Quartz Glass for Optics Data and Properties. Heraeus Quarzglas

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1 Quartz Glass for Optics Data and Properties Heraeus Quarzglas

2 Quartz Glass for Optics Data and Properties = 3D material, optically isotropic. In quartz glass, the homogeneity is typically specified in one direction only. Heraeus manufactures quartz glass grades which are controlled and specified in all 3 directions regarding striae, layers and homogeneity. These materials, specified for the most demanding applications, are identified by the 3D symbol. ➊ For raw formed ingots the bubble specification is valid for the area defined by the minimum diameter tolerance. For machined parts it is defined as % of the material. ➋ Bubbles or inclusions.8 mm diameter are not counted. ➌ For nonspherical bubbles the diameter is averaged. ➍ The n value is the maximum permissible lateral variation in refractive index (measured by interferometer at ) over 9% of the diameter or edge length of a fine ground piece, or 8% of a raw formed ingot. The maximum test diameter is 43 mm. Larger pieces are measured using overlapping interferograms. Grade Bubbles and Inclusions ➊ ➋ Homogeneity ➏ The bubble grade is given for every cm 3. Quartzglass from Heraeus is of inclusions. DIN DIN ISO Maximum bubble diameter (mm) for different weight intervals (kg). ➌ Striae class as per DIN ISO PV value ➍ (PeaktoValley) n Value Non spherical proportion n (p.s.) ➎ / 2*. 2 Grade A 2 Grade B ArF * 2 ArF * KrF * 2 KrF * Homosil Herasil 2 Herasil 3 Infrasil 3 Infrasil 32 Infrasil 33 HOQ / *.6 / *.6 / 2*. / *.6 / 2*. / *.6 / 2*. / *.6 / 2*.6 / 2*. / *.6 / 2*.4 / *.6 / *.25 / 2*.25 / 2*.63. / 6.5 / 6.25 / / 6.25 / 6 3. / 6.5 / 6.25 / 6 3. / 6.5 / 6.25 / 6 3. / 6.5 / 6.25 / / 6. / 6. / 6.2 / / 6. / / 6.2 / 6.5 / / 6.6 / / 6. / 6 3 *, 2 ArF and KrF are optimized for Excimer laser applications. Please ask for our Application Note

3 ➎ n (p.s.) (power subtracted) is calculated by subtracting from a measured n distribution the proportion that gives an exactly spherical aberration of an originally plane optical phasefront. ➏ Does not apply to drawn rods. ➐ Quartz glass is from visible fluorescence at excitation wavelengths λ > 29. ➑ Lower values available on request. ➒ The residual strain values refer to the measured stress induced birefringence per cm light path. The edge zone is defined as the outer % (with raw formed ingots and rods, the edge zone is defined as the outer 5%). = not specified Refractive index at 2 C and bar The given values are interpolated from measured values having an accuracy of ± 3 5. In contrast to other optical glasses, quartz glass shows very little difference in refractive index from melt to melt. ➒ Residual Strain Fluorescence OH Content ➐ Wavelength PV value by special request In the center /cm ➏ At the edges /cm With excitation using a Hg lampe at λ = 254 and UG 5filter slight blue blueviolet blueviolet blueviolet blueviolet blueviolet blueviolet blueviolet (µg/g) ca. 2 ca. 2 ca. 5 ca. 5 ca ca. 3 ➑ ➑ ➑ 9 ArF KrF 248, x Nd:YAG XeCl HeCd 325 N (ni) (nh) (ng) HeCd 44.6 Kr 447. (nf) Ar 488 Ar x Nd:YAG 532 (ne) (nd) HeNe (nc) Ruby Kr GaAs 95 Nd:YAG 64 HeNe 53 2 Nd:YAG

4 Internal Transmission (%) Typical values of internal transmission at selected UV wavelengths per mm sample thickness Measured transmission including Fresnel reflection losses (R) 2 (sample thickness mm) Internal Transmission (%) Wavelength ArF/KrF Refractive Index Dispersion Homosil Herasil Transmission (%) 3, 32, ArF, KrF 2, 2 ArF, 2 KrF 3 B B2 B3 C C2 C3 Dispersion constants (Sellmeier) Sellmeier Equation: n 2 = B λ 2 /(λ 2 C) + B2 λ 2 /(λ 2 C2) + B3 λ 2 /(λ 2 C3) Wavelengths λ in µm at 2 C Relative temperature coefficients of the refractive index in 6 K Wavelength ºC 2...4ºC Abbe constant...2ºc 2...4ºC νd = nd nf nc Birefringence constant Transmission (%) Transmission (%) Wavelength () Homosil, Herasil 2, Herasil 3 (sample thickness mm) Homosil, Herasil 2 Herasil 3 Wavelength () HOQ 3, Infrasil 3, 32, 33 (sample thickness mm) Infrasil HOQ 3 cm bar Wavelength () The uppermost curves in the transmission graphs indicate the calculated Fresnel reflection losses for two uncoated surfaces.

5 Technical properties Electrical data of quartz glass Resistivity in Ω m Mechanical data Density g/cm 3 Mohs hardness Micro hardness N/mm 2 Knoop hardness N/mm 2 Modulus of elasticity N/mm 2 (at 2 C) Modulus of torsion N/mm 2 Poisson s ratio Compressive strength N/mm 2 Tensile strength N/mm 2 Bending strength N/mm 2 Torsional strength N/mm 2 Sound velocity m/s Thermal data Softening temperature C Annealing temperature C Strain temperature C Max. working temperature C continuous shortterm Mean... C specific heat...5 C J/kg K...9 C Heat conductivity 2 C W/m K C 2 C 3 C 4 C 95 C Mean termal... C expansion...2 C coefficient...3 C K...6 C...9 C 5... C...6 C C 4 C 8 C 2 C Dielectric strength in kv/mm (sample thickness 5 mm) 2 C 5 C Dielectric loss angle (tg δ) khz...mhz 3 4 MHz Dielectric constant (ε) 2 C... MHz 23 C 9 2 MHz 23 C 3 4 MHz Typical trace impurities in quartz glass Impurity Al = Aluminium Ca = Calcium Cr = Chromium Cu = Copper Fe = Iron K = Potassium Li = Lithium Mg= Magnesium Na = Sodium Ti = Titanium,,5,,3,5,,,5,,5 Herasil 2/ Homosil Herasil 3/ Infrasil/ HOQ SI units and their conversion In the SI system there are 7 base units: Name SIBasiseinheit Einheitenzeichen Quantity Name Unit Symbol Definition Length Mass Time Electrical current Thermodynamic temperature Amount of substance Luminous intensity Conversion between SI and former units: N =.976 kp J =.976 kp m = cal = ev W =.976 kp m/s = kcal/h Pa = 5 bar =.97 5 kp/cm 2 atm =.33 kp/cm 2 = 76 Torr = Pa =.325 bar Temperature: Meter Kilogram Second Ampere Kelvin Mol Candela m kg s A K mol cd TK = 273,5 + TC TK = Temperature in Kelvin TC = 5/9 (TF 32) TC = Temperature in Celsius TF =,8 (TK 459,67) TF = Temperature in Fahrenheit Force Work Energy Heat quantity Power Pressure Mechanical stress Strength Temperature } } Newton N N = kg m/s 2 Joule J J = W s = Nm Watt W W = J/s = Nm/s = V A Pascal (bar) Pa Pa = N/m 2 = kg/(m s 2 ) (bar) 5 Pa = bar Kelvin K K (base unit) ( Celsius) C C = K Conversion between American, British and SI units: m = in = 3.28 ft =.936 yd m 3 = in 3 = fluid ounces = US Gallons N =.2248 lb.wt. J = BTU (mean) = ft.lb.wt. W = 3.43 BTU/h = lbf.ft.wt. Pa = lb.wt./in 2 (psi) = lbf/ft 2

6 Quartz Glass for Optics Data and Properties Grades Herasil Grades Infrasil Grades 2 Grade A 2 Grade B ArF 2 ArF KrF 2 KrF Homosil Herasil 2 Herasil 3 Infrasil 3 Infrasil 32 Infrasil 33 HOQ 3 Highest UV transmittance Highest IR transmittance Highest purity Low bubble content Highest homogeneity in all three directions Highest homogeneity in functional direction Without striae in all three directions Without striae in functional direction Very high resistance against high energy radiation Very high resistance against excimer UV radiation Most economic grade Germany Heraeus Quarzglas GmbH & Co. KG Quartz Glass for Optics and Lamp Materials P. O. Box 5 54 D6345 Hanau Phone: +49 (68) 35 Fax: +49 (68) hqsgolsales@ heraeusquarzglas.com France Heraeus S.A. 2, Avenue du Quebec Bat. I 2 Villebon B.P Courtaboeuf Cedex Phone: +33 () Fax: +33 () salesfrance@heraeus.com Printed in Germany Technical data given in this brochure are subject to change Great Britain Heraeus QuartzTech Limited 4 Tannery House Tannery Lane Send Surrey GU23 7EF Phone: +44 () Fax: +44 () byfleet.sales@heraeus.com USA Heraeus Optics, LLC 52 Broadmoor Boulevard Suite F Buford, GA 358 Phone: + (678) Fax: + (678) sales@heraeusoptics.com HQS DatenUS / 6.3 / DruckRepro. UNICO

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