Multi-layer Micro-structured Films

Transcription

1 Multi-layer Micro-structured Films Kent Coulter, John Cernosek, and James Arps Surface Engineering Section Materials & Mechanical Engineering Division Southwest Research Institute San Antonio, Texas

2 Southwest Research Institute (SwRI ) Independent nonprofit applied R&D organization 11 Technical Divisions & 3000 employees 1200 acre main campus & 12 satellite/ project offices 50/50 split of government & industrial funding $399M in FY2004 revenues Unique IP policy and business model Over 1500 clients annually Expertise in; Mechanical & Materials Engineering Chemistry Aerospace Nondestructive Evaluation Automation Instrumentation Fuels & Lubricants Applied Physics Nuclear Regulatory Waste Analyses

3 Surface Engineering Section 10 staff members (4 PhDs) 6 large (>1.5m3) vacuum chambers (2 more coming online) Areas of Emphasis Aerospace & Defense Biomedical Energy & Transportation Tool & Die R&D to Pilot Production Can provide consulting for: Equipment design/construction Evaluation of new coating technologies Failure analyses involving coatings or tribology Scale-up and transition of surface engineering processes to client or appropriate 3rd party Certification & testing

4 National Nanotechnology Initiative 30 Countries worldwide with national initiatives US spending $1.08B (05) & $1.05B (06) PCAST 5 yr review - money well spent NSF estimates 2,000,000 new jobs Total Market of $1T in 2015 National Nanofabrication Infrastructure Network Pennsylvania State University, Nanofabrication Facility Stanford University, Stanford NanoFabrication Facility University of California at Santa Barbara, Nanotech Fabrication Facility Georgia Institute of Technology, Microelectronics Research Laboratory Harvard University, Center for Imaging and Mesoscale Systems North Carolina State University, Triangle National Lithography Center University of Michigan, Solid State Electronics Laboratory University of Minnesota, Minnesota Nanotechnology Cluster University of New Mexico, Nanoscience at the University of New Mexico University of Texas at Austin, Microelectronics Research Center University of Washington, Center for Nanotechnology Cornell University, Cornell Nanoscale Science and Fabrication Facility Howard University, Keck Center for the Design of Nanoscale Materials for Molecular Recognition

5 Present Market Applications Burn and wound dressings Water filtration Catalysis A dental-bonding agent Step assists on vans. Coatings for easier cleaning glass Bumpers and catalytic converters on cars Sunscreens and cosmetics. Longer-lasting tennis balls. Light-weight, stronger tennis racquets. Stain-free clothing and mattresses. Ink

6 Quantum Technology What are electrons doing? Quantum Computing Quantum Dots Tio2b.mat A Chang, Department of Physics, Purdue university Physics Laboratory, NIST

7 NanoPatterning Nanostructures structures with at least one dimension between 1 and 100 nm L Jay Guo, Department of Electrical Engineering, University of Michigan B Korgel, Department of Chemical Engineering, University of Texas

8 MetaMaterials New man-made materials with superior properties that cannot be found in nature. (the prefix "meta" means "beyond" in Greek) S Sridhar, Physics Department, Northeastern University D Smith, Electrical & Computer Engineering Department, Duke University

9 Plasmonic Devices Collective oscillation of conduction electrons in a metal Radiation drives plasma frequency Resonance for constructive interference Size dimensions for Au & Ag of 1-20nm Applications in LEDs, photovoltaics, sensors, waveguides, polarizers Y Xia, Chemistry Department, University of Washington N J Halas, Electrical and Computer Engineering Department, Rice University

10 Subtractive Processes Feature Size (nm) Area (inches2) Advantages Disadvantages Laser Ablation single step surface damage Lithography 15 unlimited resolution # of steps Maskless Etch 40 6 dry small area C J Hayden & C Dalton, Institute of Biomolecular and Molecular Microsystems, University of Wales; JCT Eijkel, Twente University CR Martin & IA Aksay, Department of Chemical Engineering, Princeton University

11 Roll to Roll Lithography & Ablation Anvik Corporation 10µ resolution Widths up to 610mm 4 ft2/ min

12 Additive Processes Technology Feature Size (nm) Area (inches2) Advantages Disadvantages Ink jet 30, flexibility fluid dynamics Flexo 50,000 unlimited large are resolution Masking 1,000 unlimited simplistic variation Xerography scalability process control MBE 40 1 atomistic slow M Kowalski & J Caruso, Cabot Corporation HO Jacobs, Electrical & Computer Engineering, University of Minnesota Japanese National institute for Materials Science

13 Laser Guided Direct Writing Edward Nadgorny (Physics Department) & Jaroslaw Drelich (Materials Science Department), Michigan Technology University

14 Structure Zone Model Angle of incidence Deposition temperature ratio to material melting temperature ü Energy released on condensation ü Adatom surface mobility ü Surface roughness Deposition rate ü Void coalescence ü Mass transport and grain growth I Petrov, Department of Materials Science, University of Illinois

15 Structure Zone Model Surface Patterning Energetic Patterning Source Substrate Deposition Source Substrate

16 Film Structure

17 Conclusions Surface patterning of multi-layer thin films is a horizon technology that is demonstrating order of magnitude device improvements at laboratory scale. Deposition at speed and resolution requirements is the primary barrier for next generation plasmonic devices, metamaterials, and quantum technology Structure Zone Model Surface Patterning is a potential web coating process to achieve nanometer scale pattern resolution at high rates kent.coulter@swri.org Office: Cell:

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