic bonding for silicon pressure sensors with bossed membrane Elaboration of new method of deep wet glass etching for MEMS applications Elaboration of different method of glass drilling holes Silicon microlevitating engine structure and steering unit (Supervisor of student project, Institute of Microsystems Technology, Wroclaw, Poland) Glass-silicon-glass multilayer connection systems for μtas (Institute of Microsystems Technology, Wroclaw, Poland) Investigation of new TCD detectors for gas flow measurement Investigation of new valves with Teflon membrane for gas fluid maintenance Silicon valveless micropumps ejectors investigation and pump structure testing (Master and Bachelor Thesis, Institute of Microsystems Technology, Wroclaw, Poland). Education experience, invited seminars and presentations Micro-Electro-Mechanical Systems (MEMS) The Art of Change; 6th National Meeting of MC Fellows; Verona Italy; Study of the silicon-glass anodic bonding process realized at low-temperature; Gruppo Elettronica (GE) - The annual meeting; Politecnico di Torino - Dipartimento di Elettronica; Torino Italy; Microelectronics-compatible technologies for silicon microsystems (MEMS) with emphasis on photolithography, wet and dry etching, and anodic bonding; University of Reggio Calabria; Italy; MEMS, MOEMS, μtas what are they? A brief overview of applications and technology; University of Reggio Calabria; Italy; MEMS s technologies - an overview with recent results at the Laboratory for Microsystems of Technical University Wrocław; University of Reggio Calabria; Italy; The integrated microdosing system for silicon capillary systems; Faculty of Microsystems Electronics and Photonics, Wroclaw University of Technology, Wrocław - Poland, Silicon Micromechanics and Microsystems in Wrocław - Poland; Institute for Microelectronics and Microsystems (IMM) Italian National Council of Research (CNR); Naples Italy; Page 7 / 14

8 Injection valves and thermoconductive flow meters results of research; Department of Chemistry Warsaw university of Technology; Warsaw Poland; Silicon components for gas chromatograph; International Forum for Graduates and Young Researchers at EXPO 2000; University of Hannover; Hannover - Germany, An integrated microdozing system for silicon capillary systems; Research Institute of Semiconductor Devices, Institute of Microsystem Technology, Wrocław University of Technology; Wrocław Poland; Technology and design semiconductor devices and integrated circuits; Institute of Microsystem Technology, Wrocław University of Technology; Wrocław Poland; An integrated micromechanical silicon pump for microdozing; 5 th Science Conference for Optoelectronics and Electronics Sensors - COE 98; Jurata Poland, A ceramic hybrid cartridge for silicon pressure sensor; An influence of anodic bonding on silicon pressure sensor quality; The multilayer anodic bonding; XXI ISHM-Poland Chapter Annual Conference and Exhibition, International Society for Hybrid Microelectronics; Ustron Poland; Ejector Micropump Technology; 6 th Science Conference of Electron Technology ELTE 97; Krynica Poland, Semiconductor pressure sensors; presentation and exhibition at VI International Telecommunication and Electronics Fair TAREL97 in Wroclaw Poland; Academic supervision of BS and M.Sc. candidates Thermal oxidation of silicon at high temperature; Francesco Garreffa, Faculty of Engineering, University of Reggio Calabria - Italy, Process facilities for anisotropic etching of silicon in alkaline solutions; Thesis for graduation of Giovani Rodi, Faculty of Engineering, University of Reggio Calabria - Italy, Experimental analysis of the silicon/glass anodic bonding technique realised at low temperature, Domenico Alfieri, Faculty of Engineering, University of Reggio Calabria - Italy, Silicon-glass Anodoc Bonding Technology, Carmelo Massara, DIES, University of Calabria Cosenza, Italy, An integrated injection system with a dosage loop (Zintegrowany układ wstrzykowy z pętlą dozującą in Polish); Dawid Zalewski; Faculty of Microsystem Electronics and Photonics; Wrocław University of Technology, Department of Electronics, Wrocław Poland; A gas composition thermodetector in integrated chromatography system; (Termodetektor składu gazu w układzie chromatografu zintegrowanego in Polish); Wojciech Buła; Faculty of Microsystem Electronics and Photonics; Wrocław University of Technology, Department of Electronics, Wrocław Poland; Page 8 / 14

9 Computer simulation of gas dozing process in capillary microsystems for chemical analyses; (Komputerowa symulacja procesu dozowania gazów w kapilarnych mikrosystemach analizy chemicznej in Polish); Robert Kubik; Faculty of Microsystem Electronics and Photonics; Wrocław University of Technology, Department of Electronics, Wrocław Poland; A micromechanical valve with steering system (Zawór mikromechaniczny ze sterowaniem in Polish); Konrad Rozmarynowski; Institute of Microsystems Technology; Wrocław University of Technology, Department of Electronics, Wrocław Poland; Elaboration of functional system with steering microprocessor for integrated gas microchromatograph; (Opracowanie układu funkcjonalnego z mikroprocesorem sterującym dla zintegrowanego mikrochromatografu gazowego in Polish); Jan Nongiesser, Marek Szczerbik; Institute of Microsystems Technology; Wrocław University of Technology, Department of Electronics, Wrocław Poland; Memberships PTTS Member of the Polish Society of Sensor Technology (Polskie Towarzystwo Technik Sensorowych) MCFA Member of the Marie Curie Fellowship Association IMPAS-US International Microelectronics and Packaging Society of US Other skills Experience in photolithography mask designing and process realization Microsystems design, technology and technology optimization Hands on laboratory processes: photolithography, thermal oxidation, wet processing (cleaning, isotropic and anisotropic etching) of silicon and glass, doping, silicon-glass anodic bonding, structure assembling (micromontage, hybridization) Process-flow designing, laboratory/clean room management Excellent computers and informatics operating Excellent troubleshooting solver Experience in designing, realization and organization of semiconductor laboratory, microtechnology line, clean room, wide experience and contacts with business companies Management with human, technical and financial responsibilities Good teaching and tutoring experience on academic, laboratory and industrial/business level Good command of English and Russian Page 9 / 14

10 References & Recommendations (Other contact addresses are available on request) Professor Francesco Giuseppe Della Corte Associate Professor of Electronics "Mediterranea" University of Reggio Calabria Coordinator of the Doctoral Courses in Electronic Engineering "Mediterranea" University of Reggio Calabria Head of the Laboratory of Electronics "Mediterranea" University of Reggio Calabria Research Associate to the Institute for Microelectronics and Microsystems of the CNR Head of the Electronic Components Division Institute of Research on Electromagnetism and Electronic Devices of CNR ( ) Project Leader National Consortium for the Optoelectronic Applications of InP ( ) Coordinator of the European Project entitled: "Micro Opto Mechanical Systems in Campania Felix" Marie Curie Fellowships, 5th Framework Programme (FP5) for Research and Development Improving Human Research Potential and the Socio-economic Knowledge Base Coordinator of the National Project "MEDNET- Micro Electronic Design Network- Enhanced Training Laboratory" funded by the Italian Minstry for Education, University and Research Coordinator of the National Project "Temperature Microsensors with Optical Transmission Channel for Hostile Environments" funded within the Italian Targeted Program MADESS (Materials and Devices for Solid State Electronics) CNR Coordinator of the National Project "Micromodulators and optical switches in amorphous silicon" funded by the Italian Agency for Energy and Environment Memberberships: IEEE, Gruppo Elettronica, Italian Association on Sensors and Actuators Rewiever for Solid State Electronics Page 10 / 14

11 Professor Kazimierz P. Friedel Associate Professor at the Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology Fellow of Japan Society for the Promotion of Science Fellowship at Welding Research, Institute of Osaka University, Japan Member of Polish Society of Electrical Engineers Member of Polish Society for Theoretical and Applied Electrical Engineering Member of Polish Vacuum Society Member of Wroclaw Scientific Society Member of International Microelectronics and Packaging Society (IMAPS) Supervisor of Krzysztof Malecki s Philosophic Doctor Degree dissertation Group Leader and Hear of the Steering Committee of Materials Recycling Center of Excellence Professor Zbigniew Brzozka brzozka@ch.pw.edu.pl Associate Professor at the Warsaw University of Technology Head of Chemical Sensors Research Group CSRG Chief of Laboratory of Miniature Analytical Systems Reviewer of Krzysztof Malecki s PhD dissertation Dr Jan Dziuban Associate Professor Head of Micromechanics Group Member of the Steering Committee of Eurosensors Conference Member of the Steering Committee of International Vacuum Microelectronic Conference Member of the Board Polish Society for Sensor Technology Member of the Committee on Machine Building Polish Academy of Sciences Supervisor of Krzysztof Malecki s Bachelor and Master of Science degree theses Date: Signature: 22/10/2006 Page 11 / 14

12 List of Publications 1. Krzysztof Małecki, Silicon Micropump for Liquid, Elaborate of Diploma in Engineering, the Institute of Electronic Technology of the Wrocław University of Technology, Krzysztof Małecki, Silicon Micropump for Liquid for Microsystem Chromatography" Elaborate of Diploma M.Sc. degree, Institute of Electronic Technology of the Wrocław University of Technology, Krzysztof Małecki, Jan A. Dziuban, Anna Górecka-Drzazga; Jeży Mróz; Ejector Micropump Technology; Proceedings of 6 th Science Conference of Electron Technology ELTE 97; Krynica, 6-9 May Krzysztof Małecki, Jan A. Dziuban, Anna Górecka-Drzazga; A silicon valve-less pump IC compatible technology; Micro System Technology News POLAND 3/ Krzysztof Małecki, Jan A. Dziuban, Anna Górecka-Drzazga; Silicon Microsystem for Mivrovolume Pumping in Analysing Systems; Mechatronics 97; Proceedings of 3 rd Science-Technical Conference; Warszawa, November Krzysztof Małecki, Jan A. Dziuban, Anna Górecka-Drzazga; An integrated micromechanical silicon pump for microdozing; Optoelectronics and Electronics Sensors; Proceedings of 5 th Science Conference COE 98; Jurata, May Krzysztof Małecki, Jan A. Dziuban, Anna Górecka-Drzazga, Łukasz Nieradko; Integrated Mass-flow Meter for Microchromatography; Proceedings of 22 nd Conference of the International Microelectronics and Packaging Society; Poland Chapter; Zakopane, October Małecki Krzysztof, Dziuban Jan, Górecka-Drzazga Anna, Nieradko Łukasz; Silicon-glass micromachined chromatographic microcolumn; Journal of Capillary Electrophoresis and Microchip Technology; 1999 vol. 6 iss. 1/2. 9. Małecki Krzysztof, Dziuban Jan, Górecka-Drzazga Anna, Nieradko Łukasz, Mróz Jerzy: Silicon components for gas chromatograph. Proceedings of the 14 th European Conference on Solid-State Transducers; Eurosensors XIV; August 2000; Copenhagen, Denmark; 10. Małecki Krzysztof, Nieradko Łukasz; Silicon components for gas chromatograph; proceedings of Shaping the future; International Forum for Graduates and Young Researchers at EXPO 2000; University of Hannover; Hannover, Germany, July ( 11. Małecki Krzysztof, Dziuban Jan, Górecka-Drzazga Anna, Nieradko Łukasz, Mróz Jerzy, Szczygielska Małgorzata; Silicon components for gas chromatograph; Optoelectronics and Electronics Sensors; Proceedings of 6 th Science Conference COE 2000; Gliwice, June Małecki Krzysztof, Dziuban Jan, Górecka-Drzazga Anna, Nieradko Łukasz, Mróz Jerzy; Gas microchromatograph: component parts and concept of hybridisation; Proceedings of 7 th Science Conference of Electron Technology ELTE 2000; Polanica Zdrój, September Małecki Krzysztof, Górecka-Drzazga Anna, Nieradko Łukasz, Mróz Jerzy, Szczygielska Małgorzata; Silicon components for gas chromatograph; Optoelectronic and Electronic Sensors IV; Bellingham, SPIE - The International Society for Optical Engineering; Poland, June K. Malecki, L. DeStefano, L. Moretti, F. Della Corte, I. Rendina; Anodically-bonded silicon-glass optical chip for bio-chemical sensing applications; BIOS; Photonics West 2005; SPIE - The International Society for Optical Engineering; San Jose Convention Center, California, USA, January Krzysztof Malecki, Francesco G. Della Corte; Silicon-glass anodic bonding at low temperature; MOEMS-MEMS MICRO & NANOFABRICATION; Photonics West 2005; SPIE - The International Society for Optical Engineering; San Jose Convention Center, California, USA, January F. G. Della Corte, M. Gagliardi, A. Nigro, K. Malecki; All-optical modulation in thin film-film silicon-based waveguiding structures; INTEGRATED OPTOELECTRONIC DEVICES; Photonics West 2005; SPIE - The International Society for Optical Engineering; San Jose Convention Center, California, USA, January L. De Stefano, K. Malecki, L. Moretti, L. Rotiroti, I. Rendina, A.M. Rossi, A microchamber for lab-on-chip applications based on silicon-glass anodic bonding; AISEM the 10 th Annual Conference of the Italian Association of Sensors and Microsystems, February 2005, Firenze, Italy. 18. L. De Stefano, K. Malecki, F.G. Della Corte, L. Moretti, L. Rotiroti, I. Rea, I. Rendina, Silicon-glass integrated optical sensor based on porous silicon for gas and liquid inspection, Proceedings of the 19 th European Conference on Solid-State Transducers; Eurosensors XIX; September 2005; Barcelona, Spain. 19. K. Malecki, L. De Stefano, L. Moretti, L. Rotiroti, F. Della Corte, I. Rendina, Integrated silicon-glass chip for opto-chemical sensing applications based on the Flow Injection Analysis, Proceedings of the European Optical Society Topical Meeting: Optical Microsystems, September 2005, Capri Island, Italy. 20. Stefano L.; Malecki K.; Rossi A. M.; Rotiroti L.; Corte F. G.; Moretti L.; Rendina I.; Integrated silicon-glass opto-chemical sensors for lab-on-chip applications; Sensors and Actuators - B - Chemical Biochemical Sensors; Volume 114, Issue 2, 26 April 2006, pp L. De Stefano, K. Malecki, D. Alfieri, I. Rendina, L. Moretti, F. G. Della Corte; Fast optical detection of chemical substances in integrated silicon-glass chip; The 11th National Conference on Sensors and Microsystems; 8 10 February 2006; LECCE, Italy. 22. Daniela Andrijasevic, Ioanna Giouroudi, Walter Smetena, Werner Brenner, Krzysztof Malecki; Multilayer Adhesive Bonding under Hot Air Stream; Proceedings - IMAPS The International Conference and Exhibition on Device Packaging, Doubletree Paradise Valley Resort; Scottsdale, Arizona USA, March 20-23, Page 12 / 14

13 23. Krzysztof Malecki, Mariano Gioffrè, Daniela Andrijasevic, Werner Brenner, Francesco G. Della Corte; Investigation On Silicon- Glass Low Temperature Anodic Bonding; The 2nd International Workshop on Wafer Bonding for MEMS Technologies, Halle, Germany, April 9-11, 2006, pp Daniela Andrijasevic, Krzysztof Malecki, Ioanna Gioroudi, Walter Smetana and Werner Brenner; Low Temperature non-viscous adhesive bonding in MEMS; Proceedings of the 29th International Spring Seminar on Electronics Technology, ISSE 2006; St. Marienthal, Germany, May 10-14, Luca De Stefano, Krzysztof Malecki, Francesco G. Della Corte, Luigi Moretti, Ilaria Rea, Lucia Rotiroti and Ivo Rendina; A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing; ISSN ; Sensors 2006, 6, pp K. Malecki, D. Alfieri, F. Della Corte, W. Brenner; Integrated Microsystem for Chemo/Bio-Sensing Applications Based on Flow Injection Analysis and Optical Interrogation; The 2 nd Annual International Conference on Nanobiotechnology in Europe, "NanoBio-Europe'06", Grenoble, France, June 14-16, Krzysztof Malecki, Adam Bakala, Olga Adamowicz, Nikodem Szymanski, Michal Chudy, Artur Dybko, Zbigniew Brzozka, Andreas Schneider, Samuel Serra, Werner Brenner; Polymer-Glass Microfluidic Device for Single Cell Photodynamic Therapy Evaluation; 32nd International Conference on Micro- and Nano-Engineering 2006 MNE 2006, Barcelona, Spain, September Over 20 unpublished works; know-how of μtas; rapports of scientific research under the frame of Polish Research and Science Committee KBN grants No W4, 9T12A03710, W4, W4, 9T12A04613, and other international projects. Page 13 / 14

14 Scientific Grants Activity Unpublished Rapports 1. Badania nad elementami technologii ostrzy typu MOLD in polish; (Research of technology MOLD tips); Works of Grant No W4; Wrocław X Projekt struktur mikropompy krzemowej in polish; (Project of silicon micropumps structures); Works of Grant No. 9T12A03710; Wrocław Technologie specyficzne dla wykonania elementów mikrochromatografu in polish (Specific technology for microchromatograph elements elaborating); Works of Grant No. 9T12A03710; Wrocław Badania nad mikrostrukturami krzemowymi do pomiarów gazów in polish (Research of silicon microstructures for gas measurements); Works of Grant No. 9T12A03710; Wrocław Opracowanie zoptymalizowanych mikrostruktur krzemowych do pomiarów gazów in polish (Elaborating of optimally silicon microstructures for gas measurements); Works of Grant No. 9T12A03710; Wrocław; V Analiza możliwości integracji podzespołów mikromechanicznych chromatografu z elementami technologii specyficznych - Technologia integracji mikrozaworu do chromatografu gazowego in polish (Analysis of chromatograph micromechanical units integration possibility with specific technology processes Technology of microvalve integration for gas chromatograph); Works of Grant No. 9T12A03710; Wrocław XII Analiza możliwości integracji podzespołów mikromechanicznych chromatografu z elementami technologii specyficznych - Krzemowy mikrozawór do chromatografu gazowego oraz jego integracja z systemem in polish (Analysis of chromatograph micromechanical units integration possibility with specific technology processes Silicon microvalve for gas chromatograph and its integration with microsystems); Works of Grant No. 9T12A03710; Wrocław XII Badania metod wytwarzania układów μ-tas in polish (Research of technology processes of μtas production); Works of Grant No. 9T12A03710; Wrocław XII Algorytm działania i konstrukcja dozownika zintegrowanego in polish (Unit operation and integrated dosage system construction); Works of Grant No. 9T12A03710; Wrocław IV Wykonanie wybranych elementów mikrochromatografu zintegrowanego in polish (Elaborating of selected elements of integroated gas chromatograph); Works of Grant No. 9T12A03710, W4; Wrocław V Opracowanie topologii i technologii detektora cieplnoprzewodnościowego in polish (Topology and technology elaborating of thermoconductivity detector); Works of Grant No. 9T12A03710; Wrocław VI Opracowanie założeń modelu mikrochromatografu zintegrowanego in polish (Elaborating of principle of integrated gas microchromatograph); Works of Grant No. 9T12A03710; Wrocław X Wykonanie modelu dla modułu separacyjno-detekcyjnego mikrochromatografu in polish (Elaborating of the microchromatograph model); Works of Grant No. 9T12A04613; Wrocław X Modyfikacja układu mikrochromatografu in polish (Modification of microchromatograph functional design); Works of Grant No. 9T12A04613, W4; Wrocław III Badania nad integracją układu dozownika dla chromatografu in polish (Research of chromatograph microdosage system integration); Works of Grant No. 9T12A04613, W4; Wrocław V Mikromechaniczne napędy w mikrosystemach krzemowych in polish (Micromechanical drives in Microsystems); Report of Inst. Tech. Mikrosyst. PWroc Ser. SPR no. 8 ( W-4); Wrocław VI Analiza najnowszych konstrukcji mikromechanicznych stosowanych w mikrochromatografach gazowych in polish (Analysis of the newest micromechanical design in gas microchromatograph using); Works of Grant No. 9T12A04613; Wrocław XII Mikrosystemy do kompleksowej analizy mediów wieloskładnikowych in polish (Totally analysis multicomponents fluids microsystems); Report of Inst. Tech. Mikrosyst. PWroc Ser. SPR no. 4 (342445/W-4/PBZ0915); Wrocław I Krzemowo-szklany dozownik gazów dla zintegrowanego chromatografu gazowego in polish (Silicon-glass gas dosing microsystem for integrated gas chromatograph); Works of Grant No. 9T12A04613; Wrocław VI Silicon Glass Anodic Bonding for MEMS applications implementation of technology; Rapport of scientific research and Technology Transfer; Institute for Microelectronics and Microsystems Unit of Naples; March 2004, Naples. 21. Anisotropic etching of crystalline silicon in alkali solutions implementation of technology; Rapport of scientific research and Technology Transfer; Institute for Microelectronics and Microsystems Unit of Naples; December 2004, Naples. Date: Signature: 22/10/2006 Page 14 / 14