Conference Scope. Important Dates. Registration. Manuscript Publication

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1 The ICMAP 2014 Program Committee invites paper submission. ICMAP 2014 will be held in July 8-11, 2014, in Gunsan, Korea and the hosting organization will be the Korean Vacuum Society (KVS). The conference location Gunsan is High-Tech Industrial City and International Trade Seaport which is located in mid-west coast of Korea where fertile ground and rich sea is surrounded by Geum River and Mangyung River in harmony with quiet mountains. ICMAP 2014 participants will have the opportunity to build and maintain connections with scholars in the field of plasma related technologies all over the world. We look forward to seeing you in July 8-11, 2014 in Gunsan. Conference Scope The 5th International Conference on Microelectronics and Plasma Technology (ICMAP 2014) is initiated for providing an open forum to discuss the current state of the art perspective of scientific and technological achievements of the plasma R&D fields with an industrial importance currently and in the future. In ICMAP2014, the scope includes a variety of plasma and processing technologies related to semiconductor, display, and energy conversion devices. Many of the subjects covered by submitted papers would include newly-developed materials, processes, and integration technologies. For application of the materials and processing technologies to those important devices in rapid development today, development of basic and new plasma technologies are also essential for low-temperature and low-cost processing. In this respect, technological convergences between different materials, processing, and device technologies and between basic science and applied engineering is inevitably needed and would benefit the communities related to the fields. Sharing of the research achievements in these interdisciplinary fields would also benefit the scientific community around the world. Important Dates Abstract submission deadline: Abstract acceptance notification: Manuscript submission deadline: Pre-registration: Hotel reservation: Registration May 2, 2014 May 16, 2014 August, 1, 2014 June 5, 2014 June 20, 2014 Pre-registration: On-site registration: Student / Retiree: KRW600,000 (USD571) KRW660,000 (USD629) KRW300,000 (USD286) Manuscript Publication The submitted regular manuscripts will be published in journals, "Journal of Nanoscience and Nanotechnology (SCI)"(American Scientific Publishers), and "Thin Sold Films (SCI)"(Elsevier) as a special issue after peer review. Author instructions and proceedings manuscript submission form will be posted on the conference website soon.

2 Program Topics (1) Session I: Materials and Processing on Nano Devices Nano-Graphene / 2-D materials for nano-devices / Nanolithography/Fabrication / Plasma processing technology for nano-scale devices / Plasma nano engineering (2) Session II: Materials and Processing on Energy Conversion & Storage Solar cell technologies / Secondary battery technologies / Fuel cell technologies / Energy harvesting technologies / New materials and processing for energy conversion and storage (3) Session III: Materials and Processing on Next Generation Displays Materials and processes for next generation display (flexible display, OLED TV, Over UHD LCD, etc) / Plasma processing and equipment for display devices (OLED, LCD, PDP technology) / Materials and processes for oxide and new semiconductor thin film / Plasma applications for display technology (4) Session IV: High enthalpy plasma science and technology Thermal plasma diagnostics and control / Thermal plasma technology / Materials by thermal plasma / Characterization of thermal plasma: numerical analysis and diagnostics (5) Special Session V: - Topic I: Plasma Bioscience, Agriculture and Food Plasma Biosciences and Medicine / Plasma Biomaterials and Films / Plasma Agriculture and Food Nonthermal Bioplasma Sources and Diagnostics / Plasma Bio-Nano Materials and Scaffolds / Lab-on-a-Chip, MEMS & NEMS, Micro- & Nano-Fluidics - Topic II: Industry special session: Wearable & Quantum Devices Industry & Market Trend / Flexible, Energy Harvesting and Sensor Technology for Wearable Device Applications / Materials and Processes for Quantum Dot Display / Cd-free and Blue Emitting Quantum Dot / Graphene Quantum Dot - Topic III: Advanced Carbon Devices Advanced Materials of Wearable Device/Solar Cell by using Electrospinning Interface Treatment and Functionalize for Filler of Composite Graphene/CNT Materials Mechanical Properties on Carbon Fiber Fabric by Plasma treatment Plasma Ion Implantation (6) Session VI: Renewable Energy Photovoltaic Photovoltaic Materials / Photovoltaic Devices and Processes / Photovoltaic Optics and Designs / Advanced Concepts in Photovoltaics

3 Invited Speakers (Tentative) Plenary Speakers Gary S. May (Georgia Institute of Technology, USA) Sang-Sub Jeong (Samsung Electronics, LTD, Korea) Key challenges of etching technology for beyond 20nm era Takayuki Watanabe (Kyushu Univ., Japan) Thermal plasma processing for environmental application Masaharu Shiratani (Kyushu Univ., Japan) Advanced control of plasma deposition for solar cell and battery applications Zhong Lin Wang (Georgia Institute of Technology, USA) Keynote Speakers Ali Javey (UC Berkeley, USA) Euijoon Yoon (Seoul National Univ., Korea) You-Nian Wang (Dalian Univ. of Technology, China) Electromagnetic effects in very high frequency CCP for low pressure discharges Hiroshi Fujiyama ( Nagasaki Univ., Japan) Yi Kang Pu ( Tsinghua Univ., China) Bert Ellingboe (Dublin City Univ., Irland) Han Sub Uhm ( Kwangwoon Univ., Korea) Gasification of low-grade coal by microwave plasmas for energy production Seong In Kim (Cheorwon Plasma Research Institute, Korea) Plasma engineering for nano materials Horng-Show(Frank) Koo (Minghsin Univ. of Science and Technology, Taiwan) Suk-Ho Choi (Kyung Hee University, Korea) All-graphene p-n vertical tunneling diodes and photodetector applications Yasunori Tanaka (Kanazawa Univ., Japan) Development of modulated induction thermal plasmas and their application to large scale synthesis of nanopowder Invited Speakers Manabu Tanaka (Kyushu Univ., Japan) High-Speed visualization of electrode phenomena in thermal plasma processing Masaya Shigeta (Osaka Univ., Japan) 3D fluid dynamic modelling of induction thermal plasmas B.G. Hong (Chonbuk National Univ., Korea) Thermal plasma facilities for materials R&D Sooseok Choi (Inha Univ., Korea) Arc thermal plasma synthesis of amorphous metal nanoparticles Takaki Hatae (Japan Atomic Energy Agency, Japan) Design and development of the edge Thomson scattering system in ITER Martin O Mullane (University of Strathclyde, UK) Advances in techniques for diagnosing fusion plasmas in the ITER era

4 Hyeon Gon Lee (NFRI, Korea) Staus of ITER diagnostics and technical challenges Liu Zheng (Nanyang Technological Univ., China) Synthesis of high-quality two-dimensional atomic layers and their applications on microelectronics Nathan Gardner (Glo-USA Inc. Sunnyvale, USA) Kanamura Kiyoshi (Tokyo Metropolitan Univ., Japan) Nakayama Masanobu (Nagoya Institute of Technology, Japan) Combined computational and experimental studies on interfacial properties for LiMn2O4 cathode material for rechargeable Li ion battery Yasutake Teraoka (Kyushu Univ., Japan) Yuichi Setsuhara (Osaka Univ., Japan) David Ruzic (Univ. of Illinois at Urbana Champaign, USA) PVD-quality coatings with atmospheric-pressure plasma processing Lawrence J. Overzet (Univ. of Taxas at Dallas, USA) After the fact correction of aspect ratio etch rate dependencies Yuan-Hong Song (Dalian Univ. of Technology, China) Experimental and numerical studies of pulse-modulated ICP discharges Jun Xu (Dalian Univ. of Technology, China) Ferroelectricity in yttrium-doped hafnium oxide thin films prepared by middle frequency twin magnetron sputtering Seiji Samukawa (Tohoku Univ., Japan) Jin Hyo Boo (Sungkyunkwan Univ., Korea) Deposition of organic and organic-inorganic hybrid polymer thin films using PECVD method for OTFTs, OLEDs, and OPVs applications Yong Min Kim (Dankook Univ., Korea) Development of 1.6 MJ capacitor bank for pulsed magnetic fields Jong Su Kim (Yeungnam Univ., Korea) Optical properties of InAs/GaAs quantum dot solar cells T. H. Chung (Donga Univ., Korea) Interactions of atmospheric pressure plasma jet with cancer cells in vitro: DNA damage, cell viability, and apoptosis Tae Seok Seo (KAIST, Korea) Nanowire integrated microfluidic device for gene transfection into cells Woong Choi (Kookmin University, Korea) Multilayer MoS2 thin-film transistors Lars Samuelson (Lund University, Sweden) Shangjr Gwo (National Tsing-Hua University, Taiwan) Xiao-Xia Zhong (Shanghai Jiaotong Univ., China) Microplasma in close proximity to liquid and its application in nanofabrication Remi Dussart (Polytech Orleans, France) Plasma cryoetching processes for silicon and advanced materials Jianping Zhao (TEL, USA) Fundamental properties and applications of microwave plasma Keun Su Kim (NRC, Canada) High-yield growth mechanism of small-diameter boron nitride nanotubes (<10 nm) in an induction thermal plasma

5 Organization (Tentative) Organizing Committee Honorary Chair: Chi Kyu Choi (Jeju National Univ., Korea) Conference Chair: Myeun Kwon (Nation Fusion Research Institute, Korea) International Organizing Committee Chair: Hong Young Chang (KAIST, Korea) Executive Committee Chair: Geun Young Yeom (Sungkyunkwan Univ., Korea) General Secretary: Jung Hoon Joo(Kunsan National Univ., Korea) International Advisory Committee Chair: J. E. Greene (Univ. of Illinois at Urbana Champaign, USA) International Advisory Committee: - Rod Boswell (Australia National Univ., Australia) - You-Nian Wang (Dalian Univ. of Technology, China) - Masaru Hori (Nagoya Univ., Japan) Scientific Program Committee Chair: Wonho Choe (KAIST, Korea) Local Organizing Committee Chair: Suk Jae Yoo (NFRI, Korea) Publication Committee Chair: Nae-Eung Lee (Sungkyunkwan Univ., Korea) Exhibits Chair and Treasurer: Hee Hwan Choe (Korea Aerospace Univ., Korea) International Advisory Committee Chair: J. E. Greene (Univ. of Illinois at Urbana-Champaign, USA) / Yong-Seok Hwang (Seoul National Univ., Korea) / Joung Cho Kim (Edwards Korea Ltd., Korea) / Rod Boswell ( Australia National Univ., Australia) / Duk In Choi (Kwangwoon Univ., Korea) / Han Sub Uhm (Kwangwoon Univ., Korea) / Masaru Hori (Nagoya Univ., Japan) / Osamu Takai (Kanto Gakuin Univ., Japan) / Cheng Kang Wu (Chinese Academy of Science, China) / Roger McWilliams (Univ. of California at Irvine, USA) / Chang-Jin Kang (Samsung Electronics, Ltd., Korea) / Sang Hee Hong (Seoul National Univ., Korea) / Sam Kyu Nor (Korea Research Institute of Standards and Science, Korea) / You-Nian Wang (Dalian Univ. of Technology, China) International Organizing Committee Chair:Hong Young Chang (KAIST, Korea) / HeeyeopChae (SungkyunkwanUniv., Korea) / Ki-WoongWhang (Seoul National Univ., Korea) / ChulJoo Hwang (Jusung Engineering, Korea) / Myeun Kwon (NFRI, Korea) / Eun Ha Choi (KwangwoonUniv., Korea) / Jeon K. Han (SungkyunkwanUniv., Korea) / Yasuhiro Horike (National Institute for Materials Science, Japan) / David B. Graves (Univ. of California Berkley, USA) / Bert Ellingboe (Dublin City Univ., Ireland) / Hiroshi Fujiyama (Nagasaki Univ., Japan) / Yuan-Hong Song (Dalian Univ. of Technology, China) / G. P. Li (Univ. of California Irvine, USA) / G. H. Rim (KERI, Korea) / SeungJeongNoh (DankookUniv., Korea) / Z. Huang (SIMTech, Singapore) / Harm Tolner (Phillips, Netherlands) / Mau Chien Dang (Vietnam National Univ. - HoChiMinh City, Vietnam) / Ming-Show Wong (National Dong HwaUniv., Taiwan) / Denis Shamiryan (IMEC, Belgium) / Jung-Joong Lee (Seoul National Univ., Korea) / Larry F. Weber (SID, USA) / Jin Hyo Boo (SungkyunkwanUniv., Korea)

6 Scientific Program Committee Chair: WonhoChoe (KAIST, Korea) / Jae Sang Lee (Korea Multi-Purpose Accelerator Complex, Korea) / C.G. Lee (SungkyunkwanUniv., Korea) / David Ruzic (Univ. of Illinois at Urbana-Champaign, USA) / Lawrence J. Overzet (Univ. of Texas at Dallas, USA) / JonghyunAhn (YonseiUniv., Korea) / Takayuki Watanabe (Tokyo Institute of Technology, Japan) / T. H. Ahn (Samsung Electronics, Korea) / JongwonShon (SungkyunkwanUniv., Korea) / Taeho Shin (SEMES, Korea) / Gyungsoon Park (KwangwoonUniv., Korea) / K.S. Kim (KangwonUniv., Korea) / Seiji Samukawa (Tohoku Univ., Japan) / Horng-Show(Frank) Koo (MinghsinUniv. of Science and Technology, Taiwan) / Y.H Phang(Tech Semiconductor, Singapore) / W. Boullart (IMEC, Belgium) / Bong Guen Hong (Chonbuk National Univ., Korea) / Munpyo Hong (Korea Univ., Korea) / Yong-Hoon Cho (KAIST, Korea) / Bo-yun Jang (Korea Institute of Energy Research, Korea) Publication Committee Chair: Nae-Eung Lee (Sungkyunkwan Univ., Korea) / Chin-Wook Chung (Hanyang Univ., Korea) / Hyun Woo Kim (Hanyang Univ., Korea) / Yi Kang Pu (Tsinghua Univ., China) / Han-Ki Kim (Kyunghee Univ., Korea) / Chee Won Chung (Inha Univ., Korea) / Jiyoung Kim (UT Dallas, USA) / Hyoung Sub Kim (Sungkyunkwan Univ., Korea) / Tatsuo Ishijima (Kanazawa Univ., Japan) / Heeyeop Chae (Sungkyunkwan Univ., Korea) / In-Sung Park (Hanyang Univ., Korea) / Jihyun Kim (Korea Univ., Korea) / Yuichi Setsuhara (Osaka Univ., Japan) Local Organizing Committee Chair: Suk Jae Yoo (NFRI, Korea) / Junsin Yi (Sungkyunkwan Univ., Korea) / Heon Ju Lee (Jeju National Univ., Korea) / Kang-Man Lee (Jeju National Univ., Korea) / Tae Hun Chung (Donga Univ., Korea) / Byungyou Hong ( Sungkyunkwan Univ., Korea) / Gon Ho Kim (Seoul National Univ., Korea) / C.H. Moon (Hoseo Univ., Korea) / Hyungjun Kim (Yonsei Univ., Korea) / SangHun Seo (KAIST, Korea) / Jung-Hee Lee (Kyungpook National Univ., Korea) / Se Youn Moon (Chonbuk National Univ., Korea) / Kiwon Kim (Sun Moon Univ., Korea) Executive Committee Chair: Geun Young Yeom (Sungkyunkwan Univ., Korea) / Hee Hwan Choe (Korea Aerospace Univ., Korea) / Gichung Kwon (Kwangwoon Univ., Korea) / Jae Sang Lee (Korea Multi-Purpose Accelerator Complex, Korea) / Yong-Seok Hwang (Seoul National Univ., Korea) / Yongmin Kim (Dankook Univ., Korea) / Jong Su Kim (Yeungnam Univ., Korea) / Il Ki Han (Korea Institute of Science and Technology, Korea) Secretariat of ICMAP2014 The Korean Vacuum Society #710, Daejong Bulding, 435 Teheyranro, Gangnam-gu, Seoul , Korea office@icmap2014.org